| Project/Area Number |
08555007
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
表面界面物性
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| Research Institution | Sophia University (1997)
The University of Tokyo (1996) |
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Principal Investigator |
SAKAMOTO Hiroshi Sophia University Faculty of Science and Technology Associated Professor, 理工学部, 助教授 (10242017)
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| Co-Investigator(Kenkyū-buntansha) |
KAWAZU Akira The University of Tokyo School of Engineering Professor, 大学院・工学系研究科, 教授 (20010796)
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| Project Period (FY) |
1996 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥8,700,000 (Direct Cost: ¥8,700,000)
Fiscal Year 1997: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1996: ¥8,000,000 (Direct Cost: ¥8,000,000)
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| Keywords | micro-beam / spin-polarization / scanning electron microscope |
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| Research Abstract |
First, the spin-polarized electron detecter was produced. The spin-polarized eiectron detecter is low-energy electron diffraction (LEED)-type, because it is small and cheap. The spin-polarized electron detecter was mainly composed of multichannel plate (MCP) and position sensitive detector. They were supported by four stainless steel rods, which were fixed at oneof vacuum franges. The spin-polarized electron detecter was attached to a small ultrahigh vacuum chamber. This chamber was pumped with turbomolecular pump, sputter ion pump and titanium sublimation pump. After this, the mormal performance of the spin-polarized electron detecter was confirmed under ultrahigh vacuum. Second, the other large ultrahigh vacuum chamber was manifuctured for holding samples and sample treatment (cleaning, vacuum deposition of metal thin-film etc.). The mu-metal plates of 2mm-thickness for magnetic shielding were placed inside the chamber in order to prevent the ray of secondary electrons from bending. The sample holder with faculties of three-dimensional linear motion and rotation of samples was also produced. Third, electrostatic lenses and CMA-type electron energy analyzer for focusing and energetically-resolving secondary electrons were designed and made. Almost all (>90%) of secondary electrons emitted from the sample can be detected with the electrostatic lenses and CMA-type electron energy analyzer.
Finally, two ultrahigh vacuum chambers were connected and pumped. A electron gun for TV was placed at the sample position in place of the sample. Thermelly-emitted electrons from this gun were introduced into electrostatic lense system and the efficiencies of electrostatic lense system and spin-polarized electron detecter were evaluated.
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