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Laser-Ablation Fabrication and TR Structure Measurements

Research Project

Project/Area Number 09044131
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Tsukuba

Principal Investigator

MURAKAMI K.  Inst, Materials Science, Professor, 物質工学系, 教授 (10116113)

Co-Investigator(Kenkyū-buntansha) 吉田 岳人  松下技研(株), 光エレクトロニクス研究機構, 研究員
AZIZ M.J.  Harvard Univ., Applied Science, Professor, 応用科学科, 教授
GEDREGAN D.B  オークリッジ国立研究所, 固体物性部, 研究員
LOWNDES D.H.  Oak Ridge NL,Solid State Div.Group Leader, 固体物性部, 研究リーダー
YOSHIDA T.  Matsushita Res.Inst.Tokyo, Inc., Research
GEOHEGON D.B.  Oak Ridge NL,Solid State Div., Researcher
GEOHEGAN D.B  オークリッジ国立研究所, 固体物性部, 研究員
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥18,500,000 (Direct Cost: ¥18,500,000)
Fiscal Year 1998: ¥9,200,000 (Direct Cost: ¥9,200,000)
Fiscal Year 1997: ¥9,300,000 (Direct Cost: ¥9,300,000)
KeywordsLaser Ablation / Si Nano particles / Visible Hight Emission / Si nanoparticles / Si Ge EL Device / Time-resolued measurements / Oxidation / Photo luminescence / SiGeEL素子 / 時間分解構造測定 / 時間分解レーザー分解発光分析 / シリコンナノ構造 / シリコン超微粒子 / 可視発光 / レーザープラズマ軟X線分光 / 時間分解光ルミネッセンス測定 / Z-コントラストEELS・電顕
Research Abstract

We have studied the abovementioned title for the recent two years from April, 1997 to March, 1999, and we have obtained the results as shown below. These indicate that we can synthesize more functional nanostructures by means of the second pulsed modification of the surfaces of nanoparticles and fabricate Si nanoparticle films exhibiting high efficient photoluminescence(PL) and electroluminescence (EL) without any contaminations, using laser ablation technique.
[I] Time-resolved structure measurement of growth og Si nanoparticles : 1) No significant clustering and growth of nanoparticles have been observed until 15 mu s by time-resolved laser-plasma soft-X-ray absorption measurement. 2) By time-resolved PL and Rayleigh scattering measurements, it was found that the nanoparticle growth takes place at around 1 ms and that the spatial distribution of formed nanoparticles is much different between He and Ar gas atmosphere. 3) It was clarified by the newly developed second-laser irradiation method that relatively small Si nanoparticles begins to grow in the time scale from 100 mu s to 1 ms.
[II] Fabrication of Si and SiGe nanoparticle films : 1) We observed three PL bands for Si nanoparticle films, and the PL intensity depends strongly on the surface oxidation. 2) The size of Si nanoparticles ranges form 2 to 3 nm. 3) Si nanocrystallites in SiO2 with strong PL can be realized by annealing SiOx films deposited by laser ablation. The optimum value of x is 1.3-1.4 for obtaining high efficient light emission. 4) By laser ablation, we have fabricated EL-device structures using SiGe nanoparticles, which shows visible EL.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] K.Murakami 他: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inent Gas and Formation of Si Nanoclusters" Applied Surface Science. 127-129. 368-372 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Makimura 他: "Si Nanoparticles embedded in SiO_2 Films with Visible Photoluminescence" Applied Surface Science. 127-129. 388-392 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 村上 浩一,牧村 哲也: "可視発光シリコンナノ微粒子" 応用物理. 67. 817-821 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.B.Geohegan 他: "Time-resolved Imaging of Gas Phase Nanoparticle Synthesis by Laser Ablation" Applied Physics Letters. 72. 2987-2989 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.H.Lowndes 他: "Si and Zn Te Nanoparticles Synthesized by Pulsed Laser Ablation into Ambient Gas" J.Material Research. 14(印刷中). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yoshida 他: "Crystallinities and Light Emitting Properties of Nanostructured Si Ge Alloy prepared by Laser Ablation in Inert Background Gases" Proc. SPIE. 印刷中. (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Makimura, Y.Kunii, N.Ono and K.Murakami: "Nano-Structured Silicon-Based Films with Visible Light Emission Synthesized by Laser Ablation" Mat.Res.Soc.Symp.Proc.vol.452. 135-140 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Murakami, T.Makimura, N.Ono, T.Sakuramoto, A.Miyashita and O.Yoda: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inert Gas and Formation of Si Nanoclusters"

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Makimura, Y.Kunii, N.Ono, and K.Murakami: "Silicon Nanoparticles embedded in SiO2 Films with Visible Photoluminescence" Appl.Surface Science. 127-129. 388-392 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Murakami et al.: "Si Nanoparticles with Visible PL" Oyobutsuri. 67. 817 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Makimura, T.Mizuta, T.Ueda, and K.Murakami: "Formation Process of Si Nanoparticles Formed by Laser Ablation Method" Mat.Res.Soc.Symp.Proc.in press.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Murakami: "Synthesis of Si Nanoparticles with Visible Photoluminescence and Dynamics of Laser Ablation (Invited Paper)" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 47-50

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Suzuki, T.Ueda, S.Shida, T.Makimura, C.B.Arnold, M.J.Aziz, M.Tamura, and K.Murakami: "SiOx Films with Tunable and Intense photoluminescence Synthesized by Laser Ablation" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 165-166

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Makimura, T.Mizuta, T.Ueda, C.B.Geohegan, D.H.Lowndes and K.Murakami: "Formation Process of Si nanoparticles resulting from Laser Ablation observed by a Decomposition Method" PCPM'99 (International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba, 1999) Extended Abstracts. 173-174

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.B.Geohegan, A.A.Puretzky, G.Duscher, and S.J.Pennycook: "Time-resolved Imaging of Gas Phase Nanoparticles Synthesized by Laser Ablation" Appl.Phys.Lett.72. 2987 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.H.Lowndes, C.M.Rouleau, T.Thundat, G.Duscher, E.A.Kenik, and S.J.Pennycook: "Silicon and Zinc Telluride Nanoparticles Synthesized by Low Energy Density Pulsed Laser Ablation in Ambient Gases" J.of materials Research. 14. 359 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Yoshida, Y.Yamada, N.Suzuki, T.Makino, T.Orii, K.Murakami, D.B.Geohegan, D.H.Lowndes, and M.J.Aziz: "Crystallinities and Light Emitting Properties of Nanostructured SiGe Alloy Prepared by Pulsed Laser Ablation in Inert background Gases" Proc.International Society for Optical Engineering (SPIE), High Power Lasers & Applications (LASE'99), 3618-68 (San Jose, CA,Jan.1999).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.B.Geohegan et al.: "Time-resolued Imaging of Gas Phase Nanoparticle Synthesis by baser Ablation" Appl.Ploys.Lett.72. 2987-2989 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] D.H.Louendes et al.: "Si and ZnTe Nanoparticles Synthedized by Pulsed Laser Ablation into Ambient Gas" J.Mater,Res.14 No2(印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 村上浩一,牧村哲也: "可視発光シリコン ナノ微粒子" 応用物理. 67. 817-821 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Murakami et al.: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inert Gas and Femation of Si Nanoclustru" Appl.Surface Science. 127-129. 368-372 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Makimura et al.: "Si Nanoparticles embedded in SiO_2 Films with Visible Photolyminescence" Appl.Surface Science. 127-129. 388-392 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Yashida et al.: "Crystallinities and Light Enitting Properties of Nanotractured SiGe Alloy prepared by Laser Ablation in Inert Backgromind Gases" Proc.SPIE. (印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] K. Murakami 他: "Dynamics of Si Plume produced by Laser Ablation in Ambient Inart Gas and Formation of Si Nanocluiters" Proc. COLA '97. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] T. Makimura 他: "Silicon Nanoparticles embedded in SiO_2 Films with Visible Photoluminescence" Proc. COLA '97. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] N. Fukata 他: "Hydrogen Molecules in Defective Silicon" Jpn. J. Apple. Physics. 36. L1456-1459 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] N. Fukata 他: "Hydrogen Molecules and Hydrogen-related Defects in Crystaline Silicon" Phys. Rev.B56. 6642-6647 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K. Murakami 他: "Formation of Hydrogen Molecules in Crystalline Silicon treated with Atomic Hydrogen" Mat. Res. Soc. Symp. Proc.442. 269-274 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T. Makimura 他: "Nano-Structured Silicon-Based Film with Visible to Emissives Synthesized by Laser Ablation" Mat. Res. Soc. Symp. Proc.452. 135-140 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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