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Development of microsensors for subsurface microsensing

Research Project

Project/Area Number 09305068
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section一般
Research Field 資源開発工学
Research InstitutionTohoku University

Principal Investigator

NIITSUMA Hiroaki  Graduate School of Engineering, Tohoku University, Professor, 大学院・工学研究科, 教授 (90108473)

Co-Investigator(Kenkyū-buntansha) MORIYA Hirokazu  Graduate School of Engineering, Tohoku University, Research Associate, 大学院・工学研究科, 助手 (60261591)
ASANUMA Hiroshi  Graduate School of Engineering, Tohoku University, Associate Professor, 大学院・工学研究科, 助教授 (50250717)
ESASHI Masayoshi  New Industry Creation Hatchery Center, Tohoku University, Professor, 未来科学技術共同研究センター, 教授 (20108468)
Project Period (FY) 1997 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥36,600,000 (Direct Cost: ¥36,600,000)
Fiscal Year 2000: ¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 1999: ¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 1998: ¥10,800,000 (Direct Cost: ¥10,800,000)
Fiscal Year 1997: ¥16,500,000 (Direct Cost: ¥16,500,000)
KeywordsMEMS / Microsensor / Optical Accelerometer / Capacitive Accelerometer / Optical yhdrophone / FBG / Radon sensor / Microsonde / マイクロセンサ / 地下マイクロセンシング / 加速度センサー / 光干渉型振動計 / シリコンプロセス / マイクロマシニング / 弾性波センサー
Research Abstract

1. Development of silicon capacitive accelerometer : We fabricated silicon capacitive micro accelerometers with a size of 9mmX5mmX2mm. The accelerometer had sufficient response up to 1KHz. The sensor and electrical circuit were packaged into a micro sonde and tested in mini-field.
2. Development of optical accelerometer : A pure-passive optical accelerometer was fabricated. The sensor worked well at the frequency lower than 1kHz
3. Development of optical hydrophone : Optical hydrophones were fabricated. The hydrophone uses interference at the end of fiber. The hydrophone had ability to detect signals in a water tank
4. Fiber grating sensor : We investigated a method to create fiber Bragg grating on a fiber. A fiber sensor for a temperature compensation of a tidal wave detector was successfully fabricated with a resolution in the order of 0.001 degree-C.
5. Development of Radon sensor : Miniaturized radon sensor with a sintilator and cathode was fabricated at the end of optical fiber. This sensor had ability to detect alpha-ray from standard source.

Report

(5 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] Hirata,K.,Niitsuma,H.,and Esashi,M.: "Silicon micromachined fiber-optic accelerometer for downhole seismic measurement"Trans.IEE Japan. 120-E. 576-581 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Nishizawa,M.,Niitsuma,H.,and Esashi,M.: "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer"SEG Expanded Abstracts. (in CDROM). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Asanuma,M.Nishizawa,G.Suzuki,Y.Yoshida,H.Niitsuma and M.Esashi: "Miniaturized silicon capacitive accelerometer for downhole seismic measurement"Proc.InterPACK01, 2001. (in-press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Asanuma,S.Hasihmoto,G.Suzuki,H.Niitsuma,and M.Esashi: "Optical interference type micro hydrophone fabricated by micromachining"SEG Expanded Abstracts. (in-press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hirata, H.Niitsuma and M.Esashi: "Silicon micromachined fiber-optic accelerometer for downhole seismic measurement"Trans.IEE Japan. 120-E. 576-581 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Nishizawa, H.Niitsuma and M.Esashi: "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer"Proc.SEG 2000 Annual Mtg.. (CDROM). (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Asanuma, M.Nishizawa, G.Suzuki, Y.Yoshida, H.Niitsuma and M.Esashi: "Miniaturized silion capacitive accelerometer for downhole seismic measurement"Proc.InterPACK01. (in-press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Asanuma, S.Hasihmoto, G.Suzuki, H.Niitsuma, and M.Esashi: "Optical interference type micro hydrophone fabricated by micromachining"SEG 2001 Expanded Abstracts. (in-press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hirata,K.,Niitsuma,H.,and Esashi,M.: "Silicon micromachined fiber-optic accelerometer for downhole seismic measurement"Trans.IEE Japan. 120-E. 576-581 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Nishizawa,M.,Niitsuma,H.,and Esashi,M.: "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer"SEG Expanded Abstracts. (in CDROM). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 西澤,新妻,江刺: "シリコン容量型マイクロ加速度センサを用いた小型地下弾性波検出器の試作とその性能評価"物理探査学会第102回学術講演会論文集. 178-181 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 新妻: "地下マイクロセンシング技術,2-7"超音波テクノ. 12(8). 2-7 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Asanuma,M.Nishizawa,G.Suzuki,Y.Yoshida,H.Niitsuma and M.Esashi: "Miniaturized silicon capacitive accelerometer for downhole seismic measurement"Proc.InterPACK01,2001. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hirata K.,Niitsuma H.,and Esashi M.: "Fabrication and characterization of a downhole micro accelerometer using a fabry-pero interferometer"Proc. 5th Well Logging Symposium of Japan. W1-W9 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Nishizawa M.,Lim G.,Niitsuma H.and Esashi M.: "Development of silicon microcapacitive accelerometer for seismic measurement"Proc. SPIE 44th Annual Meeting. 23. 247-252 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 平田,新妻,江刺: "地下弾性波検出のための光干渉型マイクロ加速度計の製作と特性評価"物理探査学会第100回学術講演会論文集. 119-123 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 西澤,新妻,江刺,林: "地下マイクロセンシングのための弾性波検出用シリコン容量型加速度センサの開発"第6回地下の土木のAE国内コンファレンス. 18-23 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Nishizawa M.,Niitsuma H.,and Esashi M.: "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer"SEG Expanded Abstracts. (in-press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Asamuma H.,Miyazawa H.,Niitsuma H.,and Esashi M.: "Optical interference type micro hydrophone fabricated by micromachining"SEG Expanded Abstracts. (in-press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Niitsuma and Nishizawa: "Potential of subsurface micro-sensing for HDR/HWR developmant" Proc.4th International HDR Forum. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Nishizawa,Niituma,et al.: "Development of silicon capacitive micro accelerometer for subsurface seismic measurement" Proc.4th Well Logging Symposium of Japan. V1-V7 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 平田,新妻,江刺: "シリコン振動子の光ファイバ先端への取り付けと光干渉型マイクロ加速度計の開発" 物理探査学会第98回学術講演会講演論文集. 106-110 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 西澤,林,新妻,江刺: "マイクロマシニングによるシリコン容量型加速度センサの製作とその特性評価" 物理探査学会第98回学術講演会講演論文集. 101-105 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 宮澤,新妻,江刺: "地下マイクロセンシングのためのマイクロゾンデの設計と製作" 物理探査学会第99回学術講演会講演論文集. 61-65 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 新妻: "地下情報のマイクロセンシング" 物理探査学会第96回学術講演会講演論文集. 33-34 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 西澤, 新妻, 江刺: "マイクロマシニングによる地下弾性波検出のためのシリコン容量型加速度センサの製作" 物理探査学会第96回学術講演会講演論文集. 35-38 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 平田, 新妻, 江刺: "マイクロマシニングによる地下弾性波計測のための光干渉型加速度センサの開発" 物理探査学会第97回学術講演会講演論文集. 165-168 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 西澤, 林, 新妻, 江刺: "マイクロマシニングによる地下弾性波検出のためのシリコン容量型加速度センサの製作(第2報)" 物理探査学会第97回学術講演会講演論文集. 169-172 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 西澤, 林, 新妻, 江刺: "地下弾性波検出のための高感度・広帯域容量型加速度センサの開発" 電気学会センサ・マイクロマシン部門総合研究会. PS97-22. 13-17 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 平田, 新妻, 江刺: "地下弾性波検出のための光干渉型マイクロセンサの開発" 電気学会センサ・マイクロマシン部門総合研究会. PS97-23. 19-22 (1996)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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