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In situ SEM study of 2D to 3D transition process of strained MBE

Research Project

Project/Area Number 08455015
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionOsaka Prefecture University

Principal Investigator

INOUE Naohisa  大阪府立大学, 先端科学研究所, 教授 (60275287)

Co-Investigator(Kenkyū-buntansha) HONMA Yoshikazu  NTT, 基礎研究所, 特別研究員 (30385512)
HUJIMURA Norihumi  大阪府立大学, 工学部, 助教授 (50199361)
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥4,900,000 (Direct Cost: ¥4,900,000)
Fiscal Year 1998: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1997: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1996: ¥2,300,000 (Direct Cost: ¥2,300,000)
Keywordscompound semiconductor / strained layer / molecular beam epitaxy / three dimensional growth / in-situ observation / scanning electron microscope / Monte Carlo simulation / self organization / モンテカルロシミュレーション / 電子線成長
Research Abstract

1. 電子顕微鏡その場観察 三次元成長開始過程:昨年解明した過程の機構を検討し、1層目完了前に2層目が1層目の島の上に発生する多段島形成が素過程なことを明らかにした。昨年ステップ上の三次元島優先形成を解明したのを発展させ、ステップをネットワーク状に制御した表面でGaなどの液体金属がステップに沿って拡散するのを利用して、島をSi(111)表面の特定の位置に配列させるのに成功した。原子層穴挙動:三次元島の制御に必要な下地平坦面実現のため、成長後熱処理中の単原子層深さの穴の挙動を調べ、穴の成長や収縮が周りのステップとの原子のやりとりに支配されることを明らかにした。仕事関数:電子顕微鏡像を形成する二次電子の強度が、表面の仕事関数を良く対応することを見いだした。
2. 原子間力顕微鏡観察:歪系三次元成長による自己組織化量子ドットに有効な(111)面上成長について、表面ステップおよび量子井戸多層膜を評価した。ステップバンチングを検出すると共に、多層膜断面が観察可能なことを明らかにした。
3. 光学的評価:タイプII超格子系を歪系三次元成長に応用すると電子または正孔のみを閉じこめた新しい量子ドットが形成できる。この材料系の光学的・電気的特性を評価すると共に、その島の評価のため赤外分光法を高度化した。
4. 機構モデル構築:表面再配列構造の反位相境界が島の優先発生サイトになるということを取り入れて、三次元発生機構のモデル化を行った。
5. 計算機シミュレーション:作成済みのMBE成長のモンテカルロシミュレーションに歪と表面張力の効果を取り入れ、三次元成長を再現できることを確認した。
表面原子による電子散乱を個々の散乱を扱うダイレクトモデルでシミュレーション可能とし、SEM像のステップのコントラストを解明できる見通しを得た。

Report

(4 results)
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • 1996 Annual Research Report   Final Research Report Summary
  • Research Products

    (33 results)

All Other

All Publications (33 results)

  • [Publications] N.Inoue: "Elementary processes in molecular beam epitaxy studied by in-situ scanning electron microscopy" Surface Review and Letters. 5・3&4. 881-897 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Tanahashi, Y.Kawamura N.Inoue and Y.Homma: "Asymmetric behavior of monolayer holes after growth in GaAs molecular beam epitaxy revealed by in-situ scanning electron microscopy" Journal of Crystal Growth. (in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Homma,P.Finnie and T.Ogino: "Aligned island formation using an array of step bands and holes on Si (111)" Appl.Phys.Lett.74・6. 815-817 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Kawamura,A.Kamada,K.Yoshimatsu,M.Nakao,N.Inoue: "Properties of In_<0.52>Al_<0.48>As and In_<0.53>Ga_<0.47>As/In_<0.52>Al_<0.48>As quantum well structures grown on(111)B InP substrates by molecular beam epitaxy" Japan.J.Appl.Phys.38(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Yosimatu,Y.Kawamura,H.Kurisu,A.Kamada,H.Naito,N.Inoue: "Optical and electrical properties of InAlAs/AlAsSb type II quantum well structures grown by molecular beam epitaxy" Journal of Crystal Growth. 188. 328-331 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 片山貴寛,河村裕一,山本明子 高崎英樹、内藤裕義、井上直久: "分子線成長GaAs_<0.5>Sb_<0.5>層のドーピング特性" 真空. 42(印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] N.Inoue,Y.Kawamura,K.Tanahashi,Y,Homma and J.Osaka: "Surface Roughening processes in GaAs MBE Studied by insitu Scanning Electron Microscopy" J.Crystal Growth. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Kawamura,H.Kurisu,K.Yoshimatsu,A.Kamada,Y.Naito and N.Inoue: "Type II Emmision in InAlAs/AlAsSb Multiple Quantum well Layers Lattice-matched to InP Grown by Molecular Beam Epitaxy" J.Crystal Growth. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 棚橋克人、河村裕一、井上直久、本間芳和: "GaAsの分子線成長における二次元成長・三次元成長転移の走査電子顕微鏡その場観察" 真空. 41-7(予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 井上直久、河村裕一、棚橋克人、本間芳和: "GaAsの分子線成長における三次元成長の走査電子顕微鏡その場観察" 表面科学. 19-7(予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Araki,N.Fujimura and T.Ito,: "Mechanism for ordering in SiGe films with reconstructed surface" Applied Physics Letters. 71-9. 1174-1176 (1994)

    • Related Report
      1997 Annual Research Report
  • [Publications] P.Finnie and Y.Homma: "Atomic Step Networks as Selective Epitaxial Templates." Applied Physics Letters. 72-7. 827-829 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Tanahashi,Y.Kawamura,N.Inoue,Y.Homma and J.Osaka: "Inst.Phys.Conf.Ser.No160" In-Situ Scanning Electron Microscopy of Surface Roughening Processes in GaAs Molecular Beam Epitaxy, 4 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Inoue: "Elementary processes in molecular beam epitaxy studied by in-situ scanning electron microscopy"Surface Review and Letters. 5・3&4. 881-897 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Inoue, Y.Kawamura, K.Tanahashi, Y.Homma and J.Osaka: "Surface Roughening Processes in GaAs MBE Studied by in-situ Scanning Electron Microscopy"J.Crystal Growth. 188. 205-210 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 井上直久、河村裕一、棚橋克人、本間芳和: "GaAsの分子線成長における三次元成長の走査電子顕微鏡その場観察"表面科学. 19-7. 429-434 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Homma,P.Fnnie,T.Ogino: "Aligned island formation using an array of step bands and holes on Si(111)"Appl.Phys.Lett.. 74・6. 815-817 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Suzuki,K.Mogi,Y.Homma: "Two-dimensional imaging of surface morphology by energy-analyzed secondary electrons and Auger electron spectroscopy for stepped Si(111)"J.Vacuum Sci.Technol.A. 16・3. 1122-1126 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Araki,N.Fujimura,T.Ito: "The stability of ordered structures in SiGe films examined by strain-energy calculations"Journal of Crystal Growth. 174. 675-679 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tanahashi, Y.Kawamura, N.Inoue,Y. Homma and J.Osaka: "Inst.Phys.Conf.Ser.No.160"In-Situ Scanning Electron Microscopy of Surface Roughening Processes in GaAs Molecular Beam Epitaxy. 4 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N. Inoue: "Elementary processes in molecular beam epitaxy studied by in-situ scanning electron microscopy"Surface Review and Letters. 5・3&4. 881-897 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N. Inoue: "Surface Roughening Processes in GaAs MBE Studied by in-situ Scanning Electron Microscopy"J. Crystal Growth. 188. 205-210 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N. Inoue: "Kinetics on MBE-grown GaAs Surface during Annealing as Revealed by in-situ SEM Observation"J. Surf. Sci. Soc. Jpn. 19-7. 429-434 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Homma: "Aligned island formation using an array of step bands and holes on Si (111)"Appl. Phys. Lett.. 74・6. 815-817 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Suzuki: "Two-dimensional imaging of surface morphology by energy-analyzed secondary electrons and Auger electron spectroscopy for stepped Si (111)"J. Vacuum Sci. Technol. A. 16・3. 1122-1126 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Araki: "The stability of ordered structures in SiGe films examined by strain-energy calculations"J. Crystal Growth. 174. 675-679 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Tanahashi: "In-Situ Scanning Electron Microscopy of Surface Roughening Processes in GaAs Molecular Beam Epitaxy"Inst. Phys. Conf. Ser.. No. 160. 67-70 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 河村裕一、荒木努、森本恵造、井上直久、本間芳和、篠原正典: "結晶成長における表面制御と雰囲気制御のその場観察" 真空. 39-11. 546-553 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N. Inoue, Y. Kawamura, Y. Hmma, J. Osaka, T. Araki, T. Ito: "Two-dimensional to one-dimensional mode change in GaAs molecu beam epitaxy revealed by in situ scanning electron microscopy" J. Crystal Growth. (予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] N. Inoue, K. Morimoto, T. Araki, T. Ito, Y. Homma, J. Osaka: "Annihilation of monolayer holes on molecular bam epitaxy grown GaAs surface during annealing as shown in situ scanning electron microscopy" J. Vac. Sci. Technol. B. 14-6. 3575-3581 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 井上直久、河村裕一、棚橋克人、本間芳和: "化合物半導体のMBE成長過程のSEMその場観察" 真空. 40-7(予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 井上直久、本間芳和、棚橋克人、河村裕一、: "GaAsの分子線成長における成長中断時の挙動の走査電子顕微鏡その場観察" 表面科学. 18-7(予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Araki, N. Fujimura, T. Itho, A. Wakahara, A. Sasaki: J. Appl. Phys.80. 3804-3807 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2017-05-19  

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