| Project/Area Number |
08650769
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Physical properties of metals
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| Research Institution | Yamaguchi Univeristy |
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Principal Investigator |
NAKAYAMA Noriaki Yamaguchi University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (00164369)
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| Project Period (FY) |
1996 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1997: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1996: ¥1,500,000 (Direct Cost: ¥1,500,000)
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| Keywords | Micro Haardness / Multilayrs / Transition Metal Nitrides / Chromium Nitride / Carbon Nitride / Titanium Nitride / X-ray Diffraction / Reactive Sputtering / 金属窒化物 / 反応スパークリング |
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| Research Abstract |
Based on the investigation of nonstoichiometric CrN prepared by reactive sputtering, we have prepared CrN/CN and CrN/TiN multilayrs and studied their structre and micro hardness. As for CrN/CN multilyers, the maximum hardness was observed when samples were prepared on the room temperature substrate with the artificial period of 3.0nm and CrN : CN thickness ratio of 3 : 1. The value of hardness is 1.2 times of CrN films and is 1.5 times of CN films prepared under the same comdition. The hardness values are strongly dependent on the CrN : CN thickness ratio and the aahardness decreases with the increase of the artificial period. Highly [111] oriented CrN/TiN multilayrs were obtained. However, the intermixing layrs at the interfaces were detected from the x-ray diffraction analysis. No enhancement of hardness was observed for CrN/TiN multilayrs.
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