• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Nonlinear Phenomena in Cluster Ion impact on Solid Surfaces

Research Project

Project/Area Number 09305004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

YAMADA Isao  Kyoto University, Faculty of Engineering, Professor, 工学研究科, 教授 (00026048)

Co-Investigator(Kenkyū-buntansha) MATSUO Jiro  Kyoto University, Faculty of Engineering, Assistant, 工学研究科, 助手 (40263123)
TAKAOKA Gikan  Kyoto University, Faculty of Engineering, Assistant Professor, 工学研究科, 助教授 (90135525)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥11,100,000 (Direct Cost: ¥11,100,000)
Fiscal Year 1999: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1998: ¥9,300,000 (Direct Cost: ¥9,300,000)
Keywordscluster ion / secondary ion / non-linear / Ar cluster / ion implantation / molecular dynamics / SIMS / shallow junction / フラーレン / ホウ素クラスター / 損傷形成 / TOF / 多価イオン / スパッタリング / 多体衝突 / 質量分析
Research Abstract

Interaction between cluster ions and solid surfaces, which is the so-called "nonlinear phenomena", has been studied. Molecular dynamics calculation shows that cluster ion impact process is far from monomer ion impact process, which is well described with binary collision theory. Many atoms impact on small surface area within femto-second time scale. Therefore, a new interaction of each collision of the cluster constituent atoms with the surface atoms is expected.
Average cluster size used in this study was about 3000 by using Time of fight (TOF) technique. Detection efficiency of multi channel plate (MCP) should be considered because secondary electron emission efficiency of heavy ion was less than 1. We have calibrated the efficiency carefully in order to measure the size distribution of cluster ion precisely. Not only singly charged cluster ions but also multiple-charged cluster ions were found in the TOF spectra. Crater formation with cluster ion impact has been reported. We have found that the minimum size for crater formation is 10. This result was also confirmed by MD calculation. Secondary ion emission was studied in order to realize cluster ion SIMS. Sb doped silicon was used to measure the SIMS spectra with Ar cluster ions as primary ions. Secondary ion emission yield is proportional to the sputtering yield. This indicates that cluster ion has a great advantage to realize high-depth resolution SIMS. These unique bombardment effects of cluster ions on solid surfaces cause high yield of sputtering surface smoothing, shallow implantation and high yield of secondary ion emission.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] J.Matsuo, G.Takaoka, I.Yamada: "Indium Oxide Film Fomation by O_2 Cluster Ion-Assisted Deposition"Materials Chemistry and Physics. Vol. 54. 258-261 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.Matsuo, I.Yamada: "Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface"Materials Chemistry and Physics. Vol. 54. 139-142 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] I.Yamada: "Low Energy Cluster Ion Beam Modification of Surfaces"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 1-18 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.Matsuo, I.Yamada: "Cluster Size Dependence of the Impact Process on a Carbon Substrate"Nuclear Instruments and Methods in Physics Research B. Vol. 153. 264-269 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.Matsuo, I.Yamada: "Ionised Cluster Beram as a Hardness Measurement Tool"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 47-52 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.Matsuo, I.Yamada: "Surface Treatment of Diamond Films with O2 Cluster Ion Beams"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 639-644 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Matsuo, G. Takaoka, I. Yamada: "Indium Oxide Film Fomation by OィイD22ィエD2 Cluster Ion-Assisted Deposition"Materials Chemistry and Physics. Vol. 54. 258-261 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Matsuo, I. Yamada: "Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface"Materials Chemistry and Physics. Vol. 54. 139-142 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] I. Yamada: "Low Energy Cluster Ion Beam Modification of Surfaces"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 1-18 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.Matsuo, I. Yamada: "Cluster Size Dependence of the Impact Process on a Carbon Substrate"Nuclear Instruments and Methods in Physics Research B. Vol. 153. 264-269 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Matsuo, I. Yamada: "Ionised Cluster Beam as a Hardness Measurement Tool"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 47-52 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Matsuo, I. Yamada: "Surface Treatment of Diamond Films with OィイD22ィエD2 Cluster Ion Beams"Nuclear Instruments and Methods in Physics Research B. Vol. 148. 639-644 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] I.Yamada: "Low Energy Cluster Ion Beam Modification of Surfaces"Nuclear Instruments and Methods in Physics Research B. Vol.148. 1-18 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Matuo,I.Yamada: "Cluster Size Dependence of the Impact Process on a Carbon Substrate"Nuclear Instruments and Methods in Physics Research B. Vol.153. 264-269 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Matsuo,I.Yamada: "Decaborane (B_<10>H_<14>) Ion Implantation Technology for Sub-0.1μm PMOSFET's"IEEE Transactions on Electron Devices. Vol.46,No.4. 683-689 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] I.Yamada: "Low Energy Cluster Ion Beam Modification of Surfaces"Nuclear Instruments and Methods in Physics Research B. Vol.148. 1-11 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Matuo,I.Yamada: "Ionised Cluster Beam as a Hardness Measurement Tool"Nuclear Instruments and Methods in Physics Research B. Vol.148. 47-52 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Matsuo,I.Yamada: "Surface Treatment of Diamond Films with O2 Cluster Ion Beams"Nuclear Instruments and Methods in Physics Research B. Vol.148. 639-644 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] I.Yamada: "Gas Cluster Ion Beams for Processing New Materials" Physics of Clusters. No.3. 74-85 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] I.Yamada: "Progress,Demands and Prospects for Advanced Ion Beam Processing" Materials Chemistry and Physics. Vol.54. 5-14 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Matsuo,G.Takaoka,I.Yamada: "Indium Oxide Film Fomation by O_2 Cluster Ion-Assisted Deposition" Materials Chemistry and Physics. Vol.54. 258-261 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Matsuo,I.Yamada: "Molecular Dynamics Simulation of a Carbon Cluster Ion Impacting on a Carbon Surface" Materials Chemistry and Physics. Vol.54. 139-142 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Matsuo,I.Yamada: "Energy Dependence of a Single Trace Created by C_<60> Ion Impact" Materials Chemistry and Physics. Vol.54. 143-146 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Matsuo,I.Yamada: "Angular Distributions of the Particles Sputterd with Ar Cluster Ions" Materials Chemistry and Physics. Vol.54. 262-265 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 山田公・松尾二郎: "ガスクラスターイオンビームによる固体表面プロセス" 応用物理. 66・6. 559-568 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] I.Yamada, J.Matsuo, E.C.Jones, D.Takeuchi, T.Aoki, K.Goto and T.Sugii: "Range and damage distribution in cluster ion implantation" Materials Research Society Symposium Proceedings. 438. 363-374 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] I.Yamada: "Prospects of materials processing by gas cluster ion beams" Application of Accelerators in Research and Industry. 479-482 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Z.Insepov and I.Yamada: "Computer simulation of crystal surface modification by accelerated cluster ion impacts" Nuclear Instruments and Methods in Physics Research B. 112. 44-48 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Seki, T.Kaneko, D.Takeuchi, T.Aoki, J.Matsuo, Z.Insepov and I.Yamada: "STM observasion of HOPG surfaces irradiated with Ar cluster ions" Nuclear Instruments and Methods in Physics Research B. 121. 781-785 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Tanomura, D.takeuchi, J.Matsuo, G.H.Takaoka and I.Yamada: "Fullerene ion irradiation to silicon" Nuclear Instruments and Methods in Physics Research B. 121. 480-483 (1997)

    • Related Report
      1997 Annual Research Report

URL: 

Published: 1998-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi