Development of new micromachining technology by laser microfabrication technique
| Project/Area Number |
08455122
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokushima |
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Principal Investigator |
MISAWA Hiroaki Univ.of Tokushima, Graduate School of Engi., Professor, 大学院・工学研究科, 教授 (30253230)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUO Shigeki Univ.of Tokushima, Faculty of Engi., Research Associate, 工学部, 助手 (20294720)
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| Project Period (FY) |
1996 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1997: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1996: ¥5,600,000 (Direct Cost: ¥5,600,000)
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| Keywords | micromachine / stereolithopraphy / photo polymer / micromachining / microstructure / forming resolution |
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| Research Abstract |
In recent years laser microfabrication utilizing stereolithography of photopolymers have been a subject of considerable interest for their ability to fabricate real three-dimentional microstructures which exhibit prospective applications on the fields such as new types of micromachine, integrated microfluid sensor and photoelectronic devices and so forth, on which conventional techniques including semiconductor IC technology suitable only for two dimensional structures have met severe difficulties.
To develop new micromachining technique satisfying real three-dimensional fabrication, we proposed stereolithography of one photon absorption process by laser microfabrication system consisting of a picosecond pulsed laser and an optical microscope, and explored that fabrication of microstructure by photopolymerization of a light curing resin. WHen the ultra violet light curing resin (Nopcocure 800) placed between two glass plates on the microscope stage was irradiated with 355nm laser pulses (-30 ps, 10Hz) within a second, a formation of resin in the vicinity of the focal spot of the laser beam was observed. Further irradiation of the focused laser pulses on the bottom glass plate resulted in a formation of a rod-shaped resin with 1 mum formation resolution. The resolution of the fabrication methodology was strongly dependent on the laser intensity and was determined by atomic force microscope. And we succeeded fabrication of a rectangular tube of 50 mum x 10 mum x 10 mum was fabricated layr by layr in Z direction with step length 0.5 mum. To testify the the spatial selection capability of structure fabrication, a rod was fabricated between the two broader sidewall. The success of fabrication was approved from SEM image. Actually, microstructures with larger aspect ratio have been fabricated without principle difficulty by the present fabrication technique.
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Report
(3 results)
Research Products
(4 results)
