高効率パワーデバイス用シリコンカーバイドの高品位結晶成長と物性制御

• Project/Area Number: 09044156
• Research Category: Grant-in-Aid for international Scientific Research
• Allocation Type: Single-year Grants
• Section: Joint Research
• Research Institution: Kyoto University
• Principal Investigator: 松波 弘之 京大, 工学(系)研究科, 教授 (50026035)
• Project Period (FY): 1997
• Project Status: Completed (Fiscal Year 1997)
• Budget Amount: ¥2,000,000 (Direct Cost: ¥2,000,000); Fiscal Year 1997: ¥2,000,000 (Direct Cost: ¥2,000,000)