| Project/Area Number |
08044169
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| Research Category |
Grant-in-Aid for international Scientific Research
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| Allocation Type | Single-year Grants |
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| Section | Joint Research |
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| Research Field |
表面界面物性
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| Research Institution | Keio University |
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Principal Investigator |
MAKABE Toshiaki Keio University, Dept.of Elec.Eng., Prefessor, 理工学部, 教授 (60095651)
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| Co-Investigator(Kenkyū-buntansha) |
PETROVIC Zoran lj Univ. of Belgrad, Inst. of Phys., Professor, of Belgrade・Institute of Phys, Research Professor
NESS Kevin f James Cook Univ., Phys. Department, Lecturer, ・Physics Department, Lecturer
ROBSON Robert e James Cook Univ., Phys. Department, Reader, ・Physics Department, Reader
NAKANO Nobuhiko Keio University, Dept. of Elec. Eng., Instructor, 理工学部, 助手 (40286638)
PETROVIC Zor Univ. of Belgrade, Institute of Phys., Research P
NESS Kevin F James Cook Univ. Physics Department, Lecturer
ROBSON Rober James Cook Univ. Physics Department, Reader
PETROVIC Zo Institute of Phys. Univ. of Belgrade, Research P
NESS Kevin Physics Department, James Cook Univ., Reader
ROBSON Robe Physics Department, James Cook Univ., Reader
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| Project Period (FY) |
1996 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1997: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1996: ¥2,400,000 (Direct Cost: ¥2,400,000)
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| Keywords | rf electron transport theory / anomarous electron diffusion in rf field / Boltzmann equation / ICP / Electron-heating in ICP / Electron transport in E×B / Tomographic diagnostics / Plasma modeling / 電子rf異常拡散 / ICPモデリング |
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| Research Abstract |
(1). Development of electron transport in an radiofrequency field.
Makabe and Petrovic ; Phys. Rev. E55 5901 (1997)
(2). Development of electron transport in crossed electric and magnetic fields, and analysis in Ar.
Ness and Makabe ; submitted to J. Phys. D.
(3). Theoretical verification of our Relaxation ConTinuum (RCT) model by the Boltzmann equation.
Robson and Makabe ; Annals of Physics 261, 74 (1997)
(4). Development of electron/ion transport in phase space by using RCT/Boltzmann equation
Makabe and Nakano ; J. Vac. Sci. Technol. A16, 294 (1998)
(5). Experimental evidence of the additional heating mechanism of electrons in ICP by using 2D CT.
Makabe and Petrovic ; Phys. Rev. E57, R43 (1998)
(6). Etched particle transport from the substrate exposed to the plasma.
Makabe and Nakano ; submitted
(7). Others.
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