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A Multi-Scale Measurement Method and Its Data Compression of from Surface Profiles to Form Errors

Research Project

Project/Area Number 09305013
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

TSUKADA Tadao  Tokyo Institute of Technology・Graduate School of Information Science and Engineering, Professor, 大学院・情報理工学研究科, 教授 (00016437)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Masaaki  Tokyo Institute of Technology・Graduate School of Information Science and Enginee, 大学院・情報理工学研究科, 助手 (00179524)
SASAJIMA Kazuyuki  Tokyo Institute of Technology・Graduate School of Information Science and Enginee, 大学院・情報理工学研究科, 助教授 (80170702)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥39,500,000 (Direct Cost: ¥39,500,000)
Fiscal Year 1998: ¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1997: ¥31,900,000 (Direct Cost: ¥31,900,000)
KeywordsForm measurement / Multi-scale / Image measurement / Interference measurement / Stitching / Surface roughness / Flatness / Microscope
Research Abstract

This research aims to handle functional surface forms as multi-scale. The authors developed a wide-range measurement system that consists of a high-resolution microscope and of its stitching system. The type of microscope is selected as a scanning white light interference microscope because of its high resolution and high accuracy. The stitching is done firstly by moving a work horizontally in x, y directions relatively against the microscope. Data connection is carried through calculating optimization method and correlation method.
The results of this research are (1) the multi-scale measurement system is accomplished, (2) the wide range measurement by stitching is useful for multi-scale assessment, (3) the truncation wear is measured as application and evaluated its volume precisely than the present method, and (4) this multi-scale measurement system is useful for other functionally important precision surface evaluation. The future subjects are (1) the application of this multi-scale measurement to non-plane surface like cylinder and other features, and (2) data system of huge amount multi-scale data, compression and its standardization.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] 笹島和幸、 塚田忠夫: "表面おうとつ形状のマルチスケール測定(第1報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 直井一也、 笹島和幸、 塚田忠夫: "表面おうとつ形状のマルチスケール測定(第2報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.SASAJIMA and T.TSUKADA: "Multi-Scale Measurement of Surface Asperity Profile (1st Report) (In Japanese)" Proc.of JSPE (Mar.1998).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.NAOI,K.SASAJIMA and T.TSUKADA: "Multi-Scale Measurement of Surface Asperity Profile (2nd Report) (In Japanese)" Proc.of JSPE (Mar.1998).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 笹島和幸、塚田忠夫: "表面おうとつ形状のマルチスケール測定(第1報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 直井一也、笹島和幸、塚田忠夫: "表面おうとつ形状のマルチスケール測定(第2報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 笹島和幸、塚田忠夫: "表面おうとつ形状のマルチスケール測定(第1報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 直井一也、笹島和幸、塚田忠夫: "表面おうとつ形状のマルチスケール測定(第2報)" 精密工学会春季大会学術講演会講演論文集. (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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