Hybrid Plasma sulf-nitriding of ion-nitriding and sputtering
| Project/Area Number |
08650865
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Metal making engineering
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| Research Institution | IBARAKI UNIVERSITY |
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Principal Investigator |
URAO Ryoichi IBARAKI Univ.Fac.of Engineering, Professor, 工学部, 教授 (10007776)
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| Co-Investigator(Kenkyū-buntansha) |
YOKOTA Hitoshi IBARAKI Univ.Fuc.of Engineering, Research Assistant, 工学部, 助手 (70252260)
NAGASE Yoshinori IBARAKI Univ.Fuc.of Engineering, Research Assistant, 工学部, 助手 (60007630)
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| Project Period (FY) |
1996 – 1998
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| Project Status |
Completed (Fiscal Year 1998)
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| Budget Amount *help |
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1998: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1997: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1996: ¥1,600,000 (Direct Cost: ¥1,600,000)
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| Keywords | Sputtering / Sulf-nitring / Nitring / Ion-nitring / プラズマ / スパッタリング / プラズマ窒化 / 硫化 / 表面硬化 |
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| Research Abstract |
Target is usually sputtered in highly reduced atmosphere under 0.02 Torr, but sputtering phenomena can arise in about 10 Torr and steel sputters in the atmosphere of 1-10 Torr with ion bombarding in ion-nitriding. So, firstly, steel was plasma sulf-nitrided at 823K for 3.6-18 k s in nitrogen and hydrogen atmospheres of 1-10 Torr. Molybdenum sulfide was used as a negative electrode and target. The steel was sulf-nitrided. Compound layer of 4 mum with nitrogen diffusion layer of 400 mum were formed by sputtering of molybdenum sulfide. Secondly, steel plate was sulf-nitrided by putting pararelly with molybdenum sulfide plate and arising hollow cathode discharge between the two plates. Compound layer of 8-15 mum and 400 mum nitrogen diffusion layer were formed. In both case, compound layers were made with iron sulfide and iron nitride layers.
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Report
(4 results)
Research Products
(7 results)
