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Study on Short-Wavelength Soft X-Ray Phase Contrast Microscope

Research Project

Project/Area Number 08405010
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionUniversity of Tsukuba

Principal Investigator

AOKI Sadao  Univ.Tsukuba, Inst.Appl.Phys., Professor, 物理工学系, 教授 (50016804)

Co-Investigator(Kenkyū-buntansha) AOTA Tatsuya  Univ.Tsukuba, Inst.Appl.Phys., Research Assistant, 物理工学系, 助手 (20292526)
WATANABE Norio  Univ.Tsukuba, Inst.Appl.Phys., Research Assistant, 物理工学系, 助手 (80241793)
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥42,400,000 (Direct Cost: ¥42,400,000)
Fiscal Year 1998: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1997: ¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 1996: ¥32,500,000 (Direct Cost: ¥32,500,000)
Keywordsx-ray / soft x-ray / microscope / phase contrast / dark-field / Wolter mirror / X線顕微鏡 / 位相差顕微鏡 / 暗視野顕微鏡 / 短波長軟X線 / 位相差コントラスト
Research Abstract

1) Development of a phase contrast x-ray microscope
We developed the first Zernike phase-contrast x-ray microscope with a phase plate. Synchrotron radiation from the bending magnet beamline BL3C2 at the Photon Factory, Institute for High Energy Physics was used. Monochromatic x-rays at 9keV were incident on a specimen. Using a Wolter mirror, the transmission image was enlarged with the magnification ratio of 10. The microscope could image only one-dimensional direction, because the small part of the annular aperture of the mirror was used, and the figure error of the mirror was severely affected to the meridional direction. A phase plate of an aluminum foil of a 5mum thickness was set at the back focal plane of the Wolter mirror. A phase-contrast image of poly(ethylene telephthalate) wires of a 5-10mum diameter was clearly focused at 9keV, that could not be observed in the case of bright field.
2) Development of a dark-field soft x-ray microscope
We developed the first dark-field soft x-ray microscope with Wolter mirrors. Soft x-rays from a laser-produced plasma source were focused with a condenser mirror with the slightly small annular aperture of an objective mirror. Scattering soft x-rays from a specimen were focused on a CCD camera. Edge-enhanced dark-field images of a PMMA pattern and biological specimens could be observed.
3) Fabrication of a Wolter mirror
Mirror mandrels of oxygen-free copper were turned with a NC lathe and a diamond single-point tool. The surface roughness was about Rq (rms) 9nm. Then, the Pyrex glass replicas were fabricated. The surface roughness of the mirrors was about Rq (rms) 20-30nm, This process of a Wolter mirror fabrication would shorten a fabrication term of a Wolter mirror however the surface roughness was not small enough for soft x-rays and x-rays, and it was necessary to polish a mandrel and a replicated glass replica.

Report

(4 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • 1996 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] S.Aoki et al.: "Submicron X-Ray Microbeam production with a Wolter-Type Grazing Incidence Mirror at Tristan Main Ring (KEK)" J.Phys.IV France. 7. C2-329-330 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Watanabe et al.: "Soft X-Ray Gabor Holography by Use of a Backilluminated CCD Camera" Appl. Opt.36. 7433-7436 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Aoki et al.: "A Table-Top Grazing-Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source" "X-Ray Microscopy and Spectromicroscopy" eds.J.Thieme et al.,(Springer-Verlag,Berlin,1998). I-163-167 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Watanabe et al.: "Three-Dimensional Tomography Using a Soft X-Ray Holographic Microscope and CCD Camera" J.Synchrotron Rad.5. 1088-1089 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Aoki et al.: "Imaging X-ray Fluorescence Microscope with a Wolter-Type Grazing-Incidence Mirror" J.Synchrotron Rad.5. 1117-1118 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Sugisaki et al.: "Influence of fabrication errors of Wolter mirror imaging performance" Appl.Opt.37. 8057-8066 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Aoki et al.: "Submicron X-Ray Microbeam Production with a Wolter-Type Grazing Incidence Mirror at Tristan Main Ring (KEK)" J.Phys.IV France. 7. C2-329-330 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Watanabe et al.: "Soft X-Ray Gabor Holography by Use of a Backilluminated CCD Camera" Appl.Opt.36 (29). 7433-7436 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Aoki et al.: "A Table-Top Grazing-Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source" "X-Ray Microscopy and Spectromicroscopy" eds.J.Thieme et al., (Springer-Verlag, Berlin). I-163-167 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Watanabe et al.: "Three-Dimensional Tomography Using a Soft X-Ray Holographic Microscope and CCD Camera" J.Synchrotron Rad. 1088-1089 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Aoki et al.: "Imaging X-ray Fluorescence Microscope with a Wolter-Type Grazing-Incidence Mirror" J.Synchrotron Rad. 5. 1117-1118 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Sugisaki et al.: "Influence of fabrication errors of Wolter mirror imaging performance" Appl.Opt.37 (34). 8057-8066 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 青木貞雄: "放射光による計測 X線顕微鏡" RADIOISOTOPES. 47・6. 510-516 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 青木貞雄: "X線ホログラフィー" 光学. 27・5. 273-278 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Watanabe et al.: "Three-dimensional tomography using a soft X-ray holographic microscope and CCD camera" J.Synchrotron Rad.5. 1088-1089 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Aoki et al.: "Imaging X-ray fluorescence microscope with a Wolter-type grazing-incidence mirror" J.Synchrotron Rad.5. 1117-1118 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Sugisaki et al.: "Influence of fabrication errors of Wolter mirror imaging performance" Appl.Oct.37.34. 8057-8066 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Watanabe 他: "Soft X-ray Gabor holography by use of a backilluminated CCD camera" Appl.Opt.36・29. 7433-7436 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 青木貞雄: "斜入射ミラーとX線顕微鏡への応用" 光学技術コンタクト. 35・4. 233-240 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Ogata 他: "Development of a Grazing Incidence Soft X-ray Microscope with a Laser-Produced Plasma Source" J.Electron Spectroscopy and Related Phenomena. 80. 357-360 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Aota 他: "Image characteristics of a channel plate collimator for low energy X-rays" Rev.Sci.Instrum.68・4. (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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