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Modeling of micro object dynamics based on energy transfer for micro manipulation

Research Project

Project/Area Number 09450102
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

SATO Tomomasa  The University of Tokyo, RCAST,Professor, 先端科学技術研究センター, 教授 (50235371)

Co-Investigator(Kenkyū-buntansha) MIYAZAKI Hideki  The University of Tokyo, RCAST,Research Associate, 先端科学技術研究センター, 助手 (10262114)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥13,600,000 (Direct Cost: ¥13,600,000)
Fiscal Year 1998: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1997: ¥12,000,000 (Direct Cost: ¥12,000,000)
KeywordsAdhesive force / Resistance moment / Fracture / Electrostatic force / Surface energy / Positioning accuracy / Micro manipulation / Scanning electron microscope / マイクロマニピュレーション / 弾性エネルギー / 電子顕微鏡 / 力測定
Research Abstract

To advance the trend of miniaturization of parts in industry, it is indispensable to establish manipulation technique which can realize accurate positioning of micro parts without accidental deformation, fracture, or flipping away. The purpose of this research is to construct the model of micro dynamics described with energy rather than force to establish control techniques of micro object dynamics.
In 1997, we have constructed "in situ" force measurement system to measure force and displacement during micro object manipulation under SEM observation. As a result of accumulation of systematic experimental data, the large effect of electrostatic force, the unavoidable uncertainty due to surface roughness, and the existence of large time effect due to slight deformation of surfaces have been clarified.
In 1998, based on these findings, we have considered how the micro object dynamics can be modeled. Obtained data support that the micro object dynamics is not necessarily described with a simple surface energy. After a certain period, the objects are already interconnected, and picking up of such object should be considered as the growth of a crack and fracture at the interface. Based on these considerations, we concluded that adhesion term and resistance moment term should be added to macro object dynamics model when we deal with a micro object.
Systematic experiment to pick and place micro spheres under SEM observation justified this simple model. Furthermore, we have derived optimum manipulator trajectory for reliable pick and that for accurate positioning, and confirmed their effectiveness by experiment.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 宮崎英樹: "微細作業ロボット搭載用共振式近接センサの開発" 日本機械学会ロボティクス・メカトロニクス講演会講演論文集. 1BIV-3 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 宮崎英樹: "電子顕微鏡下の微小物体に作用する付着力" 日本機械学会ロボティクス・メカトロニクス講演会講演論文集. 1BIV-7 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Takeshi Kasaya: "Micro object handling under SEM by vision-based automatic control" Proc.SPIE Microrobotics and Micromanipulation. 3519. 181-192 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Shigeki Saito: "Robust pick and place task execution method for future automation micro." Proc.Intern.Workshop on Micro factories. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Hideki Miyazaki: "Mechanical assembly of micrometer-sized spleres for photonic band study" Proc.Workshop on Electro magnetic Crystal Structure. WD16- (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] ShigekiSaito: "Pick and Place operation of a micro object with highreliability and pre cision" Proc.IEEE Intern.Conf.on Robotics and Automation. (印刷中). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Miyazaki: "Proximity sensor based on resonance modulation for the micro handling robot" Proc.of JSME Robotics and Mechatoronics. 1BIV1-3. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Miyazaki: "Adhesive force acting on micro objects under scanning electron microscope" Proc.of JSME Robotics and Mechatoronics. 1BIV1-7. (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Kasaya: "Micro object handling under SEM by vision-based automatic control" Proc.of SPIE Microrobotics and Micromanipulation. 3519. 181-192 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Saito: "Robust pick and place task execution method for future micro automation" Proc.of Intern.Workshop on Microfactories. (to be published). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Miyazaki: "Mechanical assembly of micrometer-sized spheres for photonic band study" Proc.of Workshop on Electromagnetic Crystal Structures. WD16. (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] S.Saito: "Pick and place operation of a micro object with high reliability and presicion" Proc.of IEEE Intern.Conf.on Robotics and Automation. (to be presented). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 宮崎英樹: "微細作業ロボット搭載用共振式近接センサの開発" 日本機械学会ロボテックス・メカトロンクス講演会講演論文集. 1BIV1-3 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 宮崎英樹: "電子顕微鏡下の微小物体に作用する付着力" 日本機械学会ロボテックス・メカトロニクス講演会講演論文集. 1BIV1-7 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Takeshi Kasaya: "Micro object handling under SEM by Vision-based outo matic control" Proc.SPIE Microrobotics and Micromanipulation. 3519. 181-192 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Shigeki Saito: "Rebust Pickund Plaue Task Exeaution Method for Future Micro Automation" Proc.Intern.Workshop on Microfactories. 発表予定 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Hideki Miyazaki: "Mechanicel assembly of micrometer-sized spheres for photonic bornd study" Proc.Workshap on Electromagnetic Crystal structures. WD15 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Shigeki Saito: "Rok and Place operation of a microobiect with high reliability and Precision" Proc.IEEEIntern Conf.on Robotics and Automatim. (発表予定). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] Hideki Miyazaki: "Mechanical Assembly of Three Dimensional Micro Structures under a Scanning Election Microscope" Proc.Intern.Conf.on Micromechatronicsfor Information and Eguipment Precision. 335-340 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hideki Miyazaki: "Mechanical Assembly of Three Dimensional Micro Structures from Fine Particles" Advanced Robotics. 11,2. 169-185 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hideki Miyazaki: "Adlnesive forces acting on micro objects in manipulation under SEM" Proc.SPIEM icrorobotics and Microsystems Fabrication. 3202. 197-208 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 斎藤滋規: "電子顕微鏡下超微細作業におけるPlace操作の実現" 日本機械学会第75期通常総会講演論文集. (発表予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 宮崎英樹: "微小物体に働く付着力" 日本機械学会論文集(C編). 64,620(発表予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 宮崎英樹: "電子顕微鏡下の微小物体に作用する付着力" 日本機械学会ロボティクス・メカトロンクス′98講演論文集. (発表予定). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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