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Study on Ultra-Precision Grinding of Micro Aspherical Molding Dies for Optical Transmission Devices

Research Project

Project/Area Number 09450055
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTohoku University

Principal Investigator

SYOJI Katsuo  Graduate school of Eng., Dept.of Mechatronics & Precision, Tohoku University Professor, 大学院・工学研究科, 教授 (80005339)

Co-Investigator(Kenkyū-buntansha) SUZUKI Hirofumi  Graduate school of Eng., Dept.of Mechatronics & Precision, Tohoku University Res, 機械工学教室, 講師 (20282098)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥14,000,000 (Direct Cost: ¥14,000,000)
Fiscal Year 1998: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1997: ¥10,300,000 (Direct Cost: ¥10,300,000)
Keywordsmicro aspherical surface / micro machining / resinoid bonded diamond wheel / tungsten carbide / micro wheel / ductile mode grinding / form accuracy / compensation machining / レジンボンドダイヤモンド砥石 / マイクロ非球面 / 超精密研削 / 高速回転スピンドル / セラミックス材料 / 形状補正加工 / カップツルア
Research Abstract

In this study, a new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. The wheel was formed to a precise columnar shape of 0.8 mm in the diameter by a single crystal diamond truer on the machine. By the developed system, in grinding test of the workpiece of about 0.7 mm radius curvature, the form accuracy of about 0.1 mum P-V and surface roughness of less than 0.03 mum Ry were obtained.
Recent trend is the further micronization of aspherical optical components. Therefore further micronizing of aspherical surface was examined by the ultra-high speed grinding spindle of 15 * 104 rpm at the maximum rotational rate and micro wheel of about 0.3 mm in radius curvature. In the grinding test, WO (tungsten carbide) molding die of less than 0.3 mm radius curvature was tested and the form accuracy of about 0.1 mum P-V was obtained.
Finally, the effects of the wheel radius error and the wheel positioning errors (horizontal and vertical directions) on the workpiece form accuracies are simulated and its compensation methods are discussed. And in the aspherical grinding tests, the grinding examples of tungsten carbide by using a proposed compensation methods are examined. From the experiments, it was clarified that the proposed compensation methods are useful.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] H.Suzuki,K.Syoji et al.: "Precision Grinding of Aspherical Surface -Grinding of Axo-Symmetric Aspherical CVD-SiC Molding Die-" Int'JSPE. 32・1. 25-30 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 鈴木浩文,庄司克雄ほか: "マイクロ非球面の超精密研削に関する研究-斜軸研削法によるマイクロ非球面の鏡面研削の可能性検証-" 精密工学会誌. 64・4. 619-623 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 鈴木浩文ほか: "マイクロ非球面の超精密研削に関する研究(第2報)-磁石の各種誤差要因が形状誤差に与える影響およびその補正法の検討-" 精密工学会誌. 64・8. 1211-1215 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 鈴木浩文,庄司克雄ほか: "マイクロ非球面の超精密研削に関する研究(第3報)-斜軸研削における非球面(凹面)の微小化の検討-" 精密工学会誌. 64・9. 1350-1354 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Shoji et al.: "Grinding of Micro Aspheical Surface" Proceedings of the Third Int'l Conf on Progress of Cutting and Grinding. 593-597 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Shoji et al.: "Ultra Precision Grinding of Micro Axi-Symmetric Aspheical Surface" Advances in Abrasive Technology(II)(1998). 65-70 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Syoji et al.: "Precision Grinding of Aspherical Surface-Grinding of Axi-Symmetric Aspherical CVD-SiC Molding Die-" Int' JSPE. Vol.32 No.1. 25-30 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Syoji et al.: "Studies on Precision Grinding of Micro Aspherical Surface-Feasibility Study of Micro Aspherical Surface by Inclined Rotational Grinding-" J.of JSPE. Vol.64 No.4. 619-623 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki et al.: "Studies on Precision Grinding of Micro Aspherical Surface (2nd Report) -Effects of Tool Errors on Workpiece Form Accuracies and its Compensation Methods-" J.of JSPE. Vol.64 No.8. 1211-1215 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Syoji et al.: "Studies on Precision Grinding of Micro Aspherical Surface (3rd Report) -Micronizing of Aspherical Surface in Inclined Rotational Grinding-" J.of JSPE. Vol.64 No.9. 1350-1354 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Shoji et al.: "Grinding of Micro Aspheical Surface" Proceedings of the Third Int'l Conf on Progress of Cutting and Grinding, Osaka. 593-597 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki, K.Shoji et al.: "Ultra Precision Grinding of Micro Axi-Symmetric Aspheical Surface" Advances in Abrasive Technology (II). 65-70 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Suzuki,K.Syoji et al.: "Precision Grinding of Aspherical Surface-Grinding of Axi-Symmetric Aspherical CVD-SiC Molding Die-" Int' JSPE. 32・1. 25-30 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 鈴木浩文,庄司克雄ほか: "マイクロ非球面の超精密研削に関する研究-斜軸研削法によるマイクロ非球面の鏡面研削の可能性検証-" 精密工学会誌. 64・4. 619-623 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 鈴木浩文ほか: "マイクロ非球面の超精密研削に関する研究(第2報)-砥石の各種誤差要因が形状誤差に与える影響およびその補正法の検討-" 精密工学会誌. 64・8. 1211-1215 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 鈴木浩文,庄司克雄ほか: "マイクロ非球面の超精密研削に関する研究(第3報)-斜軸研削における非球面(凹面)の微小化の検討-" 精密工学会誌. 64・9. 1350-1354 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Suzuki,K.Shoji et al.: "Grinding of Micro Aspheical Surface" Proceedings of the Third Int'l Conf on Progress of Cutting and Grinding(1996.11). 593-597 (1996)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Suzuki,K.Shoji et al.: "Ultra Precision Grinding of Micro-Axi-Symmetric Aspheical Surface" Advances in Abrasive Technology(IIX1998). 65-70 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Suzuki, K.Syoji et.al: "Precision Grinding of Asphrical Surface- Accuracy Improving by On-Machine Measurement -" Abrasive Technology. 7. 116-120 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Suzuki, K.Syoji et.al: "Precision Grinding of Asphrical Surface- Grinding of Axi-Symmetric Aspherical CVD-SiC Molding Die -" MM21. 7. 55-60 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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