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Study on Surface acoustic wave/semiconductor functional devices

Research Project

Project/Area Number 08650414
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionKanagawa Institute of Technology

Principal Investigator

HOHKAWA Kohji  E&EEng. Kanagawa Institute of Technology Professor, 工学部, 教授 (30257406)

Co-Investigator(Kenkyū-buntansha) NOGE Satoru  E&EEng.Kanagawa Institute of Technology Research Assistant, 工学部, 助手 (10221483)
KOH Keishin  E&EEng.Kanagawa Institute of Technology Research Assistant, 工学部, 助手 (30257414)
UNO Takehiko  E&EEng.Kanagawa Institute of Technology Professor, 工学部, 教授 (50257408)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1997: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1996: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsSurface Acoustic Wave / Quartz / Eiptaxial liftoff / GaAs / Twin Quartz / Sensor / Y-ZLINbO3 / x-axis inversion / センサ / 基板エッチング / ボンディング / Y-Z LiNbO_3 / 弾性表面波半導体複合素子 / GaAs半導体 / マチドフィルタ / Y-ZLiNbO_3
Research Abstract

(1)We proposed new fabrication technology based on epitaxial liftoff process. We investigated the optimal condition for liftoff and bonding processes and succeeded in fabricating GaAs MESFET,Schttoky diode without any damage in semiconductor films.
(2)We improved the epitaxial lift-off process and advance in wafer handing, etching and bonding. Using these improved processes, We have fabricated basic circuit for SAW-semiconductor co-integrated devices such adaptive filter and succeeded measuring basic characteristics. We also investigated suface microspico feature of ST-cut quartz using X-ray and AFM.We are studying the effects of these features on degradation of device characteristics.
(3)We also applied substrate removal process to release GaAs epitaxial film, which is grown on the AlAs thin film on GaAs substrate and adapted Au-Sn eutectic bonding process to bonding GaAs film on the Y-ZLINbO3 substrate.
(4)We proposed a monolithic integration technique for AT-cut resonator using the x-axis inversion phenomenon of quartz. It was clarified that an x-aiis inversion area formed on an AT-cut plate very effectively reduces the mechanical coupling between resonators formed on the plate. This suggests the apossibility of resonator arrays on an AT-cut plate.
(5)We also studied piezoeletiic gasses sensor using rubber sensing film and experiments showed that sensors using various kinds of film have different selectivity which is sufficient for application as gas sensors.

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] K.Hohkawa: "Surface Acoustic Wave Semiconductor coupled devices Employing Epitaxisl lift-off Film" Jpn.J.Appl.Phys.35. 3015-3019 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Suzuki: "Integation of Semiconductor Devices With Surface Acoustic Wave Using the Epitaxial lift-off Process" Jpn.J.Appl.Phys.36. 3109-3114 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uno: "Transient Phenonmenon of Twin Formation in Quarts Platez" Jpn.J.Appl.Phys.36. 3000-3003 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Q.Huang: "Fabrication of Superconductor/semiconductor Quasi-monolithic devices epitaxial lift-off technology" IEEE Trans.on Appl.Superconduc.3. 3461-3464 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Noge: "Study of the MicrosopicSurface Struture of a Quartz Substrate for Surface Acousic Wave Devices" Jpn.J.Appl.Phys.37. 3081-3086 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hohkawa: "Piezoelectric Sensor using rubber sensing film" Jpn.J.Appl.Phys.38(to be published). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hohkawa, H.Suzuki, K.Komine and Q.Huang: ""Surface Acoustic Wave Semiconductor coupled devices Employing Epitaxial lift-off Film, "" Jpn.J.Appl.Phys.Vol.35. 3015-3019 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Suzuki, K.Komine, Q.Huang and K.Hohkawa: ""Integration of Semiconductor Devices with Surface Acoustic Wave Using the Epitaxial lift-off Process", "" Jpn.J.Appl.Phys.Vol.36. 3109-3114 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uno: ""Transient Phenomenon of Twin Formation in Quartz plates"" Jpn.J.Appl.Phys.Vol.36. 3000-3003 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Q.Huang and K.Hohkawa: ""Fabrication of superconductor/semiconductor Quasi-monolithic devices epitaxial lift-off technology"" IEEE Trans.on Appl.Superconduc. Vol.36. 3461-3464 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Noge, N.Araki, K.Komine, H.Suzuki, H.Shiraishi and K.Hohkawa: ""Study of the Microsopic Surface Structure of a Quartz Substrate for Surface Acoustic Wave Devices"" Jpn.J.Appl.Phys.Vol.36. 3081-3086 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Uno: ""Elastic and Dielectric Anomalies of Twinned Quartz above Twinning Temperature"" Kor.J.Phys.Soc.Vol.32. S1822-S1825 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hohkawa, H.Suzuki, K.Komine and Q.Huang: ""Piezoelectric sensor using rubber sensing film" Jpn.J.Appl.Phys.(to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Noge and T.Uno: ""Piezoelectric resonance properties of ab phase quartz plate""" Jpn.J.Appl.Phys.(to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hohkawa and K.Koh: ""A Vortex Flow Device Employing Josephson Junction Network"" 6th ISEC Extended Abstracts. Vol.3. 168-170 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Koh and K.Hohkawa: ""A new fabrication method of superconductor/semiconductor devices by epitaxial liftoff"" 6th ISEC Extended Abstracts. Vol.2. 176-178 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Noge and T.Uno: ""AFM and TEM measurment of the microscopic structure of a quartz substrate"" 1997 IEEE Ultrasonics symposium Proc.285-288 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Noge and T.Uno: ""Monolithic Integration of AT-Cut Resonators Using Artificial Twin Quartz Plate"" 1997 IEEE Ultrasonics symposium Proc.1043-1046 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hohkawa: "Piezoelectric sensor using rubber sensing film" Japanese Journal of Applied Physics. (to be published).

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Hohkawa: "A Vortex Flow Device Employing Josephson Junction Network" 6th ISEC Extended Abstracts.

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Koh: "A new fabrication method of superconductor/semiconductor devices by epitaxial liftoff" 6th ISEC Extended Abstracts.

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Noge: "Piezoelectric resonance properties of a β phase quartz plate" Japanese Journal of Applied Physics. (to be published).

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Noge: "AFM and TEM measurement of the microscopic structure of a quartz substrat" 1997 IEEE Ultrasonics symposium Proceeding.

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Hohkawa: "Application of SAW devices on pulse position modulated spread spectrum communication system" Proceedings on IEEE ISSSTA96. Vol.2. 735-735 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroji Suzuki: "Integration of semiconductor devices with surface acoustic wave using epitaxial lift-off process" Japanese Journal of Applied Physics. (to be published). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Takehiko Uno: "Transient phenomenon of twin formation in Quartz Plates" Japanese Journal of Applied Physics. (to be published). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Qixin Huang: "Fabrication of superconductor/semiconductor Quasi-monolithic devices using epitaxial lift-off technology" IEEE Transactions on Applied Superconductivity. Vol.3(to be published). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Satoru Noge: "Study on the microscopic surface structure of a quartz substrate for SAW device" Japanese Journal of Applied Physics. (to be published). (1997)

    • Related Report
      1996 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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