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Determination of Energy Distribution of Defect State Density for Ultrathin SiO_2/Si Interfaces by Using Photoelectron Yield Spectroscopy

Research Project

Project/Area Number 08455147
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHIROSHIMA UNIVERSITY

Principal Investigator

MIYAZAKI Seiichi  Hiroshima University, Department of Electrical Engineering, Associate Professor, 工学部, 助教授 (70190759)

Co-Investigator(Kenkyū-buntansha) HIROSE Masataka  Hiroshima University, Department of Electrical Engineering, Professor, 工学部, 教授 (10034406)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1997: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1996: ¥5,400,000 (Direct Cost: ¥5,400,000)
KeywordsUltrathin SiO_2 / c-Si Interface / Photoelectron Yield Spectroscopy / Sur11face Fermi Level / Surface States Density / Valence Band State Density / Photoelectron Escape Depth / Interface State Density / Hydrogen Terminated Si Surface / 欠陥準位密度 / ケルビンプローブ / 光電子収率分光 / 表面・界面欠陥 / 界面準位 / 表面準位 / 極薄シリコン酸化膜 / 電子占有状態 / 仕事関数
Research Abstract

A system for total photoelectron yield spectroscopy (PYS) with a high sensitivity has been developed to determine the energy distribution of gap state densities for H-terminated c-Si surfaces and thermally-grown SiO_2/c-Si interfaces. The PYS system was installed in an UHV chamber for X-ray/ultraviolet excited photoelectron spectroscopy together with a Kelvin probe, which enables us to determine Fermi energy on a sample surface with an accuracy of a few meV.
1. In the PYS system, a dynamic range of eight orders of magnitude was obtained for c-Si and SiO_2/c-Si samples.
2. The threshold energies for direct and indirect photoexitations are determined by liner and cubic root plots of PYS spectra for the samples. This leads us to determine the energy position of the valence band edge on the surface independent of the amount of surface band bending.
3. On the basis of the density of states near the valence band edge obtained from the XPS valence band spectrum for c-Si, the gap state density as low as 10^<10>cm^<-2>eV^<-1> can be detected and determined from the first derivative PYS spectrum.
4. The escape depth for 5.6 eV-excited photoelectrons in SiO_2 was estimated to be 3.1nm from the yield reduction rate for the SiO_2/c-Si system.
5. There exist interface states around midgap with densities as high as -10^<12>cm^<-2>eV^<-1> in an as-grown 2.7nm-thick SiO_2/n^+Si interface. 400゚C annealing in an H_2 + N_2 gas mixture reduces the interface state density by one order of magnitude for the sample without any gate metal.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] S.Miyazaki: "Evaluation of Gap States in Hydrogen-Terminated Silicon Surfaces and Ultra-Thin SiO_2/Si Interfaces by Using Photoelectron Yield Spectroscopy" Mat.Res.Symp.Proc.500(印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Implication of Hydrogen-Induced Boron Passivation in Wet-Chemically Cleaned Si(111):H" App.Surf.Sci.117/118. 32-35 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Structure and Electronic States of Ultrathin SiO_2 Thermally Grown on Si(100) and Si(111) Surfaces" App.Surf.Sci.113/114. 585-589 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Structural Characterization of a-Si:H/a-SiC:H and SiO_2/c-Si Interfaces" Proc. of Japan-China Workshop on Thin Films. 72-79 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Electronic States of Hydrogen-Terminated Silicon Surfaces and SiO_2/Si Interfaces" Proc.of JRCAT Intern.Workshop on Sci.and Technol.of Hydrogen-Terminated Silicon Surfaces. 35-36 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Imafuku: "Organic Contamination of Silicon Wafers in Clean Room Air and Its Impact to Gate Oxide Integrity" Mat.Res.Symp.Proc.477. 101-105 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Evaluation of Gap States in Hydrogen-Terminated Silicon Surfaces and Ultrathin SiO_2/Si Interfaces by Using Photoelectron Yield Spectroscopy" Mat.Res.Soc.Symp.Proc.500 (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Implication of Hydrogen-Induced Boron Passivation in Wet-Chemically Cleaned Si (111) : H" Applied Surface Science. 117/118. 32-35 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Structure and Electronic States of Ultrathin SiO_2 Thermally Grown on Si (100) and Si (111) Surfaces" Appl.Surf.Sci.113/114. 585-589 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Structural Characterization of a-Si : H/a-SiC : H and SiO_2/c-Si Interfaces" Proc.of Japan-China Workshop on Thin Films. 72-79 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Electronic States of Hydrogen-Terminated Silicon Surfaces and SiO_2/Si Interfaces" Proc.of JRCAT Intern.Workshop on Sci.and Technol.of Hydrogen-Terminated Silicon Surfaces. 35-36 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Imafuku: "Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity" Mat.Res.Soc.Symp.Proc.vol.477. 101-105 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Miyazaki: "Evaluation of Gap States in Hydrogen-Terminated Silicon Surfaces and Ultra-thin SiO_2/Si Interfaces by Using Photoelectron Yield Spectroscopy" Mat.Res.Symp.Proc.500(印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Miyazaki: "Electronic States of Hydrogen-Terminated Silicon Surfaces and SiO_2/Si Interfaces" Proc.of JRCAT Intern. Workshop on Sci.and Technol.of Hydrogen-Terminated Silicon Surfaces. 35-36 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] D.Imafuku: "Organic Contamination of Silicon Wafers in Clean Room Air and Its Impact to Gate Oxide Integrity" Mat.Res.Symp.Proc.477. 101-105 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Seiichi Miyazaki: "Implication of Hydrogen-Induced Boron Passivation in Wet-Chemically Cleaned Si (111) : H" Appl. Surf. Sci.(1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Seiichi Miyazaki: "Structure and Electronic States of Ultrathin SiO_2 Thermally Grown on Si (100) and Si (111) Surfaces" Appl. Surf. Sci.(1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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