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INVESTIGATION OF ELECTRON BEAM ANALYZER FOR OBSERVING THE SPECIMEN IN THE AIR

Research Project

Project/Area Number 07805008
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionOSAKA INSTITUTE OF TECHNOLOGY (OIT)

Principal Investigator

SUGA Hiroshi  INSTITUTION,DEPARTMENT,TITLE OF POSITION OIT,FACULTY OF INFORMATION,PROF., 情報科学部, 教授 (80079574)

Co-Investigator(Kenkyū-buntansha) KOTERA Masatoshi  INSTITUTION,DEPARTMENT,TITLE OF POSITION OIT,FACUITY OF ENGINEERING,PROF., 工学部, 教授 (40170279)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1996: ¥500,000 (Direct Cost: ¥500,000)
Keywordselectron beam analyzer / Oligo-scattering electron beam / ESEM / Oligo-scattering phenomenon / Monte Carlo simulation / single scattering model / Origo Scatlering / Oligo Scattering / ASEM / AIRSEM / 電子ビーム分析 / 試料分析 / 検体
Research Abstract

This project is concerned with the development of electron beam analyzer for obsevcing the specimen in the air by using Oligo-scattering electron beam which is using for ESEM.The Oligo-scattering phenomenon in the Be or C foil and air is studied by the theoretical analysis and digital simulation. And the conditions which should be considered in design of the device is reauested.
First of all, the requirement to take out Oligo scattering electron beam into air through the Be foil is theoretically derived. Next, the simulation program developed to analyze Oligo-scattering phenomenon is described. This program is based on the Monte Carlo simulation by which the single scattering model is adopted and it is the one with a wide range of application to give the result which is corresponding to analysis and the experimental result well so far.
It is shown to be able to calculate the behavior of the electron in the Be or C foil and the air layr (or, substituted gas layr) and to use Oligo-scattering beam within the range of the size which can be achieved by the simulation program. And it is confirmed that Oligo-scattering beam reached the specimen surface by passing the foil and the air layr, and generated back scattering elecrons which can be used for image processing in the model size proposed here. According to the calcuation, several nm spot diameter on the specimen surface could be obtained and the reflection rate of electrons could be 7% for
E=40keV,L (Be) =0.2mum and L (Air) =200mum.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] T.Kijima,M.kotera,H.Suga,Y.nakase: "Monte Carlo Calculations on the Passage of Electrons through" Thin Films Irradiated by 300keV Electrons IEICE Transaction on Electronics. E78-C. 557-563 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.kotera,M.Kato,H.Suga Using: "Observation Technique of Surface Magnetic Structure Type-I Magnetic Contrast in the Scanning Electron Microscope" Digest of Papers Micro Process'95. 62-64 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.kotera,M.Kato,H.Suga: "Simulation of the Type-I Magnetic Contrast in the Scanning Electron Microscope" Proceedings of the 29th Annual Conference of The Microbeam Analysis Society. 379 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Kumano,Z.Gang,M.kotera,H.Suga: "空気中試料観測用電子顕微鏡の実現可能性" Memoirs of the Osaka Institute of Technology Series. A40.1. 39-47 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Z.Gang,H.Kumano,T.Kijima,M.kotera,H.Suga: "空気中試料観測用電子ビーム分析装置の検討" IEICE Transaction. C-II J78-C-II 12. 589-591 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.kotera,M.Kato,H.Suga Using Type-: "Observation Technique of Surface Magnetic Structure I Magnetic Contrast in the Scanning Electron Microscope" Japanese Journal of Applied Physics 6906. 34,12B. 6903 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Z.Gang,H.Kumano,M.kotera,H.Suga: "Application of Oligo-Scattering Beam to Electron Beam Analyzer for Observing the Specimen in the Air" IEICE Transaction. (accepted). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kijima, M.Kotera, H.Suga, Y.nakase: "Monte Carlo Calculations on the Passage of Electrons through" Thin Films Irradiated by 300keV Electrons IEICE Transaction on Electronics. E78-C. 557-563 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.kotera, M.Kato, H.Suga Using: "Observation Technique of Surface Magnetic Structure Type-I Magnetic Contrast in the Scanning Electron Microscope" Digest of Papers Micro Process'95. 62-64 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kotera, M.Kato, H.Suga: "Simulation of the Type-I Magnetic Contrast in the Scanning Electron Microscope" Proceedings of the 29th Annual Conference of The Microbeam Analysis Society. 379 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kotera, M.Kato, H.Suga Using Type: "Observation Technique of Surface Magnetic Structure I Magnetic Contrast in the Scanning Electron Microscope" Japanese Journal of Applied Physics 6906. 34,12B. 6903-6906 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Z.Gang, H.Kumano, M.Kotera, H.Suga: "Application of Oligo-Scattering Beam to Electron Beam Analyzer for Observing the Specimen in the Air" IEICE Transaction. (accepted). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kijima,M.kotera,H.Suga,Y.nakase: "Monte Carlo Calculations on the Passage of Electrons through" Thin Films Irradiated by 300ke V Electrons IEICE Transaction of Electronics. E78-C. 557-563 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.kotera,M.Kato,H.Suga Using: "Observation Technique of Surface Magnetic Structure Type-I Magnetic Contrast in the Scanning Electron Microscope" Digest of Papers Micro Process'95. 62-64 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.kotera,M.Kato,H.Suga: "Simulation of the Type-I magnetic Contrast in the Scanning Electron Microscope" Proceedings of the 29th Annual Conference of The Microbeam Analysis Society. 379 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumano,Z.Gang,M.kotera,H.Suga: "空気中試料観測用電子顕微鏡の実現可能性" Memoirs of the Osaka Institute of technology Series. A40.1. 39-47 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] Z.Gang,H.Kumano,T.Kijima,M.kotera,H.Suga: "空気中試料観測用電子ビーム分析装置の検討" IEICE Transaction. C-II J78-C-II 12. 589-591 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.kotera,M.Kato,H.Suga Using Type: "Observation Technique of Surface Magnetic Structure I Magnetic Contrast in the Scanning Electron Microscope" Japanese Journal of Applied Physics 6906. 34,12B. 6903 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. KIJIMA, M. KOTERA H. SUGA, Y. NAKASE: "Monte Carlo Calculation on the Passage of Electrons through Thin Films Irradiated by 300keV Electrons" IEICE Transactions on Electronics. E78-C. 557-563 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 趙 剛、熊野秀昭、来島利幸 小寺正敏、菅 博: "空気試料観測用電子ビーム分析装置の検討" 電子情報通信学会論文誌C-II. J78-C-II. 587-591 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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