| Project/Area Number |
08555038
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
機械工作・生産工学
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| Research Institution | KYUSHU INSTITUTE OF TECHNOLOGY |
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Principal Investigator |
NAKASHIMA Katuhiro KYUSHU INSTITUTE OF TECHNOLOGY,Engineering, PROFESSOR, 工学部, 教授 (30093967)
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| Co-Investigator(Kenkyū-buntansha) |
TAMARU Yuuma KYUSHU INSTITUTE OF TECHNOLOGY,Engineering, RESERCH ASSOSIATE, 工学部, 助手 (30284590)
TAKAFUJI Kazuki KYUSHU INSTITUTE OF TECHNOLOGY,Engineering, LECTURER, 工学部, 講師 (20128119)
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| Project Period (FY) |
1996 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1997: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1996: ¥2,500,000 (Direct Cost: ¥2,500,000)
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| Keywords | ULTRAFINE FEEDING / LONG STROKE / COARSE AND FINE FEEDING / BALL SCREW / SLIDING SCREW / DOUBLE NUT / PRELOAD CHANGE / PIEZOELECTRIC ELEMENT / 台形ねじ |
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| Research Abstract |
A simple method for ultraprecision positioning of nanometer order over long stroke is developed. As the feeding element, the ordinary lead screw is adopted. Tte Purpose of ultraprecision positioning is realized by combining coarse and fine feed on the same lead screw. The coarse positioning is perfomed with regular screw motion and the fine feed utilize the defomations of threads and screw, nut body followed by preload change in the preloaded double nuts of lead screw. Because of this fine feed is independent of thread friction, in the feed mechanism we can use not only the ball screw but also the sliding screw which is considered unsuitable for fine positioning due to high friction.
Theoretical displacement calculated from the screw thread defomation analysis is the order of nanometer with preload change of 1N,and both of feed resolution and range of fine feed can be controled widely with the spacing part stiffness. The experimental results obtained by the feed unit developed here show the coincidence of nut and table displacement, and there exist no hysteresis or lost motion, and fine feed is not also influenced by the table load.
On the fine feed system, the control by preload change is adopted based on one to one correspondence of preload and displacement, and this is very effective to avoid the unreliability of unstable measured values by position sensor in nanometer region. The minimum step feed obtained here is 1nm for sliding screw and 5nm for ban screw.
As the application of this method, the vertical feed unit attached the diamond tip on its end side is installed and it is useful for nanoindenter up to the depth of 500nm.
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