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Preparation and application of polycrystalline silicon carbide thin films as a material for micromachining.

Research Project

Project/Area Number 08650375
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionShinshu University

Principal Investigator

KAMIMURA Kiichi  Shinshu University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40113005)

Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1997: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1996: ¥1,300,000 (Direct Cost: ¥1,300,000)
Keywordssilicon carbide / micromachining / sensor / pressure sensor / infrared light source / 耐環境性材料 / マイクロマシニング / 温度センサ / 圧力センサ
Research Abstract

Polycrystalline silicon carbide microstructures were fabricated by micromachining for microsensors in order to estimate the promising properties as a material for micromachining. Microdiaphragms and microbidges were fabricated by micromachining of the polycrystalline silicon carbide film on the single crystal silicon substrate.
The polycrystalline silicon carbide film were deposited on (100) surface of single crystal silicon wafer by low pressure chemical vapor deposition at about 1000 degree C.The source material was tetramechisilane (TMS). The silicon carbide microdiaphragms and microbridges were fabricated by reactive ion etching of silicon carbide films and anisotropic etching of silicon substrate.
Microsensors were prepared using these structure. The deformation of the diaphragm by the applied pressure was detected optically with optical fibers connected to the diaphragm. The microbridge was useful as a infrared micro-light source.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] K.Kamimura, et al: "Preparation of Polycrystalline SiC Thin Films and Its Application to Resistive Sensors" Institute of Physics Conference Series. 142. 825-828 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Kamimura, et al: "Oxidation of Polycrystalline SiC Films" Institute of Physics Conference Series. 142. 649-652 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 花岡 健一, 上村 喜一、 他: "光ファイバを用いた位置・速度センサの試作" 先端加工学会誌. 16. 25-30 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Kamimura, et al.: "Preparation of Polycrystalline SiC Thin Films and Its Application to Resistive Sensors" Institute of Physics Conference Series. Vol.142. 825-828 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Kamimura, et al.: "Oxidation of Polycrystalline SiC Films" Institute of Physics Conference Series. Vol.142. 649-652 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hanaoka, et al: "A Position and Speed sensor constructed with optical fiber array" Japanese Journal of Advanced Machining. Vol.16 (in Japanese). 25-30 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 花岡 健一, 上村 喜一、他: "光ファイバを用いた位置・速度センサの試作" 先端加工学会誌. 16. 25-30 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Kamimura,他: "Preparation of Polycrystalline SiC Thin Films and Its Application to Resistive Sensors" Institute of Physics Conference Series. 142. 825-828 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Kamimura,他: "Oxidation of Polycrystalline SiC Films" Institute of Physics Conference Series. 142. 649-652 (1996)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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