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Creation of Perfect Surfaces

Research Project

Project/Area Number 08CE2004
Research Category

Grant-in-Aid for COE Research

Allocation TypeSingle-year Grants
Research InstitutionOsaka University

Principal Investigator

MORI Yuzo  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (00029125)

Co-Investigator(Kenkyū-buntansha) HIROSE Kikuji  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (10073892)
KATAOKA Toshihiko  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50029328)
YOSHII Kumayasu  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (30029152)
ENDO Katsuyoshi  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90152008)
MORITA Mizuho  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50157905)
青野 正和  大阪大学, 大学院・工学研究科, 教授 (10184053)
安武 潔  大阪大学, 工学部, 助教授 (80166503)
Project Period (FY) 1996 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥1,696,000,000 (Direct Cost: ¥1,660,000,000、Indirect Cost: ¥36,000,000)
Fiscal Year 2002: ¥156,000,000 (Direct Cost: ¥120,000,000、Indirect Cost: ¥36,000,000)
Fiscal Year 2001: ¥150,000,000 (Direct Cost: ¥150,000,000)
Fiscal Year 2000: ¥370,000,000 (Direct Cost: ¥370,000,000)
Fiscal Year 1999: ¥350,000,000 (Direct Cost: ¥350,000,000)
Fiscal Year 1998: ¥390,000,000 (Direct Cost: ¥390,000,000)
Fiscal Year 1997: ¥280,000,000 (Direct Cost: ¥280,000,000)
KeywordsPerfect surfaces / Ultra precision machining / Plasma CVM / EEM / Atmospheric pressure plasma CVD / Electrochemical machining in ultrapure water / First-principles molecular dynamics simulation / Ultra clean technology / 超純粋電解加工 / 第一原理分子動力学シュミレーション / STM
Research Abstract

"Perfect surfaces"are required in various areas of advanced technology and basic science. The objectives of the present research are to establish new ultra precision machining technology that can be used to create "perfect surfaces" with roughness less than 0.5nm PV and figure accuracy higher than 0.01μm PV for arbitrary shape, and to systematize the technology of ultra precision machining as a new paradigm of natural science.
We have constructed Ultra Clean Room with the world's top performance and conducted researches in the following fields ; 1) development of new machining process ; 2) evaluation of machined surfaces and development of new-surface evaluation techniques ; 3) development of measurement and control technology for machining process ; and 4) theoretical study of machining mechanism.
In the field 1), we have developed numerically controlled plasma chemical vaporization machining NC-PCVM) system, elastic emission machining (EEM) system, atmospheric pressure plasma chemical … More vapor deposition (AP-PCVD) process at high deposition rates, and hydroxyl electrochemical machining (HECM) process using pure water only. Ultra precision X-ray mirrors, ultra thin SOI wafers, Si thin film solar cells, and HECM damascene process are highlighted as several of numerous outcomes. An ultra precision measuring sytem of figure accuracy and an evaluation system for ultra precisely machined surfaces have been developed in 2), and a diagnostic system for atmospheric pressure plasma in 3). Based on calculated results by the originally developed first-principles methods, we have proposed HECM and clarified its machining mechanism in 4).
In summary, we have achieved to create a "perfect surface" with the roughness of three atomic layers (in 0.1μm x 0.1μm area) and the figure accuracy of 1nm PV. Cooperating with outer institutes that need perfect surfaces, we have produced a scanning X-ray microscope system and ultra thin SOI devices. These achievements well surpassed the objectives at the beginning. Less

Report

(8 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • 1996 Annual Research Report

Research Products

(707 results)

All Other

All Publications (707 results)

  • [Publications] Hidekazu Goto: "Chemisorption of the H_2O on the H-terminated Si(001) Surface"Transactions of the Materials Research Society of Japan. 20. 871-874 (1996)

    • Description
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    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazuto Yamauchi: "First-principle Analysis of Chemical Reactions between Metal-Oxide Fine Particles and Si(100) surface in EEM(Elastic Emission Machining)"Transactions of the Materials Research Society of Japan. 20. 819-822 (1996)

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      2002 Final Research Report Summary
  • [Publications] Koji Inagaki: "Investigation of Surface States on and Si(001) and Si(111) Surfaces -Photo-reflectance Measurement and Ab-initio Calculation -"Transactions of the Materials Research Society of Japan. 20. 875-878 (1996)

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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "New Measurment and Ab-initio Model Calculation of Wettability"Transactions of the Materials Research Society of Japan. 20. 827-830 (1996)

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      2002 Final Research Report Summary
  • [Publications] Katsuyoshi Endo: "OBSERVATION OF METAL ATOMS ADSORBED ON H-TERMINATED SI(001) SURFACES BY STM/STS AND ITS CONSIDERATION BASED ON AB-INITIO MOLECULAR ORBITAL CALCULATIONS"Transactions of the Materials Research Society of Japan. 20. 867-870 (1996)

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      2002 Final Research Report Summary
  • [Publications] Toshihiko Kataoka: "Development of a scanning near-field optical microscope with a probe consisting of a small spherical protrusion"Ultramicroscopy. 63. 219-225 (1996)

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      2002 Final Research Report Summary
  • [Publications] 安 弘: "光散乱法によるナノメータオーダの粒径測定法の開発(第4報)-光電子増倍管出力特性の定式化とダイナミックレンジの改善法-"蓄精密工学会誌. 62. 1198-1202 (1996)

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      2002 Final Research Report Summary
  • [Publications] H.Oyanagi: "Variable exit beam height double-crystal monochromator for high-power insertion devices"Rev.Sci.Instrum.. 67. 350-354 (1996)

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      2002 Final Research Report Summary
  • [Publications] S.Nakatani: "Structure determination of Si(111)√3x√3-Sb surface by X-ray diffraction"Surf.Sci.. 357-358. 65-68 (1996)

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      2002 Final Research Report Summary
  • [Publications] Koshichi Nemoto: "Laser beam intensity profile transformation with a fabricated mirror"Applied Optics. 36. 551-557 (1997)

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      2002 Final Research Report Summary
  • [Publications] Y.Kuwahara: "Bond-length anomaly in lnP_<1-x>As_x, monolayers on lnP(001) studied by extended x-ray absorption fine structure"J.Appl.Phys.. 82. 214-218 (1997)

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      2002 Final Research Report Summary
  • [Publications] G.Treboux: "Analysis of adsorption sites of benzene molecules on the Pd(110) surface throb ugh calculations of STM Images"J.Phys.Chem.. B101. 4620-4622 (1997)

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      2002 Final Research Report Summary
  • [Publications] Toshihiko Kataoka: "Growth of Crystalline Silicon on a Cryogenic Substrate by Photochemical Reaction in Condenced Phase"Japanese Journal of Applied Physics. 36. 7395-7398 (1997)

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      2002 Final Research Report Summary
  • [Publications] H.Kuramochi: "Site-independent adsorption of hydrogen atoms deposited from a scanning tunneling microscope tip onto a Si(111)-7x7"Jpn.J.Appl.Phys.. 36. L1343-L1346 (1997)

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      「研究成果報告書概要(和文)」より
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      2002 Final Research Report Summary
  • [Publications] 井上晴行: "レーザー光散乱法よるSiウエハ付着微粒子計測装置の開発"精密工学会誌. 63. 1117-1121 (1997)

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      2002 Final Research Report Summary
  • [Publications] Zhanghua Wu: "Intensity and Polarization Switching Behaviors of Light Emission Induced with a Scanning Tunneling Microscope"Appl.Phys.Lett.. 73. 2269-2271 (1998)

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      2002 Final Research Report Summary
  • [Publications] D.H.Huang: "Platinum Nanodot Formation by Atomic Point Contact with a Scanning Tunneling Microscope Platinum Tip"Appl.Phys.Lett.. 73. 3360-3362 (1998)

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      2002 Final Research Report Summary
  • [Publications] Chun-Sheng Jiang: "Bias Voltage-Dependent Scanning Tunneling Microscopy Images of a GaAs(110) Surface with Small Ag Clusters"Appl.Surf.Sci.. 130-132. 425-430 (1998)

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      2002 Final Research Report Summary
  • [Publications] D.H.Huang: "Dependence of Electric Field on STM Tip Preparation"Appl.Surf.Sci.. 130-132. 909-913 (1998)

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      2002 Final Research Report Summary
  • [Publications] Hideo Takino: "Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication"APPLIED OPTICS. 37. 5198-5210 (1998)

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      2002 Final Research Report Summary
  • [Publications] Katsuyoshi Endo: "Atomic Structures of Hydrogen-Terminated Si(001) Surfaces After Wet Cleaning by Scanning Tunneling Microscopy"Applied.Physics Letters. 73. 1853-1855 (1998)

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      2002 Final Research Report Summary
  • [Publications] Takeo Ushiki: "Improvement of Gate Oxide Reliability for Tantalum-Gate MOS Devices Using Xenon Plasma Sputtering Technology"IEEE TRANSACTIONS ON ELECTRON DEVICES. 45. 2349-2354 (1998)

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      2002 Final Research Report Summary
  • [Publications] Carsten Thirstrup: "Photon Emission STM using Optical Fiber Bunches"J.Surf.Analysis. 4. 152-158 (1998)

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      2002 Final Research Report Summary
  • [Publications] D.H.Huang: "STM Atom Manipulation with Different Material Tips"J.Surf.Analysis. 4. 264-267 (1998)

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      2002 Final Research Report Summary
  • [Publications] Kiyoshi Yasutake: "Molecular Beam Epitaxial Growth of AlN Single Crystalline Films on Si(111) Using Radio-Frequency Plasma Assisted Nitrogen Radical Source"J.Vac.Sci.Tech.A. 16. 2140-2147 (1998)

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      2002 Final Research Report Summary
  • [Publications] Shu Watanabe: "Achievement of Extremely High Vacuum in an Electrolytically Polished Stainless Steel Vacuum Chamber"J.Vac.Sci.Technol.A. 16. 2711-2717 (1998)

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      2002 Final Research Report Summary
  • [Publications] Shu Watanabe: "pumping Properties Using an Electrolytic Polished Stainless Steel Vacuum Chamber"J.Vac.Sci.Technol.A. 16. 3084-3087 (1998)

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      2002 Final Research Report Summary
  • [Publications] Kenji Nakagawa: "Vortex-inducde Oscillation and Lift of Yawed Circular Cylinders in Cross-flow"Journal of Fluids and Structures. 12. 759-777 (1998)

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      2002 Final Research Report Summary
  • [Publications] Hideo Takino: "Plasma Chemical Vaporization Machining(CVM) for Fabrication of Optics"Jpn.J.Appl.Phys.. 37. L894-L896 (1998)

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      2002 Final Research Report Summary
  • [Publications] Vladimir Khavryutchenko: "Supercluster Quantum-Chemical Approach to the Si(111)7x7 Surface. 2.Charge and Spin Distribution"Phys.Low-Dim.Struct.. Vol.3/4. 81-106 (1998)

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      2002 Final Research Report Summary
  • [Publications] Akira Saito: "Normal-incidence x-ray standing-wave analysis of Si(111)√3x√3-Au structure"Physical Review B. 58. 3541-3544 (1998)

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      2002 Final Research Report Summary
  • [Publications] Carsten Thirstrup: "Atomic Scale Modifications of Hydrogen-Terminated Silicon 2x1 and 3x1 (001) Surfaces by Scanning Tunneling Microscope"Surf.Sci.. 411. 203-214 (1998)

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      2002 Final Research Report Summary
  • [Publications] Zhanghua Wu: "Luminescence frog the Transition Metal Iron Induced with a Scanning Tunneling Microscope"Surf.Sci.. 415. L1032-L1036 (1998)

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      2002 Final Research Report Summary
  • [Publications] 山内和人: "EEM(Elastic Emission Machining)に関する研究-加工液中の溶存酸素がSiウエハに与える影響-"精密工学会誌. 64. 907-912 (1998)

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      2002 Final Research Report Summary
  • [Publications] 櫻井 亮: "STMリソグラフィーによるシリコンダングリングボンド細線の形成とその装飾"表面科学. 19. 708-715 (1998)

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      2002 Final Research Report Summary
  • [Publications] 青野正和: "走査プローブ法によるリソグラフィーの方向性-ナノ構造の構築からその物性や機能の計測へ-"表面科学. 19. 698-707 (1998)

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      2002 Final Research Report Summary
  • [Publications] Kenta Arima: "Atomically resolved scanning tunneling microscopy of hydrogen-terminated Si(001) surfaces after HF cleaning"Appl.Phys.Lett.. 76. 463-465 (1999)

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      2002 Final Research Report Summary
  • [Publications] Hidekazu Goto: "Chemisorption of OH on the H-terminated Si(001) surface"Computational Materials Science. 14. 77-79 (1999)

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      2002 Final Research Report Summary
  • [Publications] Kazuto Yamauchi: "First-principles simulation of removal process in EEM (Elastic Emission Machining)"Computational Materials Science. 14. 232-235 (1999)

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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "An explanation of the wetting and the mutual diffusion mechanisms of liquid metals using ab-initio atomic orbital calculation"Computational Materials Science. 14. 129-131 (1999)

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      2002 Final Research Report Summary
  • [Publications] H.Goto: "First-principles Molecular Dynamics Simulation of Metal Surfaces Interacting with OH Molecule"Transactions of the Materials Research Society of Japan. 24. 225-228 (1999)

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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "A Fundamental Study on Atomic Diffusion Phenomenon between Liquid Metal and Carbon Substrate"Transactions of the Materials Research Society of Japan. 24. 233-236 (1999)

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      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第1報)-回転電極型大気圧プラズマCVD装置の設計・試作-"精密工学会誌. 65. 1600-1604 (1999)

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      2002 Final Research Report Summary
  • [Publications] K.Yasutake: "Velocity spectrometer for a neutral atomic beam"Applied Physics B. 71. 787-793 (2000)

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      2002 Final Research Report Summary
  • [Publications] M.V.Lebedev: "valence band photoemission, band bending, and ionization energy of GaAs(100) treated in alcoholic sulfide solution"J.Appl.Phys.. 87. 289-294 (2000)

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      2002 Final Research Report Summary
  • [Publications] J.Onoe: "In situ FTIR, XPS, and STM studies of the nano-structure of a photopolymerized C60 film"Mol.Cryst.and Liq.Cryst.. 340. 689-694 (2000)

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      2002 Final Research Report Summary
  • [Publications] Yasushi Oshikane: "Scanning Near-field Optical Microscope with a sMall Spherical Protrusion Probe Excited with WGM Resonances (Invited)"Optical Memory and Neural Networks. 9. 147-168 (2000)

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      2002 Final Research Report Summary
  • [Publications] M.Sakurai: "Nanoscale growth of dilver on prepatterned hydrogen-terminated Si(001) surfaces"Phys.Rev.B. 62. 16167-16174 (2000)

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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "Development of plasma chemical vaporization machining"Rev.Sci.Instrum.. 71. 4627-4632 (2000)

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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "The study of fabrication of the X-ray mirror by numerically controlled plasma chemical vaporization machining : Development of the machine for the X-ray mirror fabrication"Rev.Sci.Instrum.. 71. 4620-4626 (2000)

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      2002 Final Research Report Summary
  • [Publications] Y.Mori: "Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials"Review of Scientific Instruments. 71. 3173-3177 (2000)

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      2002 Final Research Report Summary
  • [Publications] Kenta Arima: "Scanning Tunneling Microscopy Study Of Hydrogen-terminated Si(001) Surfaces After Wet Cleaning"Surface Science. 446. 128-136 (2000)

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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "Development of Numerically Controlled Plasma Chemical Vaporization Machining System"Technol.Repts.Osaka Univ.. 50. 63-69 (2000)

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      2002 Final Research Report Summary
  • [Publications] Y.Mori: "High-Rate Deposition of Amorphous Silicon Films by Atmospheric Pressure Plasma CVD"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 55-62 (2000)

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      2002 Final Research Report Summary
  • [Publications] Kouji INAGAKI: "Development of Surface State Evaluation Method by High Precision Photo-Reflaectance Spectrum Measurement"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 49-59 (2000)

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      2002 Final Research Report Summary
  • [Publications] Kazuto YAMAUCHI: "First-principles Molecular-Dynamics Simulations of Atomic Removal Process and Binding Energy Analysis in EEM(Elastic Emission Machining)"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 27-32 (2002)

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      2002 Final Research Report Summary
  • [Publications] Hidekazu GOTO: "First-Principles Molecular-Dynamics Simulations of Etching Process by OH Molecules"Technology Reports of the Osaka University. 50. 33-39 (2000)

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      2002 Final Research Report Summary
  • [Publications] H.Uchida: "Analysis of single Si atoms deposited on the Si(111)7x7 surface"Thin Solid Films. 369. 73-78 (2000)

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      2002 Final Research Report Summary
  • [Publications] H.Yagi: "Generation of Microwave Plasma under High Pressure and Synthesis of Diamond"Transactions of the Materials Research Society of Japan. 25. 313-316 (2000)

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      2002 Final Research Report Summary
  • [Publications] 井上智代: "新設クリーンルーム内における有機物濃度の経時変化とその発生源"クリーンテクノロジー. 10. 47-51 (2000)

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      2002 Final Research Report Summary
  • [Publications] 山内和人: "SPV(Surface Photo-Voltage)スペクトロスコピーによる超精密加工表面評価法の開発"精密工学会誌. 66. 630-634 (2000)

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      2002 Final Research Report Summary
  • [Publications] 片岡俊彦: "シリコンウエハ表面上の微粒子・微小欠陥による光散乱-散乱光強度およびレンズによる像形成の計算-"精密工学会誌. 66. 1716-1722 (2000)

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      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "プラズマCVMの開発"精密工学会誌. 66. 1280-1285 (2000)

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      「研究成果報告書概要(和文)」より
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      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "大気圧プラズマCVDシステムにおけるプロセス雰囲気の清浄化"精密工学会誌. 66. 1802-1806 (2000)

    • Description
      「研究成果報告書概要(和文)」より
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      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるアモルファスSiC薄膜の高速成膜に関する研究(第1報)-成膜速度および膜構造の検討-"精密工学会誌. 66. 907-911 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第2報)-成膜速度の高速化-"精密工学会誌. 66. 1636-1640 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大参宏昌: "中性原子ビーム速度分光装置の開発"精密工学会誌. 66. 1938-1942 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 清水正男: "半導体素子保護用ポリイミド表面のプラズマ処理"精密工学会誌. 66. 725-729 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 豊田洋通: "超高真空中での液体金属の濡れ性測定と評価(第2報)-液体金属の濡れ性と原子拡散の検討-"精密工学会誌. 66. 1120-1124 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 豊田洋通: "炭素系基板への金属原子拡散過程の分子軌道論的考察"精密工学会誌. 66. 1776-1780 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 豊田洋通: "液体金属の濡れ性に関する分子軌道計算による考察"精密工学会誌. 66. 1906-1910 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Shimizu: "Lifetime of metastable fluorine atoms"Applied Physics B. 72. 227-230 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Chiyo Inoue: "Time Variations of Organic Compound Concentrations in a Newly Constructed Cleanroom"Journal of the IEST. 44. 23-29 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Tsukamoto: "First-Principles Calculations of Conductance for Na Quantum Wire"Material Transactions. 42. 2253-2256 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Inagaki: "First-Principles Evaluations of Machinability Dependency on Powder Material in Elastic Emission Machining"Material Transactions. 42. 2290-2294 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Tsukamoto: "Geometry and Conductance of an Infinite Single-Row Gold Wire"Material Transactions. 42. 2257-2260 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Fujimoto: "Images of Scanning Tunneling Microscopy on the Si(001)-p(2×2) Reconstructed Surface"Material Transactions. 42. 2247-2252 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Okawa: "Nanoscale control of chain polymerization"Nature. 409. 683-684 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Okada: "Detailed analysis of scanning tunneling Microscopy images of the Si(001) reconstructed surface with buckled dimers"Phys.Rev.B. 63. 195324/1-195324/7 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Hirose: "Direct minimization to generate electronic states with proper occupation numbers"Phys.Rev.B. 64. 085105/1-085105/5 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Gengmin Zhang: "Scanning Tunneling Microscopy Observation of Binary Monolayers of 10,12-Ticosadiynoic Acid and Stearic Acid Deposited by Horizontal Lifting Method"Sucf.Sci.Lett.. L254-L258 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大参宏昌: "Li原子ビームのレーザーコリメーション"精密工学会誌. 67. 433-437 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "プラズマCVMによる機能材料の切断加工-内周刃型切断加工装置の試作とその切断加工特性-"精密工学会誌. 672. 295-299 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 佐々木都至: "レーザー光散乱法によるSiウエハ表面上のナノパーティクルの計測"精密工学会誌. 67. 1818-1823 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇蔵: "数値制御EEM(Elastic Emission Machining)加工システムの開発-nmオーダでの加工精度の評価-"精密工学会誌. 67. 33-38 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "数値制御プラズマCVMによるX線ミラーの加工に関する研究(第1報)-X線ミラー加工用装置の開発-"精密工学会誌. 67. 131-136 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第3報)-高速形成a-Si薄膜の電気・光学特性-"精密工学会誌. 67. 829-833 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大参宏昌: "注入同期法による色素レーザの増幅"精密工学会誌. 67. 1108-1113 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面のOH-イオンによる加工現象の第一原理分子動力学シミュレーション-"精密工学会誌. 67. 1159-1163 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面原子のOHによる加工現象の反応素過程-"精密工学会誌. 67. 1169-1174 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陰極Si(001)表面における除去加工現象の第一原理分子動力学シミュレーション-"精密工学会誌. 67. 1680-1686 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法の研究-触媒反応を利用した超純水中のOHイオンの増加方法-"精密工学会誌. 67. 932-936 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-水素終端化されていないSi(001)表面原子とOHとの反応素過程-"精密工学会誌. 67. 1321-1326 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陽極Si(001)表面の反応素過程-"精密工学会誌. 67. 1438-1442 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Takino: "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode"Appl.Optics. 41. 3971-3977 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Endo: "Atomic Image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"J.Appl.Phys.. 91. 4065-4072 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Souvorov: "Deterministic retrieval of surface waviness by means of topography with coherent X-rays"J.Synchrotron Rad.. 9. 223-228 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Yamauchi: "Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror"J.Synchrotron Rad.. 9. 313-316 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Tsukamoto: "Sudden Suppression of Electron-Transmission Peaks in Finite-Biased Nanowires"Jpn.J.Appl.Phys.. 41. 7491-7495 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 片岡俊彦(共著): "近接場ナノフォトニクスハンドブック(プローブ(3)微小球プローブなど)"オプトロニクス社. 150 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Mizuho Morita(共著): "Ultraclean Surface Processing of Silicon Wafers (42 : Native Oxide Films and Chemical Oxide Films)"Springer-Verlag. 921 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 青野正和(編著): "表面科学シリーズ5 表面の組成分析"丸善. 222 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toshihiko Kataoka(共著): "Nano-Optics(4 Apertureless Near-Field Probes)"Springer-Verlag. 321 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 森 勇藏(編著): "究極の物づくり-原子を操る-"大阪大学出版会. 96 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidekazu Goto: "Chemisorption of the H_2O on the H-terminated Si(001) Surface"Transactions of the Materials Research Society of Japan. 20. 871-874 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazuto Yamauchi: "First princple Analysis of Chemical Reactions between Metal-Oxide Fine Particles and Si(100) surface in EEM (Elastic Emission Machining)"Transactions of the Materials Research Society of Japan. 20. 819-822 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Koji Inagaki: "Investigation of Surfaces States on Si(001) and Si(111) Surfaces-Photo-reflectance Measurement and Ab-initio Calculation"Transaction of the Materials Research Society of Japan. 20. 875-878 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "New Measurment and Ab-initio Medel Calculation of Wettability"Transactions of the Materials Research Society of Japan. 20. 827-830 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Katsuyoshi Endo: "OBSERBATION OF METAL ATOMS ADSORBED ON H-TERMINATED SI(001) SURFACES BY STIM/STS AND ITS CONSIDERATION BESED ON AB-INITIO MOLECULAR ORBITAL CALCULATIONS"Transaction of the Materials Research Society of Japan. 20. 867-870 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toshihiko Kataoka: "Development of a scanning near-field optical microscope with a probe consisting of a small spherical protrusion"Ultramicroscopy. 63. 219-225 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hiroshi AN: "Designing a New Apparatus for Measuring Particle Size of Nanometer Order by Light-scattering (4th Report)-Formation for Output Characteristics of Photomultiplier and Improvement of Dynamic Range-"Journal of the Japan Society for Precision Engineering. 62. 1198-1202 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Oyanagi: "Variable exit beam height double-crystal monochromator for high-power insertion devices"Rev. Schi. Instrum. 67. 350-354 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Nakatani: "Structure determination of Si(111)√<3x>√<3>-Sb surface by X-ray diffraction"Surf. Sci.. 357-358. 65-68 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Koshichi Nemoto: "Laser beam intensity profile transformation with a fabricated mirror"Applied Optics. 36. 551-557 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Kuwahara: "Bond-length a nomaly in InP_<1-x>As_x monolayears on lnP(001) studied by extended x-ray absorption fine structure"J. Appl. Phys.. 82. 214-218 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G. Treboux: "Analysis of adsorption sites of benzene molecules on the Pd(110) surface through calculations of STM Images"J. Phys. Chem.. B101. 4620-4622 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toshihiko Kataoka: "Growth of Crystallines Silicon on a Cryogenic Substrate by Phtochemical Reaction in Condence Phase"Japanase Journal of Applied Physics. 36. 7395-7398 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Kuramochi: "Site-independent adsorption of hydrogen atoms deposited from a scanning tunneling microscope tip onto a Si(111)-7x7"Jpn. J. Appl. Phys.. 36. L1343-L1346 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Haruyuki Inoue: "Measurement of Ultra Fine Particles on the Si Wafer Surface Using a Laser Light Scattering Method"Journal of the Japan Society for Precision Engineering. 63. 1117-1121 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Zhanghua Wu: "Intensity and Polarization Switching Behaviors of Light Emission Induced with a Scanning Tunneling Microscope"Appl. Phys. Lett.. 73. 2269-2271 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] D. H. Huang: "Platinum Nanodot Formation by Atomic Point Contact with a Scanning Tunneling Microscope Platinum Tip"Appl. Phys. Lett.. 73. 3360-3362 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Chun-Sheng Jiang: "Bias Voltage-Dependent Scanning Tunneling Microscopy Images of a GaAs(110) Surface with Small Ag Clusters"Appl. Surf. Sci.. 130-132. 425-430 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] D. H. Huang: "Dependences of Electric Field on STM Tip Preparation"Appl. Surf. Sci.. 130-132. 909-913 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hideo Takino: "Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication"APPLIED OPTICS. 37. 5198-5210 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Katsuyoshi Endo: "Atomic Structure of Hydrogen Terminated Si(110) Surfaces After Wet Cleaning by Scanning Tunneling Microscopy"Applied Physics Letters. 73. 1853-1855 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Takeo Ushiki: "Improvement of Gate Oxide Reliability for Tantalum-Gate MOS Devices Using Xenon Plasma Sputtering Technology"IEEE TRANSACTION ON ELECTRON DEVICES. 45. 2349-2354 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Carsten Thirstrup: "Photon Emission STM using Optical Fiber Bunches"J. Surf. Analysis. 4. 152-158 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] D. H. Huang: "STM Atom Manipulation with Different material Tips"J. Surf. Analysis. 4. 264-267 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kiyoshi Yasutake: "Molecular Beam Epitaxial Growth of AIN Single Crystallice Films on Si(111) Using Radio-Frequence Plasma Assisted Nirogen Radical Source"J. Vac. Sci. Tech. A.. 16. 2140-2147 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shu Watanabe: "Achiebement of Extremely High Vavuum in an Electrolytically Polished Stainless Steel Vacuum Chamber"J. Vac. Sci. Technol. A. 16. 2711-2717 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shu Watanabe: "Pumping Properties Using an Electrolytic Polished Stainless Steel Vacuum Chamber"J. Vac. Sci. Technol. A. 16. 3084-3087 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kenji Nakagawa: "Vortex inducde Oscillation and Lift of Yawed Circular Cylinders in Cross-flow"Journal of Fluids and Structures. 12. 759-777 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hideo Takino: "Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics"Jpn. J. Appl. Phys.. 37. L874-L896 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Vladimir Khavrytchenko: "Supercluster Quantum-Chemical Approach to the Si(111)7x7 Surface. 2. Charge and Spin Distribution"Phys. Low-Dim. Struct.. Vol.3/4. 81-106 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Saito: "Normal-incidence x-ray standing-wave analysis of Si(111) √<3x>√<3>-Au structure"Physical Review B. 58. 3541-3544 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Carsten Thirstrup: "Atomic Scale Modifications of Hydrogen-Terminated Silicon 2x1 and 3x1(001) Surfaces by Scanning Tunneling Microscope"Surf. Sci.. 411. 203-214 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Zhanghua Wu: "Luminescence from the Transition Metal Iron Induced with a Scanning Tunneling Microscope"Surf. Sci.. 415. L1032-L1036 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazuto Yamauchi: "A Study on EEM (Elastic Emission Machining)-Influences of Dissolved Oxygen to Si Wafer Surface-"Journal of the Japan Society for Precision Engineering. 64. 907-912 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto SAKURAI: "Formation and Decoration of Silicon Dungling Bond Wire by STM Lithography"Journal of the Surface Science Society of Japan. 19. 708-715 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masakazu Aono: "Vision fo Lithography by Scanning Probe Method - From Construction of Nanostructures to Measurement of their Propertly and Function -"Journal of the Surface Science Society of Japan. 19. 698-707 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kenta Arima: "Atomically resolved scanning tunneling microscopy of hydrogen-terminated Si(001) surfaces after HF cleaning"Appl. Phys. Lett.. 76. 463-465 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidekazu Goto: "Chemisorption of OH on the H-terminated Si(001) surface"Computational Materials Science. 14. 77-79 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Kazuto Yamauchi: "First-principles simulation of removal proess in EEM (Elastic Emission Machining)"Computational Materials Science. 14. 232-235 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "An explanation of the wetting and the mutual diffusion mechanisms of liquid metals using ab-initio atomic orbital calculation"Computational Materials Science. 14. 129-131 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] H. Goto: "First-principles Molecular Dynamics Simulation of Metal Surfaces Interacting with OH Molecule"Transactions of the Material Research Society of Japan. 24. 225-228 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "A Fundamental Study on Atomic Diffusion Phenomenon between Liquid Metal and Carbon Substate"Transactions of the Materials Research Society of Japan. 24. 233-236 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "High-Rate Deposition of Amorphous Silicon Thin Films by Atmospheric Pressure Plasma Chemical Vapor Deposition (1st Report)"Journal of the Japan Society for Precision Engineering. 65. 1600-1604 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] K. Yasutake: "Velocity spectrometer for a neutral atomic beam"Applied Physics B.. 71. 787-793 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] M. V. Lebedev: "Valance band photoemission, band bending, and ionization energy of GaAs(100) treated in alcoholic salfide solution"J. Appl. Phys.. 87. 289-294 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] J. Onoe: "In situ FTIR, XPS, and STM studies of the nano-structure of a photoploymerized C60 film"Mol. Cryst. And Liq. Cryst.. 340. 689-694 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Yasushi Oshikane: "Scanning Near-field Optical Microscope with a sMall Spherical Protrusion Probe Excited with WGM Resonances (Invited)"Optical Memory and Neural Networks. 9. 147-168 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] M. Sakurai: "Nanoscale growth of dilver on prepatterned hydrogen-terminated Si(001) surfaces"Phys. Rev. B. 62. 16167-16174 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "Development of plasma chemical vaporization machining"Rev. Sci. Instrum. 71. 4627-4632 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "The study of fabrication of the X-ray mirror by numerically controlled plasma chemical vaporization maching Development of the machine for the X-ray mirror fabrication"Rev. Sci. Instrum. 71. 4620-4626 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Mori: "Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials"Review of Scientific Instruments. 71. 3173-3177 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Kenta Arima: "Scanning Tunneling Microscopy Study Of Hydrogen-terminated Si(001) Surfaces After Wet Cleaning"Surface Science. 446. 128-136 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "Development of Numerically Controlled Plasma Chemical Vaporization Machining System"Technol. Repts. Osaka Univ.. 50. 63-69 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Y. Mori: "High-Rate Deposition of Amorphous Silicon Films by Atmospheric Pressure Plasma CVD"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 55-62 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Kouji INAGAKI: "Development of Surface State Evaluation Method by High Precision Photo-Reflaectance Spectrum Measurement"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 49-54 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Kazuto YAMAUCHI: "First-principles Molecular-Dynamics Simulations of Atomic Removal Process and Binding Energy Analysis in EEM (Elastic Emission Machining)"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50. 27-32 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hidekazu GOTO: "First-Principles Molecular Dynamics Simulation of Etching Process by OH Molecules"Technology Reports of the Osaka University. 50. 33-39 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] H. Uchida: "Analysis of single Si atoms deposited on the Si(111)7x7 surface"Thin Solid Films. 369. 73-78 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] H. Yagi: "Generation of Microwave Plasma under High Pressure and Synthesis of Diamond"Transactions of the Materials Research Society of Japan. 25. 313-316 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Tomoyo Inoue: "Time Variations of Organic Compound Concentrations in a Newly Constructed Cleanroom"Clean Technology. 10. 47-51 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Kazuto YAMAUCHI: "Development of SPV (Surface Photo-voltage) Spectroscopy to Observe Finely-prepared Surface by Ultraprecision Machining Process"Journal of the Japan Society for Precision Engineering. 66. 630-634 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Toshihiko Kataoka: "Light Scattering By Small Particles And Small Defects On the Silicon Wafer Surface - Calculations Of Scattering Light Intensity And Optical Image Through A Lens"Journal of the Japan Society for Precision Engineering. 66. 1716-1722 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "Development of Plasma CVM (Chemical Vaporization Machining)"Journal of the Japan Society for Precision Engineering. 66. 1280-1285 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "Purification of the Process Environment is Atmospheric Pressure Plasma CVD System"Journal of the Japan Society for Precision Engineering. 66. 1802-1806 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "High-Rate Deposition of Amorphous Sic Films by Atmospheric Pressure Plasma Chemical Vapor Deposition (1st Report) Examination of Deposition Rate and Film Structure"Journal of the Japan Society for Precision Engineering. 66. 907-911 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "High-Rate Deposition of Atmorphous Silicon Film by Atmospheric Pressure Plasma Chemical Vapor Deposition (2nd Report) Investigation for Higher Deposition Rate"Journal of the Japan Society for Precision Engineering. 66. 1636-1640 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hiromasa Ohmi: "Development of Velocity Spectrometer for Neutral Atomic Beam"Journal of the Japan Society for Precision Engineering. 66. 1938-1942 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Masao Shimizu: "Surface Plasma Treatments of Protecting Polyimide Films for Semiconductor Devices"Journal of the Japan Society for Precision Engineering. 66. 725-729 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hiromichi Toyota: "A New Measurement and Evaluation of Wettability between Solid and Liquid Metals in Ultra-High Vacuum (2nd Report)"Journal of the Japan Society for Precision Engineering. 66. 1120-1124 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hiromichi Toyota: "A Consideration of Atomic Diffusibility of Metal on Carbon Substrate using Ab Initio Molecular Orbital Calculation"Journal of the Japan Society for Precision Engineering. 66. 1776-1780 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Hiromichi Toyota: "A Consideration of Wettability of Liquid Metal Using Ab Initio Molecular Orbital Calculation"Journal of the Japan Society for Precision Engineering. 66. 1906-1910 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] M. Shimizu: "Lifetime of metastable fluorine atoms"Applied Physics B. 72. 227-230 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Chiyo Inoue: "Time Variation of Organic Compound Concentrations in a Newly Constructed Cleanroom"Journal of the IEST. 44. 23-29 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] S. Tsukamoto: "First-Principles Calculations of Conductance for Na Quantum Wire"Material Transactions. 42. 2253-2256 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] K. Inagaki: "First-Principles Evaluations of Machinability Dependency on Powder Material in Elastic Emission Machining"Material Transactions. 42. 2290-2294 (2001)

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      「研究成果報告書概要(欧文)」より
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  • [Publications] S. Tsukamoto: "Geometry and Conductance of an Infinite Single-Row Gold Wire"Material Transactions. 42. 2257-2260 (2001)

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  • [Publications] Y. Fujimoto: "Images of Scanning Tunneling Microscopy on the Si(001)-p(2x2) Reconstructed Surface"Material Transactions. 42. 2247-2252 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Y. Okawa: "Nanoscale control of chain polymerization"Nature. 409. 683-684 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] H. Okada: "Detailed analysis of scanning tunneling microscopy images of the Si(001) reconstructed surface with buckled dimers"Phys. Rev. B. 63. 195324-1-195324-7 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] K. Hirose: "Direct minimization to generate electronic states with proper occupation numbers"Phys. Rev. B. 64. 085105-1-085105-5 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Gengmia Zhang: "Scanning Tunneling Microscopy Observation of Binary Monolayets of 10,12-Ticosadiynoic Acid and Stearic Acid Deposited by Horizontal Lifting Method"Surf. Sci. Lett.. L254-L258 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hiromasa Ohmi: "Laser Collimation of Li Atomic Beam"Journal of the Japan Society for Precision Engineering. 97. 433-437 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "Cutting og Functional Material by Plasma CVM - Development of the Cutting Machine with Inner Blade Electrode and Its Cutting Characteristics -"Journal of the Japan Society for Precision Engineering. 67. 295-299 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Satoshi SASAKI: "Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method"Journal of the Japan Society for Precision Engineering. 67. 1818-1823 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "Development of Numerically Controlled EEM (Elastic Emission Machining) System - Evaluation of Figuring Accuracy with the Range of Nanometer -"Journal of the Japan Society for Precision Engineering. 67. 33-38 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "The Study of Fabrication of the X-ray Mirror by Numerically Controlled Plasma CVM (1st Report) - Development of the Machine for the X-ray Mirror Fabrication -"Journal of the Japan Society for Precision Engineering. 67. 131-136 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "High-Rate Deposition of Amorphous Silicon Film by Atmospheric Pressure Plasma Chemical Vapor Deposition (3rd Repor) - Electrical and Optical Properties of a-Si Films Fabricated at Very high Deposition Rate -"Journal of the Japan Society for Precision Engineering. 67. 829-833 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Hiromasa Ohmi: "Amplification of Dye Laser by Injection Seeding"Journal of the Japan Society for Precision Engineering. 67. 1108-1113 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Yuzo Mori: "A Study on Electrochemical Machining Method in Ultrapure Water First-Principles Molecular-Dynamics Simulations for Etching Process of Hydrogen-Terminated Si(001) Surface by hydroxyl Ions -"Journal of the Japan Society for Precision Engineering. 67. 1159-1163 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidekazu GOTO: "A Study on Electrochemical Machining Method in Ultrapure Water - Etching Process of Hydrogen-Terminated Si(001) Surface Atom by Hydroxyl Function -"Journal of the Japan Society for Precision Engineering. 67. 1169-1174 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] Hidekazu GOTO: "A Study on Electrochemical Machining Method in Ultrapure Water - First-Principles Molecular-Dynamics Simulations for Etching Process of Si(001) Cathode Surface -"Journal of the Japan Society for Precision Engineering. 67. 1680-1686 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yuzo Mori: "A Study on Electrochemical Machining Method in Ultrapure Water - Increase of Hydroxyl Ion in Ultrapure Water by Catalytic Reaction -"Journal of the Japan Society for Precision Engineering. 67. 932-936 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidekazu GOTO: "A Study on Electrochemical Machining Method in Ultrapure Water - Etching Process of Si(001) Surface Atom by Hydroxyl Function -"Journal of the Japan Society for Precision Engineering. 67. 1321-1326 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidekazu GOTO: "A Study on Electrochemical Machining Method in Ultrapure Water - Chemical Reaction Process of Si(001) Anode Surface -"Journal of the Japan Society for Precision Engineering. 67. 1438-1442 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] H. Takino: "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode"Appl. Optics. 41. 3971-3977 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] K. Endo: "Atomic Image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"J. Appl. Phys.. 91. 4065-4072 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] A. Souvorov: "Deterministic retrieval of surface waviness by means of topography with coherent X-rays"J. Synchrotron Rad.. 9. 223-228 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] K. Yamauchi: "Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror"J. Synchrotron Rad.. 9. 313-316 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
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      2002 Final Research Report Summary
  • [Publications] S. Tsukamoto: "Sudden Suppression of Electron-Transmission Peaks in Finite-Biased Nanowires"Jpn. J. Appl. Phys.. 41. 7491-7495 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Toshihiko Kataoka: "Handbook of Near-Field Nano-photonics (Probes (3) Spherical Microcavity Probe)(Japanese)"Optronics. 150 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
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  • [Publications] Mizuho Morita: "Ultraclean Surface Processing of Silicon Wafers (42 : Native Oxide Films and Chemical Oxide Films)"Springer Verlag. 921 (1998)

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      「研究成果報告書概要(欧文)」より
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  • [Publications] Masakazu Aono: "Chemical Composition Analysis of Surface (Surface Science Series 5 )(Japanese)"Maruzen. 222 (1999)

    • Description
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  • [Publications] Toshihiko Kataoka: "Nano-Optics (4 Apertureless Near-Field Probes)"Springer-Verlag. 321 (2002)

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  • [Publications] Yuzo Mori: "Ultimate Manufacturing -Manipulating Surface Atoms- (Japanse)"Osaka Unviersity Press. 96 (2002)

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  • [Publications] Y.Mori: "Ultra-Precision Machining based on Physics and Chemistry"Proceedings of 3rd Workshop on Physical Chemistry of Wet Etching of Silicon. 10-26 (2002)

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  • [Publications] Y.Mori: "Sub-micron focusing by reflective optics for scanning x-ray microscopy"Proc. SPIE. 4782. 58-64 (2002)

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      2002 Annual Research Report
  • [Publications] A.Souvorov: "Deterministic retrieval of surface waviness by means of topography with coherent X-rays"J. Synchrotron Rad.. 9. 223-228 (2002)

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      2002 Annual Research Report
  • [Publications] H.Takino: "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode"Appl. Optics. 41. 3971-3977 (2002)

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      2002 Annual Research Report
  • [Publications] K.Yamamura: "Aspheric surface fabrication in nm-level accuracy by numerically controlled plasma CVM and EEM"Proc. SPIE. 4782. 265-270 (2002)

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      2002 Annual Research Report
  • [Publications] K.Yamauchi: "Wave-optical analysis of sub-micron focusing by reflective optics"Proc. SPIE. 4782. 271-276 (2002)

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      2002 Annual Research Report
  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射光用X線ミラーの作製とその応用-波動光学的手法を用いた必要精度の検討-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 125-126 (2002)

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      2002 Annual Research Report
  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射光用X線ミラーの作製とその応用-干渉計を利用した高精度形状計測システムの開発-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 127-128 (2002)

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  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射光用X線ミラーの作製とその応用-硬X線集光用楕円ミラーの製作-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 129-130 (2002)

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      2002 Annual Research Report
  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射光用X線ミラーの作製とその応用-プロジェクション顕微鏡用X線ミラーの作製-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 131-132 (2002)

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      2002 Annual Research Report
  • [Publications] 森 勇藏: "数値制御プラズマCVM(Chemical Vaporization Machining)によるSOIの薄膜化加工-超薄膜SOIウエハ作製のための加工精度の検討-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 133-134 (2002)

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      2002 Annual Research Report
  • [Publications] 佐藤慎也: "プラズマCVMに用いられる大気圧・高周波プラズマの分光計測-レーザー誘起蛍光分光法によるラジカル密度の分布計測-"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 135-136 (2002)

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      2002 Annual Research Report
  • [Publications] K.Yamauchi: "Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror"J. Synchrotron Rad.. 9. 313-316 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射X線用楕円ミラーの作製と集光特性の評価"精密工学会誌. 68. 1347-1350 (2002)

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  • [Publications] 石川哲也: "コヒーレント照射でのX線全反射ミラー"放射光. 15. 296-302 (2002)

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  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによる放射光用X線ミラーの作製とその応用 -硬X線顕微鏡の開発-"2002年度精密工学会秋季大会学術講演会講演論文集. 458 (2002)

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  • [Publications] 森 勇藏: "プラズマCVMおよびEEMによる放射光用X線ミラーの作製とその応用 -二枚の平面ミラーを用いたX線干渉計の開発-"2002年度精密工学会秋季大会学術講演会講演論文集. 459 (2002)

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  • [Publications] 押鐘 寧: "プラズマCVMプロセス中のCF, CF_2ラジカルの分光計測 -レーザー誘起蛍光分光と紫外線吸収分光とによるラジカル密度分布診断"2002年度精密工学会秋季大会学術講演会講演論文集. 461 (2002)

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  • [Publications] 森 勇藏: "数値制御プラズマCVM(Chemical Vaporization Machining)によるSOIの薄膜化-加工装置の開発と超薄膜SOIウエハの試作-"精密工学会誌. 68. 1590-1594 (2002)

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  • [Publications] 遠藤勝義: "高周波パルスSTM(Scanning Tunneling Microscopy)の開発"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 81-82 (2002)

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  • [Publications] 池田 学: "走査型トンネル顕微鏡による水素化アモルファスシリコン表面の構造"2002年度精密工学会関西支部地方定期学術講演会講演論文集. 83-84 (2002)

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  • [Publications] 森 勇藏: "超精密形状計測装置の開発-測定原理-"2003年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2003)

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  • [Publications] 東 保男: "超精密形状計測装置の開発-開発した計測装置の性能-"2003年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2003)

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  • [Publications] 森 勇藏: "大気圧プラズマCVD法による太陽電池用アモルファスSiの超高速成膜"精密工学会誌. 68・8. 1077-1081 (2002)

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  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるエピタキシャルSiの低温かつ高速成長(第1報)-エピタキシャルSi成長条件の検討-"精密工学会誌. (発表予定). (2003)

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  • [Publications] 江畑裕介: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究-薄膜太陽電池デバイスの分光感度特性について-"2002年度精密工学会春季大会学術講演会講演論文集. 612 (2002)

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  • [Publications] 中濱康治: "回転電極型大気圧プラズマCVD法によるSiNx膜の高速成膜に関する研究(SiH_4/NH_3系成膜)"2002年度精密工学会春季大会学術講演会講演論文集. 613 (2002)

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  • [Publications] 森 勇藏: "大気圧プラズマCVDによるSiの低温・高速エピタキシャル成長(第2報)-成膜温度と投入電力が結晶性に及ぼす影響-"2002年度精密工学会春季大会学術講演会講演論文集. 614 (2002)

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  • [Publications] 森 勇藏: "回転電極型大気圧プラズマCVD法によるSiNx膜の高速成膜に関する研究-成膜速度のパラメーター依存性-"2002年度精密工学会開催地方定期学術講演会講演論文集. 31-32 (2002)

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  • [Publications] 森 勇藏: "大気圧プラズマCVDによるSiの低温・高速エピタキシャル成長(第3報)-成膜速度と温度の関係-"2002年度精密工学会秋季大会学術講演会講演論文集. 369 (2002)

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  • [Publications] 森 勇藏: "大気圧プラズマCVD法によるSiNx薄膜の高速形成に関する研究-NH_3/SiH_4比の最適化-"2002年度精密工学会秋季大会学術講演会講演論文集. 370 (2002)

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  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法の研究-陰極表面における加工現象-"精密工学会誌. 68・9. 1241-1245 (2002)

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  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工システムの開発と平坦化加工プロセスへの応用"精密工学会誌. 68・11. 1486-1491 (2002)

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  • [Publications] 森 勇藏: "超純水超高速せん断流によるシリコンウエハ表面の洗浄-汚染微粒子の除去特性-"2002年度精密工学会春季大会学術講演会講演論文集. 609 (2002)

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  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法のダマシン配線形成プロセスへの応用"2002年度精密工学会春季大会学術講演会講演論文集. 610 (2002)

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  • [Publications] 後藤英和: "Si(001)表面の超純水によるエッチング現象の第一原理計算"日本物理学会第57回年次大会講演概要集. 57-1. 844 (2002)

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  • [Publications] 森 勇藏: "超純水・超高速せん断流による洗浄プロセスの開発"精密工学会2002年度関西地方定期学術講演会講演論文集. 141-142 (2002)

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  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法の研究"2003年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2003)

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  • [Publications] 森 勇藏: "水の化学的機能を利用した新しい生産プロセス"精密工学会誌. 68・8. 1001-1003 (2002)

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  • [Publications] 森 勇藏: "超純水のみによる電気化学的加工法の研究"電気加工学会誌. (発表予定). (2003)

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  • [Publications] T.Ono: "Coherent relation between structure and conduction of infinite atomic wires"Nanotechnology. 14. 299-303 (2003)

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  • [Publications] Yoshitaka Fujimoto: "First -principles calculation method of electron-transport properties of metallic nanowires"Nanotechnology. 14. 147-151 (2003)

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  • [Publications] S.Tsukamoto: "Sudden Suppression of Electron-Transmission Peaks in Finite-Biased Nanowires"Jpn. J. Appi. Phys. 41. 7491-7495 (2002)

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  • [Publications] Shigeru Tsukamoto: "Electron-transport properties of Na nanowires under applied bias voltages"Phys. Rev. B. 66. 161402 1-161402 4 (2002)

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  • [Publications] H.Okada: "First -principles molecular-dynamics calculations and STM observations of dissociative adsorption of Cl_2 and F_2 on Si(001) surface"Surface Science. 515・2-3. 287-295 (2002)

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  • [Publications] K.Endo: "Atomic Image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"J. Appl. Phys.. 91・7. 4065-4072 (2002)

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  • [Publications] 広瀬喜久治: "スーパーコンピューターを用いたシミュレーションによる超精密加工プロセス・ナノ電子デバイスの解析"東北大学情報シナジーセンターSENAC. 35・3. 59-66 (2002)

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  • [Publications] 和田万里子: "第一原理分子動力学法によるCVDエピタキシャルSi薄膜形成過程の解析"精密工学会2002年度関西地方定期学術講演会講演論文集. 99-100 (2002)

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  • [Publications] 椙本欧介: "EEM加工機構の第一原理分子動力学シミュレーションによる解明-Gaas表面とSiO_2微粒子との相互作用-"精密工学会2002年度関西地方定期学術講演会講演論文集. 101-102 (2002)

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  • [Publications] 島名智子: "カーボンナノチューブにおける水分子輸送の第一原理分子動力学による解析"精密工学会2002年度関西地方定期学術講演会講演論文集. 103-104 (2002)

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  • [Publications] 池田裕志: "ハロゲンガスを用いたSi表面のプラズマエッチングにおける第一原理分子動力学シミュレーション-Oラジカルによるハロゲン生成の解析-"日本物理学会2002年秋季大会. 57・2. 749 (2002)

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  • [Publications] 藤本義隆: "金原子細線と電極構造に関わる電気伝導特性"日本物理学会2002年秋季大会. 57・2. 750 (2002)

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  • [Publications] 塚本 茂: "第一原理計算による電界下でのナノ構造と電気伝導"日本物理学会2002年秋季大会. 57・2. 751 (2002)

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  • [Publications] K.Hirose: "First-principles calculation of electron-transfport properties of metaric nanowires"Trends in Nanotechnology 02. 41 (2002)

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  • [Publications] 江上喜幸: "第一原理計算によるナノチューブの電気伝導特性の予測"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 藤本義隆: "金原子細線の電気伝導特性"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 山崎秀樹: "第一原理分子動力学法を用いたNafion-水クラスター間のプロトンリレーのシミュレーション"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 大谷めぐみ: "第一原理計算によるフラーレン鎖の電気特性の解析"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 稲垣耕司: "異なる結晶面方位を持つSi表面の光反射率スペクトルの差の解析-(100)と(111)の比較-"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 塚本 茂: "有限電圧下のナノワイヤーにおける負の微分コンダクタンス発生メカニズムの解明"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] 小野倫也: "金属単原子鎖の構造と安定性II"日本物理学会2003年春季大会. (発表予定). (2003)

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  • [Publications] Kikuji Hirose: "First principle study on electron transport through nanometer-scale junctions"第4回日仏ナノマテリアルワークショップ. (発表予定). (2003)

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  • [Publications] Y.Mori: "Activities on Perfect Surfaces in Osaka University, Ultra Precision Machining Research Center"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 3-32 (2001)

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  • [Publications] Y.Mori: "Development of Elastic Emission Machining and Plasuta Chemical Vaporization Machining System to Fabricate X-Ray Opics for 3rd and 4th Generation Synchrotron Facilities"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 42-54 (2001)

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  • [Publications] Y.Mori: "Flattening Si (001) Surface by EEM (Elastic Emission Machining)"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 61-66 (2001)

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  • [Publications] K.Inagaki: "First-Principles Evaluations of Machinability Dependency on Power Material in Elastic Emission Machining"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 67-71 (2001)

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  • [Publications] H.Goto: "A Study on Electrocheinical Machining Method in Ultrapure Water-First-Principles Molecular-Dynamics Simulations for Etching Process of Si(001) Cathode Surface-"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 80-85 (2001)

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  • [Publications] Y.Mori: "Dissociation Process of Water Molecule by Catalytic Reaction and Application to Electrocheniical Machining in Ultrapure Water(1st Report)"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 86-95 (2001)

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  • [Publications] Y.Mori: "Dissociation Process of Water Molecule by Catalytic Reaction and Application to Electrocheuiical Machining in Ultrapure Water(2nd Report)"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 96-102 (2001)

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  • [Publications] Y.Mori: "Development of Electrocheiaical Machining System in Ultrapure Water and Application to Plananization Hachining Process"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 103-109 (2001)

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  • [Publications] Y.Higashi: "A New Designed Ultra-High Precision Profiler for SR Mirrors"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 113-120 (2001)

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  • [Publications] Y.Oshikane: "Point Diffraction Interferoineter Using 2 Optical Fiber Point Sources"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 121-126 (2001)

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  • [Publications] H.Inoue: "Measurement of Ultra-Fine Particles and Micro Defects on Si Wafer Surface by Laser Light Scattering"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 131-135 (2001)

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  • [Publications] Y.Oshikane: "Scanning Near-Filed Optical Microscope with a Spherical Microcavity Probe"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 136-140 (2001)

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  • [Publications] K.Endo: "SREM/STN Observation of the Hydrogen-Terminated Si (001 ) Surface in Heating-up Process after Wet Cleaning"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 141-145 (2001)

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  • [Publications] M.Morita: "Ultrathin Dielectric Films for Next Generation Semiconductor Devices"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 155-160 (2001)

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  • [Publications] S.Sasaki: "Measurement of Nanoparticles and Defects by Laser Light Scattering on Si Wafer Surface with Ellipsoidal Reflector"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 161-166 (2001)

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  • [Publications] Y.Mori: "Numerically Controlled Thinning of SOI by Plasma CVM"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 167-172 (2001)

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  • [Publications] Y.Mori: "High-Rate Deposition of Device-Grade Amorphous Si by Atmospheric Pressure Plasma CVD"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 187-192 (2001)

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  • [Publications] Y.Mori: "Hydrogenated Amorphous Sil-xCx Filuis Fabricated at Extremely High Deposition Rate by Atmospheric Pressure Plasma CVD"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 199-204 (2001)

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  • [Publications] Y.Mori: "High-Rate Growth of Epitaxial Si by Atmospheric Pressure Plasma CVD"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 205-210 (2001)

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  • [Publications] Y.Mori: "Epitaxial Growth of Si by Atmospheric Pressure Plasma CVD -Growth Rate and Crystallinity-"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 211-215 (2001)

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  • [Publications] Y.Mori: "Epitaxial Growth of Si by Atmospheric Pressure Plasma CVD -Effects of Temperature and Plasma Power on Crystallinity of the Si films"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 216-220 (2001)

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  • [Publications] M.Nakano: "Numerical Simulation of Reactive Gas Flow in Atmospheric Pressure Plasma Chemical Vapor Deposition (AP-PCVD) Process"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for AAtomistic Production Engineering. 221-226 (2001)

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  • [Publications] H.Toyota: "High Rate Synthesis of Diamond by Plasma CVD under Higher Pressure than Atmospheric Pressure"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 227-232 (2001)

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  • [Publications] Y.Oshikane: "Optical Emission Spectroscopy and Laser Induced Fluorescence Spectroscopy of CF and CF2 Radicals in Capacitive Atmospheric VHF Plasma"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 233-238 (2001)

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  • [Publications] Y.Kuwahara: "Control of Spatial Distribution of Self-Assembled Organic Molecules on the Solid Surface"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 248-250 (2001)

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  • [Publications] H.Ohmi: "Formation of Monochromatic Atomic Beam for Nanofabrication"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 251-256 (2001)

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  • [Publications] A.Saito: "Strucural Analysis of One-Dimensional Nano-Architecture by X-ray Standing Wave Method"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 257-261 (2001)

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  • [Publications] T.Ono: "Development of First-Principle Moleculer-Dynamics Simulation Program Based on Real-Space Finite-Difference Method"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 278-284 (2001)

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  • [Publications] S.Tsukamoto: "Electronic State Calculation for the Nanostructure Based on Lippmann-Schwinger Equation"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 285-289 (2001)

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  • [Publications] Y.Fujimoto: "First-Principle Calculation of Surface States on Semi-Infinite System"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 290-294 (2001)

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  • [Publications] H.Okada: "First-Principles Molecular-Dynamics Calculation and STI4 Observation of Dissociative Adsorption of C12 and F2 on Si(001) Surface"Proceedings of the COE International Symposium on Ultraprecision Science and Technology for Atomistic Production Engineering. 295-299 (2001)

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  • [Publications] 森勇藏: "プラズマCVMによるSOIの数値制御薄膜化-加工面のデバイス特性評価-"2001年度精密工学会秋季学術講演会講演論文集. 228 (2001)

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  • [Publications] 森勇藏: "数値制御プラズマCVMによるX線ミラーの加工に関する研究(第2報)"2001年度精密工学会秋季学術講演会講演論文集. 229 (2001)

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  • [Publications] 瀧野日出雄: "プラズマCVMによる光学部品の超精密加工-薄肉光学部品の加工特性-"2001年度精密工学会秋季学術講演会講演論文集. 230 (2001)

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  • [Publications] 柴原正文: "プラズマCVMにおける高融点金属材料の加工特性"2001年度精密工学会秋季学術講演会講演論文集. 231 (2001)

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  • [Publications] 森勇藏: "プラズマCVMにおける基礎研究-単結晶シリコンの加工における加工条件と表面粗さの相関-"2001年度精密工学会秋季学術講演会講演論文集. 233 (2001)

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  • [Publications] Hideo Takino: "Removal Characteristics of Plasma Chemical Vaporization Machining with a Pipe Electrode"Proc. 2nd International Conference of European Society for Precision Engeneering and Nanotechnology. 58-61 (2001)

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  • [Publications] Y.Mori: "Developuient of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics"Proc. SPIE 4501. 30-42 (2001)

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  • [Publications] 山内和人: "Elastic Emission Machining における表面原子除去過程の解析とその機構の電子論的な解釈"精密工学会誌. 68・3. 456-460 (2002)

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  • [Publications] 森勇藏: "EEM(Elastic Emission Machining)による超精密数値制御加工に関する研究(第3報)-形状修正加工の高精度化-"2001年度精密工学会秋季学術講演会講演論文集. 239 (2001)

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  • [Publications] 森勇藏: "超清浄EEM(Elastic Emission Machining)システムに関する研究(第2報)-原子像による加工表面の評価-"2001年度精密工学会秋季学術講演会講演論文集. 238 (2001)

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  • [Publications] 森勇藏: "プラズマCVMおよびEEMによるX線光学素子の加工と放射光による評価"2001年度精密工学会秋季学術講演会講演論文集. 240 (2001)

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  • [Publications] 森勇藏: "プラズマCVMおよびEEMによるシンクロトロン放射x線用楕円ミラーの作製と集光特性の評価"精密工学会誌. (投稿中).

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  • [Publications] 森勇藏: "超清浄EEM(Elastic Emission Machining)加工システム開発-加工表面の原子レベルでの評価-"2001年度精密工学会秋季学術講演会講演論文集. (2002)

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  • [Publications] 森勇藏: "数値制御プラズマCVMおよび数値制御EEMによる硬X線集光用超標精密非球面ミラーの加工"2001年度精密工学会秋季学術講演会講演論文集. (2002)

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  • [Publications] 森勇藏: "数値制御プラズマCVMおよびEEMによるX線平面ミラーの加工と放射光による評価"2001年度精密工学会秋季学術講演会講演論文集. (2002)

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  • [Publications] 森勇藏: "プラズマCVMによるSOIの数値制御薄膜化-薄膜化した8インチSOIウエハのデバイス特性-"2001年度精密工学会秋季学術講演会講演論文集. (2002)

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  • [Publications] Kazuto YAMAUCHI: "Figuring with subnanoineter-level accuracy by numerically controlled elastic emission machining"Review of Scientific Instruments. (投稿中).

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  • [Publications] Kazuto Yamauchi: "Nearly diffraction-limited line focusing of hard X-raybeaia with elliptically figured mirror"Synchrotoron Radiation. (投稿中).

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  • [Publications] 森勇藏: "大気圧プラズマCVDによるSiの高速エピタキシャル成長"2001年度精密工学会秋季学術講演会講演論文集. 249 (2001)

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  • [Publications] 森勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第3報)-高速形成a-Si薄膜の電気・光学特性-"精密工学会誌. 67・5. 829-833 (2001)

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  • [Publications] 江畑裕介: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究-太陽電池変換効率のパラメータ依存性について-"2001年度精密工学会秋季学術講演会講演論文集. 252 (2001)

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  • [Publications] 森勇藏: "大気圧プラズマCVDにより高速形成したa-SiC薄膜の光学的特性"2001年度精密工学会秋季大会講演論文集. 248-248 (2001)

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  • [Publications] 森勇藏: "大気圧プラズマCVDによるSiの高速エピタキシャル成長(第2報)-成膜温度と投入電力が結晶性に及ぼす影響-"2002年度精密工学会春季学術講演会講演論文集. (2002)

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  • [Publications] 江畑裕介: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究"2002年度精密工学会春季学術講演会講演論文集. (2002)

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  • [Publications] 中濱康治: "回転電極型大気圧プラズマCVD法によるSiNx膜の成膜過程に関する研究"2001年度精密工学会秋季学術講演会講演論文集. 247 (2001)

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  • [Publications] 中濱康治: "回転電極型大気圧プラズマCVD法によるSiNx膜の成膜過程に関する研究-SiH4/NH3系成膜-"2002年度精密工学会春季学術講演会講演論文集. (2002)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工システムの開発と平坦化加工プロセスへの応用"精密工学会誌. (投稿中). (2002)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工システムの開発と平坦化加工プロセスへの応用"精密工学会2001年度秋季学術講演会講演論文集. 227-227 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工プロセスの第一原理分子動力学シュミレーション"超精密. 11(印刷中). (2001)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法のダマシン配線形成プロセスへの応用"精密工学会2002年度春季大会学術講演会講演論文集. (発表予定). (2002)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面のOH-イオンによる加工現象の第一原理分子動力学シュミレーション-"精密工学会誌. 67・7. 1159-1163 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面原子のOHによる加工現象の反応素過程-"精密工学会誌. 67・7. 1169-1174 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陰極Si(001)表面における除去加工現象の第一原理分子動力学シュミレーション-"精密工学会誌. 67・10. 1680-1686 (2001)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法の研究-陰極表面における加工現象"精密工学会誌. (投稿中).

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法の研究-触媒反応を利用した超純水のOH-イオンの増加方法"精密工学会誌. 67・6. 932-936 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-水素終端化されていないSi(001)表面原子とOHとの反応素過程-"精密工学会誌. 67・8. 1321-1326 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陽極Si(001)表面の反応素過程-"精密工学会誌. 67・9. 1438-1442 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陰極表面における加工現象-"精密工学会2001年度秋季大会学術講演会講演論文集. 225-225 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-加工現象の第一原理分子動力学シュミレーション-"精密工学会2001年度秋季大会学術講演会講演論文集. 224-224 (2001)

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の第一原理分子動力学シュミレーション-陰極におけるAl(001)表面加工現象"精密工学会2001年度秋季大会学術講演会講演論文集. 226-226 (2001)

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  • [Publications] 森勇藏: "超純水超高速せん断流によるシリコンウエハ表面の洗浄-汚染微粒子の除去特性-"精密工学会2002年度春季大会学術講演会講演論文集. (発表予定). (2001)

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  • [Publications] 押鐘寧: "3次元境界要素法を用いた走査型近接場光学顕微鏡用の微粒子プローブ周りの電磁場伝搬解"2001年度精密工学会秋季学術講演会講演論文集. 208-208 (2001)

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  • [Publications] Yasushi Oshikane: "CFx Radicals and Electric Field Measurement in Capacitive VHF Plasma at Atmosphere by Laser Induced Fluorescence and Optical Emission Spectroscopy"Proceedings of XXV ICPIG (International Conference on Phenomena in Ionized Gases)(Nagoya, Japan). 1. 181-182 (2001)

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  • [Publications] Hiromi Okada: "Detai led analysis of scanning tunneling microscopy images of the Si(001) reconstructed surface with buckled dimmers"Phys. Rev. B. 63・19. 195324-195327 (2001)

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  • [Publications] 稲垣耕司: "EEM(Elastic Emission Machining)における表面原子除去能率の考察"日本物理学会講演概要集. 57・1(to be pulished). (2002)

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  • [Publications] 森田諭: "昇温過程精密制御よる極薄シリコン酸化膜形成"第62回応用物理学会学術講演会講演予稿集. 628-628 (2001)

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  • [Publications] 奥山敦: "極薄シリコン酸化膜電気的特性の超純水洗浄依存性"第62回応用物理学会学術講演会講演予稿集. 628-628 (2001)

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  • [Publications] Satoru MORITA: "Tunneling Current through Ultra-Thin Silicon Dioxide Films Formed by Controlling Preoxide in Heating-up"Extended Abstracts of International Workshop Gate Insulatorot. 110-113 (2001)

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  • [Publications] N.Hirashita: "Study on temperature calibration of a silicon substrate in a temperature prograimned desorption analysis"Journal of Vacuum Science & Technology A. 19・4. 1255-1260 (2001)

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  • [Publications] Atsushi OKUYAMA: "Effects of Wafer Cleaning with Ultrapure Water on Tunneling Current through Ultra-Thin Silicon Dioxide Films"Extended Abstracts of the 7th Workshop on FOR MATION, CHARACTERIZATION AND RELIABILITY OF ULTRATHIN SILICON OXIDES. 241-244 (2002)

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  • [Publications] Yasushi Oshikane: "Electric Impedance Measurement and Pulsed OPO Laser Induced Fluorescence Study of Capacitevely Coupled VHF Plasma (He/CF4/02) at Atmospheric Pressure for Chemical Vaporization Machining (CVM) Process"Bulletin of The American Physical Society, Program of The 54th Annual Gaseous Electronics Conference. 46・6. 62-62 (2001)

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  • [Publications] Satoru MORITA: "Formation of Ultra-thin Silicon Dioxide Films under Muiulti-Temaperature Condition"Extended Abstracts of the 7th Workshop on FORMATION, CHARACTERIZATION AND RELIABILITY OF ULTRATHIN SILICON OXIDES. 165-168 (2002)

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  • [Publications] 青野正和: "ナノワイヤーの電気伝導"学術月報. 54. 989-995 (2001)

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  • [Publications] 尾上順: "フラーレンポリマーの構造・性質・応用?新しいパイ電子共役系炭素物質相?"材料科学. 38. 241-249 (2001)

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  • [Publications] 中山知信: "マクロとミクロをむすびつけるために-フラーレンポリマー形成のナノスコピック観察-"バウンダリー誌. 17. 30-36 (2001)

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  • [Publications] J.Onoe: "A New form of carbon material using C60 fullerene"RIKEN Review. No.38. 7-8 (2001)

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  • [Publications] J.Nakamura: "Anisotropic electronic structure of the Si(111)-(4x1) In surface"Phys. Rev.. B63. 193307-1-193307-4 (2001)

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  • [Publications] Y.Okawa: "Linear chain polymerization initiated by a scanning tunneling microscope tip at designated positions"J. Chem. Phys.. 115. 2317-2322 (2001)

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  • [Publications] T.Kobayashi: "Luminescence from Er-doped Si film grown by solid phase epitaxy"RIKEN Review. No.38. 23-25 (2001)

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  • [Publications] T.Yamazaki: "Mutual inductance of small solenoid coil equipped with scanning tunneling electron microscope"Materials Transactions. 42. 1705-1709 (2001)

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  • [Publications] Y.Okawa: "Nanowire connection using chain polmerization"RIKEN Review. No.37. 3-6 (2001)

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  • [Publications] K.Terabe: "Quantum point contact switch realized by solid electrochemical reaction"RIKEN Review. No.37. 7-8 (2001)

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  • [Publications] 大川祐司: "分子の鎖でナノワイヤーをつくる"化学. 57. 21-23 (2002)

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  • [Publications] H.Sakurai: "Scanning tunneling microscope-induced light emission from nanostructures formed by Ag clusters"Phys. Rev.. B64. 045402-1-045402-4 (2001)

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  • [Publications] J.Nakainura: "Structural and cohesive properties of a C60 monolayer"Phys. Rev. Lett.. 87. 048301-1-048301-4 (2001)

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  • [Publications] J.Nakamura: "Structural stability and electronic states of gold nanowires"Surf. Sci.. 482-485. 1266-1271 (2001)

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  • [Publications] S.Nakatani: "Study of the Si(111)" 5x5" -Cu surface structure by X-ray diffraction and scanning tunneling microscopy"Jpn. J. Appl. Phys.. 40. L695-L697 (2001)

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  • [Publications] J.Onoe: "The Nanostructure of C60 Photopolymers"Springer Series in Cluster Physics "Cluster and Nanomaterials", Eds. Kawazoe, Kondow, Ohno, Springer-Verlag, Berlin. 135-169 (2002)

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  • [Publications] Yuzo Mori: "Development of Numerically Controlled Plasma Chemical Vaporization Machining System"Technol.Repts.Osaka Univ.. 50・2374. 63-69 (2000)

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  • [Publications] 森勇藏: "大気圧プラズマによる超精密加工と高速成膜"精密工学会誌. 66・4. 517-522 (2000)

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  • [Publications] 森勇藏: "数値制御プラズマCVMによるX線ミラーの加工に関する研究(第1報)"精密工学会2000年度関西地方定期学術講演会講演論文集. 27-28 (2000)

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  • [Publications] 森勇藏: "数値制御プラズマCVMによるSOIウエハの薄膜化"精密工学会2000年度関西地方定期学術講演会講演論文集. 29-30 (2000)

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  • [Publications] 森勇藏: "大気圧・高周波プラズマのインピーダンス計測-電磁場解析による測定原理の検証と測定結果について-"精密工学会2000年度関西地方定期学術講演会講演論文集. 79-80 (2000)

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  • [Publications] 森勇藏: "プラズマCVMの開発"精密工学会誌. 66・8. 1280-1285 (2000)

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  • [Publications] Yuzo Mori: "The study of fabrication of the X-ray mirror by numerically controlled plasma chemical vaporization machining : Devlopment of the machine for the X-ray mirror fabrication"Rev.Sci.Instrum.. 71・12. 4620-4626 (2000)

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  • [Publications] Yuzo Mori: "Development of plasma chemical vaporization machining"Rev.Sci.Instrum.. 71・2. 4627-4632 (2000)

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  • [Publications] 森勇藏: "数値制御プラズマCVMによるX線ミラーの加工に関する研究(第1報)-X線ミラー加工用装置の開発-"精密工学会誌. 67・1. 131-136 (2000)

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  • [Publications] 森勇藏: "プラズマCVMによる機能材料の切断加工-内周刃型切断加工装置の試作とその切断加工特性-"精密工学会誌. 67・2. 295-299 (2000)

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  • [Publications] Yuzo Mori: "Development of New Machining Processes for Ultra Precision Surface Preparation-EEM, Plasma CVM and Atmospheric Pressure Plasma CVD-"Book of Lecture Notes, Second International School on Crystal Growth Technology, Zao. 212-233 (2000)

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  • [Publications] 山村和也: "プラズマCVM(Chemical Vaporization Machining)による超精密加工"表面科学. 22・3. 160-166 (2000)

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  • [Publications] 大参宏昌: "中性原子ビーム速度分光装置の開発"精密工学会誌. 66・12. 1938-1942 (2000)

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  • [Publications] K.Yasutake: "Velocity spectrometer for a neutral atomic beam"Applied Physics B. 71・6. 787-793 (2000)

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  • [Publications] 大参宏昌: "Li原子ビームのレーザーコリメーション"精密工学会誌. 67・3. 433-437 (2001)

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  • [Publications] M.Shimizu: "Lifetime of metastable fluorine atoms"Applied Physics B. 72・2. 227-230 (2001)

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  • [Publications] 清水正男: "半導体素子保護用ポリイミド表面のプラズマ処理"精密工学会誌. 66・5. 725-729 (2000)

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  • [Publications] Hidekazu GOTO: "First-Principles Molecular-Dynamics Simulations of Etching Process by OH Molecules"Technol.Repts.Osaka Univ.. 50・2370. 33-39 (2000)

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法の研究-触媒反応を利用した超純水中のOH-イオンの増加方法-"精密工学会誌. (投稿中).

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  • [Publications] 森勇藏: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面のOH-イオンによる加工現象の第一原理分子動力学シミュレーション-"精密工学会誌. (投稿中).

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-Si(001)水素終端化表面原子のOHによる加工現象の反応素過程-"精密工学会誌. (投稿中).

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-水素終端化されていないSi(001)表面原子とOHとの反応素過程-"精密工学会誌. (投稿中).

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  • [Publications] 後藤英和: "超純水のみによる電気化学的加工法の研究-陽極Si(001)表面の反応素過程-"精密工学会誌. (投稿中).

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  • [Publications] 井上晴行: "レーザー光散乱法によるSiウエハ表面上の微小欠陥の観察"精密工学会2000年度関西地方定期学術講演会講演論文集. 99-100 (2000)

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  • [Publications] 片岡俊彦: "シリコンウエハ表面上の微粒子・微小欠陥による光散乱-散乱光強度およびレンズによる像形成の計算-"精密工学会誌. 66・11. 1716-1722 (2000)

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  • [Publications] 押鐘寧: "大気圧・高周波CF_4プラズマにおけるレーザー誘起蛍光分光法を用いたCFおよびCF_2ラジカルの計測"第48回応用物理学関係連合講演会講演予稿集. 30aA10 (2001)

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  • [Publications] 押鐘寧: "微小球内のWGM共振を利用した走査型近接場光学顕微鏡の開発"2000年度精密工学会秋季大会学術講演会講演論文集. 293 (2000)

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  • [Publications] 押鐘寧: "共振球プローブを用いた走査型近接場光学顕微鏡の開発-標準試料の走査結果とプローブの性能評価-"2000年度精密工学会春季大会学術講演会講演論文集. L68 (2000)

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  • [Publications] 押鐘寧: "大気圧・高周波プラズマの計測と制御 -発光分光を中心としたCVM用プラズマ中のフリーラジカル密度の分光計測-"2000年度精密工学会春季大会学術講演会講演論文集. E84 (2000)

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  • [Publications] 井上晴行: "光散乱法によるSiウエハ表面上のナノ形状欠陥の計測"2000年度精密工学会秋季大会学術講演会講演論文集. 60 (2000)

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  • [Publications] 押鐘寧: "高分解能レーザ分光法を用いた大気圧・高周波CVMプラズマ中のCFxラジカル粒子の時空間分解密度計測"2000年度精密工学会秋季大会学術講演会講演論文集. 479 (2000)

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  • [Publications] Kenta Arima: "Scanning Tunneling Microscopy Study of Hydrogen-terminated Si(001)Surfaces After Wet Cleaning"Surface Science. 446・1-2. 128-136 (2000)

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  • [Publications] 池田和浩: "ファイバ端からの回折球面波を用いた位相シフト干渉計の開発"第47回応用物理学関係連合講演会講演予稿集. 1002 (2000)

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  • [Publications] 片岡俊彦: "光散乱法によるシリコンウエハ表面上の微粒子・微小欠陥の計測I理論"第47回応用物理学関係連合講演会講演予稿集. 791 (2000)

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  • [Publications] 井上晴行: "光散乱法によるシリコンウエハ表面上の微粒子・微小欠陥の計測II微粒子計測"第47回応用物理学関係連合講演会講演予稿集. 792 (2000)

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  • [Publications] 片岡俊彦: "光散乱法によるシリコンウエハ表面上の微粒子・微小欠陥の計測III表面欠陥計測"第47回応用物理学関係連合講演会講演予稿集. 792 (2000)

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  • [Publications] 有馬健太: "STMによる希HF洗浄後の水素終端化Si(001)表面の原子構造の観察"第47回応用物理学関係連合講演会講演予稿集. 805 (2000)

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  • [Publications] 大参宏昌: "単色Li原子ビームの生成とナノリソグラフィーへの応用"2000年度精密工学会春季大会学術講演会講演論文集. 379 (2000)

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  • [Publications] 大参宏昌: "原子光学用レーザーの周波数安定化と光の増幅"2000年度精密工学会春季大会学術講演会講演論文集. 380 (2000)

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  • [Publications] 大参宏昌: "注入同期による狭帯域シングルモード色素レーザーの増幅"精密工学会2000年度関西地方定期学術講演会講演論文集. 67-68 (2000)

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  • [Publications] 森勇蔵: "超清浄EEM(Elastic Emission Machining)システムに関する研究(第1報)、シリコン表面の平坦化および評価"2000年度精密工学会春季大会学術講演会講演論文集. 190 (2000)

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  • [Publications] 森勇蔵: "EEM(Elastic Emission Machining)による超精密数値制御加工に関する研究(第1報)、nmオーダの形状修正加工システムの開発"2000年度精密工学会春季大会学術講演会講演論文集. 195 (2000)

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  • [Publications] 森勇蔵: "EEM(Elastic Emission Machining)による超精密数値制御加工に関する研究(第2報)"精密工学会2000年度関西地方定期学術講演会講演論文集. 25-26 (2000)

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  • [Publications] 山内和人: "SPV(Surface Photo-Voltage)スペクトロスコピーによる超精密加工表面評価法の開発"精密工学会誌. 66・4. 630-634 (2000)

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  • [Publications] 森勇蔵: "数値制御EEM(Elastic Emission Machining)加工システムの開発-nmオーダでの加工精度の評価-"精密工学会誌. 67・4. 33-38 (2001)

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  • [Publications] K.NISHIMURA: "Ultrathin Silicon Dioxide Film Formation by Precise Control of Heating-up Process in Thermal Oxidation"Extended Abstracts of the 6th Workshop on FORMATION, CHARACTERIZATION AND RELIABILITY OF ULTRATHIN SILICON OXIDES. 6. 291-294 (2001)

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  • [Publications] 有馬健太: "湿式洗浄Si(001)水素終端化表面のSTM観察と第一原理計算による考察"シリコンテクノロジー分科会第4回ミニ学術講演会特集号. 17. 10-13 (2000)

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  • [Publications] H.Okada: "Detailed analysis of scanning tunneling microscopy images of the Si(001)reconstructed surface with buckled dimmers"Phys.Rev.B. (in press).

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  • [Publications] Satoshi SASAKI: "Evaluation of Particles on a Si Wafer before and after Cleaning Using a New laser particle Counter"PROCEEDINGS OF THE NINTH INTERENATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING. 317-320 (2000)

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  • [Publications] 安弘: "微粒子測定機を用いたSiウエハの洗浄効果の測定と表面評価"精密工学会2000年度関西地方定期学術講演会講演論文集. 101-102 (2000)

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  • [Publications] 安弘: "微粒子測定機によるナノメータオーダのSiウエハ表面形状の測定"2000年度砥粒加工学会学術講演会講演論文集. 401-402 (2000)

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  • [Publications] 安弘: "光散乱法を用いた粒径測定法"戦略的砥粒加工技術専門委員会第3回オープンシンポジウム. 81-90 (2000)

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  • [Publications] 安弘: "微粒子測定機による粗さ測定法とSiウエハ表面評価"2000年度精密工学会秋季学術講演会講演論文集. 286

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  • [Publications] 安弘: "光散乱法を用いたSiウエハのナノ表面構造およびナノ微粒子の測定"第48回応用密理学関係連合講演会講演予稿集. (予定). (2001)

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  • [Publications] 佐々木都至: "光散乱法を用いた複合表面評価システムによるSiウエハ表面ナノ構造評価"2001年度精密工学会春季学術講演会講演論文集. (予定). (2001)

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  • [Publications] 神尾豪: "EEM(Elastic Emission Machining)における加工機構の解明-ZrO_2微粒子とSi表面との反応過程の解明-"精密工学会2000年度関西地方定期学術講演回講演論文集. 19-20 (2000)

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  • [Publications] 稲田敬: "ハロゲンによるSi表面エッチング過程の第一原理分子動力学シミュレーション-ハロゲン原子によるSi(001)表面原子の挙動-"精密工学会2000年度関西地方定期学術講演回講演論文集. 21-22

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  • [Publications] 大橋和朗: "実空間差分法による水分子解離過程の第一原理分子動力学シミレーション"精密工学会2000年度関西地方定期学術講演回講演論文集. 23-24 (2000)

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  • [Publications] Kazuto YAMAUCHI: "First-principles Molecular-Dynamics Simulations of Atomic Removal Process and Binding Energy Analysis in EEM (Elastic Emission Machining)"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50・2369. 27-32 (2000)

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  • [Publications] Kouji INAGAKI: "Development of Surface State Evaluation Method by High Precision Photo-Reflaectance Spectrum Measurement"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. 50・2369. 49-54 (2000)

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  • [Publications] 稲垣耕司: "スーパーコンピュータを用いたシミュレーションによる超精密加工プロセスの原子レベルでの解析"東北大学大型計算機センター広報. 33・3. 25-34 (2000)

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  • [Publications] 広瀬喜久治: "超平滑・高精度表面形成プロセスのモデリングとシミュレーション"O plus E. 22・5. 573-582 (2000)

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  • [Publications] 広瀬喜久治: "超平滑・高精度表面形成プロセスのモデリングとシミュレーション(招待講演)"日本表面科学会関西支部第7回関西支部セミナー. 7. 15-24 (2000)

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  • [Publications] 塚本茂: "積分方程式を用いた方法による原子架橋の電子状態計算"日本物理学会講演概要集. 55・2. 805 (2000)

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  • [Publications] 藤本義隆: "ブロッホ波に接続する固体表面電子状態の決定 其の弐"日本物理学会講演概要集. 55・2. 805 (2000)

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  • [Publications] 角田信彦: "スラブモデルを用いない半無限系における表面電子状態計算手法の開発"日本物理学会講演概要集. 55・2. 778 (2000)

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  • [Publications] 小野倫也: "螺旋周期境界条件を用いた実空間差分法による第一原理電子状態計算"日本物理学会講演概要集. 56・1(未定). (2001)

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  • [Publications] 稲垣耕司: "水素終端化Si表面とZrO2微粒子の水中での接触過程の第一原理計算による解析"日本物理学会講演概要集. 56・1. 822 (2001)

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  • [Publications] 藤本義隆: "Si(001)SAステップでのSTMバイアス依存性に関する電子状態計算"日本物理学会講演概要集. 56・1. 802 (2001)

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  • [Publications] 広瀬喜久治: "Si表面反応の第一原理計算機シミュレーション(招待講演)"応用物理学会関西支部セミナー要旨集. 2000・1. 8-37 (2000)

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  • [Publications] M.V.Lebedev: "Valence band photoemission, band bending, and ionization energy of GaAs (100) treated in alcoholic sulfide solution"J.Appl.Phys.. 87. 289-294 (2000)

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  • [Publications] J.Onoe: "In situ FTIR, XPS, and STM studies of the nano-structure of a photopolymerized C60 film"Mol.Cryst.and Liq.Cryst.. 340. 689-694 (2000)

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  • [Publications] H.Uchida: "Analysis of sinsle Si atoms deposited on the Si (111)7x7 surface"Thin Solid Films. 369. 73-78 (2000)

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  • [Publications] M.Sakurai: "Nanoscale growth of dilver on prepatterned hydrogen-terminated Si (001) surfaces"Phys.Rev.B. 62. 16167-16174 (2000)

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  • [Publications] Y.Okawa: "Nanoscale control of chain polymerization"Nature. 409. 683-684 (2001)

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  • [Publications] Gengmin Zhang: "Scanning Tunneling Microscopy Observation of Binary Monolayers of 10,12-Ticosadiynoic Acid and Stearic Acid Deposited by Horizontal Lifting Method"Surf.Sci.Lett.. (in press). (2001)

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  • [Publications] Y.Kuwahara: "Scanning Tunneling Microscopy Observation of Self Assembled Monolayers of Two Component Organic Molecules"1st Int.Sym.on Nanoarchitectonics Using Suprainteractions. 130 (2000)

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  • [Publications] K.Takami: "Construction of Independently-Driven Double-Tip Scanning Tunneling Microscope"4th Int.Symp.On InterMaterials. (2001)

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  • [Publications] M.Akai-Kasaya: "Scanning Tunneling Microscopy/Spectroscopy Investigations of PTCDAn-Stacking Monolayer on HOPG"4th Int.Symp.On InterMaterials. (2001)

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  • [Publications] 齋藤彰: "Si(001)表面上のビスマス原子細線の構造"日本物理学会講演概要集. 55・2. 769 (2000)

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  • [Publications] 齋藤彰: "Si(001)面内Bi原子細線のX線定在波法による構造解析"第一回表面エレクトロニクス研究会予稿集. 21 (2000)

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  • [Publications] A.Saito: "Elemental analysis STM on 27m soft X-ray ID beamline"The 4th International Workshop on the Use of Coherenet Soft X-ray from a 27m Long Undulator at SPring-8. 10 (2000)

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  • [Publications] Kazuto Yamauchi: "First-principles simulation of removal process in EEM (Elastic Emission Machining)"Computational Materials Science. Vol.14. 232-235 (1999)

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  • [Publications] Hidekazu Goto: "Chemisorption of OH on the H-terminated Si(001) surface"Computational Materials Science. Vol.14. 77-79 (1999)

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  • [Publications] Mizuho Morita: "Si Oxidation in Heating-up for Gate Oxide Formation"International Symposium on Future of Intellectual Integrated Electronics. 153-156 (1999)

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  • [Publications] 青野正和: "一次元分子鎖の構造と電子状態"生産技術誌. Vol.61. 61-65 (1999)

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  • [Publications] 大柳宏之: "チューナブルX線アンジュレータによるXAFS"電子技術総合研究所彙報. Vol.62,No.9. 9-20 (1999)

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  • [Publications] 有馬健太: "STMによる溶液処理水素終端化Si(001)表面の原子構造の観察(2)"第46回応用物理学関係連合講演会講演予稿集. 第2分冊. 28a2T8 (1999)

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  • [Publications] 押鐘寧: "Whispering Gallery Modesにより微小球表面に発生する近接場と物質との相互作用"第46回応用物理学関係連合講演会講演予稿集. 第3分冊. 29pE19 (1999)

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  • [Publications] 大川祐司: "STM誘起連鎖重合反応"東京大学物性研短期研究会「表面ダイナミクス」. (1999)

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  • [Publications] 森勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第1報)-回転電極型大気圧プラズマCVD装置の設計・試作-"精密工学会誌. 65[11]. 1600-1604 (1999)

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  • [Publications] 森勇藏: "大気圧プラズマCVD法によるアモルファスSiC薄膜の高速成膜に関する研究(第1報)-成膜速度および膜構造の検討-"精密工学会誌. (投稿中).

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  • [Publications] 森勇藏: "大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第2報)-成膜速度の高速化-"精密工学会誌. (投稿中).

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  • [Publications] 森勇藏: "大気圧プラズマCVDシステムにおけるプロセス雰囲気の清浄化"精密工学会誌. (投稿中).

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  • [Publications] Y.Mori: "Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials"Review of Scientific Instruments. (投稿中).

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  • [Publications] Y.Mori: "High-rate deposition of hydrogenated amorphous Sil-xCx films by atmospheric pressure plasma CVD"Journal of Applied Physics. (投稿中).

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  • [Publications] Y.Mori: "High-Rate Deposition of Amorphous Silicon Filme by Atmospheric Pressure Plasma CVD"TECHNOLOGY REPORTS OF THE OSAKA UNIVERSITY. (accepted).

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  • [Publications] Kenta Arima: "Scanning tunneling microscopy study of hydrogen-terminated Si(001) surfaces after wet cleaning"Surf.Sci.. 446. 128-136 (2000)

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  • [Publications] Kenta Arima: "Atomically resolved scanning tunneling microscopy of hydrogen-terminated Si(001) surfaces after HF cleaning"Appl.Phys. Lett.. Vol.76[4]. 463-465 (2000)

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  • [Publications] 押鐘寧: "SNOM用微小共振球プローブの電磁場解析による特性診断"1999年度精密工学会秋季大会学術講演会講演論文集. 74 (1999)

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  • [Publications] 中川: "微小共振球プローブを用いた走査型近接場光学顕微鏡の特性"1999年度精密工学会秋季大会学術講演会講演論文集. 75 (1999)

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  • [Publications] 有馬: "STMによる溶液処理水素終端化Si(001)表面の原子構造観察"1999年度精密工学会秋季大会学術講演会講演論文集. 76 (1999)

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  • [Publications] 押鐘寧: "高圧力・高周波プラズマの計測と制御 -赤外半導体レーザー吸収分光法によるプラズマ中のラジカル計測"1999年度精密工学会秋季大会学術講演会講演論文集. N64 (1999)

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  • [Publications] 遠藤: "STM/STSによるAl,Cu吸着Si(001)表面の観察"精密工学会1999年度関西地方定期学術講演会講演論文集. B05 (1999)

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  • [Publications] 遠藤: "高圧力・高周波プラズマの計測と制御 -赤外半導体レーザー吸収分光法によるプラズマ計測-"精密工学会1999年度関西地方定期学術講演会講演論文集. B15 (1999)

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  • [Publications] 片岡: "PDI/PSIを用いた球面形状の高精度計測"精密工学会1999年度関西地方定期学術講演会講演論文集. B19 (1999)

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  • [Publications] 井上: "レーザー光散乱を用いたSiウエーハ表面上の微粒子計測-微粒子検出限界-"精密工学会1999年度関西地方定期学術講演会講演論文集. B20 (1999)

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  • [Publications] 片岡: "走査型近接場光学顕微鏡 -微小突起プローブの開発-"精密工学会1999年度関西地方定期学術講演会講演論文集. B26 (1999)

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  • [Publications] H.Goto: "First-principles Molecular Dynamics Simulation of Metal Surfaces Interacting with OH Molecule"Transactions of the Materials Research Society of Japan. Vol.24,2. 225-228 (1999)

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  • [Publications] 後藤英和: "シリコンおよび金属表面の水酸基によるエッチング現象の第一原理計算(I)"日本物理学会講演概要集. 54[1]. 314 (1999)

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  • [Publications] 森勇蔵: "金属・半導体と水酸イオンの電気化学反応及び超純水による加工への応用(第3報)"1999年度精密工学会秋季大会学術講演会講演論文集. 571 (1999)

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  • [Publications] Hidekazu GOTO: "First-Principles Molecular-Dynamics Simulations of Etching Frocoss by OH Moleeules"Technology Reports of The Osaka University. (投稿中).

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  • [Publications] Y.Mori: "Activites on Perfect Surfaces in Osaka University Ultra Precision Machining Research Center"Proc.of the 9th ICPE. iii-xxii (1999)

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  • [Publications] M.Aono: "Structure Fabrication and Physical Property Measurement on the Nanometer Scale by STM-Based New Methods"Proc.of the 9th ICPE. 665-670 (1999)

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  • [Publications] K.Hirose: "First-Principles Molecular-Dynamics Simulations Aiding Creation of Perfect Surfaces"Proc.of the 9th ICPE. 913-922 (1999)

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  • [Publications] Y.Mori: "Development of Numerically Controlled EEM (Elastic Emission Machining) System for Ultraprecision Figuring and Smoothing of Aspherical Surfaces"Proc.of the 9th ICPE. 207-212 (1999)

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  • [Publications] Y.Mori: "Development of Numerically Controlled Plasma CVM (Chemical Vaporization Machining) System for Fabrication of Ultra Precision Optical Devices"Proc.of the 9th ICPE. 213-218 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Takino: "Plasma Chemical Vaporization Machining with a Pipe Electrode for Large Optics"Proc.of the 9th ICPE. 219-224 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Mori: "Slicing of Functional Materials by Plasma CVM (Chemical Vaporization Machining)"Proc.of the 9th ICPE. 225-230 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Mori: "Development of Ultra-precision and Ultra-clean Electro-chemical Processing Method Using Hydroxyl Ion in Ultrapure Water"Proc.of the 9th ICPE. 237-242 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Uchikoshi: "Laser Beam Straight Datum with Nanometric Accuracy-Analytical Estimation of Ultimate Straightness"Proc.of the 9th ICPE. 323-328 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Oshikane: "Development of Phase-shifting Point Diffraction Interferometry Method with Fiber Point Sources"Proc.of the 9th ICPE. 336-341 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.An: "Evaluation of Si Wafer Surface Using a New Apparatus for Measuring Particles of the Order of Nanometer"Proc.of the 9th ICPE. 372-377 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Inoue: "Measurement of Ultra Fine Particles on the Si Wafer Surface Using Laser Light Scattering"Proc.of the 9th ICPE. 378-383 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Takeuchi: "High Rate Polishing of Silicon Surface using Plasma CVM with Rotary Drum Electrode"Proc.of the 9th ICPE. 405-410 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Shimizu: "Development of Anisotropic Dry Etching Method Using Laser-Collimated Fluorine Radical Beam"Proc.of the 9th ICPE. 450-458 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Endo: "Scanning Tunneling Microscopy Observations of Hydrogen Terminated Si(001) Surfaces after Wet Cleaning"Proc.of the 9th ICPE. 485-490 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Mori: "High-Rate Deposition of Amorphous Si Thin Films by Atmospheric Pressure Plasma CVD"Proc.of the 9th ICPE. 537-542 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Nakano: "High Speed Patterning of Integrated-Type a-Si Solar Cell Submodules by Plasma CVM"Proc.of the 9th ICPE. 543-548 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A.Takeuchi: "Doping of Single Crystalline AlN Thin Films Grown on Si(111) by Plasma-Assisted MBE"Proc.of the 9th ICPE. 624-629 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Ohmi: "Creation of Mono-Velocity Neutral Atomic Beam"Proc.of the 9th ICPE. 630-638 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Kuramochi: "Control of Atomic Defects of TiC(001) by Its Chemical Activity"Proc.of the 9th ICPE. 699-704 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Okawa: "Ordering and Reaction of Diacetylene Molecules on a Graphite Surface Observed with STM"Proc.of the 9th ICPE. 705-710 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Terabe: "A Scanning Tunneling Microscope Tip Made of an Ionic Conductor as a Metal Atom Source to Fabricate Nanostructures"Proc.of the 9th ICPE. 711-717 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A.Saito: "Newly Applied X-ray Standing Wave Analysis to the YSZ Crystal"Proc.of the 9th ICPE. 787-791 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Inagaki: "Development of Evaluation Method for Ultra Precision Machined Surfaces by Photo-Reflectance Spectra"Proc.of the 9th ICPE. 792-795 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A.Saito: "Structural Study of Ni/YSZ(001) by Coaxial Impact-collision Ion Scattering Spectroscopy"Proc.of the 9th ICPE. 796-801 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Sakurai: "Visible Light Emission from Silver Atom Clusters Formed on Deuterium-terminated Si(001) Surface"Proc.of the 9th ICPE. 837-842 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Endo: "Scanning Tunneling Microscopy/Spectroscopy Observations of Metal Adsorbed Si(001)2×1 Surfaces"Proc.of the 9th ICPE. 843-848 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Mori: "Development of X-ray Microanalysis by Using STM Probe"Proc.of the 9th ICPE. 849-853 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Nakagawa: "Development of a High Sensitive Probe for Scanning Near-field Optical Microscope with a Micro Cavity"Proc.of the 9th ICPE. 905-912 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Goto: "First-Principles Molecular-Dynamics Simulations of Electro-Chemical Etching Process in Ultrapure Water"Proc.of the 9th ICPE. 923-928 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Inagaki: "First-Principles Molecular-Dynamics Calculation for Evaluating Separation Energy and Force between Powder and Work Surfaces in EEM (Elastic Emission Machining) Process"Proc.of the 9th ICPE. 929-934 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Okada: "First-Principles Molecular-Dynamics Simulation and STM Observation of Dissociative Adsorption Process of F_2 and Cl_2 on the Si(001) Surface"Proc.of the 9th ICPE. 941-946 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Toyota: "Wettability and Atomic Diffusibility of Liquid Metals on Solid Surfaces"Proc.of the 9th ICPE. 983-988 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Ono: "Development of Ab Initio Molecular-Dynamics Simulation Program Based on Real-Space Finite-Difference Method"Proc.of the 9th ICPE. 1037-1042 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N.Sumida: "First-Principles Molecular-Dynamics Simulation Based on Real-Space Finite-Difference Method : Dissociation of H_2O Molecule"Proc.of the 9th ICPE. 1043-1046 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Toda: "Ab Initio Monte Carlo Simulation : Stable Structure of Carbon Cluster"Proc.of the 9th ICPE. 1047-1050 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Tsukamoto: "Development of Ab Initio Molecular-Dynamics Simulation Program for Analyzing Semi-infinite System"Proc.of the 9th ICPE. 1051-1056 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Toyata: "An explanation of the wetting and the mutual diffusion mechanisms of liquid metals using ab-initio atomic orbital calculation"Computational Materials Science. Vol.14. 129-131 (1999)

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      1999 Annual Research Report
  • [Publications] H.Toyota: "A Fundamental Study on Atomic Diffusion Phenomenon between Liquid Metal and Carbon Substrate"Transactions of the Materials Research Society of Japan. Vol.24,2. 233-236 (1999)

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      1999 Annual Research Report
  • [Publications] 瀧野日出雄: "バイプ電極プラズマCVMによる光学平面の創成加工"精密工学会誌. 65[11]. 1650-1651 (1999)

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  • [Publications] 森勇蔵: "プラズマCVMの開発"精密工学会誌. (投稿中).

    • Related Report
      1999 Annual Research Report
  • [Publications] 森勇蔵: "数値制御プラズマCVM加工装置の開発-X線ミラー加工用装置の開発-"精密工学会誌. (投稿中).

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      1999 Annual Research Report
  • [Publications] 森勇蔵: "数値制御プラズマCVM加工装置の開発(第4報)"2000年度精密工学会春季大会学術講演会講演論文集. (2000)

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      1999 Annual Research Report
  • [Publications] 森勇蔵: "プラズマCVMにおける切断加工に関する研究(第5報)"2000年度精密工学会春季大会学術講演会講演論文集. (2000)

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  • [Publications] 安弘: "光散乱法による粒径測定機を用いたSiウエハの表面評価"日本機械学会「生産に関する学術講演会'99」第1回生産加工・工作機械部門講演会講演論文集. 65 (1999)

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  • [Publications] 安弘: "光散乱法による粒径測定機を用いたSiウエハのスクラッチ形状の欠陥測定"精密工学会1999年度関西地方定期学術講演会講演論文集. 95 (1999)

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  • [Publications] 安弘: "光散乱法によるナノメータオーダの粒径測定法の開発 -Siウエハ表面に対する洗浄前後の微粒子測定による表面評価-"精密工学会誌. 65[11]. 1435-1439 (1999)

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  • [Publications] 佐々木都至: "微粒子測定機によるナノメータオーダのSiウエハ表面形状の測定"2000年度精密工学会春季大会学術講演会講演論文集. (2000)

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      1999 Annual Research Report
  • [Publications] 佐々木都至: "微粒子測定機を用いたSiウエハ表面のナノスケール構造の測定による表面評価"第47回応用物理学関係連合講演会講演予稿集. 30a-YG-2 (2000)

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      1999 Annual Research Report
  • [Publications] 森勇蔵: "大気圧プラズマによる超精密加工と高速成膜"精密工学会誌. 66[4](印刷中). (2000)

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      1999 Annual Research Report
  • [Publications] 大参宏昌: "中性原子ビーム速度分光装置の開発"精密工学会誌. (投稿中).

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      1999 Annual Research Report
  • [Publications] 大参宏昌: "Li原子ビームのレーザーコリメーション"精密工学会誌. (投稿中).

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      1999 Annual Research Report
  • [Publications] K.Yasutake: "Velocity Spectrometer for Neutral Atomic Beam"Phys.Rev.A. (submitted).

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      1999 Annual Research Report
  • [Publications] 大参宏昌: "単色Li原子ビームの生成とナノリソグラフィーへの応用"2000年度精密工学会春季大会学術講演会講演論文集. H38 (2000)

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  • [Publications] 大参宏昌: "原子光学用レーザーの周波数安定化と光の増幅"2000年度精密工学会春季大会学術講演会講演論文集. H39 (2000)

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  • [Publications] 清水正男: "フッ素ラジカルビームのレーザーコリメーション"第47回応用物理学関係連合講演会講演予稿. 第II分冊. 28a-ZC-16 (2000)

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      1999 Annual Research Report
  • [Publications] 青野正和(編著): "表面科学シリーズ5.表面の組成分析"丸善. (1999)

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      1999 Annual Research Report
  • [Publications] 森勇蔵(共著): "超精密ウェーハ表面制御技術(プラズマCVM技術、担当)"サイエンスフォーラム. (2000)

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      1999 Annual Research Report
  • [Publications] K.Endo: "Atomic structures of hydrogen-terminated Si(001)surfaces after wet cleaning by scanning tunneling microscopy." Applied Physics Letters. 73,13. 1853-1855 (1998)

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      1998 Annual Research Report
  • [Publications] 山内和人: "EEM(Elastic Emission Machining)に関する研究-加工液中の溶存酸素がS2ウエハ表面に与える影響-" 精密工学会誌. 64,6. 2140-2147 (1998)

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      1998 Annual Research Report
  • [Publications] K.Yasutake: "Molecular Beam Epitaxial Growth of AIN Single Crystalline Film on Si (111) Using Radio-Frequency Plasma Assisted Nitrogen Radical Souece." J.Vac.Sci,Tech. A16,4. 2140-2147 (1998)

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      1998 Annual Research Report
  • [Publications] A.Saito: "Normal-incidence x-raystanding-wave analysis of Si(111) 【square root】3x【square root】3-Au structure" Physical Review B. 58(7). 3541. (1998)

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      1998 Annual Research Report
  • [Publications] Hideo Takino: "Computer numerically controlled plasma chemical vaporizaiton machining with a pipe electrode for optical farbrication" APPKTED OPTICS. 37,22. 5198-5210 (1998)

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  • [Publications] Hideo TAKINO: "Plasma Chemical Vaporization Machining(CVM) for Fabrication of Optics" J.Vac.Sci,Tech. 37,7B. (1998)

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      1998 Annual Research Report
  • [Publications] 清水正男: "半導体素子特性に対するコンタクトホール内部の残留有機物薄膜の影響" 精密工学会誌. 印刷中. (1999)

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      1998 Annual Research Report
  • [Publications] 森田瑞穂: "半導体表面加工環境制御" 精密工学会超精密位置決め専門員会定例会講演前刷集. 98-2. 1-10 (1998)

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      1998 Annual Research Report
  • [Publications] 中野真吾: "集積型a-Si太陽電池のプラズマCVMによるコウソクパターンニングに関する研究(第2報)-プラズマ発生領域の制御による加工領域の微小化-" 精密工学会1998年度関西地区定期学術講演会講演論文集. 3-4 (1998)

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  • [Publications] 遠藤勝義: "大気圧・高周波プラズマの計測と制御-吸収分光法によるHe準安定原子密度の計測-" 精密工学会1998年度関西地方定期学術講演会講演論文集. 5-6 (1998)

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      1998 Annual Research Report
  • [Publications] 山内和人: "EEM(Elastic Emission Machining)における加工物表面上への粒子付着過程の第一原理分子動力学シュミレーション" 精密工学会1998年度関西地方定期学術講演会講演論文集. 15-16 (1998)

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  • [Publications] 広瀬喜久治: "水酸基と相互作用する金属表面の第一原理分子動力学シュミレーション" 精密工学会1998年度関西地方定期学術講演会講演論文集. 17-18 (1998)

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      1998 Annual Research Report
  • [Publications] 有馬健太: "STMによる水素終端化Si(001)ウェーハ表面の観察" 精密工学会1998年度関西地方定期学術講演会講演論文集. 89-90 (1998)

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  • [Publications] 岡田浩巳: "STM/STSによるハロゲン吸着Si(001)2×1表面の観察(第2報)" 精密工学会1998年度関西地方定期学術講演会講演論文集. 91-92 (1998)

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  • [Publications] 遠藤勝義: "STMによる絶縁体表面計測法の開発" 精密工学会1998年度関西地方定期学術講演会講演論文集. 93-94 (1998)

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      1998 Annual Research Report
  • [Publications] 六車義弘: "STM/XMA法に於けるX線発生過程のシュミレーション" 精密工学会1998年度関西地方定期学術講演会講演論文集. 95-96 (1998)

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      1998 Annual Research Report
  • [Publications] 井上晴行: "レーザー光散乱によるSiウェーハ表面上の微粒子計測-標準粒子の粒子径分布測定-" 精密工学会1998年度関西地方定期学術講演会講演論文集. 99-100 (1998)

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      1998 Annual Research Report
  • [Publications] 田原俊克: "超高精度光反射率スペクトル測定装置の開発" 精密工学会1998年度関西地方定期学術講演会講演論文集. 109-110 (1998)

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  • [Publications] 藤本義隆: "光反射率スペクトルの第一原理電子状態計算法による解析" 精密工学会1998年度関西地方定期学術講演会講演論文集. 111-112 (1998)

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  • [Publications] 片岡俊彦: "微小共振球をプロープとする走査型近接場光学顕微鏡の開発" 精密工学会1998年度関西地方定期学術講演会講演論文集. 115-116 (1998)

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      1998 Annual Research Report
  • [Publications] 片岡俊彦: "エキシマレーザーによる基板表面凝集相の光化学反応を利用した成膜" 精密工学会1998年度関西地方定期学術講演会講演論文集. 119-120 (1998)

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      1998 Annual Research Report
  • [Publications] 森勇藏: "回転電極を用いた大気圧プラズマCVDにより拘束形成したアモルファスSi薄膜の電気・光学特性" 精密工学会1998年度関西地方定期学術講演会講演論文集. 121-122 (1998)

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      1998 Annual Research Report
  • [Publications] 竹内昭博: "紫外光半導体レーザー用AIN単結晶薄膜pn制御" 精密工学会1998年度関西地方定期学術講演会講演論文集. 123-124 (1998)

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      1998 Annual Research Report
  • [Publications] 大参宏昌: "Li原子ビームのコリメーションとナノファブリケーションへの応用" 精密工学会1998年度関西地方定期学術講演会講演論文集. 125-126 (1998)

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      1998 Annual Research Report
  • [Publications] 山崎一輝: "金属/固体電解質界面のX線定在波法による構造解析" 関西表面セミナー. (1998)

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      1998 Annual Research Report
  • [Publications] 桑原裕司: "異種原子分子を使った有機分子の自己組織化表面秩序構造の制御" 量子効果等の物理現象第2回シンポジウム. (1998)

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      1998 Annual Research Report
  • [Publications] H.Okada: "First-pronciples molecular dynamic sumlation for STM image of Si(001) surface" The Materials Reseach Society of Japan,第10回年次総会・学術シンポジウム、プログラム・要旨集. 117-117 (1998)

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      1998 Annual Research Report
  • [Publications] K.Hirose: "Frist-principles molecular dynamics simulation of metal surfaces interacting with OH molecule." The Materials Reseach Society of Japan,第10回年次総会・学術シンポジウム、プログラム・要旨集. 118-118 (1998)

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      1998 Annual Research Report
  • [Publications] R.Hosoi: "A sumulation of removal prosess in EEM(Elastic Emission Maching) by ab-initio molecular orbital method." The Materials Reseach Society of Japan,第10回年次総会・学術シンポジウム、プログラム・要旨集. 124-124 (1998)

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      1998 Annual Research Report
  • [Publications] 押鐘 寧: "大気圧・高周波プラズマ中の励起種密度の計測-ホロカソードランプを用いた吸収分光計測-" 1998年度精密工学会秋季大会学術講演会講演論文集. K13 (1998)

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      1998 Annual Research Report
  • [Publications] 森 勇藏: "金属・半導体と水酸イオンの電気化学反応及び超純水による加工への応用(第1報)" 1998年度精密工学会秋季大会学術講演会講演論文集. 443-443 (1998)

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      1998 Annual Research Report
  • [Publications] 押鐘 寧: "大気圧・高周波プラズマ中の励起種密度の計測-ホロカソードランプを用いた吸収分光計測-" 1998年度精密工学会秋季大会学術講演会講演論文集. K13 (1998)

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      1998 Annual Research Report
  • [Publications] 井上晴行: "レーザー光散乱によるSiウェーハ表面上の微粒子計測" 1998年度精密工学会秋季大会学術講演会講演論文集. 513-513 (1998)

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  • [Publications] 中川寛文: "微小共振球プローブを用いた走査型近接場工学顕微鏡の開発" 1998年度精密工学会秋季大会学術講演会講演論文集. J62 (1998)

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  • [Publications] 有馬健太: "STMによる水素終端化Si(001)ウェーハ表面の観察" 1998年度精密工学会秋季大会学術講演会講演論文集. 420 (1998)

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      1998 Annual Research Report
  • [Publications] 岡田浩巳: "STM/STSによるハロゲン吸着Si(001)2×1表面の観察(第3報)" 1998年度精密工学会秋季大会学術講演会講演論文集. 421 (1998)

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      1998 Annual Research Report
  • [Publications] 小野倫也: "Simulatd Annealing による電子系エネルギーの最小化" 日本物理学会講演概要集. 53,2. 811 (1998)

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  • [Publications] 齊藤彰: "Pt/YSZ表面のRHEED,AFMによる観察" 日本物理学会講演概要集. 53,2. (1998)

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      1998 Annual Research Report
  • [Publications] 倉持宏実: "Si(100)表面上のA1細線形成における基板温度の影響" 第59回応用物理学会学術講演会講演予稿集. (1998)

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      1998 Annual Research Report
  • [Publications] 真田周嗣: "HOPG上のクランエーテルの観察" 第59回応用物理学会学術講演会講演予稿集. (1998)

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  • [Publications] 有馬健太: "STMによる溶液処理水素終端化Si(001)表面の原子構造の観察" 第59回応用物理学会学術講演会講演予稿集. 695 (1998)

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  • [Publications] 押鐘 寧: "狭帯域化半導体レーザーによるミクロンオーダの微小球内の進行波共振とその逝去" 第59回応用物理学会学術講演会講演予稿集. 917 (1998)

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  • [Publications] 押鐘 寧: "Whispering Gallery Modesにより微小球表面に発生する金近接場と物質との相互作用" 第59回応用物理学会学術講演会講演予稿集. 29pE19 (1998)

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  • [Publications] T.Kataoka: "Scanning near-fiend Optical Microscope with a Small Protrusion Probe on a Micro-cavity" 文部省科学研究費・特定領域研究(A)ニアフィールド・ナノ光学 研究会講演資料集. 2・2. 179-180 (1998)

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  • [Publications] Y.Kuwahara: "Control of Periodicity of Self-Assembled Organic Molecules Assisted by Water Molecules" RIKEN Conference. (1998)

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  • [Publications] 桑原裕司: "有機単分子膜の自己組織化の異種分子添加による制御" 理研シンポジウム「第5回原子スケール・サイエンジニアリング研究会」. (1998)

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  • [Publications] 南部征一郎: "超洗浄数値制御EEM(Elastic Emission Machining)の開発(第1報)-超純水静圧軸受けを用いた数値制御ステージシステムの開発-" 1999年度精密工学学会春季大会学術講演会講演論文集. 418 (1999)

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  • [Publications] 三村秀和: "超洗浄数値制御EEM(Elastic Emission Machining)の開発(第2報)-ノズル噴射流れを利用した加工ヘッドの開発-" 1999年度精密工学学会春季大会学術講演会講演論文集. 419 (1999)

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  • [Publications] 稲垣耕司: "EEM(Elastic Emission Machining)における表面原子除去過程の第一原理分子動力学シュミレーション" 1999年度精密工学学会春季大会学術講演会講演論文集. 420 (1999)

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  • [Publications] 森勇藏: "金属・半導体と水酸イオンの電気化学反応及び超純水による加工への応用(第2報)" 1999年度精密工学学会春季大会学術講演会講演論文集. 421 (1999)

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  • [Publications] 瀧野日出雄: "マイクロ電極を用いたプラズマCVMによる複雑形状光学面の創成加工" 1999年度精密工学学会春季大会学術講演会講演論文集. 422 (1999)

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  • [Publications] 西川和宏: "回転電極型プラズマCVM法におけるシリコンの加工速度向上に関するー検討" 1999年度精密工学学会春季大会学術講演会講演論文集. 423 (1999)

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  • [Publications] 柴原正文: "プラズマCVMによる高融点金属材料の表面加工(第3報)" 1999年度精密工学学会春季大会学術講演会講演論文集. 424 (1999)

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  • [Publications] 山村和也: "数値制御プラズマCVM加工装置の開発(第3報)" 1999年度精密工学学会春季大会学術講演会講演論文集. 425 (1999)

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  • [Publications] 佐野泰久: "プラズマCVM(Chemical Vaporization Machining)における切断加工に関する研究(第4報)-加工ギャップ制御方法-" 1999年度精密工学学会春季大会学術講演会講演論文集. 426 (1999)

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  • [Publications] 竹内博明: "プラズマCVM加工における電極/ワーク間ギャップセンサの開発" 1999年度精密工学学会春季大会学術講演会講演論文集. 427 (1999)

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  • [Publications] 江畑裕介: "大気圧プラズマのインピーダンス測定(第1報)-測定原理、測定結果、及びその測定精度について-" 1999年度精密工学学会春季大会学術講演会講演論文集. 428 (1999)

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  • [Publications] 遠藤勝義: "赤外線半導体レーザー吸収分光法による大気圧・高周波プラズマ中のラジカル計測" 1999年度精密工学学会春季大会学術講演会講演論文集. 429 (1999)

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  • [Publications] 島田尚一: "直線基準のための方向安定化レーザの開発-ナノスケールの直線基準としてレーザ共振器の条件-" 1999年度精密工学学会春季大会学術講演会講演論文集. 456 (1999)

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  • [Publications] 井上晴行: "レーザー光散乱によるSiウェーハ表面上の微粒子計測-Siウェーハ表面の観察-" 1999年度精密工学学会春季大会学術講演会講演論文集. 465 (1999)

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  • [Publications] 有馬健太: "STMによる溶液処理水素終端化Si(001)表面の観察" 1999年度精密工学学会春季大会学術講演会講演論文集. 503 (1999)

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  • [Publications] 中川寛文: "微小共振球の近接場光学顕微鏡プローブへの応用" 1999年度精密工学学会春季大会学術講演会講演論文集. 505 (1999)

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  • [Publications] 大参宏昌: "単色Li原子ビームの生成" 第46回応用物理学関係連合講演会予稿集. 30aP6-10 (1999)

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  • [Publications] 清水正男: "フッ素ラジカルビームのレーザーコリメーション" 第46回応用物理学関係連合講演会予稿集. 29pYE19 (1999)

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  • [Publications] 有馬健太: "STMによる溶液処理水素終端化Si(001)表面の原子構造の観察(2)" 第46回応用物理学関係連合講演会講演予稿集. 28zZT8 (1999)

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  • [Publications] 高見和宏: "Tic(001)表面のSTM観察" 第46回応用物理学関係連合講演会講演予稿集. 発表予定. (1999)

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  • [Publications] 後藤英和: "シリコンおよび金属表面の水酸基によるエッチング現象の第一原理計算" 日本物理学会第54回年会予稿集. 発表予定. (1999)

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  • [Publications] A.Saito.: "Preliminary Study for the X-ray Standing Wave Analysis of the Electrode/Ziroconia Interface" Spring-8 User Experiment Report. 106 (1999)

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  • [Publications] W.Yahiro: "Modulation of CTR Scattering under Bragg Condition" Spring-8 User Experiment Peport. 104 (1999)

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  • [Publications] Mizuho Morita: "Ultraclean Surface Processing of Sillcon Wafers 42.Native Oxide Film and Chemical Oxide Films." Springer, 16 (1998)

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  • [Publications] T.Kataoka: "Growth of Crystalline Silicon on a Cryogenic Substrate by Photochemical Reaction in a Condensed Phase" Japanese Journal of Applied Physics. Vol.36, No.12A. 7395-7398 (1997)

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  • [Publications] 井上晴行: "レーザ光散乱法によるSiウエハ付着微粒子計測装置の開発" 精密工学会誌. 63巻8号. 1117-1121 (1997)

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  • [Publications] K.Endo: "STM/STS and the first principles calculations on Al/Si(001)2×1" Applied Physics A. Vol.66. S1-S4 (1998)

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  • [Publications] K.Yasutake: "Deep Level Characterization in Semi-Insulating GaAs by Photo-Induced Current and Hall Effect Transient Spectroscopy" J.Mater.Sci.Materials in Electronics. Vol.8. 239-245 (1997)

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  • [Publications] K.Yasutake: "Thermal and Photo-induced Surface Damage in Paratellurite" J.Mater.Sci.Vol.32, No.24. 6595-6600 (1997)

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  • [Publications] K.Yasutake: "Molecular beam epitaxial gorwth of AlN single crystalline films on Si(111) using radio-frequency plasma assisted nitrogen radical source" J.Vac.Sci.Tech.A. (in the press).

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  • [Publications] 清水正男: "半導体素子特性に対するコンタクトホール内部の残留有機物薄膜の影響" 精密工学会誌. (投稿中).

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  • [Publications] Y.Oshikane: "Capacitive VHF Plasma Simulation at Atmospheric Pressure by Local Field Approximation Method" Report of the Institute of Fluid Science,Tohoku University. Vol.10. 147-155 (1997)

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  • [Publications] 押鐘 寧: "容量結合型・大気圧・高周波ヘリウムプラズマの分光計測" 第15回「プラズマプロセシング研究会」プロシ-ディングス. 358-361 (1998)

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  • [Publications] 片岡俊彦: "エキシマレーザーによる基板表面凝集相の光化学反応" 1997年度精密工学会秋季大会学術講演会講演論文集. 109 (1997)

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  • [Publications] 遠藤勝義: "STM/STSによる金属吸着Si(001)表面の観察" 1997年度精密工学会秋季大会学術講演会講演論文集. 271 (1997)

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  • [Publications] 森 勇藏: "回転電極を用いた大気圧プラズマCVDによるSi薄膜の高速成膜に関する研究(第4報)-a-Siの成膜速度の高速化-" 1997年度精密工学会秋季大会学術講演会講演論文集. 191 (1997)

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  • [Publications] 堂本洋一: "回転電極を用いた大気圧プラズマCVDによるSi薄膜の高速成膜に関する研究(第5報)-高速形成薄膜の特性-" 1997年度精密工学会秋季大会学術講演会講演論文集. 192 (1997)

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  • [Publications] 竹内昭博: "Si(111)基板上AlN単結晶薄膜のド-ピングに関する研究" 1997年度精密工学会秋季大会学術講演会講演論文集. 112 (1997)

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  • [Publications] 大参宏昌: "レーザー冷却法による中性原子ビームのコリメーション" 1997年度精密工学会秋季大会学術講演会講演論文集. 111 (1997)

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  • [Publications] 後藤英和: "水酸基と相互作用するシリコン単結晶(001)水素終端化表面の第一原理分子動力学シミュレーション" 1997年度精密工学会秋季大会学術講演会講演論文集. 95 (1997)

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  • [Publications] 広瀬喜久治: "水酸基による金属表面原子の除去加工の第一原理分子動力学シミュレーション" 1997年度精密工学会秋季大会学術講演会講演論文集. 96 (1997)

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  • [Publications] 広瀬喜久治: "EEMにおける原子除去過程の第一原理分子動力学シミュレーション" 1997年度精密工学会秋季大会学術講演会講演論文集. 97 (1997)

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  • [Publications] 片岡俊彦: "微小共振球をプローブとした近接場光学顕微鏡の開発-微小共振球プローブの開発-" 1997年度精密工学会秋季大会学術講演会講演論文集. 269 (1997)

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  • [Publications] 広瀬喜久治: "金属窒化物セラミックスの薄膜成長過程の第一原理シミュレーション" 1997年度精密工学会秋季大会学術講演会講演論文集. 113 (1997)

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  • [Publications] 遠藤勝義: "高圧力・高周波プラズマの計測と制御-プラズマの時空間分解発光分光測定-" 1997年度精密工学会秋季大会学術講演会講演論文集. 110 (1997)

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  • [Publications] 遠藤勝義: "光ファイバリング共振器を用いた近接場の発生・検知システムの開発" 1997年度精密工学会秋季大会学術講演会講演論文集. 246 (1997)

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  • [Publications] 井上晴行: "レーザー光散乱によるSiウェーハ表面上の微粒子計測-冷却CCDカメラによる測定-" 1997年度精密工学会秋季大会学術講演会講演論文集. 244 (1997)

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  • [Publications] 島田尚一: "光線基準を用いた円筒内面の高精度形状計測法" 1997年度精密工学会秋季大会学術講演会講演論文集. 241 (1997)

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  • [Publications] 森 勇藏: "数値制御プラズマCVM加工装置の開発(第1報)" 1997年度精密工学会秋季大会学術講演会講演論文集. 186 (1997)

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  • [Publications] 森 勇藏: "プラズマCVMにおける切断加工に関する研究(第3報)-各種材料の切断加工特性-" 1997年度精密工学会秋季大会学術講演会講演論文集. 185 (1997)

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  • [Publications] 押鐘 寧: "微小共振球をプローブとした近接場光学顕微鏡の開発" 1998年度精密工学会春季大会学術講演会講演論文集. 629 (1998)

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  • [Publications] 遠藤勝義: "高圧力・高周波プラズマの計測と制御-吸収分光法による準安定粒子の診断-" 1998年度精密工学会春季大会学術講演会講演論文集. 516 (1998)

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  • [Publications] 冨田 彰: "方向安定化レーザービームを直線基準とした高精度形状測定" 1998年度精密工学会春季大会学術講演会講演論文集. 506 (1998)

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  • [Publications] 稲垣耕司: "EEMにおける原子除去過程の計算機シミュレーション(第2報)" 1998年度精密工学会春季大会学術講演会講演論文集. 176 (1998)

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  • [Publications] 竹内昭博: "Si(111)基板上AlN単結晶薄膜のド-ピングに関する研究" 1998年度精密工学会春季大会学術講演会講演論文集. 425 (1998)

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  • [Publications] 森 勇藏: "数値制御プラズマCVM加工装置の開発(第2報)" 1998年度精密工学会春季大会学術講演会講演論文集. 514 (1998)

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  • [Publications] 森 勇藏: "EEM(Elastic Emission Machining)用微粒子作製装置の開発" 1998年度精密工学会春季大会学術講演会講演論文集. 430 (1998)

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  • [Publications] 片岡俊彦: "エキシマレーザーによる基板表面凝集相の光化学反応" 1998年度精密工学会春季大会学術講演会講演論文集. 431 (1998)

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  • [Publications] 森 勇藏: "EEM加工システムの超清浄化とその効果" 1998年度精密工学会春季大会学術講演会講演論文集. 517 (1998)

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  • [Publications] 大参宏昌: "中性原子ビームのコリメーションとナノリソグラフィへの応用" 1998年度精密工学会春季大会学術講演会講演論文集. 520 (1998)

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  • [Publications] 清水正男: "レーザー冷却法を用いた異方性ドライエッチングプロセスの開発" 1998年度精密工学会春季大会学術講演会講演論文集. 521 (1998)

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  • [Publications] 有馬健太: "STM/STSによるSiウェーハ表面の金属汚染物の極微量元素分析" 1998年度精密工学会春季大会学術講演会講演論文集. 674 (1998)

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  • [Publications] 安 弘: "光散乱法によるナノオーダーの粒径測定法(第7報)-ウルトラクリーンルーム内でのSiウェーハ面の微粒子測定と表面評価-" 1998年度精密工学会春季大会学術講演会講演論文集. 675 (1998)

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  • [Publications] 井上晴行: "レーザー光散乱法によるSiウェーハ表面上の微粒子計測-冷却CCDカメラによる標準試料の測定-" 1998年度精密工学会春季大会学術講演会講演論文集. N82 (1998)

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  • [Publications] 大参宏昌: "Li原子ビームのコリメーションとナノファブリケーションへの応用" 第45回応用物理学関係連合講演会 講演予稿集. (掲載予定). (1998)

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  • [Publications] 清水正男: "フッ素ラジカルビームのレーザーコリメーション" 第45回応用物理学関係連合講演会 講演予稿集. (掲載予定). (1998)

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  • [Publications] 後藤英和: "Si(001)水素終端化表面の水酸基によるエッチング現象の第一原理計算(I)" 日本物理学会講演概要集. 52巻2号. 331 (1997)

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  • [Publications] 広瀬喜久治: "STM-XMA法における電界中の電子状態計算" 日本物理学会講演概要集. 52巻2号. 349 (1997)

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  • [Publications] 広瀬喜久治: "GGAを用いた実空間差分電子状態計算II" 日本物理学会講演概要集. 52巻2号. 807 (1997)

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  • [Publications] 小野倫也: "実空間差分法を用いた二原子分子の電子状態計算" DV-Xα研究協会会報. 10巻2号. 40-44 (1997)

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  • [Publications] 杉本光宏: "EEM加工機構の第一原理分子動力学シミュレーション" DV-Xα研究協会会報. 10巻2号. 45-48 (1997)

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  • [Publications] 中村隆喜: "GGAを用いた実空間差分電子状態計算III" 日本物理学会講演概要集. 53巻1号(掲載予定). (1998)

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  • [Publications] 稲垣耕司: "固体表面間相互作用による除去加工プロセスの計算機シミュレーション" 第58回応用物理学会学術講演会 講演予稿集. 584 (1997)

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  • [Publications] H.GOTO: "Chemisorption of OH on the H-terminated Si(001)" Abstracts and program IUMRS-ICA-97. 555 (1997)

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  • [Publications] H.TOYOTA: "An explanation of the wetting and the mutual diffusion mechanisms of liquid metals using ab-initio atomic orbital calculation" Abstracts and program IUMRS-ICA-97. 562 (1997)

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  • [Publications] K.YAMAUCHI: "First-principle simulations of removal process in EEM(Elastic Emission Machining)" Abstracts and program IUMRS-ICA-97. 578 (1997)

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  • [Publications] K.ARIMA: "Observation of metal on Si(001) by STM/STS and its consideration based on the first principles calculations" Abstracts and program IUMRS-ICA-97. 579 (1997)

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  • [Publications] H.GOTO: "First-principles molecular dynamics simulations of H-terminated Si(001) surfaces interacting with OH molecules" Institute for Numerical Simulations and Applied Mathematics Symposium 1997. (1997)

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  • [Publications] Y.TATARA: "STM/STS observation and the first-principles calculations on Al/Si(001)2×1" Institute for Numerical Simulations and Applied Mathematics Symposium 1997. (1997)

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  • [Publications] K.INAGAKI: "First-principles simulations of removal process in EEM(Elastic Emission Machining)" Institute for Numerical Simulations and Applied Mathematics Symposium 1997. (1997)

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  • [Publications] 大津元一: "近接場ナノフォトニクスハンドブック" (株)オプトロニクス社, 270 (1997)

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  • [Publications] 森勇藏: "次世代を担う原子・電子レベルの先端技術" 精密工学会誌. 62. 766-772 (1996)

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  • [Publications] 安武潔: "TeO_2単結晶表面の熱損傷および光照射損傷に関する研究" 精密工学会誌. 62. 1335-1339 (1996)

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  • [Publications] 安武潔: "InGaAs/GaAs単一歪み量子井戸薄膜の低温成長に関する研究" 精密工学会誌. 63. 60-64 (1997)

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  • [Publications] 安武潔: "光電流および光ホール電圧過渡分光法による半絶縁性GaAs単結晶中の欠陥準位評価" 精密工学会誌. 63. 264-268 (1997)

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  • [Publications] 垣内弘章: "高周波スパッタ蒸着法による多結晶Siの低温成膜に関する研究(第2報)-Si薄膜の構造及び電気・光学特性-" 精密工学会誌. 63. 233-237 (1997)

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  • [Publications] 安弘: "光散乱法によるナノメータオーダの粒径測定法の開発(第4報)-光電子増倍管出力特性の定式化とダイナミックレンジの改善法-" 精密工学会誌. 62. 1198-1202 (1996)

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  • [Publications] T.Kataoka: "Development of a scaning near-field optical microscope with a probe consisting of a small spherical protrusion" ultramicroscopy. 63. 219-225 (1997)

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      1996 Annual Research Report
  • [Publications] K.Yasutake: "Low Temperature Growth of InGaAs/GaAs Strained-layer Single Quantum Wells" Int.J.JSPE. 31. in the press (1997)

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  • [Publications] K.Yasutake: "Deep Level Characterization in Semi-Insulating GaAs by Photo-Induced Current and Hall Effect Transient Spectroscopy" J.Mater.Sci.,Materials in Electronics. 8. in the press (1997)

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  • [Publications] K.Nemoto: "Laser beam intensity profile transformation with a fabricated mirror" APPLIED OPTICS. 36[3]. 551-557 (1996)

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  • [Publications] K.Yamauchi: "First-principles Analysis of Chemical Reactions between Metal Oxide Fine Powders and Si (100) Surface in EEM (Elastic Emission Machining)" Transactions of the Materials Research Society of Japan. 20. 819-822 (1996)

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  • [Publications] K.Endo: "Observation of Metal Atoms Adsorbed on H-terminated Si (100) Surfaces by STM/STS and its Consideration Based on Ab-initio Molecular Orbital Calculations" Transactions of the Materials Research Society of Japan. 20. 867-870 (1996)

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  • [Publications] H.Goto: "Chemisorption of H20 on the H-terminated Si (001) Surface" Transactions of the Materials Research Society of Japan. 20. 871-874 (1996)

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  • [Publications] K.Inagaki: "Investigation of Surface States on Si (001) and Si (111) Surfaces -Photo-reflectance Measurement and Ab-initio Calculation-" Transactions of the Materials Research Society of Japan. 20. 875-878 (1996)

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  • [Publications] K.Endo: "Characteristics of RF,VHF Helium Plasma at Atmospheric Pressure" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 50-59 (1996)

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  • [Publications] K.Yamauchi: "First-principles Analysis of Removal Mechanism in EEM (Elastic Emission Machining)" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 60-64 (1996)

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  • [Publications] Y.Mori: "Polishing of Si Wafer by Plasma CVM (Chemical Vaporization Machining)" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 65-68 (1996)

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  • [Publications] Y.Mori: "Slicing of Silicon by Plasma CVM (Chemical Vaporization Machining)" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 69-72 (1996)

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  • [Publications] K.Yasutake: "MBE Growth of AIN Single Crystalline Films on Si (111) Using RF-excited Nitrogen Source" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 79-83 (1996)

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  • [Publications] Y.Mori: "Atmospheric Pressuer Plasma Chemical Vapor Deposition of Amorphous Silicon Films with High Growth Rate" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 84-89 (1996)

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  • [Publications] Y.Mori: "The Auger Electron Spectroscopy by Using STM Probe" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 131-135 (1996)

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  • [Publications] T.Kataoka: "Scaning Near-field Optical Microscope with a Probe Consisting of Small Sphere" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 136-140 (1996)

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  • [Publications] K.Endo: "Observation of Metal Atoms Adsorbed on H-terminated Si (100) Surfaces by STM/STS" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 141-146 (1996)

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  • [Publications] H.An: "A Method for Measuring Particle Sizes of Nanometer Order by Light-scattering" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 147-153 (1996)

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  • [Publications] K.Inagaki: "Characterization of Surface States by Photo-reflectance Spectra -Comparison between Experimental Dependence on Surface Orientation and its Calculated Results-" The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering. 197-202 (1996)

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  • [Publications] 井上晴行: "レーザ光散乱によるSiウェーハ表面上の微粒子計測-レーザビーム走査型による標準資料の測定-" 1996年度精密工学会秋季大会学術講演会講演論文集. 431-432 (1996)

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  • [Publications] 遠藤勝義: "大気圧・高周波プラズマの特性" 1996年度精密工学会秋季大会学術講演会講演論文集. 195-196 (1996)

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  • [Publications] 竹内昭博: "ラジカルソースMBE法によるSi(111)基板上AIN薄膜の成長(第2報)-成膜条件の最適化-" 1996年度精密工学会秋季大会学術講演会講演論文集. 83-84 (1996)

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  • [Publications] 森勇藏: "Plasma CVM(Chemical Vaporization Machinig)におけるポリシング加工に関する研究(第3報)-加工面の平坦度と電極形状ならびに試料保持方法の相関(その2)-" 1996年度精密工学会秋季大会学術講演会講演論文集. 197-198 (1996)

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  • [Publications] 島田尚一: "極微小切削加工における工具損耗機構の分子動力学解析" 1996年度精密工学会秋季大会学術講演会講演論文集. 673-638 (1996)

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  • [Publications] 片岡俊彦: "金属微小球をプローブとした近接場光学顕微鏡" 1996年度精密工学会秋季大会学術講演会講演論文集. 689-690 (1996)

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  • [Publications] 森勇藏: "回転電極を用いた大気圧プラズマCVDによるSi薄膜の高速成膜に関する研究(第3報)-a-SiH成膜プロセスにおけるパウダーの影響-" 1996年度精密工学会秋季大会学術講演会講演論文集. 85-86 (1996)

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  • [Publications] 稲垣耕司: "半無限表面の電子状態の計算とそれに基づく光反射率スペクトルの解析" 1996年度精密工学会秋季大会学術講演会講演論文集. 87-88 (1996)

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  • [Publications] 遠藤勝義: "STM/STSによるSi表面の金属原子の観察" 1997年度精密工学会春季大会学術講演会講演論文集. (掲載予定). (1996)

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  • [Publications] 井上晴行: "レーザ光散乱によるSiウェーハ表面上の微粒子計測-P・S偏光のレーザビームによる標準試料の測定-" 1997年度精密工学会春季大会学術講演会講演論文集. (掲載予定). (1997)

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  • [Publications] 安弘: "光散乱法によるナノメータオーダの粒径測定法(第6報)-Siウェーハ面の測定と微粒子付着分布による表面評価-" 1997年度精密工学会春季大会学術講演会講演論文集. (掲載予定). (1997)

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  • [Publications] 遠藤勝義: "He高圧力・高周波プラズマの特性-電極材質による相違-" 1997年度精密工学会春季大会学術講演会講演論文集. 87-88 (1996)

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  • [Publications] 押鐘寧: "大気圧・高周波プラズマの計測とシミュレーション" 日本物理学会講演概要集1996年秋の分科会第4分冊. 131 (1996)

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  • [Publications] K.Endo: "Characteristics of VHF Helium Plasma at Atmospheric Pressure" Proc.of ICRP-3/SPP-14. 363-364 (1997)

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