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Investigation of Measurement Condition to Detect Single Charge Using Atomic Force Microscope

Research Project

Project/Area Number 08405007
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionOsaka University

Principal Investigator

MORITA Seizo  Osaka Univ., Faculty of Engineering, Professor, 工学部, 教授 (50091757)

Co-Investigator(Kenkyū-buntansha) NISHI Ryuji  Osaka Univ., Faculty of Engineering, Research Assistant., 工学部, 助手 (40243183)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥24,800,000 (Direct Cost: ¥24,800,000)
Fiscal Year 1997: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1996: ¥21,400,000 (Direct Cost: ¥21,400,000)
Keywordsatomic force microscope / atomic force / electrostatic force microscope / electrostatic force / well-defined surface / atomic resolution / semiconductor surface / charge / 周波数変調回路 / 電気的変調 / 静電気力と原子間力の分離回路 / 素電荷 / シリコン酸化膜 / 超高分解能観察 / 電荷の活性化
Research Abstract

The electrostatic force microscope (EFM) offered new opportunity to measure a variety of electrostatic properties on the surface on a sub-micron scale. For example, potentiometry, imaging of contact-electrified charge and its dissipation process on insulating surface and so on have been demonstrated. However, so far, the lateral resolution of the EFM has been insufficient. This is due to the following two main reasons : (i) It is much difficult to measure weak distance dependence of the electrostatic force with a good signal-to-noise (S/N) ratio. (ii) It is much difficult to separate the electrostatic force from the van der Waals force. Thus, the technical improvements have been required to increase the lateral resolution of the EFM.
In this project, we demonstrated a novel method to detect the van der Waals and the electroatatic force interactions simultaneously on atomic scale, which is based on frequency modulation (FM) detection method. In the noncontact AFM images measured on the GaAs (110) surface, the rectangular lattice and the atomicscale point defects can be clearly and reproducibly resolved. On the other hand, in the EFM images, point defect appeared as bright respect to the background at positive bias voltage, while it appeared dark contrast at negative bias voltage.Thus, the contrast of the EFM images depends on the sample bias voltage V.This means that the EFM images really resulted from the charge at the point defect on the GaAs (110) surface. Thus, for the first time, the atomic resolution imaging has been achieved for the electrostatic force measurement.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (41 results)

All Other

All Publications (41 results)

  • [Publications] Y.Sugawara et al.,: ""True atomic resolution imaging with noncontact atomic force microscopy"" Appl.Sur.Sci.Vol.113/114. 364-370 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe et al.: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope"" Opt.Rev.Vol.4,No1B. 232-235 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi et al.: ""Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air"" Jpn.J.Appl.Phys.Vol.36,No.6A. 3755-3758 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi et al.: ""Development of ultrahigh vacuum atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement"" J.Vac.Sci.Technol.B. Vol.15,No.4. 1543-1546 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe et al.: ""Detection mechanism of optical evanescent field using a noncontact mode Atomic force microscope with a frequency modulation detection method"" J.Vac.Sci.Technol.B. Vol.15,NO.4. 1512-1515 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] N.Sasaki et al.: ""Analysis of frictional-force image patrerns of a grapite surface"" J.Vac.Sci.Technol.B. Vol.15,NO.4. 1479-1482 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] J.Ohgami et al.: ""Growth of Two-Dimensional Nucleus on a Cleaved (010) Surface of (NH_2CH_2COOH)_3・H_2SO_4"" J.Phys.Soc.Jpn.Vol.66,No.9. 2747-2750 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi et al.: ""Role of a covalent bonding interaction in noncontact-mode atomic-force microscopy"" Phys.Rev.B. Vol.56,No.16. 9834-9840 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] R.Nishi et al.: ""Simulated Computed Tomography for Reconstruction of Vacancies from Atomic Force Microscope Image"" Jpn.J.Appl.Phys.Vol.36,No.10B. L1410-L1412 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe et al.: ""Force Imaging of Optical Near-Field Using Noncontact Mode Atomic Force Microscopy"" Jpn.J.Appl.Phys.Vol.37,No.2A. L167-L169 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Ueyama et al.: ""Stable operation mode for dynamic noncontact atomic force microscopy"" Appl.Phys.A. Vol.66 (in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Sugawara, H.Ueyama, T.Uchihashi, M,Ohta, S.Morita, M.Suzuki and S.Mishima: "True atomic resolution imaging with noncontact atomic force microscopy" Appl.Sur.Sci.Vol.223/114. 364-370 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe, T.Uchihashi, M.Ohta, H.Ueyama, Y.Sugawara and S.Morita: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope" Opt.Rev.Vol.4, No.1B. 232-235 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi, A.Nakano, T.Ida, Y.Ando, R.Kaneko Y.Sugawara and S.Morita: "Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air" Jpn.J.Appl.Phys.Vol.36, Part I,No.6A. 3755-3758 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi, M.Ohta, Y.Sugawara, Y.Yanase, T.Shigematsu, M.Suzuki and S.Morita: "Development of ultrahigh vacuum atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement" J.Vac.Sci.Technol.B. Vol.15, No.4. 1543-1546 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe, T.Uchihashi, M.Ohta, H.Ueyama, Y.Sugawara and S.Morita: "Detection mechanism of optical evanescent field using a noncontact mode Atomic force microscope with a frequency modulation detection method" J.Vac.Sci.Technol.B. Vol.15, No.4. 1512-1515 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] N.Sasaki, M.Tsukada, S.Fujisawa, Y.Sugawara, S.Morita and K.Kobayashi: "Analysis of frictional-force image Patterns of a graphite surface" J.Vac.Sci.Technol.B. Vol.15, No.4. 1479-1482 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] J.Ohgami, Y.Sugawara, S.Morita and T.Ozaki: "Growth of Two-Dimensional Nucleus on a Cleaved (010) Surface of (NH_2CH_2COOH)_3・H_2SO_4" J.Phys.Soc.Jpn.Vol.66, No.9. 2747-2750 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uchihashi, Y.Sugawara, T.Tsukamoto, M.Ohta and S.Morita: "Role of a covalent bonding interaction in noncontact-mode atomic-force microscopy" Phys.Rev.B. Vol.56, No.16. 9834-9840 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] R.Nishi, T.Ohta, Y.Sugawara, S.Morita and T.Okada: "Simulated Computed Tomography for Reconstruction of Vacancies from Atomic Force Microscope Image" Jpn.J.Appl.Phys.Vol.36, No.10B. L1410-L1412 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Abe, Y.Sugawara, Y.Hata, K.Sawada and S.Morita: "Force Imaging of Optical Near-Field Using Noncontact Mode Atomic Force Microscopy" Jpn.J.Appl.Phys.Vol.37, No.2A. L167-L169 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Ueyama, Y.Sugawara and S.Morita: "Stable operation mode for dynamic noncontact atomic force microscopy" Appl.Phys.A. Vol.66 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Sugawara et al.: ""True atomic resolution imaging with noncontact atomic force microscopy"" Appl.Sur.Sci.Vol.113/114. 364-370 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Abe et al.: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope"" Opt.Rev.Vol.4,No.1B. 232-235 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Uchihashi et al.: ""Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air"" Jpn.J.Appl.Phys.Vol.36,No.6A. 3755-3758 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Uchihashi et al.: ""Development of ultrahigh vacuum atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement"" J.Vac.Sci.Technol.B. Vol.15,No.4. 1543-1546 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Abe et al.: ""Detection mechanism of optical evanescent field using a noncontact mode Atomic force microscope with a frequency modulation detection method"" J.Vac.Sci.Technol.B. Vol.15,No.4. 1512-1515 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Sasaki et al.: ""Analysis of frictional-force image patterns of a graphite surface"" J.Vac.Sci.Technol.B. Vol.15,No.4. 1479-1482 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] J.Ohgami et al.: ""Growth of Two-Dimensional Nucleus on a Cleaved(010) Surface of (NH_2CH_2COOH)_3・H_2SO_4"" J.Phys.Soc.Jpn.Vol.66,No.9. 2747-2750 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Uchihashi et al.: ""Role of a covalent bonding interaction in noncontact-mode atomic-force microscopy"" Phys.Rev.B. Vol.56,No.16. 9834-9840 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] R.Nishi et al.: ""Simulated Computed Tomography for Reconstruction of Vacancies from Atomic Force Microscope Image"" Jpn.J.Appl.Phys.Vol.36,No.10B. L1410-L1412 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Abe et al.: ""Force Imaging of Optical Near-Field Using Noncontact Mode Atomic Force Microscopy"" Jpn.J.Appl.Phys.Vol.37,No.2A. L167-L169 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Ueyama et al.: ""Stable operation mode for dynamic noncontact atomic force microscopy"" Appl.Phys.A. Vol.66(in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Fukano: "Phase Transition of Contact-Electrified Negative Charges on a Thin Silicon Oxide in Air" Jpn.J.Appl.Phys.Vol.35,No.4A. 2394-2401 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Morita: "Contact and non-contact mode imaging by atomic force microscopy" Thin Solid Films. Vol.273. 138-142 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Sugawara: "Atomic resolution imaging of InP(110)surface observed with ultrahigh vacuum atomic force microscope in noncontact mode" J.Vac,Sci.Technol.B. Vol.14,No.2. 953-956 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Uchihashi: "Correlation between contact-electrified charge groups on a thin silicon Oxide" J.Vac,Sci.Technol.B. Vol.14,No.2. 1055-1059 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Uchihashi: "Proximity effects of negative charge groups contact electrified on thin silicon oxide in air" J.Appl.Phys.Vol.79,No.8. 4174-4177 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Morita: "Stability of Densely Contact-Electrified Charges on Thin Silicon Oxide in Air" Jpn.J.Appl.Phys.Vol.35,No.11. 5811-5814 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Sugawara: "Density saturation of densely contact-electrified negative charges on a thin silicon oxide due to the Coulomb repulsive force" Philosophical Magazine A. Vol.74,No.5. 1339-1346 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Ohta: "Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope" Jpn.J.Appl.Phys.Vol.35,No.9B. L1222-L1224 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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