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Research on Evaluation of Adhesive Strength of Thin Film Based on Micromechanics

Research Project

Project/Area Number 08455050
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionTohoku University

Principal Investigator

ABE Hiroyuki  Tohoku University, President, 総長 (00005266)

Co-Investigator(Kenkyū-buntansha) TANNO Ken  Miyagi Nationl College of Technology, Department of Mechanical Engineering, Prof, 機械工学科, 教授 (90113860)
KAYABA Tomoo  Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (60250677)
SAKA Masumi  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (20158918)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥8,100,000 (Direct Cost: ¥8,100,000)
Fiscal Year 1997: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1996: ¥4,700,000 (Direct Cost: ¥4,700,000)
KeywordsThin Diamond Film / Adhesive Strength / Nucleation Density / Single Nucleus Fracture Test / Ad-Initio Molecular Dynamics / Ultrasonic Wave Transmission / Shear Stress / Indentation Test / 表面点欠陥 / 圧子押込み試験 / 超音波 / 透過波形 / 周波数特性
Research Abstract

1.Adhesive strength of thin diamond film was investigated based on the adhesion of microscopic nuclei appeared on the substrate in the initial stage of chemical vapor deposition. The microscopic adhesive strength of these individual nuclei was successfully evaluated by being scratched off in an electron microscope.
2.The ultrasonic wave transmission has been examined in order to find the relation between the transmission of ultrasonic angle beam and the adhesive strength of thin film. By comparing the experimental results with the results obtained by theoretical models, the transmission of ultrasonic wave was revealed to be influenced by the character of shear stress transmission through the interface, which ensured that the ultrasonic angle beam technique presented here was able to evaluate quantitatively the adhesion of thin film.
3.The adhesive strength has been examined in connection to a simple fracture test performed by a Vickers indentation testing machine on thin diamond film. The energy released due to the extension of interface cracks was evaluated by subtracting the energy required for the plastic deformation of the substrate from the total dissipated energy obtained from the load-displacement diagram during the indentation test. This result was compared with the result of fracture test of individual nuclei performed in 1.
4.The adhesive strength of thin film obtained by the simple fracture test performed in 3 was compared with the evaluation result given by the ultrasonic angle beam in 2. In addition, by introducing the ab-initio molecular dynamics in which the state of electrons was taken into account, atomic scale adhesion of nuclei was further examined in connection to the ultrasonic transmission characteristics.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] 神谷 庄司・佐藤 真樹・坂 真澄・阿部 博之: "石英ガラス基板上におけるダイヤモンド薄膜の破壊挙動" 日本機械学会関西支部 第72期定時総会講演会 講演論文集. 5-33-5-34 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M, Saka・S, sato and H, Abe: "Quantitative NDE of Diamond Film Adhesion Using an Ultrasonic Angle-Beam Technique" NDT & E International. 30. 305-311 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S, Kamiya・H, Takahashi・M, Saka and H, Abe: "Direct Measurement of the Adhesive Fracture Resistance of CDV Diamond Particles" Application of Fracture Mechanics in Electronic Packaging,ASME. AMD-222/EEP-20. 169-174 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S, Kamiya・S, sato・M, Saka and H, Abe: "Fracture Toughness Estimation of Thin Chemical Vapor Deposition Diamond Films Based on the Spontaneous Fracture Behavior on Quartz Glass Substrates" Journal of Applied Physics. 82. 6056-6061 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 神谷 庄司・浅田 伸司・丹野 顯・坂 真澄・阿部 博之: "圧子押し込みによるダイヤモンド薄膜の破壊挙動実時間観察" 日本機械学会東北支部 第33期総会・講演会講演論文集. 115-116 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 萱場 智雄・井上 昭徳・坂 真澄・阿部 博之: "ダイヤモンド核発生過程解明への分子動力学アプローチ" 日本機械学会東北支部 第33期総会・講演会講演論文集. 125-126 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 萱場 智雄・井上 昭徳・坂 真澄・阿部 博之: "分子動力学によるダイヤモンド核発生の数値シミュレーション" 日本機械学会 第75期通常総会講演会 講演論文集. 掲載予定. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 神谷 庄司・佐藤 真樹・坂 真澄・阿部 博之: "気相合成ダイヤモンド薄膜中の残留応力" 日本機械学会 第75期通常総会講演会 講演論文集. 掲載予定. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 萱場 智雄・水上 剛志・坂 真澄・阿部 博之: "基板傷つけ処理を考慮したダイヤモンド核発生の三次元数値シミュレーション" 日本機械学会論文集(A編). 掲載予定. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (M.Sato, M.Saka and H.Abe): "Spontaneous Fracture Behavior of Diamond Thin Film on Quartz Glass Substrate" Prepr.of Jpn.Soc.Mech.Eng.No.974-1. 5-33-5-34 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Saka (S.Sato and H.Abe): "Quantiative NDE of Diamond Film Adhesion Using an Ultrasonic Angle-Beam Technique" NDT & E International. Vol.30, No.5. 305-311 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (H.Takahashi, M.Saka and H.Abe): "Direct Measurement of the Adhesive Fracture Resistance of CVD Diamond Particles" Application of Fracture Mechanics in Electronic Packaging, ASME. AMD-222/EEP-20. 169-174 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (M.Sto, M.Saka and H.Abe): "Fracture Toughness Estimation of Thin Chemical Vapor Depostion Diamond Films Based on the Spontaneous Fracture Behavior on Quartz Glass Substrates" Journal of Applied Physics. Vol.82, No.12. 6056-6061 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (S.Asada, K.Tanno, M.Saka and H.Abe): "Real Time Observation of the Fracture Process of Diamond Films Due to Indentation" Prepr.of Jpn.Soc.Mech.Eng.No.981-1. 115-116 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Kayaba (A.Inoue, M.Saka and H.Abe): "Approach to Solving Process of Nucleation of Diamond by Molecular Dynamics" Prepr.of Jpn.Soc.Mech.Eng.No.981-1. 125-126 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Kayaba (A.Inoue, M.Saka and H.Abe): "Numerical Simulation of Nucleation of Diamond by Molecular Dynamics" Prepr.of Jpn.Soc.Mech.Eng.(to be published).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (M.Sato, M.Saka and H.Abe): "Residual Stress in Thin CVD Diamond Films" Perpr.of Jpn.Soc.Mech.Eng.(to be published).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Kayaba (T.Mizukami, M.Sada and H.Abe): "Three Dimensional Numerical Simulation of Nucleation of Diamond by Considering Surface Pretreatment of Substrate" Trans.JSME (A). (to be published).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kamiya (H.Takahashi, M.Saka and H.Abe): "Direct Measurement of the Adhesive Fracture Resistance of CDV Diamond Particles" Application of Fracture Mechanics in Electronic Packaging,ASME. AMD-222/EEP-20. 169-174 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Kamiya (M.Sato, M.Saka and H.Abe): "Fracture Toughness Estimation of THin Chemical Vapor Deposition Diamond Films Based on the Spontaneous Fracture Behavior on Quartz Glass Substrates" Journal of Applied Physics. 82・12. 6056-6061 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 神谷 庄司(浅田神司, 丹野 顯, 坂 真澄, 阿部博之): "圧子押込みによるダイヤモンド薄膜の破壊挙動実時間観察" 日本機械学会東北支部第33期総会・講演会講演論文集. 掲載予定. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 萱場 智雄(井上昭徳, 坂 真澄, 阿部博之): "ダイヤモンド核発生過程解明への分子動力学アプローチ" 日本機会学会東北支部第33期総会・講演会講演論文集. 掲載予定. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 萱場 智雄(井上昭徳, 坂 真澄, 阿部博之): "分子動力学によるダイヤモンド核発生の数値シュミレーション" 日本機械学会第75期通常総会講演会講演論文集. 掲載予定. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 神谷 庄司(佐藤真樹, 坂 真澄, 阿部博之): "気相合成ダイヤモンド薄膜中の残留応力" 日本機械学会第75期通常総会講演会講演論文集. 掲載予定. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 笹川 和彦(中村直章,坂 真澄,阿部博之): "角部に丸みを有する金属薄膜配線のエレクトロマイグレーション" 日本機械学会 平成8年度材料力学部門講演会 講演論文集(B). No. 96-10. 481-482 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Saka (S. Sato and H. Abe): "Quantitative Nondestructive Evaluation of Adhesion of Diamond Film Using Ultrasonic Angle Beam Technique" NDT & International. (掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 神谷 庄司(佐藤真樹,坂 真澄,阿部博之): "石英ガラス基板上におけるダイヤモンド薄膜の破壊挙動" 日本機械学会関西支部第72期定時総会講演会 講演論文集. (掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 笹川 和彦(本間良和,坂 真澄,阿部博之): "折れ曲がる金属薄膜配線のエレクトロマイグレーション" 日本機械学会 第74期通常総会講演会 講演論文集. (掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Sasagawa (Y. Honma, M. Saka and H. Abe): "Analysis of Electromigration in Angled Metal Line" Experimental/Numerical Mechanics in Electronic Packaging. 1(掲載予定). (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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