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New Assembly Technique of Three Dimensional Micro-structure by YAG Laser Beam

Research Project

Project/Area Number 08555035
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 機械工作・生産工学
Research InstitutionTOYOHASHI UNIVERSITY OF TECHNOLOGY

Principal Investigator

IKENO Junichi  TOYOHASHI UNIV.Technology, Manufacturing center, Lecturer, 工作センター, 講師 (10184441)

Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 1997: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1996: ¥5,700,000 (Direct Cost: ¥5,700,000)
KeywordsMicro-assembly / Micro-machining / Laser trapping / Fine particle / Optical levitation / YAG laser / Gradient of radiation force / Ultra-precision machining
Research Abstract

The focus of this study is on a newly developed micro-assembly technique by YAG laser beam. Silica fine particle is levitated and can be trapped along optical axis in the air, as it on soda glass plate is irradiated single-beam from upper. The levitation and the trapping in the air are discovered for the first time. Furthermore, we find out that a occurrence of the levitation is caused by some other unknown factors besides gradient of radiation force. The trapped particle can be manipulated in fully three dimensional orientation. This new 3D-manipulation technique is expected to be an effective handling technique for micro-assembly in the future. Hence assembling of a micro-structure, which is constructed by fine particles, is verified with the presented technique. In present technique, particles can be assembled in horizontal and vertical direction. Based on the horizontal and vertical assembly capability, 3D micro-structure like tetrahedron and so on, can be created.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] 沢木 大輔: "レーザ光線による微粒子の操作とその応用に関する研究(第5報)" 精密工学会学術講演論文集. 479-480 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 沢木 大輔: "同上(第6報)" 同上. 481-482 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森 幸博: "同上(第7報)" 同上. 1123-1124 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 沢木 大輔: "同上(第8報)" 同上. 1125-1126 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森 幸博: "同上(第9報)" 同上. 360-360 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森 幸博: "同上(第10報)" 同上. 564-564 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 池野 順一: "CMPのサイエンス" (株)サイエンスフォーラム, 373 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 池野 順一: "精密加工の最先端技術" 工業調査会, 329 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Sawaki, J.Ikeno, Y.Mori, O,Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 5th report, -Assembly of fine particles in Air-" Proceeding of JSPE. 479-480 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Sawaki, J.Ikeno, Y.Mori, O,Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 6th report, -Manipulation of Ultra fine particles-" Proceeding of JSPE. 481-482 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Mori, J.Ikeno, D.Sawaki, O.Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 7th report, -Micro-structure Tempered by Bonding Agent-" Proceeding of JSPE. 1123-1124 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Sawaki, J.Ikeno, Y.Mori, O,Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 8th report, -Arrangement and Motion Control of fine particles-" Proceeding of JSPE. 1125-1126 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Sawaki, Y.Mori, M.Yamamoto, J.Ikeno, O.Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 9th report, -Elucidation of Levitation-" Proceeding of JSPE. 360. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Mori, J.Ikeno, O.Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 10th report, -Effect of Objects on manipulation of a fine particl-" Proceeding of JSPE. 564. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] D.Sawaki, J.Ikeno, O.Horiuchi: "Study on a manipulation of fine particles by laser beam and the applications, 11th report, -3 Dementional manipulation of fine particles in Air-" Proceeding of JSPE. 565. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 澤木大輔: "レーザ光線による微粒子の操作とその応用に関する研究(第5報)〜空中における微粒子の組立〜" 精密工学会学術講演論文集. 479-480 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 澤木大輔: "レーザ光線による微粒子の操作とその応用に関する研究(第6報)〜超微粒子の操作〜" 精密工学会学術講演論文集. 481-482 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 森幸博: "レーザ光線による微粒子の操作とその応用に関する研究(第7報)〜接着剤を用いた微粒子の3次元組立〜" 精密工学会学術講演論文集. 1123-1124 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 澤木大輔: "レーザ光線による微粒子の操作とその応用に関する研究(第8報)〜定点配列と運動制御〜" 精密工学会学術講演論文集. 1125-1126 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 森幸博: "レーザ光線による微粒子の操作とその応用に関する研究(第9報)〜浮上現象の解明〜" 精密工学会学術講演論文集. 360 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 池野 順一: "結晶化ガラスのYAGレーザ加工〜クラックフリー・3次元加工法の開発〜" 精密工学会学術講演論文集. 232 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 柏木 正弘: "CMPのサイエンス" (株)サイエンスフォーラム, 373 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 池野順一 他2: "レーザ光線による微粒子の操作とその応用に関する研究(第3報)" 精密工学会講演論文集. 703-704 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 池野順一 他2: "レーザ光線による微粒子の操作とその応用に関する研究(第4報)" 精密工学会講演論文集. 705-706 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 澤木大輔 他3: "レーザ光線による微粒子の操作とその応用に関する研究(第5報)" 精密工学会講演論文集. 479-480 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 澤木大輔 他3: "レーザ光線による微粒子の操作とその応用に関する研究(第6報)" 精密工学会講演論文集. 481-482 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 森 幸博 他3: "レーザ光線による微粒子の操作とその応用に関する研究(第7報)" 精密工学会講演論文集. (予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 澤木大輔 他3: "レーザ光線による微粒子の操作とその応用に関する研究(第8報)" 精密工学会講演論文集. (予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 日本学術振興会第136委員会編: "精密加工の最先端技術" 工業調査会, 329 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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