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Development of laser-driven micromachine using thin film of sputtered shape memory alloys

Research Project

Project/Area Number 08650322
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionGifu National College Technology

Principal Investigator

KUMAZAKI Hironori  Gifu National College Technology, Department of Electrical Engineering, Associate Professor, 電気工学科, 助教授 (70270262)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhiro  Tohoku University, Department of Mechtronics and Precision Engineering, Professo, 工学部, 教授 (50164893)
INABA Seiki  Gifu National College Technology, Department of Electrical Engineering, Professo, 電気工学科, 教授 (30110183)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1997: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1996: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsOptical actuator / Mictomachine / Shape memory alloy / Ion sputtering / 光学式アクチュエータ
Research Abstract

Miniature actuators, in which wires of shape-memory alloys are driven photothermally by a laser diode. A cantilever made of the shape-memory alloy showed considerably larger vibration amplitude and force than that fabricated from the other materials. Using two laser diodes, the elliptic resonance vibration of the cantilever beam around z-axis was demonstrated. In addition, a laser-driven gripper was constructed by using eight wires of shape-memory alloys which were fixed at the microfabricated plates and an optical fiber. The fabricated gripper can hold a sphere with a diameter of 1 mm and weight of 30mg-w at the laser power of 300 m W.
Although miniature actuator were developed by using bulk material of shape memory alloy, it was necessary to use thin film for making micro actuator. Sputtering equipment was made for production of Ti-Ni shape memory alloy thin film. The photothermal vibration of micro-cantilever of which surface was Ti-Ni thin film was obtained. As a result, Ti-Ni thin film showed shape memory effect, and it was confirmed the displacement of the micro-cantilever increased 4.3 times than former displacement.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] A.Shimamura: "Light-driven actuators using shape-memory alloys" Technical Digest 14th Sensor Symposium. 259-262 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] A.Shimamura: "Light-driven actuators using shape-memory alloys" Technical Digest 14th Sensor Symposium. 259-262 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] A.Shimamura: "Light-driven actuators using shape-memory alloys" Technical Digest 14th Sensor Symposium. 259-262 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] A.Shimamura: "Light-Driven Actuators using Shape-Memory Alloys" Technical Digest of The 14th Sensor Symposium. 259-262 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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