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ATOMIC-LAYER CONTROLLED SUPER-HETEROEPITAXY AND PROPERTIES OF LANTHANOIDE/SEMICONDUCTOR STRUCTURES

Research Project

Project/Area Number 08650009
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

FUJIWARA Yasufumi  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,ASSOCIATE PROFESSOR, 工学研究科, 助教授 (10181421)

Co-Investigator(Kenkyū-buntansha) TABUCHI Masao  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,ASSISTANT PROF, 工学部, 講師 (90222124)
TAKEDA Yoshikazu  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,PROFESSOR, 工学研究科, 教授 (20111932)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1997: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1996: ¥1,900,000 (Direct Cost: ¥1,900,000)
KeywordsLanthanoide / Super-heteroepitaxy / ErP / InP / X-ray CTR scattering / AFM / STM / 量子効果 / AFM / STM / STS / 量子機能 / Er / 蛍光EXAFS法 / δド-ピング
Research Abstract

There has been increasing interest in the combination of rare-earth (RE) elements and III-V semiconductors. One of the reasons is RE reacts with group-V elements to form lanthanoides such as ErP and ErAs. Incorporation of the lanthanoide layrs in semiconductor heterostructures is expected to facilitate new physics in quantum-confined systems and novel electronic devices, since the lanthanoides exhibit semimetallic behavior.
In this research project, we investigated atomic-layr controlled super-heteroepitaxy of ErP on InP substrates. Gas-flow sequence used for the epitaxy was basically the same as that for "delta-doping" of Er. Results obtained experimentally are summarized as follows ;
1) Rutherford backscattering (RBS) measurements showed that Er sheet density in samples increases linearly with Er-exposure duration and exhibits no saturation even at 80 min, and that Er atoms, corresponding to 1 mono-layr (ML) in number, are incorporated during the Er-exposure duration of 23 min.
2) In 4.2K photoluminescence (PL) measurements, characteristic Er-related emissions due to 4f-intra shell transitions were observed, which were quite different from those in InP doped uniformly with Er.
3) X-ray crystal truncation rod (CTR) scattering measurements using synchrotron radiation revealed clearly that Er atoms are incorporated having the NaCl crystal arrangement with P atoms, which was also supported by fluorescence-detected extended X-ray absorption fine structure (EXAFS) measurements. The resultant Er profiles were almost symmetric and were characterized by Er atoms confined in several MLs in thickness.
4) Epitaxy of ErP on InP were observed by atomic force microscope (AFM) and ultra-high vacuum scanning tunnelling microscope (UHV-STM). Surface morphology depended strongly on substrate temperature and Er-exposure duration. There were generation of misfit dislocations along the [110] direction and formation of voids and holes.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] Y.FUJIWARA: "Erbium δ-doping to InP by OMVPE" Institute of Physics Conference Series. 145. 149-154 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.FUJIWARA: "Effects of growth temperature on Er-related photolumine-scence in Er-doped InP and GaAs by OMVPE with TBP and TBA" Japanese Journal of Applied Physics. 36(5). 2587-2591 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.TAKEDA: "Layer structure analysis of Er δ-doped InP by x-ray crystal truncation rod scattering" Journal of Applied Physics. 82(2). 635-638 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.FUJIWARA: "Low-temperature photoluminescence study on Er-doped GaP grown by organometallic vapor phase epitaxy" Journal of Applied Physics. 83(9)(印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.FUJIWARA: "Extremely sharp Er-related luminescence in Er-doped GaP grown by OMVPE with TBP" Institute of Physics Conference Series. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.TABUCHI: "Thermal diffusion of Er-atoms δ-doped in InP" Applied Surface Science. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, M.Tabuchi, Y.Takeda et al.: "Erbium delta-doping to InP by OMVPE" Inst.Phys.Conf.Ser.No.145. 149-154 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "EXAFS and x-ray CTR scattering characterization of Er doped in InP by OMVPE" Materials Research Society Symposium Proceedings Vol.422, Rare Earth Doped Semiconductors II. 155-160 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Observation of trap states in Er-doped InP by photoreflectance" Appl.Phys.Lett.Vol.70, No.1. 84-86 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Effects of growth temperature on Er-related photoluminescence in Er-doped InP and GaAs by organometallic vapor phase epitaxy with tertiarybutylphosphine and tertiarybutylarsine" Jpn.J.Appl.Phys.Vol.36, No.5. 2587-2591 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Characterization of InP delta-doped with Er by fast Fourier transformed photoreflectance" Appl.Surf.Sci.Vol.117/118. 776-780 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "Atom configuration study of delta-doped Er in InP" Appl.Surf.Sci.Vol.117/118. 781-784 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "Occupation site and distribution of delta-doped Er in InP measured by x-ray CTR scattering" Appl.Surf.Sci.Vol.117/118. 785-789 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Takeda, M.Tabuchi, Y.Fujiwara et al.: "Layr structure analysis of Er delta-doped InP by x-ray crystal truncation rod scattering" J.Appl.Phys.Vol.82, No.2. 635-638 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, M.Tabuchi, Y.Takeda et al.: "Structural analysis of erbium delta-doped InP (001) crystal by means of RBS-channeling" Radiat.Phys.Chem.Vol.50, No.3. 193-197 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Formation of ErP islands on InP (001) surface by organometallic vapor phase epitaxy" Jpn.J.Appl.Phys.Vol.36, No.11B. L1534-L1537 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Low-temperature photoluminescence study on Er-doped GaP grown by organometallic vapor phase epitaxy" J.Appl.Phys.Vol.83, No.9 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "Local structures around Er atoms doped in InP revealed by fluorescence EXAFS" Mater.Sci.Eng.B : Solid State Materials for Advanced Technology. (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara, M.Tabuchi, Y.Takeda et al.: "Extremely sharp Er-related luminescence in Er-doped GaP grown by OMVPE with TBP" Inst.Phys.Conf.Ser.(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "Local structure study on dilute Er in InP revealed by fluorescence EXAFS" J.Syn.Rad.(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Fujiwara, Y.Takeda et al.: "Thermal diffusion of Er-atoms delta-doped in InP" Appl.Surf.Sci.(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Fujiwara: "Effects of growth temperature on Er-related photoluminescence in Er-doped InP and GaAs by OMVPE with TBP and TBAs" Japanese Journal of Applied Physics. 36(5). 2587-2591 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Fujiwara: "Low-temperature photoluminescence study on Er-doped GaP grown by organometallic vapor phase opitaxy" Journal of Applied Physics. 83(9),(印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Takeda: "Layer structure analysis of Erδ-doped InP by x-ray crystal truncation rod scattering" Journal of Applied Physics. 82(2). 635-638 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] L.Bolotov: "Formation of ErP islands on the Er-doped InP (100) by MOVPE" Japanese Journal of Applied Physics. 36(11B). L1534-L1537 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] J.Yuhara: "Structural analysis of erbium δ-doped InP (001) crtstal by means of RBS-channeling" Radiation Physics and Chemitry. 50(3). 193-197 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Fujita: "Occupation site and distribution of δ-doped Er in InP measured by x-ray CTR scattering" Applied Surface Science. 117/118. 785-789 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.FUJIWARA: "Erbium δ-Doping to InP by OMVPE" Inst.Phys.Conf.Ser.145. 149-154 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.FUJIWARA: "Effects of Growth Temperature on Er-Related Photoluminescence in Er-Doped InP and GaP by OMVPE" Jpn.J.Appl.Phys.36(印刷中). (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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