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Atomic Level Study of Photo-Stimulated Field Emission from Insulating Thin Layers Utilizing the Scanning Atom Probe

Research Project

Project/Area Number 09450023
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKanazawa Institute of Technology

Principal Investigator

NISHIKAWA Osamu  Kanazawa Institute of Technology, Materials Science and Engineering, Professor, 工学部, 教授 (10108235)

Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 1999: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1998: ¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 1997: ¥4,800,000 (Direct Cost: ¥4,800,000)
KeywordsScanning Atom Probe (SAP) / F-N plot / Photo-Stimulated Field Emission / Carbon Nano-Tubes / Carbon Clusters / CVD & HPHT Diamonds / Silicon / Graphite / CVDダイヤモンド / HPHTダイヤモンド / ガラス状炭素 / 走査型アトムプローブ / 電子のトンネル / 電界蒸発 / 電界放射 / ダイヤモンド / マススペクトル
Research Abstract

Irradiation of light to insulators and semi-insulators at a negative bias voltage induces photo-stimulated field emission. Photo-stimulated field ionization and field evaporation are also observed. In this study the correlation between the field emission characteristics and the surface composition of low conductive materials such as CVD and HPHT diamonds, 99.8 and 99.99% purity graphites, vitreous carbon, carbon nano-tubes (CNT), silicon micro-tips, silicon pyramid, silicon grains is investigated utilizing the unique capability of the scanning atom probe(SAP). The photo-stimulated field evaporation was observed by applying pulsed voltage and pulsed YAG laser beam to the specimens. The study revealed that the diamonds contain a large amount of hydrogen depending on the growth process. Many carbon clusters are detected from all carbon specimens, especially form the 99.99% pure graphite. Silicon micro-tips are highly corroded by HF acid. Carbon, oxygen and hydrogen diffuse into the tips. In order to study the photo-stimulated field emission a SiOィイD22ィエD2 layer is deposited covering a transparent conductive layer on a glass plate. However, no photo-stimulated field emission could be observed possibly due to defects in the SiOィイD22ィエD2 layer where leak current flows. Slope and intercept of the F-N plot are plotted. The plotted chart indicates that the work function of the CNT is the lowest among the analyzed specimens. While the work function of the CNT increases by hydrogen adsorption, that of silicon decreases. A new SAP with a position sensitive ion detector is under development to exhibit the 3D-distribution of compositions at an atomic resolution.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] Osamu Nishikawa et al: "Development of a Scanning Atom Probe and Atom-by-Atom Mass Analysis of Diamonds"Appl. Phys. A. 66. S11-S16 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Osamu Nishikawa et al: "Atomic Investigation of Individual Apexes of Diamond Emitters by a Scanning Atom Probe"J. Vac. Sci. Technol. B. 16. 836-840 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Osamu Nishikawa et al: "Atom-by-Atom Analysis of Microtip Emitter Surfaces by the Scanning Atom Probe"J. Vac. Sci. Technol. B. 17. 608-612 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O. Nishikawa et al: "Atomic Level Analysis of Electron Emitter Surfaces by the Scanning Atom Probe"Appl. Phys. A. 146. 398-407 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O. Nishikawa et al: "Development of the Scanning Atom Probe and Atomic Level Analysis"Materials Characterization. 44. 29-57 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O. Nishikawa et al: "Atom-by-Atom Analysis of Diamond, Graphite and Vitreous Carbon by Scanning Atom Probe"J. Vac. Sci. Technol. B. 18(印刷中). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Osamu Nishikawa, Takahiro Sekine, Yoshikatsu Ohtani, Kiyoshi Maeda, YoshihiroNumada, Masafumi Watanabe, Masashi Iwatsuki, Susumu Aoki, Junji Itoh and Kazushi Yamanaka: "Development of a Scanning Atom Probe and Atom-by-Atom Mass Analysis of Diamonds"Appl.Phys.A. 66. S11-S16 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Osamu Nishikawa, Takahiro Sekine, Yoshikatsu Ohtani, Kiyoshi Maeda, Yoshihiro Numada and Masafumi Watanabe: "Atomic Investigation of Individual Apexes of Diamond Emitters by a Scanning Atom Probe"J.Vac.Sci.Techol.B.. 16(2). 836-840 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Osamu Nishikawa, Takahiro Sekine, Yoshikatsu Ohtani, Kiyoshi Maeda, Yoshihiro Numada, Masafumi Watanabe, Masashi Iwatsuki, Susumu Aoki, Junji Itoh and Kazushi Yamanaka: "Development of the Scanning Atom Probe and Atomic Level Analysis"Microsc.Microanal.. 4(Suppl.2 : Proceedings). 82 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa, M.Watanabe, Y.Ohtani, K.Maeda, K.Tanaka and T.Sekine: "Atom-by-Atom Analysis of Microtip Emitter Surfaces by the Scanning Atom Probe"J.Vac.Sci.Technol.B. 17. 608-612 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa, K.Maeda, Y.Ohtani, M.Watanabe, K.Tanaka, T.Sekine, M.Iwatsuki, S.Aoki, J.Itoh and K.Yamanaka: "Atomic Level Analysis of Electron Emitter Surfaces by the Scanning Atom Probe"Appl.Surf.Sci.. 146. 398-407 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa, Y.Ohtani, K.Maeda, M.Watanabe and K.Tanaka: "Development of the Scanning Atom Probe and Atomic Level Analysis"Materials Characterization. 44. 29-57 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa, Y.Ohtani, K.Maeda, M.Watanabe and K.Tanaka: "Atom-by-Atom Analysis of Diamond, Graphite and Vitreous Carbon by Scanning Atom Probe"J.Vac.Sci.Technol.B. 18, Mar/Apr, in press. (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa, M.Watanabe, Y.Ohtani, K.Maeda and K.Tanaka: "Atomic Level Analysis of Silicon Emitters Utilizing the Scanning Atom Probe"J.Vac.Sci.Technol.B. in press. (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] O.Nishikawa et al.: "Atom-by-Atom Analysis of Microtip Emitter Surfaces by the Scanning Atom Probe"J.Vac.Sci.Technol.B. 17. 608-612 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] O.Nishikawa et al.: "Atomic Level Analysis of Electron Emitter Surfaces by the Scanning Atom Probe"Appl.Surf.Sci.. 146. 398-407 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] O.Nishikawa et al.: "Development of the Scanning Atom Probe and Atomic Level Analysis"Materials Characterization. 44. 29-57 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] O.Nishikawa et al.: "Atom-by-Atom Analysis of Diamond,Graphite and Vitreous Carbon by Scanning Atom Probe"J.Vac.Sci.Technol.B. 18(印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] O.Nishikawa et al.: "Atomic Level Analysis of Silicon Emitters Utilizing the Scanning Atom Probe"J.Vac.Sci.Technol.B. 18(印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Atomic investigation of individual apexes of diamonds emitters by a scanning atom probe" J.Vac.Sci.Technol.B,. 16. 836-840 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Development of a scanning atom probe and atom-by-atom mass analysis of diamonds" Appl.Phys.A. 66. S11-S16 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Atomic Level Analysis of Electron Emitter Surfaces by the Scanning Atom Probe" to be published in Appl.Iurf.Sci.(1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Atom-by-atom analysis of micro tip emitter surfaces by the scanning atom probe" to be published in J.Vac.Sci.Technol.B. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Development of the scanning atom probe and atomic level analysis" to be published in Mat.Characterizaion. (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 西 川 治 他: "走査プローブ顕微鏡 STMからSPMへ" 丸善出版株式会社, 245 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Development of a Scannig Atom Probe and Atom-by-Atom Mass Analysis of Diamonds" Appl.Phys.A. 66(in print). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] O.Nishikawa et.al.: "Atomic Investigation of Individual Apexes of Diamond Emitters by a Scanning Atom Probe" J.Vac.Sci.Technol.16(in print). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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