• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Establishment of Charging Free and Non-Scatter Implantation Technology for Micro Powders by Using Negative-Ion Beam

Research Project

Project/Area Number 08555172
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Material processing/treatments
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

ISHIKAWA Junzo  Kyoto Univ., Graduate School of Engineering, Professor, 工学研究科, 教授 (80026278)

Co-Investigator(Kenkyū-buntansha) GOTOH Yasuhito  Kyoto Univ., Graduate School of Engineering, Instructor., 工学研究科, 助手 (00225666)
TSUJI Hiroshi  Kyoto Univ., Graduate School of Engineering, Instructor., 工学研究科, 助手 (20127103)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥19,900,000 (Direct Cost: ¥19,900,000)
Fiscal Year 1997: ¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 1996: ¥12,000,000 (Direct Cost: ¥12,000,000)
KeywordsNegative-ion implantation / Powders / Micro particles / Charge-up free / Non scattering / Agitation of powders / Uniform implantation / Depth profile for spheres / 粒子飛散 / チャージアップ / 表面解質 / 触媒
Research Abstract

1.Elucidation of Particle-Scattering Phenomenon and Threshold Charging Voltage
Scattering of powders during conventional positive-ion implantation without any charge compensation results from a high charging voltage. Taking account of forces acting on one particle in the top layr : Coulomb repulsive force and attractive forces to other particles in the layr just below, such as gravity and van der Waals force, the threshold charging voltage for scattering was derived for a stationary state and a vibrated state. This relation was confirmed by experiments. Thus, we have clarified the mechanism of particle scattering.
2.Development of Negative-Ion Implanter for Powders with an Agitator and Non-Scattering
We constructed a negative-ion implantation for micro-powders as equipped with ion beam bending deflector and an agitator of electromagnetic vibrator at a frequency of 120 Hz. With this implanter, various negative ions were implanted into powders at 70 keV.No scattering was observed. The negat … More ive-ion implantation is found a nonscattering implantation method for powders.
3.Evaluation of Charging Surface Potential of Insulators at Negative-Ion Implantation
We measured surface potentials of several kinds of insulators by secondary electron energy analysis. The surface potential during negative-ion implantation was only several volts negative much less than threshold voltage. Therefore, scattering is considered to not result in negative-ion implantation.
4.Establishment of Agitation Method by Vibration for Treatment of Whole Surface of Powder-Particles
For agitation by vibration, required conditions of frequency and amplitude were theoretically driven. The conditions were confirmed by vibration experiments. For evaluation of uniformity, copper negative ions were implanted into glass beads. From contents of copper atoms in a bead by XPS,the implantation under the vibration was found to make treatment of whole surface with good uniformity.
Thus, we developed a negative-ion implanterfor powders and established negative-ion implantation into powders as a charging free and non-scattering ion implantation method with a good uniformity. Less

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (40 results)

All Other

All Publications (40 results)

  • [Publications] Junzo Ishikawa: "Negtaive-Ion Sources for Modification of Materials(invited)" Review of Scientific Instruments. Vol.67. 1410-1415 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Extraction of Gaseous Materials from a Radio Frequency Plasma-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.67. 1012-1014 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive-and Negative-Ion Implantation into Powder Materials" Applied Surface Science. Vol.100/101. 342-346 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Charging Phenomenon of Insulators in Negative-Ion Implantation" Applied Surface Science. Vol.100/101. 370-373 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "負イオンの産業への応用" プラズマ・核融合学会誌. 第72巻. 1144-1149 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantatin Technology-96. IEEE96TH8182. 249-252 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" Nuclear Instruments and Methods. B127/128. 278-281 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative-and Positive-Ion Induced Secodnday Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B127/128. 282-285 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" (to be published in Surface Coatings and Technology). 6ページ (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2-Film by Negative-Ion Bombardment" (to be published in Nuclear Instruments and Methods). 5 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "負イオンの発見から現在の応用に至るまで" アイオニクス. 第23巻. 1-6 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "無帯電負イオン注入技術と負イオン注入装置" アイオニクス. 第23巻. 85-94 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 石川 順三: "イオンビームの工業応用における新展開" 第8回粒子線の先端的応用技術に関するシンポジウム論文集. BEAMS1997. 1-10 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 辻 博司: "振動状態における粉体の飛散開始帯電電圧と正イオンおよび負イオン注入実験" 第8回粒子線の先端的応用技術に関するシンポジウム論文集. BEAMS1997. 143-146 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Negative-Ion Sources for Modification of Matherials (invited)" Review of Scientific Instruments. Vol.67. 1410-1415 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Negative-Ion Extraction of Gaseous Materials from a Radio Frequency Plasma-Sputter-Type Heavy Negative-Ion Source" Review of Scientific Instruments. Vol.67. 1012-1014 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive-and Negative-Ion Implantation into Powder Materials" Applied Surface Science. Vol.100/101. 342-346 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Charging Phenomenon of Insulators in Negative-Ion Implantation" Applied Surface Science. Vol.100/101. 370-373 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Application of Negative Ions to Industrial Field" Journal of Plasma and Nuclear Fusion Science Soc.of Japan. Vol.72. 1144-1149 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantation Technology-96. IEEE96TH8182. 249-252 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" Nuclear Instruments and Methods. B127-128. 278-281 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative- and Positive-Ion Induced Secondary Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B127-128. 278-281 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2-Film By Negative-Ion Bombardment" Nuclear Instruments and Methods. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junko Ishikawa: "Short History from Discovery of Negative Ions to Their Current Applications" Ionics. Vol.23, No.261. 1-6 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Charging Free Negative-Ion Implantation Technique and Negative-Ion Implanter" Ionics. Vol.23, No.261. 85-94 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "New Evolution in Industrial Application of Ion Beams" Proc.of the 4th Symposium on Beam Engineering and Advanced Material Syntheses, BEAMS1997. 1-10 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hiroshi Tsuji: "Threshold Charging Voltage for Particle-Scattering of Vibrated Powders and Experimental Study on Positive- and Negative-Ion Implantation" Proc.of the 4th Symposium on Beam Engineering and Advanced Material Syntheses, BEAMS1997. 143-146 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Junzo Ishikawa: "Particle-Scattering Phenomenon of Powders Caused by Charging Voltage of the Surface during Ion Implantation" Ion Implantatin Technology-96. IEEE96TH8182. 249-252 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Slightly Negative Surface Potential and Charging Model of Insulator in the Negative-Ion Implantation" Nuclear Instruments and Methods. B127/128. 278-281 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Study on Emission Yields of Negative-and Positive-Ion Induced Secodnday Electron from Thin SiO_2 Film" Nuclear Instruments and Methods. B127/128. 282-285 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Secondary Electron Emission and Surface Potential of SiO_2-Film by Negative-Ion Bombardment" (to be published in Nuclear Instruments and Methods). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Jounzo Ishikawa: "Non-Scattering Technique of Ion Implantation into Powders of Micro-Beads by Using Negative Ions" (to be published in Surface Coatings and Technology). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 石川 順三: "負イオンの発見から現在の応用に至るまで" アイオニクス. 第23巻. 1-6 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 石川 順三: "無帯電負イオン注入技術と負イオン注入装置" アイオニクス. 第23巻. 85-94 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 石川 順三: "イオンビームの工業応用における親展開" 第8回粒子線の先端的応用技術に関するシンポジウム論文集. BEAMS1997. 1-10 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 辻 博司: "振動状態における粉体の飛散開始帯電電圧と正イオンおよび負イオン注入実験" 第8回粒子線の先端的応用技術に関するシンポジウム論文集. BEAMS1997. 143-146 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Junzo Ishikawa: "Negtive-Ion Scources for Modification of Materials(invited)" Review of Scientific Instruments. Vol.67. 1410-1415 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 石川順三: "負イオンの産業への応用" プラズマ・核融合学会誌. 第72巻. 1144-1149 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroshi Tsuji: "Fundamental Study on Powder-Scattering in Positive-and Negative-Ion Implantation into Powder Materials" Applied Surface Science. Vol.100/101. 342-346 (1996)

    • Related Report
      1996 Annual Research Report

URL: 

Published: 1996-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi