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Development of X-ray and infrared detectors using micromachining technologies

Research Project

Project/Area Number 09440092
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Astronomy
Research InstitutionInstitute of Space and Astronautical Science

Principal Investigator

MITSUDA Kazuhisa  Institute of Space and Astronautical Science, High Energy Astrophysics, Professor, 宇宙圏研究系, 教授 (80183961)

Co-Investigator(Kenkyū-buntansha) HIROSE Kazuyuki  Institute of Space and Astronautical Science, High Energy Astrophysics, Associate Professor, 衛星応用工学系, 助教授 (00280553)
FUJIMOTO Ryuichi  Institute of Space and Astronautical Science, High Energy Astrophysics, Research Associate, 宇宙圏研究系, 助手 (20280555)
SHOJI Shuji  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (00171017)
SHIMIZU Hirohiko  Institute of Chemical Research, Senior Research Staff, 理化学研究所, 研究員 (50249900)
MURAKAMI Hiroshi  Institute of Space and Astronautical Science, High Energy Astrophysics, Professor, 宇宙圏研究系, 教授 (40135299)
田島 道夫  宇宙科学研究所, 衛星応用工学研究系, 教授 (30216965)
Project Period (FY) 1997 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2000: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1999: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1998: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1997: ¥7,900,000 (Direct Cost: ¥7,900,000)
KeywordsDetectors / X-ray / infrared / Spectrometer / Superconductors / microcalorimeters / bolometers / SQUID / SQUID array amp. / Imaging / micromachining
Research Abstract

We studied new approaches to develop imaging microcalorimeters. We fabricated test models to confirm the new ideas experimentally. Major results are summarized below.
(1) Micrormachine processing to fabricate microcalorimeter pixel structures
We developed processes suited for imaging device. Finally we succeeded to fabricate calorimeter pixels with dry processes alone.
(2) Fabrication of X-ray absorber on the calorimer pixel with micromachine processing
We developed new processes utilizing plating to fabricate X-ray absorbers of "mushroom structure" which covers the calorimeter pixels with high covering efficiencies.
(3) Ti-Au bilayer TES thermometers
In our calorimeters, the temperature is sensed by the superconducting transition edge sensors (TES). We developed TES with Ti-Au bilayer membrane.
(4) Microcalorimeter imaging readout system
Number of signal lines allowed between the cryogenic to room temperatures is very limited. We developed a new method to multiplex calorimeter signals on frequency space. We developed a SQUID with multiple number of input coils and experimentally proved our new approach with a two-pixel calorimeter.
(5) Evaluation of the X-ray microcalorimeters
We evaluated the energy resolution of our X-ray microcalorimeter operating at 200 mK.The energy resolution was 99 eV.This is not good enough. We studied the extra noise factors which limit our resolutions.

Report

(5 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (38 results)

All Other

All Publications (38 results)

  • [Publications] H.Kudo,S.shoji,R.Fujimoto,K.Mitsuda, 他: "Development of the high energy resolution X-ray Micro-bolometer for detecting Cosmic Rays"in Proceedings of the 2nd Int.Symp.on Electrochemical Microsystem Technology. 122-123 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Kudo,S.Shoji,r.Fujimoto,K.Mitsuda, 他: "Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES"in Proceedings of SPIE on Design, Characterization, and Packaging for MEMS and Microelectronics. 3893. 241-249 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Mitsuda,R.Fujimoto,S.Shoji et al.: "Multi-pixel readout of transition-edge sensors using a multi-input SQUID"Nuclear Instruments and Methods in Physics Research A. 436. 252-255 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] R.Fujimoto,K.Mitsuda,S.Shoji, et al.: "Development of a superconduting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods in Physics Research A. 444. 180-183 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Kudo,S.Shoji,R.Fujimoto,K.Mitsuda, 他: "Improvements of an x-ray microcalorimeter for detecting cosmic rays."in Proceedings of SPIE on Micromachining and Microfabrication. 4230. 58-65 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 満田和久,藤本龍一 他: "チタン-金薄膜TESX線マイクロカロリメータの開発"放射線. 26. 115-122 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] R.Fujimoto,K.Mitsuda et al.: "Status of X-ray Microcalorimeter Development at ISAS"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Oshima,R.Fujimoto, et al.: "Performance of SII SQUID Amplifiers"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Ishisaki,R.Fujimoto et al.: "Development of a TES microcalorimeter system for the future X-ray mission"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Miyazaki,K.Mitsuda, et al.: "AC Calorimeter Bridge ; a new multi-pixel readout method for TES calorimeter arrays"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Yoichi Aruga, Ryuichi Fujimoto, Kazuhisa Mitsuda, Toshiyuki Miyazaki: "Development of the high energy resolution X-ray Microbolometer for detecting Cosmic Rays"in Proceedings of the 2nd Int.Symp.on Electrochemical Microsystem Technology. 122-123 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hiroyuki Kudo, Yuichi Yoloyama, Shuichi Shoji, Tai Oshima, Yoichi Aruga, Kana Maegami, Ryuichi Fujimoto, Toshiyuki Miyazaki, Kazuhisa Mitsuda: "Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES"in Proceedings of SPIE on Design, Characterization, and Packaging for MEMS and Microelectronics. 3893. 241-249 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Mitsuda, R.Fujimoto, T.Miyazaki, K.Maegami, Y.Aruga, T.Oshima, S.Nakayama, S.Shoji, H.Kudo, Y.Yokoyama, T.Mihara, H.M.Shimizu: "Multi-pixel readout of transition-edge sensors using a multi-input SQUID"Nuclear Instruments and Methods in Physics Research A. 436. 252-255 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] R.Fujimoto, K.Mitsuda, T.Miyazaki, K.Maegami, Y.Aruga, T.Oshima, M.Yamazaki, S.shoji, H.Kudo, Y.Yokoyama, T.Mihara, H.M.Shimizu: "Development of a superconduting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods in Physics Research A. 444. 180-183 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Kazuhisa Mitsuda, Ryuichi Fujimoto, Toshiyuki Miyazaki, Tai Oshima, Masahiro Yamazaki, Naoko Iyomoto, Kazuo Futamoto, Yoshitaka Ishisaki, Tomohiro Kagei: "Improvements for an x-ray microcalorimeter for detecting cosmic rays"in Proceedings of SPIE on Micromachining and Microfabrication. 4230. 58-65 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Mitsuda, R.Fujimoto, T.Miyazaki, T.Oshima, M.Yamazaki, S.Shoji, H.Kudo, Y.Yokoyama: "Development of Ti-Au TES calorimeters"Houshasen (Radiations). 26. 115-122 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] R.Fujimoto, K.Mitsuda, N.Iyomoto, M.D.Audley, T.Miyazaki, T.Oshima, M.Yamazaki, K.Futamoto, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, A.Kushino, T.Hiroike, S.Shoji, H.Kudo, Y.Yokoyama, H.Sato, T.Nakamura, E.Gotoh, Y.Kuroda, M.Onishi, M.Goto: "Status of X-ray Microcalorimeter Development at ISAS"in proceedings New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, T.Miyazaki, K.Mitsuda, R.Fujimoto, N.Iyomoto, T.Oshima, M.Yamazaki, K.Futamoto, M.D.Audley, S.Shoji, H.Kudo, Y.Yokoyama: "Development of a TES microcalorimeter system for the future X-ray mission"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in Press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Oshima, M.Yamazaki, K.Mitsuda, R.Fujimoto, N.Iyomoto, M.D.Audley, T.miyazaki, K.Futamoto, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, S.Shoji, H.Kudo, Y.Yokoyama, A.Kushino, T.Hiroike: "Performance of SII SQUID Amplifiers"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.Yamasaki, A.Kushino, Y.Aoki, Y.Ishisaki, T.Ohashi, K.Mitsuda: "Measurement of the specific heat of Er-doped YAG and its application to the X-ray astronomy"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Miyazaki, M.Yamazaki, K.Futamoto, K.Mitsuda, R.Fujimoto, N.Iyomoto, T.Oshima, M.D.Audley, Y.Ishisaki, N.Yamasaki, T.Ohashi, T.Kagei, S.Shoji, H.Kudo, Y.Yokoyama: "AC Calorimeter Bridge ; a new multi-pixel readout method for TES calorimeter arrays"in proceedings of New Century of X-ray Astronomy, ed.by H.Kunieda et al.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H,Kudo,S.Shoji,K.Mitsuda, 他: "Improvements of an X-ray Microcalorimeter for Detecting Cosmicrays"in Proceedings of SPIE on Micromachine and Microfabrication. 4230(印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.Fujimoto,K.Mitsuda, 他: "Development of a superconducting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods, A. 444. 180-183 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.Fujimoto,K.Mitsuda et al.: "Status of X-ray Microcalorimeter Development at ISAS"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy' ed.by H.Kunieda et al.). (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Oshima,R.Fujimoto, et al.: "Performance of SII SQUID Amplifiers"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy' ed.by H.Kunieda et al.). (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Ishisaki,R.Fujimoto et al.: "Development of a TES microcalorimeter system for the future X-ray mission"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy' ed.by H.Kunieda et al.). (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Miyazaki,K.Mitsuda, et al.: "AC Calorimeter Bridge ; a new multi-pixel readout method for TES calorimeter arrays"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy' ed.by H.Kunieda et al.). (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] R. Fujimoto, K. Mitsuda,他: "Development of a superconducting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments ans Methods A. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] K. Mitsuda, R. Fujimoto, S. Shoji 他: "Multi-pixel readout of transition edge sensors using a multi-input SQUID"Nuclear Instruments and Methods, A. 436. 252-255 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Kudo, S. Shoji, R. Fujimoto, K. Mitsuda, 他: "Fabrication of an X-ray Microcalorimeter for X-ray Spectroscopy"Proceeding of SPIE on Microelectronics and Micro-Electro-Mechanical Systems, Queensland, Australia. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 満田和久、藤本龍一、他: "チタン-金薄膜TES X線マイクロカロリメータの開発"応用物理学会 放射線誌. 24・1. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Kudo,S.Shoji,R.Fujimoto,K.Mitsuda,他: "Development of the high energy resolution X-ray Micro-bolometer for detecting Cosmic Rays" The 2nd Int.Symp.on Electrochemical Microsystem Technology. 122-123 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Mitsuda,R.Fujimoto,S.Shoji 他: "Multi-pixel readout of transition edge sensors using a multi-input SQUID" Nuclear Instruments and Methods. (印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 前神佳奈、満田和久、藤本龍一、庄子習一、他: "チタン薄膜を用いたX線マイクロカロリメータの開発" 搭載機器基礎開発成果報告書. 12(印刷中). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 藤本、満田、庄子, 他: "高波長分解能と一検出をめざしたX線マイクロカロリメータの開発" 日本機会学会ロボティクス・メカトロニクス講演会'97講演論文集. VOL A. 131-132 (1987)

    • Related Report
      1997 Annual Research Report
  • [Publications] 工藤、 庄子、 藤本 他: "宇宙放射線計測用高感度X線マイクロボロメータの開発" 電気学会・全国大会予稿集(発表予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 宮崎、 藤本、 満田 他: "マイクロマシ-ニング技術を用いたマイクロカロリメータの開発" 日本天文学会‘98年春期年会予稿集. W04b (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 昆野、 藤本、 満田, 他: "超伝導トランジションエッジを用いた温度センサーの開発" 日本天文学会‘98年春期年会予稿集. W17a (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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