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Production of polarized atomic hydrogen beam and its application to spin-selected Si surface reaction

Research Project

Project/Area Number 09450020
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKyushu Institute of Technology

Principal Investigator

NAMIKI Akira  Kyushu Institute of Technology, Professor, 工学部, 教授 (40126941)

Co-Investigator(Kenkyū-buntansha) INANAGA Shoji  Kyushu Institute of Technology, Research Associate, 工学部, 助手 (30093959)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 1999: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1998: ¥2,700,000 (Direct Cost: ¥2,700,000)
Keywordsspin-polarized beam / hexapole magnet / hydrogen abstraction / Si surface reaction / Ge surface reaction / スピン偏曲原子線 / 六重曲電磁石 / スピン偏極 / 水素シリコン表面反応 / 偏極水素原子ビーム
Research Abstract

Spin polarized atomic hydrogen beam can be obtained with a hexapole magnet. The basic principle is that hydrogen atoms with a magnetic dipole moment receive a force in an inhomogeneous magnetic field. If the atoms have an up-spin state they will receive a force towards the center of the inhomogeneous hexapole magnetic field, while the atoms with a down-spin state will receive a force towards the opposite direction. Thus, the only up-spin state particles can be preferentially focussed after passing a hexapole magnetic field. We produced atomic hydrogen beams from an electron-bombarded W tube. A quadrupole mass spectrometer was used to detect polarized hydrogen atoms. However, we could not get any positive evidence of a focussed polaized beam for the range of magnetic field from a zero to 5000kG. This result should be compared with the case that the supersonic oxygen molecules with a triplet state could be really focussed at the magnetic field of 2-3kGauss. In case of the supersonic oxygen beam the beam is well collimated along the axis of the hexapole maget, while the hydrogen atomic beam from the heated W tube must be defocussed. Therefore, we consider that the failure in focussing the spin polaized hydrogen beam is due to the big divergence of the beam at the entrance of the hexapole magnet. We are now improving the atomic hydrogen source by employing a super sonic expansion of RF plasma.
We measured hydrogen atom-induced deuterium abstraction on the Ge(100) surfaces with the unpolarized H beam. This was the preliminary experiment for the spin selected reaction on surfaces. Upon the H beam exposure, HD as well D2 molecules were found to desorb the D/Ge(100) surfaces. We revealed the mechanism of H-induced abstraction and desorption on the semiconductor surfaces.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] S.Shimokawa, et.al.: "Kinetics study on the hydrogen atom-induced abstration and associative desorption of deuterium adatoms from the Si(100) surface at 573K"Journal of Chemical Physics. 112. 356-365 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Shimokawa, A.Namiki, et al.: ""Kinetics study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface""J.Chem.Phys.. 112. 356-365 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] S.Shimokawa,A.Namiki,et al: "Kinetics study on the hydragen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface at 573k"Journal of Chimical physics. 112. 356-365 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Ohtani: "physisurption lifetimes of Cl_2 on the Si(100)surfaces adsorbed with Cs" Surface Suence. 414. 85-92 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Takamine: "Angular distribution of HD produced in the abstraction reaction by inaident D atoms on the monohydrided Si(100)" Journal of Chemical Physics. 106(21). 8935-8937 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Doshita et.al.: "Dynamcal aspect of cl_2 reaction on Si Surfaces" Journal of Vacuum Science and Technolosy. A16(1). 265-269 (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1998-04-01   Modified: 2016-04-21  

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