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New Functional Transparent Conducting Thin Films using Multicomponent Oxides

Research Project

Project/Area Number 08555079
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionKanazawa Institute of Technology

Principal Investigator

FUKUDA Ichiro  Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (10064445)

Co-Investigator(Kenkyū-buntansha) ITAYA Hisao  Gunze Limited, Shiga Research Laboratory, Chief Researcher, 滋賀研究所, 主任研究員
FURUKAWA Shuji  Gunze Limited, Shiga Research Laboratory, Researcher, 滋賀研究所, 研究員
TAKATA Shinzo  Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70064467)
MINAMI Tadatsugu  Kanazawa Institute of Technology, Engineering, Professor, 工学部, 教授 (70113032)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 1997: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1996: ¥4,500,000 (Direct Cost: ¥4,500,000)
KeywordsMulticomponent oxide / Transparent conducting thin film / Sputtered thin film / Magnetron Sputtering / Transparent electrode / Intelligent thin film / 多元系酸化物 / II-III-IV族化合物透明導電膜
Research Abstract

New multicomponent (ZnO)_1-x-(MgO)x-(In_2O_3)_1-Y-(Ga_2O_3)Y-SnO_2 system transparent conducting oxide thin films have been preapred by magnetron sputtering using oxide powder targets. First, thin films using multicomponent oxides consisting of a combination of different binary compounds were pareapred by controlling the composition. In these systems, new transparent conducting oxide thin films were prepared in materials identified as ternary compounds such as Zn_2In_2O_5, ZnSnO_3, MgIn_2O_4, InGaO_3 and In_4Sn_3O_<12>. Consequently, thin films using multicomponent oxides consisting of a combination of different ternary compounds were pareapred by controlling the composition. In these systems, transparent conducting films could be prepared with all compositions of the multicomponent oxides. Highly transparent conducting thin films were prepared with the overall composition in multicomponent oxides such as Zn_2In_2O_5-ZnSnO_3, Zn_2In_2O_5-MgIn_2O_4, Zn_2In_2O_5-InGaO_3, Zn_2In_2O_5-In_4Sn_3O_<12> and ZnSnO_3-In_4Sn_3O_<12> systems. The resulting electrical, optical and chemical properties of multicomponent oxide films changed continuously as the composition in the target was varied : the resistivity, band-gap energy, refractive index, etching rate and work function of Zn_2In_2O_5-ZnSnO_3, Zn_2In_2O_5-MgIn_2O_4, Zn_2In_2O_5-InGaO_3, Zn_2In_2O_5-In_4Sn_3O_<12> and ZnSnO_3-In_4Sn_3O_<12> could be controlled continuously. It is concluded that transparent conducting multicomponent oxide thin films are applicable to specialized applications because their physical and chemical properties can be controlled by altering the composition of the components.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] T.Minami, T.Kakumu, Y.Takeda, S.Takata: "Preparation of Transparent Conducting Zn_2In_2O_5 films by d.c.magnetron sputtering" Thin Solid Films. in press.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, T.Kakumu, Simokawa, S.Takata: "New transparent conducting ZnO-In_2O_3-SnO_2 thin films prepared by magnetron sputtering" Thin Solid Films. (in pyess).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, Y.Takeda, S.Takata, T.Kakumu: "preparation of transparent conducting In_4Sn_3O_<12> thin films by DC magnetron sputtering" Thin Solid Films. 308-309. 13-18 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, H.Kumagai, T.Kakumu, A.Takata , M.Ishii: "Highly transparent and conducive ZnO-In_2O_3 thin films prepared by atmospheric pressure chemical vapor deposition" J.Vac.Sci.Technol.A. 15(3). 1069-1073 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, Y.Takeda, T.Kakumu, S.Takata, I.Fukuda: "Preparation of highly transparent and conducting Ga_2O_3-In_2O_3 films by direct current magnetron sputtering" J.Vac.Sci.Tehnol.A. 15(3). 958-962 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, Y.Takeda, S.Takata and T.Kakumu: ""Preparation of transparent conducting In_4Sn_3O_<12> thin films by DC magnetron sputtering"" Thin Solid Films. 308-309. 13-18 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, Y.Takeda, T.Kakumu, S.Takata and I.Fukuda: ""Preparation of highly transparent and conducting Ga_2O_3-In_2O_3 films by direct current magnetron sputtering"" Journal of Vacuum Science and Technology A. 15(3). 958-962 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, H.Kumagai, T.Kakumu, S.Takata and M.Ishii: ""Highly transparent and conductive ZnO-In_2O_3 thin films prepared by atmospheric pressure chemical vapor deposition"" Journal of Vacuum Science and Technology A. 15(3). 1069-1073 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, T.Kakumu, K.Shimokawa and S.Takata: ""New transparent conducting ZnO-In_2O_3-SnO_2 thin films prepared by magnetron sputtering"" Thin Solid Films. (in press.).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, T.Kakumu, Y.Takeda, and S.Takata: ""Preparation of transparent conducting Zn_2In_2O_5 films by d.c.magnetron sputtering"" Thin Solid Films. (in press.).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Minami, T.Kakumu, Y.Takeda, S.Takata: "Preparation of transparent conducting Zn_2In_20_5 films by d.c. magnetron sputtering" Thin Solid Films. (in press).

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Minami, T.Kakumu, K.Shimokawa, S.Takata: "New transparent conducting Zn0-In_20_3-Sn0_2 thin films prepared by magnetron sputtering" Thin Solid Films. (in press).

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Minami, Y.Takeda, S.Takata, T,Kakumu: "Preparation of transparent conducting In_4Sn_30_<12> thin films by DC magnetron sputtering" Thin Solid Films. 308-309. 13-18 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Minami, H.Kumagai, T.Kakumu, A.Takata, M.Ishii: "Highly transparent and conductive Zn0-In_20_3 thin films prepared by atmospheric pressure chemical vapor deposition" J.Vac.Sci.Technol.A. 15(3). 1069-1073 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Minami, Y.Takeda, T.Kakumu, S.Takata, I.Fukuda: "Preparation of highly transparent and conducting Ga_20_3-In_20_3 films by direct current magnetron sputtering" J.Vac.Sci.Technol.A. 15(3). 958-962 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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