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Surface Patterning of Aluminum Using Pulsed-YAG Laser

Research Project

Project/Area Number 08455326
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

TAKAHASHI Hideaki  Grad.School of Engineering, Hokkaido University, Pro., 大学院・工学研究科, 教授 (70002201)

Co-Investigator(Kenkyū-buntansha) SAKAIRI Masatoshi  Grad.School of Engineering, Hokkaido University, Inst., 大学院・工学研究科, 助手 (50280847)
KUROKAWA Kazuya  Grad.School of Engineering, Hokkaido University, Asso.Pro., 大学院・工学研究科, 助教授 (00161779)
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥7,000,000 (Direct Cost: ¥7,000,000)
Fiscal Year 1998: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1997: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1996: ¥4,200,000 (Direct Cost: ¥4,200,000)
KeywordsAluminum / Pulsed Nd-YAG laser / Local metal plating / Laser ablation / Surface patterning / レーザー照射 / 局部表面処理 / パタ-ニング / アノード酸化 / 局部めっき / プリント配線基板 / アノード酸化皮膜 / レーザー
Research Abstract

Aluminum specimen covered with porous anodic oxide films was irradiated with a pulsed Nd-YAG laser in solutions containing metal ions, and then electro- or electroless- plating was carried out. Fine pattern was produced on an insulating organic board by the successive processes of anodizing, laser irradiation, metal deposition, insulator gluing, and metal substrate dissolution.
The main results obtained in this investigation are in the following.
1) Reaction during laser irradiation
It was found that laser irradiation causes the anodic oxide film to be removed effectively from the substrate at the laser-irradiated area, and that the film removal can be explained in terms of the laser ablation of the metal substrate. Spot size, D, and line width, W, of laser irradiated area was examined as the functions of laser power, distance between lens and specimen, and focal length of lens, and the D and W was found to be controlled in the range 15- 500 mm.
During laser irradiation in solutions contai … More ning Pd2+, Cu2+, and Ni2+ ions, fine particles of metals, Pd, Cu, and Ni, deposited on the surface at the laser-irradiated area, and this was verified by XPS and rest potential measurements. This is due to the redox reaction between metal ions and the aluminum substrate.
2) Metal deposition after laser irradiation
During cathodic polarization of the specimen in the solution containing Cu2+ or Ni2+ ions after laser irradiation lead to the deposition of a dense layer of Cu or Ni only at the film-removed area. The current efficiency for Cu or Ni deposition was about 100 %.
Localized electroless plating of Ni-P was also accomplished at the laser-irradiated area by changing the Pb2+ ion concentration in the electroless plating solution. At the initial stage of the Ni-P electroless plating, the fine particles depositing during laser irradiation were observed to act as nuclei of Ni-P deposition. The Pd particles enhanced Ni-P deposition very much, while Cu particles did not show any effect.
3) Fine patterning on organic insulating board
By computer control, fine patterns could be drawn, using Ni and Cu deposition after laser irradiation on aluminum. The patterned specimen was glued on a glass fiber-reinforced epoxy resin board, and the metal substrate was removed by dissolution in NaOH solution. The successive processes showed a possibility of the development of a new technology in the printed wiring board manufacturing industry. Less

Report

(4 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • 1996 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 高橋英明: "レーザー照射によるアルミニウムの局部表面処理" 「最近のアルミニウム材料の表面改質と複合化技術」に関するセミナーテキスト, 軽金属学会編. 17-26 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 坂入正敏: "レーザー照射皮膜剥離によるアルミニウムアノード酸化皮膜の解析" 材料科学. 34. 275-280 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Reformation of Anodic Oxide Films on Aluminium after Destruction by Pulsed Nd-YAG Laser Trradiation" Proc.of Intern, Symp.on Passivity and Its Broabedoion, Sponsored day ECS.and ISE. 643-653 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 高橋英明: "パルスYAGレーザー照射によるアルミニウムアノード酸化皮膜の破壊と再生" 不働態皮膜の破壊と再生に関するセミナーテキスト材料学会腐食防会部門セミナー資料集. 47. 34-46 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 坂入正敏: "レーザー照射および局部めっきによるAl表面のパターニング、I. レーザー照射によるアノード酸化皮膜の破壊挙動" 表面技術. 49. 1220-1226 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 坂入正敏: "レーザー照射および局部めっきによるAl表面のパターニングII. レーザー照射部における面部めっきと微細パターン作裂" 表面技術. 49. 1227-1232 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.TAKAHASHI: "Surface Patterning of Aluminum with Laser Irrediation and Electrclsnistry" Proc.of 1st Intern Symp.on Alumionum surface Sci.and Technology. 344-349 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Z.Chu: "Local Deposition of Ni-Palloy on Aluminum by Laser Irradiation and Electorless Plating" J.Electrochem. Soc.14・6(No.2)in Press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Takahashi: "Local Surface Finishing of Aluminum with Laser Irradiation" Textbook of Seminar on the Recent Surface Modification and Composite Material of Aluminum. 17-26 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Analysis of Anodic Oxide Films on Aluminum by Laser Film Removal" Mat.Sci.Vol.34. 275-280 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Reformation of Anodic Oxide Films on Aluminum after Destruction by Pulsed Nd-YAG Laser Irradiation" Proc.of Intern.Symp on Passivity and Its Breakdown. 643-653 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Takahashi: "Destruction and Reformation of Anodic oxide Films on Aluminum with Pulsed YAG-laser Irradiation" Textbook of Seminar on Breakdown and Reformation of Passive Films. 34-46 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Patterning of Aluminum Surface with Laser Irradiation and Nickel Electrodeposition I.Removal of Anodic Oxide Films by Laser Irradiation" J.Surf.Finishing Soc.Jpn.49. 1220-1226 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Patterning of Aluminum Surface with Laser Irradiation and Nickel Electrodeposition II.Local Nickel Deposition at Laser Irradiated Area and Patterning with Fine Ni-Lines" J.Surf.Finishing Soc.Jpn.49. 1227-1232 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Takahashi: "Surface Patterning of Aluminum with Laser Irradiation and Electrochemistry" Proc.of 1^<st> Intern.Symp.on Aluminum Surface Sci.and Technology. 344-349 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Z.Chu: "Local Deposition of Ni-P alloy On aluminum by Laser Irradiation and Electroless Plating" J.Electrochem.Soc.146, No.2 (in press). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Sakairi: "Reformation of Anodic Oxide Films on Aluminum after Destruction by Pulsed-YAG Laser Irradiation" Proc.of Intern.Symp.on Passivity and Its Breakdown,Cosponsored by ECS and ISE,. 643-653 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Z.Chu: "Local Deposition of Ni-P Alloy on Aluminum by Laser Irradiation and Electroless-Plating" J.Electrochem.Soc.,. Vol 146.No2. in press (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 坂入正敏: "レーザー照射および局部めっきによるAl表面のパターニング I.レーザー照射によるアノード酸化皮膜の破壊挙動" 表面技術. 49. 1220-1226 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 坂入正敏: "レーザー照射および局部めっきによるAl表面のパターニング II.レーザー照射部における局部Niめっきと微細パターン作製" 表面技術. 49. 1227-1232 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 高橋英明: "レーザー照射によるアルミニウムアノード酸化皮膜の破壊と再生挙動" 日本材料学会腐食防食専門委員会研究集会(資料). 47. 34-46 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 坂入正敏: "レーザー皮膜剥離法によるアルミニウムアノード酸化皮膜の解析" 材料科学. 34. 275-280 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 高橋英明他4名: "レーザー照射によるアルミニウムの局部表面処理" 第21回軽金属セミナーテキスト. 17-26 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Takahashi et.al.: "Sarface Patterning of Aluminum with Laser Irrcdiation and Electrochemistry" Proc.Tntern.Symp.on Aluminum Surface Science ahd Tehnology. 344-349 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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