| Project/Area Number |
09450049
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
KITAMURA Takayuki KYOTO UNIVERSITY,Graduate School of Engineering Professor, 工学研究科, 教授 (20169882)
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| Co-Investigator(Kenkyū-buntansha) |
TADA Naoya KYOTO UNIVERSITY,Graduate School of Engineering, Research Associat, 工学研究科, 助手 (70243053)
OHTANI Ryuichi KYOTO UNIVERSITY,Graduate School of Engineering Professor, 工学研究科, 教授 (50025946)
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| Project Period (FY) |
1997 – 1998
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| Project Status |
Completed (Fiscal Year 1998)
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| Budget Amount *help |
¥9,300,000 (Direct Cost: ¥9,300,000)
Fiscal Year 1998: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 1997: ¥5,100,000 (Direct Cost: ¥5,100,000)
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| Keywords | LSI conductor / Atom migration / Electric current / Stress / Cavity / Numerical simulation / Polycrystalline / FEM / エレクトロマイグレーション / ストレスマイグレーション / 破壊機構 / 拡散 / 信頼性 |
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| Research Abstract |
It is well known that, atoms are transported by thermal stress as well as electric current in an LSI conductor. The interacted migration brings about cavities and the failure of conductor takes place by their growth. The results obtained from this study is summarized as follows. (1) An FEM of diffusion along grain boundaries is developed in order to analyze the cavity growth under the stress-induced migration. The simulation reveals that the diffusion along the interface between the conductor and the insulator strongly affects the atom flow and change the growth rate of cavity. (2) The movement of cavity is analyzed on the basis of atom migration along the surface due to electric current. (3) The analyzing method of cavity growth under interacted migration is discussed on the basis of the results (I) and (2). The method is implanted to the advanced FEM (1), which allows us to analyze the cavity growth in a polycrystalline conductor under the interaction. (4) The cavity grows little under migration induced by only electric current. However, it brings about the stress distribution along the grain boundaries near the cavity and the cavity growth is governed by the atom migration due to the stress gradient.
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