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Study on New Small-Size High-Performance Electromechanical Devices using Piezoelectric Single Crystals

Research Project

Project/Area Number 08305010
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTohoku University

Principal Investigator

NAKAMURA Kiyoshi  Graduate shool of Engineering, Tohoku University, Professor, 大学院・工学研究科, 教授 (00005365)

Co-Investigator(Kenkyū-buntansha) SATO Yoshio  Fujitsu Laboratory, 部長 (研究職)
SONE Hideaki  Graduate School of Information Sciences, Tohoku University Associate Professor, 大学院・情報科学研究科, 助教授 (40134019)
TAMAI Teruo  Hyogo University of Teacher Education, Professor, 教授 (70053668)
WAKATSUKI Noboru  School of Science and Engineerign, Ishinomaki Senshu University, Professor, 理工学部, 教授 (40275615)
SAWA Koichiro  Faculty of Science and Technology, Keio University, Professor, 理工学部, 教授 (10051674)
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥11,200,000 (Direct Cost: ¥11,200,000)
Fiscal Year 1998: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1997: ¥4,300,000 (Direct Cost: ¥4,300,000)
Fiscal Year 1996: ¥4,400,000 (Direct Cost: ¥4,400,000)
Keywordselectromechanical device / piezoelectric actuator / polarization-inverted layer / piezoelectric crystal / relay / electrical contact / accelerometer / proximity sensor / アーク放電 / 電極損傷 / 有限要素法
Research Abstract

To realize integrated electromechanical devices with higher performance, instead of conventional electromagnetic actuators, piezoelectric actuators consisting of single crystals with a polarization-inverted layer have been studied for application with new electromechanical devices. Bending actuators for miniaturization and electrical drive methods for quick response were proposed, and contact phenomena were examined experimentally for high reliability. The following results were obtained.
1. The formation of a LiNbO_3 polarization-inverted layer and the fabrication technique of the actuators were improved. A power-saving precision actuator with no hysteresis and no creep was developed.
2. The defect of electrical contact due to oxidation or contamination in the atmosphere containing silicone was investigated. The effect on an electrode surface membrane and electric resistance of a heat treatment and a surrounding area atmosphere was studied. Moreover, the change of resistance due to surf … More ace impurities on the electrode caused by repeated contact was examined.
3. To design new electromechanical actuators using a piezoelectric crystal, a computer simulation technique using a three-dimensional finite element method was improved. The results of the numerical analysis for displacement, resonant frequency, and electromechanical coupling coefficient were experimentally confirmed.
4. A piezoelectric actuator with a integrated displacement sensor was proposed and examined to evaluate electrical contact phenomena such as an insulation destruction voltage and a locking phenomena.
5. A servo accelerometer using a LiNbO_3 bending actuator was proposed and its potential was experimentally confirmed as a highly sensitive sensor in a frequency range of less than 1Hz.
6. A proximity sensor utilizing an evanescent acoustic field formed by the LiNbO_3 bending vibrator with a polarization-inverted layer is proposed. It was demonstrated that when an object approached the surface of the vibrator, resonance frequency of the bending vibrator decreased sharply. Less

Report

(4 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • 1996 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] N.Wakatsuki, H.Yokoyama, S.Kubo: "Piezoelectric Actuator of LiNbO_3 with an Integrated Displacoment Sensor" Jpn.J.Appl.Phys.37-1.5B. 37-1.5B. 2970-2973 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Nakamura and S.Hongo: "Proximity Seusors Utilizing an Evanescent Acoustic Field Formed by Piezoelectric. Beuding Vibrator" Jpn.J.Appl.Phys.37-1.5B. 2853-2855 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai, H.Ohsaki, T.Kawano: "Improvement in Contact Resistance Characteristics of Ag/Pol Allay due to a Third Doping Ageut" IEICE Trans.Electronics. E81-C.3. 362-368 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Ebara, H.Sone, Y.Nemoto, T.Takagi: "A High-resdution measurement system for Surface Profile of electric contact" IEICE Trans.Electronics. E81-C.3. 432-434 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Min-Gou Wang, K.Sawa: "Comparison of Switching Behavior of Miniaturization relay with single and twin contacts" Proc.42^<nd> IEEE Hdm Couf on Electric Contacts. 269-275 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai: "Effect of Silicone Vapor and Humidity on Contact Reliability of Micro Relay Contacts" IEEE Trans, CPMT. -PartA. 19-3. 329-338 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai: "Effect of Switching Rate on Contact Failure from Contact Resistance of Micro Relayunder Environment Containing Silicon Vapor" Proc.43^<rd> IEEE Holm Conf. On Electrical Contacts. 333-339 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Wakatsuki、H.Yokoyama and S.Kudo: "Piezoelectric Actuator of LiNbO_3 with an Integrated Displacement Sensor" Jpn.J.Appl.Phys.37-1.5B. 2970-2973 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Nakamura and S.Hongo: "Proxinity Sensors Utilizing an Evanescent Acoustic Field Formed by Piezoelectric Bending Vibrator" Jpn.J.Appl.Phys.37-1.5B. 2853-2855 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai, H.Ohsaki, and T.Kawano: "Improvement in Contact Resistance Characteristics of Ag/Pd Allay due to a Third Doping Agent" IEICE Trans.Electronics. E81-C.3. 362-368 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Ebara, H.Sone, Y.Nemoto, T.Takagi: "A High-resolution measurement system for surface profile of electric contact" IEICE Trans.Electronics. E81-C.3. 432-434 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Min-Gou Wang and Koichiro Sawa: "Comparison of Switching Behavior of Miniaturization relay with single and twin contacts" Proc.42^<nd> IEEE Holm Conf.On Electric Contacts. 269-275 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai: "Effect of Silicone Vapor and Humidity on Contact Reliability of Micro Relay Contacts" IEE Trans.CPMT.-Part A. 19.3. 329-338 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Tamai: "Effect of Swiching Rate on Contact Failure from Contact Resistance of Micro Relay under Environment containing Silicone Vapor" Proc.43^<rd> IEEE Holm Conf.On Electrical Contacts. 333-339 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Wakatsuki,H.Yokoyama,S.Kudo: "Piezoelectric Actuator of LiNbO_3 with an Integrated Displacement Seusor" Jpn.J.appl.Phys.37-1・5B. 2970-2973 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Nakamura,S.Hango: "Proximity Sensovs Utilizing an Evanescent Acoustic Field Formed by a Piezoelectric Beuding Vibrator" Jpn.J.appl.Phys.37-1・5B. 2853-2855 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Z.K.Chen,K.Sawa: "Effect of arc behavior on material transfer:A review" IEEE Trans on CPMT. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Tamai,H.Ohsaki,T.Kawano: "Improvement in Contact Resistance Characteristics of AgPd Allay due to a third Doping Agent" IEICE Trans.Electronics. E81-c・3. 362-368 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Ebara,H.Sone,Y.Nemoto,T.Takagi: "A high-resolution measurement system for surface profile of electric contact" IEICE Trans.Electronics. E81-c・3. 432-434 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Yokoyama,N.Wakatsuki,S.Kudo: "A New Approach to Piezoelectric Gyroscope for higher Sensitivity" IEEE Ultrasonics Symposium Proceedings. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 若 月 昇: "センサを内蔵したLiNbO_3圧電アクチュエータの基礎検討" 第18回超音波エレクトロニクスの基礎と応用に関するシンポジューム. 251-252 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 若 月 昇: "フィードバックによる圧電アクチュエータの過渡応答制御の検討" 電子情報通信学会 技術研究報告. EMD97-74. 25-28 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Terutaka Tamai: "Effect of Switching Rate on Contact Failure from Contact Resistance of Micro Relay under Environment Containing Silicone Vapor" Proc.43rd IEEE Holw Conf.on Electrical Contacts. 333-339 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hideaki Sone: "A High-Resulution Measurement System for Surface Profile of Electric Contact" IEICE Transactions on Communications. E81-C3(印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Kiyoshi Nakamura: "Proximity Sensors Utilizing on Evanescent Acoustic Field Famed by a Piezoelectric Bending Vibrator" Jpn.J.Appl.Phys.(in print.). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 中村僖良: "強誘電結晶の熱処理による分極反転現象" 半導体研究所報告. 31・3. 84-90 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 若月昇,横山秀樹他: "変位センサを内蔵した分極反転圧電単結晶アクチュエータの基礎研究" 電子情報通信学会機構デバイス研究会. (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Min-Gou Wang and Koichiro Sawa: "Comparison of switching Behavior of Miniaturization relay with single and twin contacts" Proc.42nd IEEE Holm Conference on Electric Contacts. 269-275 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Tamai: "Effect of silicone vapor and humidity on contact reliability of micro relay contacts" IEEE Trans.CPMT.-Part A. 19・3. 329-338 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 玉井 輝雄、他: "銅接触面に生成する酸化皮膜の成長則と接触信頼性に対する加熱酸化の加速率" 電子情報通信学会論文誌 C-II. 79・11. 537-545 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 曽根秀昭: "電気接点現象の実時間計測" 計測と制御. 35・8. 606-615 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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