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Photonic switching integrated circuits based on multi-mode interference couplers and semiconductor active devices

Research Project

Project/Area Number 08555082
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 電子デバイス・機器工学
Research InstitutionUniversity of Tokyo

Principal Investigator

NAKANO Yoshiaki  Univ.of Tokyo, School of Engineering, Associate Professor, 工学系研究科, 助教授 (50183885)

Co-Investigator(Kenkyū-buntansha) MATSUNAGA Tohru  NTT Optical Network Systems Labs., Principal Researcher, 主幹研究員
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥10,100,000 (Direct Cost: ¥10,100,000)
Fiscal Year 1997: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 1996: ¥6,100,000 (Direct Cost: ¥6,100,000)
KeywordsMultimode interference coupler / MMI coupler / Photonic switching / Monolithic photonic integrated circuit / Active / passive integration / Metal-organic vapor phase epitaxy / MOVPE / Selective-area growth / InGoAsP / InP / 光集積回路 / 半導体 / 光スイッチング / 光ゲート / 面積選択成長
Research Abstract

1.Development of software tool MOSIMUL
We developed a simulation software for the analysis and design of multi-mode interference (MMI) couplers based on multiple eigen mode expansion method, and named it MOSIMUL.By utilizing it, we studied MMI couplers with their incident waveguides coupled at large angles, and showed that such couplers could be used as compact bending devices in photonic integrated circuits.
2.Applicability of MMI semiconductor photonic devices to WDM photonic switching
We discussed to what extent the photonic switching devices in this research benefit WDM photonic switching systems, and found that more than 30dB improvement in loss would be achieved. Furthermore, temperature control equipment could be shared by all the elements, and alignment between different devices could become unnecessary.
3.Development of metal-organic vapor-phase-diffusion-enhanced selective-area epitaxy
As an active/passive integration technology in monolithic photonic integrated circuits, we propo … More sed and developed metal-organic vapor-phase-diffusion-enhanced selective-area epitaxy (MOVE2). By utilizing this technique, we could achieve band gap difference between active and passive regions at 1.55mum as large as 200nm in bulk material (due to composition variation), and as large as 500nm in quantum wells (due to composition and thickness variation). These numbers are by far larger than conventional ones. Therefore, we expect minimizing the absorption loss of passive waveguides.
4.First fabrication of MMI couplers by MOVE2
We succeeded in fabricating MMI couplers by selective-area epitaxy for the first time, making use of the above MOVE2 process. InGaAsP of 1.25mum composition was used as a core layr, and an upper InP cladding layr was formed by MOVE2 on its top. The thickness variation in the MMI coupler was as low as 5% in perpendicular direction and 10% in parallel direction with respect to the direction of lightwave propagation. Imbalance of light output was negligible, and insertion loss in a 30mum-long MMI coupler was 2dB. Less

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (61 results)

All Other

All Publications (61 results)

  • [Publications] Martin Bouda: "Canphotonic Switching sysetms benefit from monolythic integration of semiconductor optoelectronic devices?" Tech.Digest,Intern.Topical Meeting on Photonics in Switching(PS'96). PWC20. 124-125 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yi Luo: "A novel monolithically integrated device composed of MQW GaAlAs/GaAs gain-coupled DFB laser and electro-absorption modulator" Chinese J.of Semiconductors. 17・5. 347-352 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "Wide-Wavelength polarization-independent optical modulator based on tensile-strained quantum well with mass-dependent width" IEEE Photon.Tech.Lett.8・6. 785-787 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited paper)Recent progress in Semlconductor gain-coupled DFB laser research" Tech.Digest,Conf.on Lasers and Electro-Optics(CLEO'96). CTuC1. 76-77 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yi Luo: "Fabrication of gain-coupled DFB semiconductor laser and its integration with electroabsorption modulator" Tech.Digest,25th General Assembly of the Intern.Union of Radio Science. D7・7. 192 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited paper)Semiconductor photonic devices and their integration" Proc.of Photonics Conf.'96. II-1. 3-4 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Nong Chen: "Analysis,fabrication,and characterization of tunable DFB lasers with chirped gratings" IEEE J.of Selected Topics in Quantum Electronics. 3・2. 541-546 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Extremely large in-plane bandgapshift by MOVPE selecteve area growth using TBA and TBP" Pro.of Eighth European Conf.on Integrated Optics(ECIO'97). EThH1. 298-301 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Wide-angle coupling to multi-mode interference devices-a novel concept for compacting photonic integrated circuits" IEICE Transactions on Electronics. E80-C・5. 640-645 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Novel MOVPE selective area grouth technique with extremely large bandgapshifts and relaxed fabrication tolerances" Conf.Proc.,Ninth Intern.Conf.on Indium Phosphide and Related Materials(IPRM'97). PD4. 6-7 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jia-Pang Pang: "GaAs/AlGaAs directional coupler high speed optical modulator with asymmetric coplanar strip traveling wave electrode" Tech.Digest,the second Optoelectronics and Communication Conf.(OECC'97). 11C1-3. 660-661 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hidekazu Kawanishi: "Gain-coupled distributed-feedback laser triode-novel structure for tuning coupling coefficient" Tech.Digest,the Pacific Rim Conf.on Lasers and Electro-Optics(CLEO PacRim'97). ThI2. 141 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited paper)Semicondactor photomic devices and related MOVPE technologies" Tech.Digest,Intern.Topical Meeting on Photoelectronics. 9 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "The simplest potential-tailoaredquantum well for polarization-independent optical modulators" Conf.Proc.IEEE Lasers and Electro-Optics Society Annual Meeting(LEOS'97). MP6. 146-147 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Byongjin Ma: "All-optical wavelength converterbased on Coupled Semicondnctor optical amplifier" to be publishedin Tech.Digest,Topical Meeting on Integrated Photonics Research(IPR'98). IMH21. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "InGaAs/InAlAs asymmetric triple coupled quantum well for blue-chirp electro-absorption Optical modulators" to be published in Tech.Digest,Topical Meeting on Integrated photonics Research(IPR'98). ITuJ1. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Byongjin Ma: "proposal of a novel all-optical Wavelength converter using coupled Semiconductor optical amplifier" to be published in Tech.Digest,Conf.on Lasers and Electro-Optics(CLEO'98). CThZ5. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "First multi-mode interference devices fabrlcated by metal-organic Vaporphase diffusion enhanced selective area epitaxy" to be published in Conf.Proc.,10th Intern.Conf. on Indium phosphide and Related Materials(IPRM'98). WA1-5. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited Paper)In-sits charcterization and modeling of MOVPE for optoelectronic devices" to be published in Conf.Proc.,10th Intern.Conf.on Indium Phosphide and Related Materials(IPRM'98). WA1-1. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "First realization of multi-mode interference devices by the MOVE2 selective area growth process" Submitted to the Thira Optoelectronics and Communications Conf.(OECC'98). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Can Photonic switching systems benefit from monolithic integration of semiconductor opto-electronics devices?" Tech.Digest, Intern.Topical Meeting on Photonics in Switching (Ps'96). 124-125 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yi Luo: "A novel monolithically integrated device composed of MQW GaAlAs/GaAs gain-coupled DFB laser and electro-absorption modulator" Chinese J.of Semiconductors. Vol.17, no.5. 347-352 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "Wide-wavelength polarization-independent optical modulator based on tensile-strained quantum well with mass-dependent width" IEEE Photonics Technology Letters. Vol.8, no.6. 785-787 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited Paper) Recent progress in semiconductor gain-coupled DFB laser research" Tech.Digest, Conf.on Lasers and Electro-Optics (CLEO'96). 76-77 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yi Luo: "Fabrication of gain-coupled DFB semiconductor laser and its integration with electroabsorption modulator" Tech.Digest, 25th General Assembly of the Intern.Union of Radio Science. 192 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited Paper) Semiconductor photonic devices and their integration" Proc.of Photonics Conf.'96. 3-4 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Nong Chen: "Analysis, fabrication, and characterization of tunable DFB lasers with chirped gratings" IEEE J.of Selected Topics in Quantum Electronics. Vol.3, no.2. 541-546 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Extremely large in-plane bandgap shifts by MOVPE selective area growth using TBA and TBP" Proc.of Eighth European Conf.on Integrated Optics (ECIO'97). 298-301 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Wide-angle coupling to multi-mode interference devices-a novel concept for compacting photonic integrated circuits" IEICE Transactions on Electronics. Vol.E80-C,no.5. 640-645 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Novel MOVPE selective area growth technique with extremely large bandgap shifts and relaxd fabrication tolerances" Conf.Proc., Ninth Intern.Conf.on Indium Phosphide and Related Materials (IPRM'97). 6-7 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Jia-Pang Pang: "GaAs/AlGaAs directional coupler high speed optical modulator with asymmetric coplanar strip traveling wave electrode" Tech.Digest, the second optoelectranics and communications Conf. (OECC'97). 660-661 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hidekazu Kawanishi: "Gain-Coupled distributed-feedback lasertriode-novel structure for tuning coupling coefficient" Tech.Digest, the Pacific Rim Conf.on Lasers and Electro-Optics (CLEO Pac Rim'97). 141 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited Paper) Semiconductor photonic devices and related MOVPE technologies" Tech.Digest, Intern.Topical Meeting on photoelectronics. 9 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "The simplest potential-tailored quantum well for poralization-independent optical modulators" Conf.Proc.IEEE Lasers and Electro-Optics Society Annual Meeting (LEOS'97). 146-147 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Byongjin Ma: "All-optical wavelength converter based on coupled Semiconductor optical amflifier" to be published in Tech.Digest, Topical Meeting on Integrated Photonics Research (IPR'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaki Kato: "InGaAs/InAlAs asymmetric triple coupled quantum well for blue-chirp electro absorption optical modulators" to be published in Tech.Digest, Topical Meeting on Integrated Photonics Research (IPR'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Byongjin Ma: "Proposal of a novel all-optical wavelength converter using coupled semiconductor optical amplifier" to be published in Tech.Digest, Conf.on Lasers and Electro-Optics (CLEO'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "First multi-mode interference devices fabricated by metal-organic vapor phase diffusion enhanced selective area epitaxy" to be published in Conf.Proc.10th International Conf.on Indium Phosphide and Related'Materials (IPRM'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshiaki Nakano: "(Invited Paper) In-Sits characterization and modeling of MOVPE for optoelectronic devices" to be published in Conf.Proc., 10th Intern.Conf.on Indium Phosphide and Related Materials (IPRM'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "First realization of multi-mode interference devices by the MOVE 2 Selective area growth process" Submitted the Third Optoelectronics and Communications Conf. (OECC'98). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Martin Bouda: "Extremely large in-plane bandgap shifts by MOVPE selective area growth using TBA and TBP" Proc.of Eighth European Conf.on Intergrated Optics (ECIO'97). 298-301 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Martin Bouda: "Wide-angle coupling to multi-mode interference devices -a novel concept for compacting photonic integrated circuits" IEICE Transactions on Electronics. E80-C・5. 640-645 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Martin Bouda: "Novel MOVPE selective area growth tecnique with extremely large bandgap shifts and relaxed fabrication tolerances" Conf.Proc. (Post-deadine Papers),Ninth International Conf.on Indium Phoshide and Related Materials (IPRM'97). 6-7 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Jia-Pang Pang: "GaAs/AlGaAs directional coupler high speed optical modulator with asymmetric coplanar strip traveling wave electrode" Tech Digest,the Second Optoelectronics and Communications Conf. (OECC'97). 660-661 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 中野義昭: "(招待講演)モノリシック光集積回路の課題と展望" 電子情報通信学会フォトニックスイッチング研究会資料. PS97-9. 7-8 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Martin Bouda: "Novel MOVPE selective area growth technique for photonic switching devices" 電子情報通信学会フォトニックスイッチング研究会資料. PS97-12. 17-22 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Yoshiaki Nakano: "(Invited Paper) Semiconductor photonic devices and related MOVPE technologies" Tech.Digest,International Topical Meeting on Photoelectronics. 9 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 三島善行: "面積選択MOVPE成長のプロセスシミュレーション" 第45回応用物理学関係連合講演会. 28p-ZM-1 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] バウダ・マルティン: "MOVE2面積選択成長によるMMIカプラの作製" 第45回応用物理学関係連合講演会. 29a-SZL-1 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 馬〓真: "All-optical wavelength conversion using directional coupler semiconductor optical amplifier" 第45回応用物理学関係連合講演会. 30a-SYD-16 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Byongjin Ma: "All-optical wavelength converter based on coupled semiconductor optical amplifier" to be published in Tech.Digest,Topical Meeting on Intergrated Photonics Research (IPR'98). IMH21 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Byongjin Ma: "Proposal of a novel all-optical wavelength converter using coupled semiconductor optical amplifier" to be published in Technical Digest,Conference on Lasers and Electro-Optics (CLEO'98). Cthz5 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Martin Bouda: "First multi-mode interference devices fabricated by metal-organic vapor phase diffusion enhanced selective area epitaxy" IPRM'98, Tsukuba,に採録決定済. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Martin Bouda: "Canphotonic Swltching systems benefit from monolithic integration of Semiconductor optoelectronic derices?" Tech.Digest,International Topical Meeting on Photonicsin Switching(PS′96). PWC20. 124-125 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yi Luo: "A novel monolithically integrated device Composed of MOW GaAlAs/GaAs gain-coupled DFB/aser and electro-absorption modulator" Chinese Journal of Semiconductors. 17. 347-352 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yoshiaki Nakano: "(Invited paper)Recent progress in Semiconductor gain-coupled DFB laser research" Tech.Digest.Conf.on Lasers and Electro-Optics(CLEO′96). CTuC1. 76-77 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yi Luo: "Fabrication of gain-coupled DFB Semiconductor laser and its lntegration with electroabsorption modulator" Tech.Digest,25th General Assembly of the International Union of Radio Science. D7・7. 192 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yoshiaki Nakano: "(Invited paper)Semiconductor Photonic devices and their integration" Proc.of Photonics Conference′96. II-1. 3-4 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Martin Bouda: "Extremely large in-plane bandgap shifts by MOVPE selective area glowth using TBA and TBP" to be published in Tech.Digest,Eighth Earopean Conf.on Integrated Optics(ECIO′97). EThH1. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Martin Bouda: "Wide-angle coupling to multi-mode interference devices-a novel concept for compacting photonic integrated Circuits" to be published in IEICE Trans.on Electronics. E80-C. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Shinya Sudo: "In-situ monitoring of arsenic -phosphorus exchange in MOVPE growth of InGaAs/InP quantum wells by kinetic ellipsometry" to be published in Conf.Proc.Ninth International Conf. on Indium Phosphide and Related Materials(IPRM′97). TuB2. (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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