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Negative-Ion Beam Material Processing Techniques

Research Project

Project/Area Number 08044140
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research Field Applied physics, general
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

ISHIKAWA Junzo  KYOTO UNIVERSITY Graduate School of Engineering, Professor, 工学研究科, 教授 (80026278)

Co-Investigator(Kenkyū-buntansha) GOTOH Yasuhito  KYOTO UNIVERSITY Graduate School of Engineering, Instructor, 工学研究科, 助手 (00225666)
TSUJI Hiroshi  KYOTO UNIVERSITY Graduate School of Engineering, Instructor, 工学研究科, 助手 (20127103)
ALTON G.D.  Oak Ridge NL,Physics Division, Chief Researcher, 物理部門, 主任研究員
FREEMAN J.H.  UKAERA,Harwell Lab., Chief Researcher, ハウエル研究所, 主任研究員
ALTON Gerald  オークリッジ国立研究所, 物理部門, 主任研究員
FREEMAN J.Ha  英国原子力研究所, ハウエル研究所, 主任研究員
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥6,000,000 (Direct Cost: ¥6,000,000)
Fiscal Year 1997: ¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 1996: ¥3,200,000 (Direct Cost: ¥3,200,000)
KeywordsNegative-ion beam / Material processing / Negative-ion beam deposition / Metastable material / Negative-ion implantation / Charging free ion implantation / Non-scattering implantation into powders / Depth profile for spheres / 負イオン / 大電流負イオン源 / 空間電荷 / 発散角 / 材料プロセス / 低帯電 / 新材料
Research Abstract

l.High Current Negative-Ion Extraction and Acceleration Techniques for Negative-Ion Implanter
A lens equipped just after an extractor and charge compensation by introduced gas were effective for beam divergence due to space charge of high current ion beam. A method of gas supply brought a new production of mA-class negative ions such as F,O,and CN in our RF plasma-sputter-type heavy negative-ion source. With this ion source, a negative-ion implanter was developed which could accelerate negative ions up to 100keV.
2.Negative-Ion Implantation Technique and Application to Material Processing
In the negative-ion implantation, a surface potential of insulators is only several volts due to formation of an electric double layr during implantation. This is a charging-free implantation method. (1) non-scattering and uniform negative-ion implantation method for powders was developed, and (2) negative-ion implantation was found to control biocompatibility of polymers used in medical and biological f … More ields.
3.Deceleration Technique for Low Energy Negative-Ion and Negative-Ion Beam Deposition Apparatus
Deceleration just before substrate was effective, and could suppress beam divergence. We constructed a negative-ion beam deposition apparatus in an ultra-high vacuum and an negative-ion etching system.
4.Application of Low-Energy Negative-Ion Beams to Material Processing
As material processing technique, we investigated ion beam deposition and etching by using negative-ion beam.
(1) C and CN negative-ion beam deposition at a low energy was found to create metastable material films such as diamond-like carbon and carbon nitride.
(2) Fluorine-negative-ion etching at a low energy could effectively etch Si and SiO_2 film with a low damage.
Thus, we investigated techniques of acceleration and deceleration of a high-current negative ion beam and developed negative ion apparatus. Negative-ion beam techniques of low energy deposition, etching and high energy implantation was established as material processing techniques. Less

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (56 results)

All Other

All Publications (56 results)

  • [Publications] Junzo Ishikawa: "Negtaive-Ion Sources for Modification of Materials(invited)" Review of Scientific Instruments. Vol.67. 1410-1415 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Extraction of Gaseous Materials from a Radio Frequency Plasma-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.67. 1012-1014 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive-and Negative-Ion Implantation into Powder Materials" Applied Surface Science. Vol.100/101. 342-346 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Charging Phenomenon of Insulators in Negative-Ion Implantation" Applied Surface Science. Vol.100/101. 370-373 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "負イオンの産業への応用" プラズマ・核融合学会誌. 第72巻. 1144-1149 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantatin Technology-96. IEEE96TH8182. 249-252 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Production of Reactive Elements from Compound Gases in the RF Plasma-Sputter-Type Heavy Ngative-Ion Source" Ion Implantatin Technology-96. IEEE96TH8182. 334-337 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" Nuclear Instruments and Methods. B127/128. 278-281 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative- and Positive-Ion Induced Secodnday Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B127/128. 282-285 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Charging-Free Negative-Ion Implantation" Application of Accelerators in Research and Industry. AIP Conf.Sr.915-918 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Gerald D.Alton: "The Sputter Generation of Negative Ion Beams" Ryushisen Gijutsu News. Vol.6. 5-19 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Ion Sources for Industrial Applications(invited)" Review of Scientific Instruments. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Extraction of Molecular Negative-Ion Beams of CN from RF Plamsa-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Surface Modification by Silver-Negative-Ion Implantation for Cell-Adhesion Properties of Polystyrene" Surface Coatings and Technology. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" Surface Coatings and Technology. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Contact Angle Lowering of Polystyrene Surface by Silver-Negative-Ion Implantation for Improving Bio-compatibility and Introduced Atomic Bonding Evaluation" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2-Film by Negative-Ion Bombardment" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "負イオンの発見から現在の応用に至るまで" アイオニクス. 第23巻. 1-6 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "無帯電負イオン注入技術と負イオン注入装置" アイオニクス. 第23巻. 85-94 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Negative-Ion Sources for Modification of Materials (invited)" Review of Scientific Instruments. Vol.67. 1410-1415 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Extraction of Gaseous Materials from a Radio Frequency Plasma-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.67. 1012-1014 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive- and Negative-Ion Implantation into Powder Materials" Applied Surface Science. Vol.100/101. 342-346 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Charging Phenomenon of Insulators in Negative-Ion Implantation" Applied Surface Science. Vol.100/101. 370-373 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Application of Negative Ions to Industrial Field" Journal of Plasma and Nuclear Fusion Science Soc.of Japan. Vol.72. 1144-1149 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantation Technology-96. IEEE96TH8182. 249-252 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Production of Reactive Elements from Compound Gases in the RF Plasma-Sputter-Type Heavy Negative-Ion Source" Ion Implantation Technology-96. IEEE96TH8182. 334-337 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" Nuclear Instruments and Methods. B127-128. 278-281 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative- and Positive-Ion Induced Secondary Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B127-128. 282-285 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Charging-Free Negative-Ion Implantation" Application of Accelerators in Research and Industry, AIP.Conf.Sr.915-918 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Gerald D.Alton: "The Sputter Generation of Negative Ion Beams" Ryushisen Gijutsu News. Vol.6. 5-19 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Ion Sources for Industrial Applications (invited)" Reviw of Scientific Instruments. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Extraction of Molecular Negative-Ion Beams of CN from RF Plasma-Sputter-Type Heavy Negative-Ion Source" Reviw of Scientific Instruments. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Surface Modification by Silver-Negative-Ion Implantation for Cell-Adhesion Properties of Polystirene" Surface Coatings and Technology. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" Surface Coatings and Technology. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Contact Angle Lowering of Polystirene Surface by Silver-Negative-Ion Implantation for Improving Biocompatibility and Introduced Atomic Bonding Evaluation" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2 -Film By Negative-Ion Bombardment" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Short History from Discovery of Negative Ions to Their Current Applications" Ionics. Vol.23, No.261. 1-6 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Charging Free Negative-Ion Implantation Technique and Negative-Ion Implanter" Ionics. Vol.23, No.261. 85-94 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantatin Technology-96. IEEE96TH8182. 249-252 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Negative-Ion Production of Reactive Elements from Compound Gases in the RF Plasma-Sputter-Type Heavy Ngative-Ion Source" Ion Implantatin Technology-96. IEEE96TH8182. 334-337 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Nagative-Ion Implantation" Nuclear Instruments and Methods. B 127/128. 278-281 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative- and Positive-Ion Induced Secodnday Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B 127/128. 282-285 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Charging-Free Negative-Ion Implantation" Application of Accelerators in Research and Industry. AIP Conf.Sr.915-918 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Gerald D. Alton: "The Sputter Generation of Negative Ion Beams" Ryushisen Gijutsu News. Vol.6. 5-19 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Ion Sources for Industrial Applications(invited)" Review of Scientific Instruments. Vol.69. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Extraction of Molecular Negative-Ion Beams of CN from RF Plamsa-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.69. 884-886 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Surface Modification by Silver-Negative-Ion Implantation for Cell-Adhesion Properties of Polystyrene" Surface and Coatings Technology. (未定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" Surface and Coatings Technology. (未定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Contact Angle Lowering of Polystyrene Surface by Silver-Negative-Ion Implantation for Improving Bio-compatibility and Introduced Atomic Bonding Evaluation" Nuclear Instruments and Methods. (未定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2-Film by Negative-Ion Bombardment" Nuclear Instruments and Methods. (未定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 石川 順三: "負イオンの産業への応用" プラズマ・核融合学会誌. 72巻. 1144-1149 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive-and Negative-Ion Implantation into Powder Materials" Applied Surface Science. 100/101. 342-346 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Negative-Ion Extraction of Gaseous Materials from a Radio Frequency Plasma-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.67. 1021-1014 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Charging Phenomenon of Insulators in Negative-Ion Implantation" Applied Surface Science. 100/101. 370/373 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative-and Positive-Ion Induced Secodnday Electron from Thin SiO_<> Film" (to be published in Nuclear Instruments and Methods). 4 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" (to be published in Nuclear Instruments and Methods). 4 (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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