Project/Area Number |
09305013
|
Research Category |
Grant-in-Aid for Scientific Research (A)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
機械工作・生産工学
|
Research Institution | TOKYO INSTITUTE OF TECHNOLOGY |
Principal Investigator |
TSUKADA Tadao Tokyo Institute of Technology・Graduate School of Information Science and Engineering, Professor, 大学院・情報理工学研究科, 教授 (00016437)
|
Co-Investigator(Kenkyū-buntansha) |
TAKAHASHI Masaaki Tokyo Institute of Technology・Graduate School of Information Science and Enginee, 大学院・情報理工学研究科, 助手 (00179524)
SASAJIMA Kazuyuki Tokyo Institute of Technology・Graduate School of Information Science and Enginee, 大学院・情報理工学研究科, 助教授 (80170702)
|
Project Period (FY) |
1997 – 1998
|
Project Status |
Completed (Fiscal Year 1998)
|
Budget Amount *help |
¥39,500,000 (Direct Cost: ¥39,500,000)
Fiscal Year 1998: ¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1997: ¥31,900,000 (Direct Cost: ¥31,900,000)
|
Keywords | Form measurement / Multi-scale / Image measurement / Interference measurement / Stitching / Surface roughness / Flatness / Microscope |
Research Abstract |
This research aims to handle functional surface forms as multi-scale. The authors developed a wide-range measurement system that consists of a high-resolution microscope and of its stitching system. The type of microscope is selected as a scanning white light interference microscope because of its high resolution and high accuracy. The stitching is done firstly by moving a work horizontally in x, y directions relatively against the microscope. Data connection is carried through calculating optimization method and correlation method. The results of this research are (1) the multi-scale measurement system is accomplished, (2) the wide range measurement by stitching is useful for multi-scale assessment, (3) the truncation wear is measured as application and evaluated its volume precisely than the present method, and (4) this multi-scale measurement system is useful for other functionally important precision surface evaluation. The future subjects are (1) the application of this multi-scale measurement to non-plane surface like cylinder and other features, and (2) data system of huge amount multi-scale data, compression and its standardization.
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