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Study for a radiation-hardened CMOS circuitdirectly fabricated on a detector-grade silicon wafer with an application of a rapid nitridation process

Research Project

Project/Area Number 09354003
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 素粒子・核・宇宙線
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

IKEDA Hirokazu  Institute of Particle and Nuclear Studies, High Energy Accelerator Research Organization, Associate Professor, 素粒子原子核研究所, 助教授 (10132680)

Co-Investigator(Kenkyū-buntansha) FUKUNAGA Chikara  Tokyo Metropolitan University, College of Arts and Science, Associate Professor, 教養部, 助教授 (00189961)
TAJIMA Hiroyasu  University of Tokyo, Department of Physics, Research Associate, 理学部, 助手 (80222107)
MATSUDA Takeshi  Institute of Particle and Nuclear Studies, High Energy Accelerator Research Organization, Associate Professor, 素粒子原子核研究所, 助教授 (10029564)
OKUNO Shoji  Kanagawa University, Faculty of Engineering, Research Associate, 工学部, 助手 (90281451)
斉藤 豊  インターチップ(株), 開発部, 部長
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥21,900,000 (Direct Cost: ¥21,900,000)
Fiscal Year 1999: ¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1998: ¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1997: ¥10,500,000 (Direct Cost: ¥10,500,000)
KeywordsHigh Energy Physics / Particle Tracking Detector / Silicon Detector / CMOS Preamplifier / CMOS Integrated Circuit / Rapid Thermal Nitridation / Radiation Damage / Radiation-hardening / 秘跡検出器 / CMOS・VLSI
Research Abstract

In order to apply for a high luminosity electron-positron collider experiment we have investigated a possibility of integrating strip and/or pixelde-tectors with a readout circuits. Since the circuits are irradiated by ionizing particles and gamma rays, the characteristics of transistors are easy to be degraded. In order to overcome the nature of a radiation damage, one way proposed was to apply a rapid thermal nitridation process for a gate oxide of a CMOS FET. We actually obtained an indication of an improvement in terms of a threshold shift and/or degradation in noise, there still remained a room for a further adjustment of process conditions. An alternative way was proposed to apply for a 0.8-micron CMOS process in place of the so-far employed 1.2-micron CMOS process, which revealed a significant improvement in terms of a noise degradation coefficient for an increment of a radiation dose as well as an initial noise slope.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report

Research Products

(28 results)

All Other

All Publications (28 results)

  • [Publications] Y. Saitoh: "Performance of a double-sided silicon microstrip detector with a wide pitch n-side readout using a field-plate and a multi p-stop"IEEE Trans.on Nucl.Sci. NS-44. 622-628 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ikeda: "Frontend interface of the SVD readout system for BELLE"IEEE Trans.on Nucl.Sci. NS-44. 275-282 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ikeda: "Combined use of a field-plate and narrow p-barriers for a wide-pitch ohmic-side readout of the BELLE double-sided SVD"Nud.Instr.8 Meth.. A400. 367-278 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ozawa: "Integration of the readout electronics for the Astro-E hard X-ray detector"SPIE. 3115. 235-243 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Sato: "10-bit CMOS optical link system for silicon vertex detector of BELLE"IEEE Trans.on Nucl.Sci. NS-45. 829-832 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.S.Lange: "Tranceputer self-organizing algorithm for beam background rejecton at the BELLE silicon vertex deteetor"Nucl.Instr.&Meth.. A420. 288-302 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] I.Imada: "A new tracking satellite-borne solar neutron detector"Nucl.Instr.&Meth.. A421. 99-112 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Tsujita: "Parallel-processing diagnostic program for a transputer-based readout system"Japan Journal of Appl.Phys.. 38. 6498-6501 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.ohta.: "Thick and large area PIN diodes for hard X-ray astronomy"Nucl.Instr.&Meth.. A436. 291-296 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Satioh et al.: "Performance of a double-sided silicon microstrip detector with a wide pitch n-side readout using a field-plate and a multi p-stop structure"IEEE Transactions on Nucl. Sci. NS-44. 622-628 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ikeda et al.: "Frontend interface of the SVD readout system for BELLE"IEEE Transactions on Nucl. Sci. NS-44. 275-282 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ikeda et al.: "Combined use of a field-plate and narrow p-barriers for a wide-pitch ohmic-side readout of the BELLE double-sided SVD"Nucl. Instr. & Meth. A400. 367-278 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Ozawa et al.: "Integration of the readout electronics for the Astro-E hard X-ray detector"SPIE. 3115. 235-243 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K.Sato et al.: ""10-bit CMOS optical link system for silicon vertex detector of BELLE"IEEE Transactions on Nucl. Sci. NS-45. 829-832 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J.S.Lange et al.: "Transputer self-organizing algorithm for beam background rejection at the BELLE silicon vertex detector"Nucl. Instr. & Meth. A420. 288-309 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] I.Imaida et al.: "A new tracking satellite-borne solar neutron detector"Nucl. Instr. & Meth. A421. 99-112 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Tsujita et al.: "Parallel-processing diagnostic program for a transputer-based readout system"Japan Journal of Appl. Phys.. 38. 6498-6501 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] N.Ohta et al.: "Thick and large area PIN diodes for hard X-ray astronomy"Nucl. Instr. & Meth. A436. 291-296 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] K. Adachi: "Measurement of the jet width in γγcollisions and e^+e^- annihilation process at TRISTAN"Phys. Lett.. B451. 256-266 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N. Ota: "Thick and large area PIN diodes for hand X-ray astronomy"Nucl. Instr. & Meth. A346. 291-296 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y. Tsujita: "Parallel-processing diagnostic program for a transputer-based readout system"Japan Journal of Appl. Phys.. 38. 6498-6501 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Sato: "10-bit CMOS Optical Link System for Silicon Vertex Detetctor of BELLE" IEEE Trans.on Nucl.Sci. 45. 829-832 (1988)

    • Related Report
      1998 Annual Research Report
  • [Publications] I.Imaida: "A New tracking Satellite-borne Solar Neutrons Detecor" Nucl.Instr.& Meth.A. 421. 99-112 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.S.Lange: "Transputer self-organizing algorithm for beam background rejection at the BELLE silicon vertex detector" Nucl.Instr.& Meth.A. 420. 288-309 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 斉藤豊: "Performance of a Double-Sided Silicon Microstrip Detector with a Wide Pitch N-side Readout using a Field-Plate and a Muti P-Stop Structure" IEEE Trans.on Nucl.Sci.44. 622-628 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 池田博一: "FRONTEND INTERFACE OF THE SVD READOUT SYSTEM FOR BELLE" IEEE Trans.on Nucl.Sci.44. 275-282 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 池田博一: "Combined use of a field-plate and narrow p-barriers for a wide-pitch ohmic-side readout of the BELLE double-sided SVD" Nucl.Instr.and Meth.A. 400. 367-378 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 小澤秀樹: "of the readout electronics for the Astro-E etector" SPIE. 3115. 235-243 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-03-31   Modified: 2016-04-21  

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