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Defect detection and structure analysis in silica thin films by use of photoluminescence

Research Project

Project/Area Number 09450132
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionWaseda University

Principal Investigator

OHIKI Yoshimichi  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (70103611)

Co-Investigator(Kenkyū-buntansha) SOTA Takayuki  Waseda University, School of Science and Engineering, Professor, 理工学部, 教授 (90171371)
HAMA Yoshimasa  Waseda University, Advanced Research Institute of Science & Engineering, Professor, 理工学総合研究センター, 教授 (40063680)
薛 光洙  早稲田大学, 理工学部, 助手 (60298148)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥9,600,000 (Direct Cost: ¥9,600,000)
Fiscal Year 1999: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1998: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 1997: ¥3,900,000 (Direct Cost: ¥3,900,000)
Keywordssilica / thermal silicon dioxide / photoluminescence / point defect / silicon oxynitride / Ge-doped silica / silicon nitride / SIMOX / シリコン熱酸化膜 / シリコン埋め込み酸化膜 / フッ素添加SiO_2
Research Abstract

Amorphous silica, a key material in the modern high-tech society. Is widely used as an insulating layer for a semiconductor device or as an optical fiber. In the present research, the effects of point defects such as impurities or vacaancies in the silica film on the electrical and optical properties have been systematically studied. The point defects were detected by photoluminescence, ESR, FT-IR, visible-VUV absorption, EPMA and SIMS. Electrical properties are examined by high-field conduction. Dielectric breakdown, and C-V measurement. Knowledge on the presence of oxygen vacancy and the estimation of its concentration, structural stabilization by impurity doping, and the relation between the defect concentration and the synthesis method has been obtained. In 1997, we demonstrated tha clear photoluminescence can be obtained in this amorphous SiOィイD22ィエD2 film by using an intense photon source such as an excimer laser or synchrotron radiation. This indicates that photoluminescence can … More be a strong tool to detect point defects in a-SiOィイD22ィエD2. Using this method, point defects in thermal silicon dioxide and SIMOX buried oxide and those induced in these oxides by ion implantation and heat treatment have been detected. The structures of these defects have also been identified. In 1998, researches were extended to fluorine-doped SiOィイD22ィエD2 film, SIMOX oxide, and silicon nitride film, and the structures of point defects in these materials were clarified. The effect of point defects on the dielectric strength was also examined by measuring the breakdown voltage. In 1999, researches were further extended to a-SiNィイD2xィエD2 a-SiOィイD2xィエD2NィイD2yィエD2, and TaィイD22ィエD2OィイD25ィエD2 films, focusing on the effects of ion implantation and heat treatment on the concentration of point defects. Photochemical reactions responsible for the formation of optical fiber grating in Ge-doped silica glass have been also clarified. Furthermore, stable and high-efficient fabrication method of optical fiber grating by use of ion implantation has bee proposed. Less

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (61 results)

All Other

All Publications (61 results)

  • [Publications] Y.Ohki et al.: "Effects of internal post-oxidation on the oxygen deficiency and dielectric strength of buried oxide formed by the separation-by-implated-oxygen(SIMOX)process"Electrical Engineering in Japan. 130. 15-20 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Fabrication of long-period optical fiber gratings using ion implantations"Optics Letters. 25. 88-89 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structures and Oprical Properties of Defects Correlated with Photo-induced Refractive Index Changes in Ge-doped SiO_2 Glass"Defect at Diffusion Forum. 177-178. 43-50 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Low Temperature Crystallization of SrBi_2Ta_2O_9 Film by Excimer Laser Irradiation"Mat. Res. Soc. Symp. Proc.. 541. 293-298 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effect of ozone annealing on the charge trapping property of Ta_2O_5-Si capacitor grown by low-pressure chemical vapor deposition"Japanese Journal of Applied Physics. 38, Part 1. 6791-6796 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effect of annealing on Ge-doped SiO_2 thin films"Journal of Applied Physics. 86. 5270-5273 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structural changes induced by KrF excimer laser photons in H_2-loaded Ge-doped SiO_2 glass"Phys. Rev. B. 60. 4682-4687 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Characteristic red photoluminescence band in oxygen-deficient silica glass"J. Appl. Phys.. 86. 370-373 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Direct deposition of a blanket tungsten layer on SiO_2 by preexposure of helium plasma"J. Appl. Phys.. 85. 8423-8426 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 大木義路他: "プラズマCVD堆積SiO_2薄膜の絶縁破壊電界におよぼすフッ素添加の効果"電学論. 119-A. 658-664 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effects of ion implantation and thermal annealing on the photoluminescence in amorphous silicon nitride"J. Appl. Phys.. 85. 6746-6750 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Paramagnetic centers induced in Ge-doped SiO_2 glass with UV irradiation"J. Phys. Condensed Matter. 11. 2589-2594 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Temperature dependence of the lifetime of 4.3 eV photoluminescence in oxygen-deficient amorphous SiO_2"Phys.Rev.B. 59. 1590-1593 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 大木義路他: "プラズマCVD法による希土類添加シリカ薄膜-成膜法の開発と発光の物性研究への応用-"電学論A. 119-A. 113-117 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 大木義路他: "内部酸化がSIMOX埋め込み酸化膜の酸素欠乏性と絶縁破壊電界に及ぼす影響"電学論. 118-A. 826-831 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen"UVSOR Activity Report. 25. 98-99 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structures and generation mechanisms of paramagnetic centers and absorption bands responsible for Ge-doped SiO_2 optical fiber gratings"Physical Review B. 57. 3920-3926 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen"J.Appl.Phys.. 83. 2357-2359 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Photoluminescence of oxygen-deficient-type defects in a-SiO_2"J.Non-Cryst.Solids. 222. 221-227 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Pare-earth-doped SiO_2 films prepared by plasma-enhanced chemical vapour deposition"J.Phys.D : Appl.Phys.. 30. 1908-1912 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effects of internal post-oxidation on the oxygen deficiency and dielectric strength of buried oxide fomed by the separation-by-implated-oxygen (SIMOX) process"Electrical Engineering in Japan. 130,No.1. 15-20 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Fabrication of long-period optical fiber gratings by use of ion implantation"Optics Letters. 25, No.2. 88-89 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Low Temperature Crystallization of SrBiィイD22ィエD2TaィイD22ィエD2OィイD29ィエD2 Film by Excimer Laser Irradiation"Defect and Diffusion Forum. Vols. 177-178. 43-50 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structures and Oprical Properties of Delects Correlated with Photo-induced Refractive Index Changes in Ge-doped SiOィイD22ィエD2 Glass"Mat. Res. Soc. Symp. Proc.. 541. 293-298 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effect of ozone annealing on the charge trapping property of TaィイD22ィエD2OィイD25ィエD2-SiィイD23ィエD2NィイD24ィエD2-p-Si capacitor grown by low-pressure chemical vapor deposition"Japanese Journal of Applied Physics. 38 Part 1, No. 12A. 6791-6796 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effect of annealing on Ge-doped SiOィイD22ィエD2 thin films"Journal of Applied Physics. 86, No.9. 5270-5273 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structural changes induced by KrF excimer laser photons in HィイD22ィエD2-loaded Ge-doped SiOィイD22ィエD2 glass"Phys. Rev. B. 60. 4682-4687 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Characteristic red photoluminescence band in oxygen-deficient silica glass"J. Appl. Phys.. 86, No.1. 370-373 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Direct deposition of a blanket tungsten layer on SiOィイD22ィエD2 by preexposure of hlium plasma"J.Appl. Phys.. 85, No.12. 8423-8426 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effects of Fluorine Doping on the Dielectric Strength of SiOィイD22ィエD2 Films Formed by Plasma-Enhanced Chemical Vapor Deposition"Trans. IEE Japan. 119-A No.5. 658-664 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effects of ion implantation and thermal annealing on the photoluminescence in amorphous silicon nitride"J. Appl. Phys.. 85, No.9. 6746-6750 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Paramagnetic centers induced in Ge-doped SiOィイD22ィエD2 glass with UV irradiation"J.Phys. Condensed Matter. 11, No.12. 2589-2594 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Temperature dependence of the lifetime of 4.3 eV photoluminescence in oxygen-deficient amorphous SiOィイD22ィエD2"Phys. Rev. B. Vol.59, No.3. 1590-1593 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Rare-earth-doped SiOィイD22ィエD2 Films Prepared by Plasma-Enhanced Chemical Vapor Deposition - Development of Deposition Method and Application of Its Luminescence to Research in Physics-"Trans. IEE Japan. 119-A,No.1. 113-117 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Effects of Internal Oxidation on the Oxygen Deficiency and Dielectric Strength of Buried Oxide Formed by the Separation-by-Implanted-Oxygen (SIMOX) Process"Trans. IEE Japan. 118-A, No.7/8. 826-831 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Concentrantion of neutral oxygen vacancies in buried oxide formed by implantation of oxygen"UVSOR Activity Report. 25,April. 98-99 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structures and generation mechanisms of paramagnetic centers and absorption bands responsible for Ge-doped SiOィイD22ィエD2 optical fiber gratings"Physical Review B. Vol.57, No.7. 3920-3926 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen"J. Appl. Phys.. Vol.83, No.4. 2357-2359 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Photoluminescence of oxygen-deficient-type defects in a-SiOィイD22ィエD2"J. Non-Cryst. Solids. Vol.222. 221-227 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Rare-earth-doped SiOィイD22ィエD2 films prepared by plasma-enhanced chemical vapour deposition"J. Phys. D : Appl. Phys.. 30. 1908-1912 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y.Ohki et al.: "Structures and Oprical Properties of Defects Correlated with Photo-induced Refractive Index Changes in Ge-doped SiO_2 Glass"Defect and Diffusion Forum,Part A,. (to appear).

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Effects of internal post-oxidation on the oxygen deficiency and dielectric strength of buried oxide formed by the separation-by-implated-oxygen (SIMOX) process"Electrical Engineering in Japan. 130,No.1. 15-20 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Fabrication of long-period optical fiber gratings by use of ion implantation"Optics Letters. 25,No.2. 88-89 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Low Temperature Crystallization of SrBi_2Ta_2O_9 Film by Excimer Laser Irradiation"Mat.Res.Soc.Symp.Pr oc.. 541. 293-298 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Effect of ozone annealing on the charge trapping property of Ta_2O_5-Si_3N_4-p-Si capacitor grown by low-pressure chemical vapor deposition"Japanese Journal of Applied Physics. 38,Part1,No.12A. 6791-6796 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Effect of annealing on Ge-doped SiO_2 thin films"Journal of Applied Physics,86. No.9. 5270-5273 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Structural changes induced by KrF excimer laser photons in H_2-loaded Ge-doped SiO_2 Glass"Phys,Rev.B 60. Rev.B60. 4682-4687 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Characteristic red photoluminescence band in oxygen-deficient silica glass"J.Appl.Phys.. 86,No.1. 370-373 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Direct deposition of a blanket tungsten layer on SiO_2 by preexposure of helium plasma"J.Appl.Phys.. 85,No.12. 8423-8426 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "プラズマCVD推積SiO_2薄膜の絶縁破壊電界におよぼすフッ素添加の効果"電学論. 119-A,No.5. 658-664 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Effects of ion implantation and thermal annealing on the photoluminescence in amorphous silicon nitride"J.Appl.Phys.. 85,No.9. 6746-6750 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Paramagnetic centers induced in Ge-doped SiO_2 glass with UV irradiation"J.Phys.Condensed Matter. 11,No.12. 2589-2594 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Ohki et al.: "Temperature dependence of the lifetime of 4.3eV photoluminescence in oxygen-deficient amorphous SiO_2" Phys.Rev.B. Vol.59 No.3. 1590-1593 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 大木義路他: "プラズマCVD法による希土類添加シリカ薄膜-成膜法の開発と発光の物性研究への応用" 電学論A. 119-A, No.1. 113-117 (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] 大木義路他: "内部酸化がSIMOX埋め込み酸化膜の酸素欠乏性と絶縁破壊電界におよぼす影響" 電学論 118-A. No.7/8. 826-831 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.S. Seol: "Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen" J. Appl. Phys.Vol.83, No.4. 2357-2359 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] M. Fujimaki: "Structures and generation mechanisms of paramagnetic centers and absorption bands responsibie for Ge-doped SiO_2 optical fiber gratings" Phys. Rev. B. Vol.57, No.7(98/2/15予定). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] H. Nishikawa: "Photoluminescence of oxygen-deficient-type defects in a-SiO_2" J. Non-Cryst. Solids. Vol.222. 221-225 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.S. Seol: "Thermal annealing behavior of defects induced by ion implantation in thermally grown SiO_2 films" Microlectronic Eng.Vol.36. 193-195 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.S. Seol: "Effect of post-oxidation on the oxygen deficiency of buried oxide" Mat. Res. Soc. Symp. Proc.Vol.446. 219-223 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M. Fujimaki: "Generation mechanism of germanium electron center in Ge-doped silica glass." International Workshop on “Structure and Functional Optical Properties of Silica and Silica-related Glasses".1-4 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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