Investigation on Quantitative Evaluation of Surface Molecular Ions by Means of Time-of-Flight Static Secondary Ion Mass Spectrometry
| Project/Area Number |
08650965
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
工業分析化学
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| Research Institution | Seikei University |
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Principal Investigator |
KUDO Masahiro Seikei Univcersity, Faculty of Engeineering, Professor, 工学部, 教授 (10114464)
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| Project Period (FY) |
1996 – 1998
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| Project Status |
Completed (Fiscal Year 1998)
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| Budget Amount *help |
¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1998: ¥100,000 (Direct Cost: ¥100,000)
Fiscal Year 1997: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1996: ¥1,000,000 (Direct Cost: ¥1,000,000)
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| Keywords | Secondary Ion Mass Spectrometry (SIMS) / Time-of Flight SIMS / Surface Chemical Structure / Surface Quantitative Analysis / Static SIMS / スタティックSIMS / TOF-SIMS / Q-SIMS / XPS / 表面定量 / スタティッSIMS |
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| Research Abstract |
In this research project, we investigated on the quantification of the surface secondary ion species from such samples as standard polymer films and Langmuir-Blodett(1B) films, using Time-of-Flight SIMS (ToF-SIMS) and X-ray Photoelectron Spectroecopy (XPS).
Due to the usage of a very small amount of primary ion dosages static secondary ion mass spectrometry (S-SIMS) has generally been classified as a non-destructive analytical technique and recognized as suitable for surface chemical state analysis of such organic materials as polymers. However, in S-SIMS, the obtainable mass spectra change a great deal according to the primary ion dosage and this fact is regarded as one of the main causes, as well as the so-called "matrix effect", for the difficulty of quantification by this technique. It is believed that the ionization mechanisms of the secondary ion species have quite significant influences on this kind of issue. Although some analysis data have been presented for typical materials, the detailed interpretations on the mechanisms of secondary ion formation and criteria for practical quantitative analysis have not been established yet.
We showed that the secondary ion species can be evaluated quantitatively with reasonable accuracy and precision by using a TOE-SIMS instrument and further proceeded to the interpretation which lead to fundamental understanding of the origin of SIMS spectra with reference to the bond orders obtained by semi-empirical MO calculation
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Report
(4 results)
Research Products
(23 results)
