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Fabnication of Superconductor/Insulator/Superconductor Trilayer Tunnel Junction Devices by Atomic Layer MOCVD

Research Project

Project/Area Number 08555004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied materials science/Crystal engineering
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

ODA Shunri  TOKYO INSTITUTE OF TECHNOLOGY,RESEARCH CENTER FOR QUANTUM EFFECT ELECTRONICS,PROFESSOR, 量子効果エレクトロニクス研究センター, 教授 (50126314)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Jiro  TOSHIBA,RESEARCH AND DEVELOPMENT CENTER,PRINCIPLAL RESEARCHER, 研究開発センター・基礎研究所, 研究主幹
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 1998: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1997: ¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 1996: ¥7,000,000 (Direct Cost: ¥7,000,000)
KeywordsOxide Superconductors / Superconducting Devices / MOCVD / Atomic Layer Epitaxy / Josephson Junction / Resonant Tunneling / Localized States / In Situ Ellipsometry
Research Abstract

1. Ultrathin films of oxide superconductors and insulator heterostructures were prepared by the atomic layer metalorganic chemical vapor deposition method. Reproducibility of thinfilms fabrication was enhanced by using in situ monitoring based on ultrasonic transducers and spectroscopic ellipsometry.
2. Superconducting field effect was enhanced by the combination of Josephson junctions and planar type devices.
3. Anomolous current voltage characteristics due to intrinsic Josephson junctions were observed in YBCO thinfilm devices fabricated by scanning probe microscopy lithography. IcRn product value of 2.5mV were obtained at 5K.
4. Two possible approaches for realizing overdamped Josephson junctions with a high IcRn product value were investigated. The use of an superconductor-insulator-superconductor structure with a shunt resistor that was formed by quasiparticle current paths via localized states in the tunnel bamer was concluded to be more promising than the use of an superconductor-normal metal-superconductor structure. The physical nature of localized states in PrBa2Cu3O7 (PBCO) and its relevance to transport properties were fully clarified. Ramp-edge-type junctions with a Co-doped PBCO barrier ranging from 6 nm to 10 nm in thickness exhibited excellent Josephson characteristics, and the maximum IcRn product value exceeding 2 mV at 4.2 K has been realized. Preliminary single-flux-quantum logic circuits including an RS- flip flop and a frequency divider have been fabricated and tested. The frequency divider circuit utilizing ramp-edge-type Josephson junctions with a buried groundplane was confirmed to operate correctly up to 200 GHz in frequency at 12 K.

Report

(4 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • 1996 Annual Research Report
  • Research Products

    (67 results)

All Other

All Publications (67 results)

  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: "Preparation of Thin Films of YBa2Cu30x with a Smooth Surface by Atomic Layer MOCVD" Mat.Sci.Eng.B. B41. 87-92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Nagano, and T.Hashimoto: "Current transport and electronic states in a, b-axis oriented YBa2Cu3O7/PrBa2Cu3O7/YBa2Cu3O7 sandwich type junctions" Phys.Rev.B. 54,13. 8623-8631 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Nagano, T.Hashimoto, and J.Yoshida: "A-axis oriented YBa2Cu3Oy thin film grown on novel buffer layers" Physica C. 265,3&4. 214-227 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Hashimoto, and T.Nagano: "Transport processes in b-axis oriented PrBa2Cu3Ox thin films" Czech.J.Physics. 46,S3. 1309-1310 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki and S.Oda: "Proposal of coplanar-type high-Tc superconducting field-effect devices" Physica C. 282-287. 2495-2496 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, A.Kawaguchi, K.Nagata, T.Hattori and S.Oda: "Atomic layer-by-layer epitaxy of oxide superconductors by MOCVD" Applied Surface Science. 112. 30-37 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, T.Watanabe and S.Oda: "Junction Formation in YBaCuO Thin Films bu Scanning Probe" J.Low.Temp.Phys. 106. 423-432 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Oda: "Growth Mechanism of YBOO thin films by MOCVD" Int.Workshop on Superconductivity. 37-42 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: "Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography" Physica C. 293. 244-248 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki and S.Oda: "Fabrication of Coplanar-type High-Tc Superconducting Field-Effect Devices" 5th Int.Workshop on High-Temperature Superconducting Electron Devices. 199-201 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida and T.Nagano: "Tunneling and hopping conduction via localized states in thin PrBa2Cu3O7-x barriers" Phys.Rev.B. 55. 11860-11871 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: "Characterization of localized states in thin PrBa2Cu3O7-x tunnel barriers" J.Low Temp.Phys.106,3/4. 327-332 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 吉田二朗: "全酸化物超電導論理回路技術" 東芝レビュー. 52,5. 98-99 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki, H.Tobisaka and S.Oda: "Electric Properties of Coplanar High-Tc Superconducting Field Effect Devices" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki, S.Sugai and S.Oda: "Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Nagano, S.Inoue, T.Hashimoto and J.Yoshida: "Interface fabrication of YBa2Cu3Oy ramp-edge junctions with PrBa2 (Cu1-xCox) Oy barrier layer in enhanced oxidizing atmosphere" Physica C. 303,3/4. 231-245 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 吉田二朗: "高温超電導デバイス技術" 東芝レビュー. 53,1. 61-64 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 吉田二朗: "単一磁束量子素子を用いた論理回路技術" 応用物理. 67,4. 410-416 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 吉田二朗: "デバイス化のための薄膜積層技術" 電気学会誌. 118,12. 765-767 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida: "Design and fabrication of a voltage divider utilizing high-Tc ramp-edge Josephson junctions with a ground plane T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida" IEEE Trans.Appl.Supercond. in press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, S.Inoue, T.Hashimoto and T.Nagano: "Characterization of ramp-type Josephson junctions with a Co-doped PrBaCuO barrier" IEEE Trans.Appl.Supercond.in press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Oda, S.Yamamoto, Z.Wang, H.Tobisaka and K.Nagata: "High-Temperature Superconductors and Novel Inorganic Materials, NATO ASI Series 3 vol.62 (eds.by G.Van Tendeloo, EV.Antipov and S.N.Putilin, Kluwer Academic, Dordorecht)" Atomic Layer MOCVD of Oxide Superconductors and Dielectrics, (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: ""Preparation of Thin Films of YBa2Cu30x with a Smooth Surface by Atomic Layer MOCVD"" Mat.Sci.Eng.B. 41. 87-92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: ""Current transport and electronic states in a, b-axis-oriented YBa2Cu3O7/PrBa2Cu3O7/YBa2Cu3O7 sandwich type junctions"" Phys.Rev.B. 53-13. 8623-8631 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Nagano, T.Hashimoto and J.Yoshida: ""A-axis orineted YBa2Cu3Oy thin film grown on novel buffer layers"" Physica C. 265-3&4. 214-227 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Hashimoto and T.Nagano: ""Transport processes in b-axis oriented PrBa2Cu3O7-x thin films"" Czech.J.Physics.46-Suppl.S3. 1309-1310 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, A.Kawaguchi, K.Nagata, T.Hattori and S.Oda: ""Atomic layer-by-layer epitaxy of oxide superconductors by MOCVD"" Applied Surface Science. 112. 30-37 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, T.Watanabe and S.Oda: ""Junction Formation in YBaCuO Thin Films by Scanning Probe"" J.Low.Temp.Phys.106. 423-432 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki and S.Oda: ""Proposal of coplanar-type high-Tc superconducting field-effect devices"" Physica C. 282-287. 2495-2496 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: ""Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography"" Physica C. 293. 244-248 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: ""Characterization of localized states in thin PrBa2Cu3O7-x tunnel barriers"" J.Low Temp.Phys.106-3/4. 327-332 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida and T.Nagano: ""Tunneling and hopping conduction via localized states in thin PrBa2Cu3O7-x barriers"" Phys.Rev.B. 55-17. 11860-11871 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki, H.Tobisaka and S.Oda: ""Electric Properties of Coplanar High-Tc Superconducting Field^Effect Devices"" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki, S.Sugai and S.Oda: ""Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions"" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Nagano, S.Inoue, T.Hashimoto and J.Yoshida: ""Interface fabrication of YBa2Cu3Oy ramp-edge junctions with PrBa2(Cu1-xCox)Oy barrier layer in enhanced oxidizing atmosphere"" Physica C. 303-3&4. 231-245 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida: ""Design and fabrication of a voltage divider utilizing high-Tc ramp-edge Josephson junctions with a ground plane"" IEEE Trans.Appl.Supercond.(to be published). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] J.Yoshida, S.Inoue, T.Hashimoto and T.Nagano: ""Characterization of ramp-type Josephson junctions with a Co-doped PrBaCuO barrier"" IEEE Trans.Appl.Supercond.(to be published). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Oda, S.Yamamoto, Z.Wang, H.Tobisaka and K.Nagata: ""Atomic Layer MOCVD of Oxide Superconductors and Dielectrics"" High-Temperature Superconductors and Novel Inorganic Materials, NATO ASI Series 3 vol.62 (eds.by G.Van Tendeloo, E.V.Antipov and S.N.Putilin, Kluwer Academic, Dordorecht). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Suzuki,H.Tobisaka and S.Oda: "Electric Properties of Coplanar High-Tc Superconducting Field^Effect Devices" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Z.Wang and S.Oda: "Atomic Layer-by-Layer Metal-Organic Chemical Vapor Deposition of SrTiO3 Films with a Very smooth Surface" Japanese Journal of Applied Physics. 37. 942-947 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Suzuki,S.Sugai and S.Oda: "Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Nagano,S.Inoue,T.Hashimoto and J.Yoshida: "Interface fabrication of YBa2Cu3Oy ramp-edge junctions with PrBa2(Cu1-xCox)Oy barrier layer in enhanced oxidizing atmosphere" Physica C. 303. 231-245 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田二朗: "高温超電導デバイス技術" 東芝レビュー. 53. 61-64 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田二朗: "単一磁束量子素子を用いた論理回路技術" 応用物理. 67. 410-416 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 吉田二朗: "デバイス化のための薄膜積層技術" 電気学会誌. 118. 765-767 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Hashimoto,S.Inoue,T.Nagano and J.Yoshida: "Design and fabrication of a voltage divider utilizing high-Tc ramp-edge Josephson junctions with a ground plane" IEEE Trans.Appl.Supercond.(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Yoshida,S.Inoue,T.Hashimoto and T.Nagano: "Characterization of ramp-type Josephson junctions with a Co-doped PrBaCuO barrier" IEEE Trans.Appl.Supercond.(in press). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Oda et al: "High-Temperature Superconductors and Novel Inorganic Materials,NATO ASI Series 3 vol.62(eds.by G.Van Tendeloo,E.V.Antipov and S.N.Putilin,Kluwer Academic,Dordorecht)" Atomic Layer MOCVD of Oxide Superconductors and Dielectrics, 75-78 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] S. Suzuki and S. Oda: "Proposal of coplanar-type high-Tc superconductingfield-effect devices" Physica C. 282-287. 2495-2496 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Yamamoto, A.Kawaguchi, K.Nagata, T.Hattori and S.Oda: "Atomiclayer-by-layer epitaxy of oxide superconductors by MOCVD" Applied Surface Science. 112. 30-37 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Yamamoto, T.Watanabe and S.Oda: "Junction Formation in YBaCuO Thin Films bu Scanning Probe" J. Low. Temp. Phys. 106. 423-432 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S. Oda: "Growth Mechanism of YBCO thinfilms by MOCVD" Int. Workshop on Superconductivity. 37-42 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: "Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography" Physica C. 293. 244-248 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S. Suzuki and S. Oda: "Fabrication of Coplanar-type High-Tc Superconducting Field-Effect Devices" 5th Int. Workshop on High-Temperature Superconducting Electron Devices. 199-201 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Suzuki, H.Tobisaka and S.Oda: "Electric Properties of Coplanar High-Tc Superconducting Field Effect Devices" Japanese Journal of Applied Physics. 37(in press). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] J. Yoshida and T. Nagano: "Tunneling and hopping conductionvia localized states in thin PrBa2Cu307-x barriers" Phys. Rev. B. 55. 11860-11871 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Yamamoto,A.Kawaguchi,K.Nagata,T.Hattori and S.Oda: "Atomiclayer-by-layer epitaxy of oxide superconductors by MOCVD" Applied Surface Science. (in press). (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Yamamoto,T.Watanabe and S.Oda: "Junction Formation in YBaCuO Thin Films bu Scanning Probe" J.Low.Temp.Phys. (in press). (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Yamamoto,A.Kawaguchi and S.Oda: "Preparation of Thin Films of YBa2Cu30x with a Smooth Surface by Atomic Layer MOCVD" Mat.Sci.Eng.B. B41. 87-92 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Oda: "Atomiclayer-by-layer MOCVD of thinfilme of Oxide superconductors" Int.Workshop on Chemical Designing and Processing of High-Tc Superconductors11. (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Suzuki and S.Oda: "Proposal of coplanar-type high-Tc superconducting field-effect devices" Physica C. (in press). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Yamamoto,A.Kawaguchi and S.Oda: "Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography" Int.Symp.Intrinsic Josephson Effect and THz Plasma Oscillations in High Tc Superconductors. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Yoshida,T.Nagano,and T.Hashimoto: "Current transport and electronic statesin a,b-axis oriented YBa2Cu3O7/PrBa2Cu3O7/YBa2Cu3O7 sandwich type junctions" Phys.Rev.B. 54,13. 8623-8631 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Nagano,T.Hashimoto,and J.Yoshida: "A-axis oriented YBa2Cu30y thin film grown on novel buffer layers" Physica C. 265,3&4. 214-227 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Yoshida,T.Hashimoto,and T.Nagano: "Transport processes in b-axis oriented PrBa2Cu30x thin films" Czech.J.Physics. 46,S3. 1309-1310 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Yoshida,T.Nagano and T.Hashimoto: "Characterization of localized statesin thin PrBa2Cu3O7-x tunnel barriers" J.Low Temp.Phys.(in press).

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Yoshida and T.Nagano: "Tunneling and hopping conduction via localized states in thin PrBa2Cu3O7-x barriers" Phys.Rev.B. (in press).

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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