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CRYSTAL STRUCTURE ANALYSIS OF SURFACE AND INTERFACE 1 ATOMIC LAYER AND CONTROL OF HETEROSTRUCTURE GROWTH

Research Project

Project/Area Number 09305003
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

TAKEDA Yoshikazu  NAGOYA UNIVERSITY, DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING, PROFESSOR, 工学研究科, 教授 (20111932)

Co-Investigator(Kenkyū-buntansha) NONOGAKI Youichiro  NAGOYA UNIVERSITY, DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING, RESEARCH ASSOCIATE, 工学研究科, 助手 (40300719)
TABUCHI Masao  NAGOYA UNIVERSITY, DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING, ASSISTANT PROFESSOR, 工学部, 講師 (90222124)
FUJIWARA Yasufumi  NAGOYA UNIVERSITY, DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING, ASSOCIATE PROFESSOR, 工学研究科, 助教授 (10181421)
HARADA Jimpei  RIGAKU ELECTRIC, X-RAY LABORATORY, RESEARCHER, X線研究所, 研究員
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥38,900,000 (Direct Cost: ¥38,900,000)
Fiscal Year 1999: ¥7,100,000 (Direct Cost: ¥7,100,000)
Fiscal Year 1998: ¥9,100,000 (Direct Cost: ¥9,100,000)
Fiscal Year 1997: ¥22,700,000 (Direct Cost: ¥22,700,000)
KeywordsSURFACE / INTERFACE / ATOMIC LAYER / CRYSTAL STRUCTURES / HETEROSTRUCTURE GROWTH / GROWTH CONTROL
Research Abstract

The targets of this research are to establish a technique to measure and analyze the crystal structures of surface and interface monolayer in semiconductor in situ, and to control the heterostructure growth, not only semiconductor/semiconductor heterostructures but also other combinations such as semiconductor/insulator and semiconductor/semimetal heterostructures.
InP/ErP/InP heterostructures were successfully fabricated and the crystal structure of ErP was proved to be the rocksalt structure by CTR scattering measurement. It was also found the semimetal changes to semiconductor due to the quantum size effects.
By the X-ray CTR scattering measurements, the compositions, the layer thicknesses and the interface structures of InP/InGaAs (2-3 monolayer) /InP heterostructures were measured and revealed to the one atomic layer level.
The observation of one atomic layer of AlAs (1 monolayer) on GaAs was successfully made by X-ray CTR scattering. Together with the interface structure analysis in … More InP/InGaAs/InP and the observation of surface 1 monolayer of AlAs, the original targets were achieved in this research.
The X-ray CTR scattering measurement technique that has demonstrated its very powerful capability to reveal the crystal structures of 1 atomic layer in heterostructures was applied to the low-temperature buffer layers for growth of GaN on sapphire substrates. The growth process and growth timing dependences of the crystalline structures of the low-temperature AlN and GaN buffer layers were revealed by the X-ray CTR scattering measurements, X-ray reflectivity measurements and AFM surface observations. The role of the low-temperature buffer layers and the best crystallinity as the buffer layers were clarified in the atomic scale.
Through the establishments of the characterization techniques and the analysis of these heterostructures, a completely new heterostructure, i.e., CaFィイD22ィエD2/InAs/CaFィイD22ィエD2, were proposed and started to fabricate by a newly designed molecular beam epitaxy. Less

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (41 results)

All Other

All Publications (41 results)

  • [Publications] H. Ofuchi: "Local structures around Er atoms doped in InP revealed by fluorescence EXAFS"Microelectronic Engineering. 43-44. 745-751 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi: "Thermal diffusion of Er atoms δ-doped in InP"Applied Surface Science. 130-132. 393-397 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki: "Nanometer-scale In As islands grown on GaP(001) by organometallic vapor phase epitaxy"Applied Surface Science. 130-132. 724-728 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ofuchi: "Local structures around Fe atoms, and magnetic properties of [fcc-Fe/Cu] multilayers"Applied Surface Science. 130-132. 899-903 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi: "Observation of composition in surface monolayers by x-ray scattering spectra caused crystal truncation and interfaces"Journal of Synchrotron Radiation. 5. 899-901 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ofuchi: "Local structurestudy of dilute Er in III-V semiconductors by fluorescence"Journal of Synchrotron Radiation. 5. 1061-1063 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki: "Formation of InGaAs dots on InP substrate with lattice-matching growth condition by droplet heterolpitaxy"Institute of Physics Conference Series. 162. 469-473 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi: "X-ray Interference and Crystal Truncation Rod Observation of GaN and GaInN Layers Grown on Sapphire with AIN Buffer Laye"Japanese Journal of Applied Physics. 38. 281-284 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Fuchi: "Self-assembled InGaAs dots grown on GaP(001) substrate by low pressure organometallic vapor phase epitaxy"Physica E. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki: "SR-stimulated etehing and OMVPE growth for semiconductor nanostructure fabrication"Materials Science and Engineering B. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Moriya: "Growth mode transition of InGaAs in OMVPE growth on GaP(001)"Microelectronic Engineering. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi: "X-ray CTR scattering measurement of InP/InGaAs/InP interface structures fabricated by different growth processes"Applied Surface Science. (印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ofuchi et al.: "Local structures around Er atoms doped in InP revealed by fluorenscence EXAFS scattering"Microelectron. Eng.. Vols. 43-44. 745-751 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi et al.: "Thermal diffusion of Er atoms δ-doped in InP"Appl. Surf. Sci.. Vols. 130-132. 393-397 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki et al.: "Nanometer-scale InAs islands grown on GaP (001) by organometallic vapor phase epitaxy"Appl. Surf. Sci.. Vols. 130-132. 724-728 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ofuchi et al.: "Local structures around Fe atoms and magnetic properties of [fcc-Fe/Cu] multilayers"Appl. Surf. Sci.. Vols. 130-132. 899-903 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi et al.: "Observation of composition in surface monolayer by X-ray scattering spectra caused by crystal truncation rod and interference"J. Synch. Radiat.. Vol. 5. 899-901 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Ofuchi et al.: "Local structure study of dilute Er in III-V semiconductors by fluorescence EXAFS"J. Synch. Radiat.. Vol. 5. 1061-1063 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki et al.: "Formation of InGaAs dots on InP substrate with lattice-matching growth condition by droplet heteroepitaxy"Inst. Phys. Conf. Ser.. No. 162. 469-473 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi et al.: "X-ray interference and crystal truncation rod observation of GaN and GaInN layers grown on sapphire with AlN buffer layer"Jpn. J. Appl. Phys.. Vol. 38. 281-284 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S. Fuchi et al.: "Self-assembled InGaAs dots grown on GaP (001) substrate by low pressure organometallic vapor phase epitaxy"Physica E. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Nonogaki et al.: "SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication"Nat. Sci. & Eng.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Moria et al.: "Growth mode transition of InGaAs in OMVPE growth on GaP (001)"Microelectron. Eng.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Tabuchi et al.: "X-ray CTR scattering measurement of InP/InGaAs/InP interface structures fabricated by different growth processes"Appl. Surf. Sci.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Nonogaki: "Formation of InGaAs dots on InP substrate with lattice-matching growth condition by droplet heteroepitaxy."Institute of Physics Conference Series. 162. 469-473 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Tabuchi: "X-ray Interference and Crystal Truncation Rod Observation of GaN and GaInN Layers Grown on Sapphire with AIN Buffer Layer."Japanese Journal of Applied Physics. 38. 281-284 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Fuchi: "Self-assembled InGaAs dots grown on GaP (001) substrate by low pressure organometallic vapor phase epitaxy."Physica. E. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Nonogaki: "SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication."Msaterials Science and Engineering B. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Moriya: "Growth mode transition of InGaAs in OMVPE growth on GaP (001)."Microelectronic Engineering. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Tabuchi: "X-ray CTR scattering measurement of InP/InGaAs/InP interface structures fabricated by different growth processes."Applied Surface Science. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 田渕、竹田 他: "observation of composition in surface monolayer by x-ray scattering spectra coused by crystal trurcation rod and interference" J.Synch.Radiat. 5. 899-901 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 田渕、竹田 他: "Local structure study an dilute Er in III-V semiconductors by fluorescence EXAFS" J.Synch.Radiat.5. 1061-1063 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 竹田、藤田 他: "Monolayer scale analysis of ZnSe/GaAs in heterointerfaces structures by x-ray CTR scattering and interference" Inst.Phys.Conf.Ser.156. 263-266 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 田渕、竹田 他: "Thermal diffusion of Er atoms S-doped in InP" Appl.Sur.Sci.130-132. 393-397 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 田渕、竹田 他: "Local structures around Fe atoms and magnetic properties of Fe/Cu multi layers" Appl.Sur.Sci.130-132. 899-903 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 竹田、田渕 他: "Local structures around Er atoms doped in InP revealed by fluorescence EXAFS" Microelectron.Engr.43-44. 745-751 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 田渕,竹田 他: "Observation of composition in surface monolayer by X-ray scattering spectra caused by crystal truncation rod and interference" J.Synch.Radiat.(印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 田渕,竹田 他: "Local structure study on dilute Er in III-V semiconductors by fluorescence EXAFS" J.Synch.Radiat.(印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 竹田,藤田 他: "Monolayer scale analysis of Znse/GaAs in heterointerfaces structures by X-ray CTR scattering and interference" Inst.Phys.Conf.Ser.(印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 田渕,竹田 他: "Thermal diffusion of Er atoms δ-doped in InP" Appl.Sur.Sci.(印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 田渕,竹田 他: "Local structures around Fe atoms and magnetic properties of Fe/Cu multilayers" Appl.Sur.Sci.(印刷中).

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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