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Development of micro-cell-plasma driven by radio frequency for PDP

Research Project

Project/Area Number 09450146
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionKeio University

Principal Investigator

MAKABE Toshiaki  Keio University, Department of Electronics and Electrical Engineering, Professor, 理工学部, 教授 (60095651)

Co-Investigator(Kenkyū-buntansha) NAKANO Nobuhiko  Keio University, Department of Electronics and Electrical Engineering, Assistant Professor, 理工学部, 専任講師 (40286638)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥12,200,000 (Direct Cost: ¥12,200,000)
Fiscal Year 1999: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1998: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1997: ¥5,100,000 (Direct Cost: ¥5,100,000)
KeywordsMicro cell Plasma ( MCP) / Radio frequency plasma / Plasma Display Pannel / Xe / Ne mixture / Chemical Ionization / Relaxation Contiuum (RCT) model / Plasma modeling / Capacitively coupled Plasma ( CCP) / 体積(サイズ)効果 / プラズマディスプレイパネル / マイクロプラズマセル
Research Abstract

(1) The fundamental basis of the research is in the "relation between the driving frequency and the maintained plasma size". The sustaining voltage as a function of pressure, distance and frequency is first investigated by using 1D-t modeling up to the size of micro cell.
(2) Conventional plasma display panel, which consists of three electrodes parallel plate system covered by a thin insulator, driven at 100 kHz is numerically investigated as for the writing, scanning, and erasing. As a result, the function of these three electrodes has been clarified. The significant disadvantage of the conventional PDP driven at low frequency results from a large energy loss by the transport of massive ions produced in the cell to the wall.
(3) Direct numerical procedure of the Boltzmann equation has been applied to investigate the influence of the gas mixture between Xe and Ne on the electron swarm parameter. The database of the electron swarm parameter has been constructed.
(4) A capacitively coupled cylindrical cell plasma with micro meter size is proposed for "the Micro-Cell-Plasma". The characteristics of MCP driven at 50 MHz are simulated and discussed in detail.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] M. Kurihara and T. Makabe: "Two-dimensional modeling of a micro-cell-plasma in Xe driven by high frequency"IEEE Trans on Plasma Sci.. 27(5). 1372-1378 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Sumioka, M. Kurihara and T. Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc of 17th Symp on Plasma Proceeding. 283-286 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 真壁利明、栗原優: "高周波(HF)励起マイクロセルプラズマ"プラズマ・核融合学会誌. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 真壁利明、栗原優: "RFマイクロセルプラズマの2次元モデリング-Ne/Xe混合ガスの影響-"第60回応用物理学会講演予稿集. No.1. 170 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 真壁利明、栗原優: "Frequency characteristics in a micro-cell plasma in Xe by using RCT model"Program of the 52th GEC. 44, No.4. 19 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 真壁利明、栗原優: "RFマイクロセルプラズマの2次元モデリング-Ne/Xe混合ガス-"プラズマ・核融合学会誌. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] 真壁利明: "プラズマエレクトロニクス"培風館. 224 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M. Kurihara and T. Makabe: "Two-dimensional modeling of a micro-cell-plasma in Xe driven by high frequency"IEEE Trans. On Plasma Sci. 27(5). 1372 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T. Makabe and M. Kurihara,: "Micro-cell-plasma driven by high frequency voltage source"J. Plasma and Fusion Research. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] T.Makabe: "Plasma Electronics"Baifukan. (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] M.Kurihara and T.Makabe: "Two-dimensional modeling of a micro-cell-plasma in Xe driven by high frequency"IEEE Trans.on Plasma Sci. 27(5). 1372-1378 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 真壁利明、栗原 優: "RFマイクロセルプラズマの2次元モデリング-Ne/Xe混合ガスの影響-"第60回応用物理学会講演予稿集. No.1. 170 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 真壁利明、栗原 優: "Frequency characteristics in a micro-cell plasma in Xe by using RCT model"Program of the 52th GEC. 44,No.4. 19 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Sumioka,M.Kurihara,T.Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc.of 17th Symp.on Plasma Processing. 283-286 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 真壁利明、栗原 優: "RFマイクロセルプラズマの2次元モデリング-Ne/Xe(10%)混合ガス-"応用物理学会講演予稿集. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 真壁利明、栗原 優: "高周波(HF)励起マイクロセルプラズマ"プラズマ・核融合学会誌. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Kurihara: "RF plasma characteristics in a micro-cell in Xe by using RCT model" Extended abstracts in 4^<th> Int.Cont.on Reactive Plasmas. 39-40 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kurihara: "高周波マイクロセルプラズマのモデリング" 電気学会 プラズマ研究会資料. EP-98-104. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kurihara: "2D modeling of a micro-cell plasma in Xe driven by high frequency" IEEE Trans.on Plasma Science. (accepted). (1999)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kurihara: "2D modelling of RF plasma in a micro-cell in Xe by using RCT model" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 326-365 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] N.Nakano: "Modeling of dual frequency capacitively coupled plasma by two dimensional relaxation contimuum model" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 194-197 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Hasebe: "2D modeling of nonvolatile particle transport from etched surface in RIE" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 186-189 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] R.Hashido: "Two-dimensional transport of submicton particles in capacitively coupled plasma reactor" Jpn.J.Appl.Phys.36・6A. 3707-3713 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Kurihara: "Electron transport in CF4,Xe by using DNP of the Boltzmann equation" Bulletin of the American Phys.Soc.42・8. 1705- (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 栗原優: "RCTモデルによるXe,RFマイクロセルプラズマの2次元モデリング" 第45回春季応用物理学会予稿集. (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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