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Processes to Fabricate 3-Dimentional Micro Structure

Research Project

Project/Area Number 09044135
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research .
Research Field Applied physics, general
Research InstitutionTokyo metropolitan Institute of Technology (1998)
The University of Tokyo (1997)

Principal Investigator

HARASHIMA Fumio  Tokyo Metropolitan Institute of Technology, President, 学長 (60013116)

Co-Investigator(Kenkyū-buntansha) LEE Kok-meng  Georgia Institute of Technology, Mechanical Department, Associate Professor, 機械工学科, 助教授
SCHMIDT Gunter  Munich Institute of Technology, Control Department, Professor, 制御工学科, 教授
HASHIMOTO Hideki  Institute of Industrial Science, Univ.of Tokyo, Associate Professor, 生産技術研究所, 助教授 (30183908)
FUJITA Hiroyuki  Institute of Industrial Science, Univ.of Tokyo, Professor, 生産技術研究所, 教授 (90134642)
MASUZAWA Takahisa  Institute of Industrial Science, Univ.of Tokyo, Professor, 生産技術研究所, 教授 (60013215)
SCHMITT Gunt  ミュンヘン工科大学, 制御工学科, 教授
SCHIMIDT gun  ミュンヘン工科大学, 制御工学科, 教授
GAGNEPAIN Je  フランス科学技術庁, 工学部門, 部長(研究職)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥16,000,000 (Direct Cost: ¥16,000,000)
Fiscal Year 1998: ¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1997: ¥8,800,000 (Direct Cost: ¥8,800,000)
KeywordsMicro-Mechatronics / 3-dimensional micro structure / Nano Technology / Process / Manipulation / Tele-operation / Micro Actuator / Micro Sensor / 3次元マイクロ装置 / MEMS / ナノ / マイクロ・モータ
Research Abstract

We have visited each other according to the program of this year's project Our discussion, exchange information and cooperation were successful based on the results of last year's project. Especially Japanese and French members organized a international workshop on Nano technology and did extensive discussion how to organize Nano technology research with the viewpoint of micro mechanical technology. The discussion attracted a lot of attention from all over the world and we showed the new research direction of nano and micro technology by using this project.
The results of this project were presented in many well-known international conference and workshop. There were so sincere and serious discussion with positive attitude to our international cooperative project. And we could lead the new research fields of nano technology. We hope that our leadership in nano and micro technology fields would last after completing this project.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] S.Nakamura: "A One-Body Mems Device Composed of Mutually Insulated Metallic Parts" Micro Electro Mechanical Systems. 278-283 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Makoto Mita: "An Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application" 1998 IEEE/LEOS Summer Topical Meetings. 33-34 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Toshiyoshi: "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Hiroyuki Fujita: "Micromachined Optical Switches for Free-Space Beam Steering" 1998 IEEE/LEOS Summer Topical Meetings. 19-20 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Young's Modulus Modification due to Joule Heating of Polysilicon Microstructures" Transducers 97. Volume 1. 603-606 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Langlet: "A quantitative analysis of Scratch Dreive Actuation for integrated X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Nakamura: "An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives" Transducers 97. Volume 2. 1081-1084 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshio Mita: "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fluidic Interconnection" Transducers 97. Volume 1. 37-40 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Nano Tele-Manipulation Using Virtual Reality Interface" Proceedings of IEEE International symposium on Industrial Electronics. Volume 1 of 2. 171-176 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Tele-Manipulation Using Atomic Force Microscope" Proceedings of 1998 IEEE/RSJ International Conference Intelligent Robots and Systems. Volume 3. 1739-1746 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume 1. 142-147 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Trends on Mechatronics for Micro/Nano Telemanipulation : Survey and Requirements" Proceedings of the 9th International Federation of Automatic Control. Volume 1. 235-240 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Macro to Nano Tele-Manipulation Through Nanoelectromechanical Systems" Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume 1 of 4. 98-103 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Nakamura: "A One-Body Mems Device Composed of Mutually Insulated Metallic Parts" Micro Electro Mechanical Systems. 278-283 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Makoto Mita: "An Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application" 1998 IEEE/LEOS Summer Topical Meetings. 33-34 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Toshiyoshi: "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Hiroyuki Fujita: "Micromachined Optical Switches for Free-Space Beam Steering" 1998 IEEE/LEOS Summer Topical Meetings. 19-20 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Young's Modulus Modification due to Joule Heating of Polysilicon Microstructures" Transducers 97. Volume 1. 603-606 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Langlet: "A quantitative analysis of Scratch Dreive Actuation for integrated X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Nakamura: "An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives" Transducers 97. Volume 2. 1081-1084 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshio Mita: "Two Dimensional Micro Conveyance System with Through Holes for Electrical and Fulidic Interconnection" Transducers 97. Volume 1. 37-40 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Nano Tele-Manipulation Using Virtual Reality Interface" Proceedings of IEEE International symposium on Industrial Electronics. Volume 1 of 2. 171-176 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Tele-Nanorobotics Using Atomic Force Microscope" Proceedings of 1998 IEEE/RSJ International Conference Intelligent Robots and Systems. Volume 3. 1739-1746 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object Manipulation" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume 1. 142-147 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Trends on Mechatronics for Micro/Nano Telemanipulation : Survey and Requirements" Proceedings of the 9th International Federation of Automatic Control. Volume 1. 235-240 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Metin Sitti: "Macro to Nano Tele-Manipulation Through Nanoelectromechanical Systems" Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume 1 of 4. 98-103 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Nakamura: "A One-BodyMems Device Composed of Matually Insulated Metallic Parts" Micro Erectro Mechanical Systems. 278-283 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Makoto Mita: "An Out-of-Plone Polysilicon Acutuator with a Smooth Mirror for Optical Fiber Switch Application" 1998 IEEE/LEOS Summer Topical Meetings. 33-34 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Toshiyoshi: "Micromechanical Fiber Optic Switches based an Electromagnetic Torsion Mirros" 1998 IEEE/LEOS Summer Topical Meetings. 23-24 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Hiroyuki Fujita: "Micromachined Optical Switches for Free-Space Beam Steering" 1998 IEEE/LEOS Summer Topical Meetings. 19-20 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] E.H.Yang: "Fabrication and Characterization of U-shaped Beams for the Determination of Younger Modulity Modification due to fould Heales" Transducers 97. Volume 1. 603-606 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] P,Langlet: "A quanlitative analysis of Scratch Dreive Actuation for integrared X/Y motion system" Transducers 97. Volume 2. 773-776 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] S.Nakamura: "An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives" Transducers 97. Volume2. 1081-1084 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Yoshio Mita: "Two Dimensional Micro Conveyance System with through Holes for Electrical and Fluidic Interconnection" Transducers 97. Volume1. 37-40 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] Metin Sitti: "Nano Tele-Manipulation Using Virtual Reality Interface" Proceedings of IEEE International symposium on Inauslrial Electronics. Volume1 of 2. 171-176 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Metin Sitte: "Tele-Nanorobotics Using Atomic Force Microscope" Proceedings of IEEE/RSJ International Conference Intelligent Robots and Systems. Volume3. 1739-1746 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Satoshi Horiguchi: "Virtual Reality User Interface for Teleoperated Nanometer Scale Object Manipulation" Proceedings of the 7th IEEE International Workshop on Robot and Human Communication. Volume1. 142-147 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Metin Sitti: "Trends on Mechatronics for Micro/Nano Telemanipulation:Survey and Requirements" Proceedings of the 9th International Federation of Automatic Control. Volume1. 235-240 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Metin Sitti: "Macroto Nano Tele-Manipulation Through Nanoelectromechanicae Systems" Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume1 of 4. 98-103 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] S. Konishi: "Three Dimensional Wire Array for Connection between Multy Layers" Trans. IEE Japan. 117-E. (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y. Fukuta: "The Reshaping Technology for Three Dimensional Polysilicon Microstructures" Trans. IEE Japan. 117-E. (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T. Akiyama: "Scratch Drive Actuotor with Mechanical Links for Self Assembly of Three Dimensional MEMS" IEEE J. Microelectromechanical Sys.6 10. (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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