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Research on an Improvement of Resolution of Electron Microscope by Means of Maximum Entropy Image Restoration.

Research Project

Project/Area Number 07650395
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionNagoya University

Principal Investigator

HANAI Takaaki  Nagoya University, Electronics, Associate Professor, 工学部, 講師 (00156366)

Co-Investigator(Kenkyū-buntansha) OGAI Keiko  Nagoya University, Center for Integrated Research in Science and Engineering, As, 理工科学総合研究センター, 助手 (60262862)
TANAKA Shigeyasu  Nagoya University, Electronics, Assistant Professor, 工学部, 助手 (70217032)
HIBINO Michio  Nagoya University, Center for Integrated Research in Science and Engineering, Pr (40023139)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1996: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1995: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsMaximum Entropy Method / Image Restoration / Electron Microscopy / Quantum Noise / Scanning Transmission Electron Microscopy / 弱位相物体
Research Abstract

1. Construction of Maximum Entropy (ME) Restoration System : A system for acquisition and ME restoration of conventional transmission electron microscope (CTEM) images was constructed by using a high quality scanner and by an implementation of ME restoration programs in a workstation instead of a mainframe used before.
2. Restoration of Scanning Transmission Electron Microscope (STEM) Images : A newly developed ME method which was designed to realize a random spatial distribution (RSD) of the inferred noise as a constraint in maximization of the image entropy, was applied to STEM images with low signal-to-noise ratio (SNR). A specimen of ferritin particles was used as a typical example of spatially extended objects for which conventional ME method failed to provide successful restoration. In was found that the SNR of the image was increased by processing with RSD constraint. The method was also applied to dark-field STEM images to study effects of the ME restoration on images blurred by a broad electron probe. With a probe having a relatively large diameter of 6.2 nm, ferritin particles with the original diameter of about 7 nm were observed with an average diameter of 12 nm. By processing the image with the improved ME method, the particle size was reduced to 9.8 nm in diameter so that closely positioned particles, not resolved in the original image, were clearly resolved with a high SNR.
3. Restoration of CTEM Images : The improved ME method was applied to a model image of weak phase objects. The blurring and the noise were simultaneously reduced for images of disk objects with a large area as well as point objects. A largely defocused noisy CTEM image of ferritin particles was processed in practice. The improved ME method yielded a successfully restored image with decreased blurring and increased SNR.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] 花井 孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint(発表予定)" Scanning Microscopy.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 花井 孝明: "Increasc of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-entry Type Foil Lens" Journal of Electron Microscopy. 44. 301-306 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田中 成泰: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors Vsing Photochemical Etching" Microscopy Research and Technique22GD03:35. 363-364 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田中 成泰: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layer Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. 166. 334-338 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Takaaki Hanai: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint (to be published)" Scanning Microscopy.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Takaaki Hanai: "Increase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-entry Type Foil Lens" Journal of Electron Microscopy. 44-5. 301-306 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Shigeyasu Tanaka: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors Using Photochemical Etching" Microscopy Research and Technique. 35-4. 363-364 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Shigeyasu Tanaka: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layr Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. 166. 334-338 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 花井孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint (発表予定)" Scanning Electron Microsopy.

    • Related Report
      1996 Annual Research Report
  • [Publications] 花井孝明: "Increase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-entry Type Foil Lens" Journal of Electron Microscopy. 44・5. 301-306 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] 田中成泰: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors Using Photochemical Etching" Microscopy Research and Technique. 35・4. 363-364 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 田中成泰: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layer Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. 166・. 334-338 (1966)

    • Related Report
      1996 Annual Research Report
  • [Publications] 花井孝明: "Effect of the Three-Fold Astigmatism on the Foil Lens Used for Correction of the Spherical Aberration of a Probe-Forming Lens" Optik. 97. 86-90 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 花井孝明: "Improvement of Maximum Entropy Method for Reduction of the Statistical Noise in Electron Microscope Images" Electron Microscopy 1994. 1. 435-436 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 花井孝明: "Characteristics and Effectiveness of a Foil Lens in Correcting the Spherical Aberration of Electron Probe Instrumwnts" Abst.4th Int.Conf.Charged Particle Optics. 226-227 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 日比野倫夫: "Detection System for Fast STEM Elemental Mapping Using Parallel EELS with a Moderate-Scale Detector" Microbeam Analysis. 3. 299-303 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 日比野倫夫: "Formation of Fine Electron Probe by Correction of the Spherical Aberration and Its Application to STEM" Proc.!st China-Japan Joint Symposium on Microbeam. 33-38 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 花井孝明: "Insrase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-Entry Type Foil Lens" Journal of Electron Microscopy. 44. 301-306 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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