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Development of Low-Fregnency Induction Thermal Plasma for Cluster Synthesis

Research Project

Project/Area Number 08555067
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 電力工学・電気機器工学
Research InstitutionKanazawa University

Principal Investigator

SAKUTA Tadahiro  KANAZAWA UNIVERSITY DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING PROFESSOR, 工学部, 教授 (80135318)

Co-Investigator(Kenkyū-buntansha) MIYAMOTO Masahiro  FUJI ELECTRIC CORPORATE RESEARCH AND DEVELOPMENT,LTD POWER ENGINEERING DEVELOPME, 課長
TAKIKAWA Horoshi  TOYOHASHI UNIVERSITY OF TECHNOLOGY DEPARTMENT OF ELECTRICAL AND ELECTRONIC ENGIN, 工学部, 助教授 (90226952)
TANAKA Yasunori  KANAZAWA UNIVERSITY DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING RESEARCH A, 工学部, 助手 (90303263)
榊原 建樹  豊橋技術科学大学, 工学部, 教授 (10023243)
Project Period (FY) 1996 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥12,100,000 (Direct Cost: ¥12,100,000)
Fiscal Year 1998: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1997: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1996: ¥6,000,000 (Direct Cost: ¥6,000,000)
KeywordsWide Area Plasma / Plasma Processing / Induction Plasma / High Rate Processing / Inverter / Cluster / Fullerene / 高速プロセミング / 熱プラズマプロセシング / 均一プロセシング
Research Abstract

In the third and final year of the project, 1998, a wide area induction plasma was successively generated by using MOSFET inverter power supply with a low frequency of 450 kHz and a power of 50 kW.The reaction area of the plasma is as wide as 150-mm diameter and 150-mm length, which enable us the high speed processing or synthesis of materials. C_<60> fullurene synthesis was carried out by using Ar, He and CO_2 induction thermal plasmas. Remarkable results are as follows.
1) The transistor inverter supply was found to be useful to establish the inductively coupled plasma with a frequency of 450 kHz. At a power level of 30kW, several kinds of plasma can be generated in Ar, He and CO2 gas circumstance. The CO2 plasma was found to have relatively high temperature around 10,000 K compared to Ar and He plasma.
2) These induction thermal plasmas were sufficiently stable for the injection of cold carbon powders up to a rate of 10 g/min, which is high enough quantity to produce the C_<60> cluster with a high rate.
3) Among the experiments carried out under several conditions with respects to the gas sort, pressure and the power of plasma, Ar/He noble gas plasma showed the most highest C_<60> synthesis rate, while the dissociative CO_2 gas plasma showed no synthesis of C_<60>. The results indicate that a strong quenching effect of the radical C atom and C_2 molecule is essential for the synthesis of such high order fullurene materials.

Report

(4 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • 1996 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] 作田,田中,香月,石垣: "パルス変調された高周波誘導熱プラズマの発生" 日本金属学会誌. 63-1. 2-8 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.T〓ika,M.Takahashi,K.C.Paul,T.Sakuta: "Transport Thermariynamic Properties of N_2/O_2 Matures it Different Admixture Ratio" International Workshop on High Voltage Engineering IWHV99. I. 103-108 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sakata,K.C.Paul,S.Hata〓a,M.Takahashi,Y.Tanaka: "Spectroscopic.Meascuremants of SF_6 and N_2 Induction Plasmas at Atmospheric Pressure" International Workshop on High Voltage Engineering IWHV99. I. 109-114 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 田中,作田: "化学非平衡モデルによる誘導SF_6熱プラズマの過波解約" 電気学会放電研究会 資料. 1. 29-34 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.C.Paul,T.Takoshima,T.Sakuta: "Coppey Vapor Effect on RF Inductively Coupled SF_6 Plasmas" IEEE Trans, on Plasma Sci. 26-3. 1000-1009 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sakuta, Y.tanaka, M.Katsuki, T.Ishigaki: "Generation of inductively coupled thermal plasma with pulse modulated mode." J.Japan Inst.Metals.Vol.63, No.1. 2-8 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Tanaka, M.Takahashi, K.C.Paul: "T,Sakuta, Transport and Thermodynamic Properties of N2/O2 Mixtures at Different Admixture Ratio" International Workshop on High Voltage Engineering IWHV99. Vol.I. 103-108 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sakuta, K.C.Paul, S.Hatazawa, M.Takahashi, Y.Tanaka: "Spectroscopic Measurements of SF6 and N2 Induction Plasmas at Atmospheric Pressure" International Workshop on High Voltage Engineering IWHV99. Vol.I. 103-108 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Tanaka and T.Sakuta: "Numerical Analysis on Transient Behavior of Induction SF6 Thermal Plasma by Non-Chemical Equilibrium Model" IEEJ Workshop. ED-98-232. 29-34 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.C.Paul, T.Takashima, T.Sakuta: "Copper Vapor Effect on RF Inductively Coulped SF6 Plasmas" IEEE Trans. On Plasma Sci.Vol.26, No.3. 1000-1009 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 作田,田中,香月,石垣: "パルス変調された高周波誘導熱プラズマの発生" 日本金属学会誌. 63-1. 2-8 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Tanaka,M.Takahasi,K.C.Paul,T.Sakuta: "Transport and Thermodynamic Properties of N_2/O_2 Mixtures at Different Admixture Ratio" International Workshop on High Voltage Engineering IWHV'99. I. 103-108 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Sakuta,K.C.Paul,S.Hatazawa,M.Takahashi,Y.Tanaka: "Spectroscopic Measurements of SF_6 and N_2 Induction Plasmas at Atmospheric Pressure" International Workshop on High Voltage Engineering IWHV'99. I. 109-114 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 田中,作田: "化学非平衡モデルによる誘導SF_6熱プラズマの過渡解析" 電気学会 放電研究会資料. 1. 29-34 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.C.Paul,T.Takashima,T.Sakuta: "Copper Vapor Effect on RF Inductively Coupled SF_6 Plasmas" IEEE Trans,on Plasma Sci. 26-3. 1000-1009 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 宮本昌弘, 作田忠裕他: "50kHz磁界による大口径誘導熱プラズマの発生" 電気学会論文誌B. Vol.117-B. 671-678 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.C.Paul, T.Sakuta: "Transport and Thermodynamic Properties of SF_6 Gas Contaminated by PTFE reinforced with Al_2O_3 and BN Particles" IEEE Trans.on Plasma Science. Vol.25. 786-798 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Sakuta 他: "Generation of 50-kHz Large Area Induction Therinal Plasma for High Rate,Vniform Processing" IEEE Trans. on Plasma Science. Vol.25. 1029-1033 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Sakuta 他: "Generation of Large Area He/CO_2 Induction Plasma for C_<60> Fullerene Synthesis" 1st Asia-Pacific Int.Symp.Basic and Appl.of Plasma Tech. 55-58 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Ishigaki, T.Sakuta 他: "Generation of Pulse-modulated Induction thermol Plasma at atmospheric pressure" Appl.Phys.Lett.71. 3787-3789 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] J.Mostaghimi, T.Sakuta 他: "Transient response of the radio frequency inductively coupled Plasma to a sudden change in power" J.of Applied Physics. 83. 1898-1908 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Sakuta: "Dynamic behavior and stability of induction thermal plasma" Proc.3rd Asia Pacific Conf.on Plasma Chemistry. vol.2. 385-392 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 番匠俊行,作田忠裕 他: "パルス状電磁界を印加した誘導熱プラズマの解析" 電気学会開閉保護・高電圧合同研究会. SP-96-31. 45-54 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中田隆雄,作田忠裕 他: "SF_6誘導プラズマの分光観測" 電気学会開閉保護・高電圧合同研究会. SP-96-33. 63-72 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 作田忠裕,西田友佐 他: "フラーレン生成用大口径誘導プラズマの発生と分光観測" 電気学会開閉保護・高電圧合同研究会. SP-96-76. 141-149 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.C.Paul,T.Sakuta 他: "The dynamic behavior of wall-stabilized SF_6 arcs contaminated by Cu and PTFE vapours" J,Phys.D : Applied Physics. 30. 103-112 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 宮本昌弘,作田忠裕 他: "50kHz磁界による大口径誘導熱プラズマの発生" 電気学会論文誌B. (1997.5月掲載決定). (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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