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Dynamical growth processes of group IV semiconducting films on the polar surfaces of compound semiconductors as assessed by RHEED rocking curve

Research Project

Project/Area Number 08455341
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionWaseda University

Principal Investigator

OSAKA Toshiaki  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (50112991)

Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥7,800,000 (Direct Cost: ¥7,800,000)
Fiscal Year 1997: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1996: ¥5,300,000 (Direct Cost: ¥5,300,000)
KeywordsRHEED / RHEED rocking curve / RHEED intensity oscillation / InSb{111}A,B- (2*2) / alpha-Sn film / surface normal atomic coordinates / dynamical growth process / 構造解析 / 表面の構造解析 / rocking-curve測定・解析
Research Abstract

Recently, growth mode of the (111) surface of group-IV semiconductors has generated great interest. However, little work has been reported on the growth fashion on the {111} polar surfaces of III-V compound semiconductors. The purpose of this work is (i) to determine the surface normal components of atomic coordinated of InSb {111} A,B- (2*2) and (ii) to study dynamical growth processes of alpha-Sn films on these surfaces by using reflection high-energy electron diffraction (RHEED). Main results are given as follows :
(i) By the quantitative analysis of RHEED rocking curves based on the dynamical diffraction theory, we have determined the surface normal atomic coordinates of the InSb {111} A,B- (2*2) surfaces which have the In-vacancy bucking structure and the Sb-trimer structure, respectively. The surface In atoms of InSb (111) A- (2*2) exhibit a large inward relaxation (-0.8). The analysis of InSb (111) B- (2*2), on the other hand, has revealed that the Sb-trimer is located at a height of -2.8 above the substrate Sb atoms, and that the prominent relaxation occurs in the subsurface region beneath the Sb-trimer.
(ii) Surfaces of Sn growing on InSb {111} A,B has been studied with use of the RHEED intensity oscillation technique. The surfaces proceed in the formation of a bilayred lattice in the whole range of film thickness. However, the geometry of the outermost surface layr is quite different in both systems : The growing surface on the InSb (111) A smoothens with the same period as the lattice formation, whereas on InSb (111) B,below and above 6 ML of Sn, smooth surfaces emerge every period of monolayr and bilayr, respectively. The monolayr-period change in surface geometry is attributed to Sb segregation on the growing surface.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] Jun Nakamura: "s-Character of MX_4(M=C,Si,GE,X=F,Cl,Br,I)Molecules" Journal of the Physical Society of Japan. 66. 1656-1659 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "Structural stability and its electronic origin of the GaAs(111)A-2×2surface" Applied Surface Science. 121/122. 249-252 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "Nucleation of Au on KCl(001)" Surface Science. 389. 109-115 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Toyoaki Eguchi: "Structure and electronic state of the a-Sn(111)-(2×2)surface" Journal of the Physical Society of Japan. 67. 381-384 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tetsuya Mishima: "Profile-imaging of the InSb{111}A,B-2×2Surfaces" Surface Science. in press. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masayasu Nishizawa: "Structure of the InSb(111)A-(2√3×2√3)-R30° surface and its dynamical formation processes" Physical Review B. in press. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "s-Character of MX_4 (M=C,Si, Ge, X=F,Cl, Br, I) Molecules" Journal of the Physical Society of Japan. 66. 1656-1659 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "Structural stability and its electronic origin of the GaAs (111) A-2*2 surface" Applied Surface Science. 121/122. 249-252 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "Nucleation of Au on KCl (001)" Surface Science. 389. 109-115 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Toyoaki Eguchi: "Structure and electronic state of the alpha-Sn (111) - (2*2) surface" Journal of the Physical Society of Japan. 67. 381-384 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tetsuya Mishima: "Profile-imaging of the InSb{111}A,B-2*2 surfaces" Surface Science. 395. L256-L260 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masayasu Nishizawa: "Structure of the InSb (111) A- (2ROO<3>*2ROO<3>) -R30゚ surface and its dynamical formation processes" Physical Review. B (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jun Nakamura: "s-Character of MX_4 (M=C, Si, Ge, X=F, Cl, Br, I) Molecules" Journal of the Physical Society of Japan. 66. 1656-1659 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Jun Nakamura: "Structural stability and its electronic origin of the GaAs(111)A-2×2 surface" Applied Surface Science. 121/122. 249-252 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Jun Nakamura: "Nucleation of Au on KCl(001)" Surface Science. 389. 109-115 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Toyoaki Eguchi: "Structure and electronic state of the α-Sn(111)-(2×2) surface" Journal of the Physical Society of Japan. 67. 381-384 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Tetsuya Mishima: "Profile-imaging of the InSb{111}A,B-2×2 surfaces" Surface Science. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Masayasu Nishizawa: "Structure of the InSb(111)A-(2√3×2√3)-R30° surface and its dynamical formation processes" Physical Review B. (in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Jun Nakamura: "Surfactant-induced bond strengthening in as-grown film surfaces" Jpn.J.Appl.Phys.35. L441-L443 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Akihiro Ohtake: "Geometry and lattice formation of surface layers of Sn growing on InSb{111}A,B" Phys.Rev.B. 54. 10358-10361 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Jun Nakamura: "Structural stability and its electronic origin of the GaAs(111)A-2×2 surface" Appl.Surf.Sci.(in press).

    • Related Report
      1996 Annual Research Report
  • [Publications] Masayasu Nishizawa: "STM study of the InSb(111)A-(2×6) surface" Appl.Surf.Sci.(in press).

    • Related Report
      1996 Annual Research Report
  • [Publications] Akihiro Ohtake: "Initial growth processes of Ag on polar and non-polar semiconductor substrates" Surf.Sci.Lett.(in press).

    • Related Report
      1996 Annual Research Report
  • [Publications] 中村淳: "Ge/Si(111)-Sb系表面変性エピタキシ-" メディアネットワークセンター紀要(早稲田大学). (印刷中).

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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