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Fabrication of new type transistor using metal/metaloxide/metal tunneling junction

Research Project

Project/Area Number 08455163
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionJapan Advanced Institute of Science and Technology, Hokuriku

Principal Investigator

MATSUMURA Hideki  Japan Advanced Institute of Science and Technology, Hokuriku, School of Materials Science, Professor, 材料科学研究科, 教授 (90111682)

Co-Investigator(Kenkyū-buntansha) MASUDA Atsushi  Japan Advanced Institute of Science and Technology, Hokuriku, School of Material, 材料科学研究科, 助手 (30283154)
IZUMI Akira  Japan Advanced Institute of Science and Technology, Hokuriku, School of Material, 材料科学研究科, 助手 (30223043)
Project Period (FY) 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥6,700,000 (Direct Cost: ¥6,700,000)
Fiscal Year 1996: ¥6,700,000 (Direct Cost: ¥6,700,000)
Keywordssuper-micro-technology / nano-technology / MITT / Ti / TiOx / anodic oxidation / ナノテクノリジ-
Research Abstract

A new micro transistor (metal/insulator tunnel transisor ; MITT) in which tunnel currents are controlled by a gate electrode has been already proposed. This work is to present new micro-technology to realize such micro-transistor, MITT.In the technology, nano-meter-thick TiOx grown laterally at the edge of titanium thin film is utilized to draw patterns in a mask. Formation of metal/insulator/metal structure with only 10 nm-width insulator is succeeded by this new technology.

Report

(2 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] 小野孝、藤丸幸二、松村英樹: "Tiを用いたナノ・メーター超微細加工技術の開発" 電子情報通信学会技術研究会報告. CPM96-104. 1-6 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Kouji Fujimaru and Hideki Matsumura: "Theoritical Consideration of a New Nanometer Transistor Using Metal/Insulator Tunnel-Junction" Jpn. J. Appl. Phys.35. 2090-2094 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Hideki Matsumura, Asako Fujii and Tomohiro Kitatani: "Properties of high-Mobility Cu_2O Films Prepared by Thermal Oxidation of Cu at Low Temperatures" Jpn. J. Appl. Phys.35. 5631-5636 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akira Izumi, Noriyuki Matsubara, et al.: "CdF_2/CaF_2 Resonant Tunneling Diode Fabricated on Si (111)" Jpn. J. Appl. Phys.36 (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. Masuda, K. Matsuda, Y. Yonezawa, et al.: "Mechanism of Stoichiometric Deposition for Volatile Elements in Multimetal-Oxide Films Prepared by Pulsed Laser Ablation" Jpn. J. Appl. Phys.35. L237-L240 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Nakamura, A. Masuda, A. Morimoto and T. Shimizu: "Influence of buffer layers on lead magnesium niobate titanate thin films prepared by pulsed laser ablation" Jpn. J. Appl. Phys.35. 4750-4754 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Takashi Ono, Kouji Fujimaru and Hideki Matsumura: "Development of nano-meter-size micro-technology using metal titanium" IEICE Technical Report. CPM96-104. 1-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Kouji Fujimaru and Hideki Matsumura: "Theoretical Consideration of a New Nanometer Transistor using Metal/Insulator Tunnel-Junction" Jpn.J.Appl.Phys.35. 2090-2094 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Hideki Matsumura, Asako Fujii and Tomohiro Kitatani: "Properties of high-Mobility Cu_2O Films Prepared by Thermal Oxidation of Cu at Low Temperatures" Jpn.J.Appl.Phys.35. 5631-5636 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akira Izumi, Yusuke Kushida, Kazuo Tsutsui and Nikolai S.Sokolov: "CdF_2/CaF_2 Resonant Tunneling Diode Fabricated on Si (111)" Jpn.J.Appl.Phys.36(in press). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Masuda, K,Matsuda, Y.Yonezawa, A.Morimoto and T.Shimizu: "Mechanism of Stoichiometric Deposition for Volatile Elements in Multimetal-Oxide Films Prepared by Pulsed Laser Ablation" Jpn.J.Appl.Phys.35. L237-L240 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 小野孝、藤丸幸二、松村英樹: "Tiを用いたナノ・メーター超微細加工技術の開発" 電子情報通信学会技術研究会報告. CPM96-104. 1-6 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Kouji Fujimaru and Hideki Matsumura: "Theoritical Consideration of a New Nanometer Transistor Using Metal/Insulator Tunnel-Junction" Jpn. J. Appl. Phys.35. 2090-2094 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hideki Matsunura,Asako Fujii and Tomohiro Kitatani: "Properties of high-Mobility Cu_2O Films Prepared by Thermal Oxidation of Cu at Low Temperatures" Jpn. J. Appl. Phys.35. 5631-5636 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Akira Izumi,Noriyuki Matsubara,et al.: "CdF_2/CaF_2 Resonant Tunneling Diode Fabricated on Si (III)" Jpn. J. Appl. Phys.36 (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Masuda,K. Matsuda,Y. Yonezawa,et al.: "Mechanism of Stoichiometric Deposition for Volatile Elements in Multimetal-Oxide Films Prepared by Pulsed Laser Ablation" Jpn. J. Appl. Phys.35. L237-L240 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Nakamura,A. Masuda,A. Morimoto and T. Shimizu: "Influence of buffer layers on lead magnesium niobate titanate thin films prepared by pulaed laser ablation" Jpn. J. Appl. Phys.35. 4750-4754 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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