| Budget Amount *help |
¥11,800,000 (Direct Cost: ¥11,800,000)
Fiscal Year 1998: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 1997: ¥7,300,000 (Direct Cost: ¥7,300,000)
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| Research Abstract |
The purpose of this study is to fabricate nanocomposite AlN films containing magnetic particles, such as Co, Fe, and Fe-Co alloys by the use of a low-cost preparation apparatus, and to examine their microstructure and relevant physical properties. AlN is a semiconductor which has highly thermal conductivity and highly chemical resistance. The main results are as follows : (1) By changing the composition ratio of argon gas to nitrogen gas as sputtering gas in a two-facing-target dc sputtering chamber, it was easy to fabricate AlN films which contain Go, Fe, and Fe-Co particles in a desired range of composition. Their microstructure and magnetic properties including electrical resistivity were examined for the annealed films as well as as-deposited films in detail, and their characteristics were summarized in comparison with each other. (2) When the gas ratio of nitrogent to argon is large, as-depsosited films appear more amorphous-like than the films prepared at the small gas ratio, and
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showed different behavior of crystalization during annealing. As-deposite AlN films do not exhibit collumnar structure at all for the films prepared at higher gas ratios. (3) The formation of CoNx was not seen for the films even when the Al-Co comosite targets were used at lower gas ratios. When Al-Fe target was used, as-deposited films did not show any magnetic properties. This may be ascribed to the fabrication of a newly formed AlFe compound which does not exhibit magnetic property. But FeNx iron-nitrides were formed after annealing and decomposed at elevated temperatures. For both films after annealing, we can observe a drastic change in magnetic property as well as electrical resistivity, and this was ascribed to the changes in microstructure in the films. (4) Both Al target and FeCo target were used for the formation of nanocomposite films, and most of the films were pilled out from the substrates at around 400 。C, and this was ascribe to the decomposition process of the films into Co phase and FeN phase which took place drastically for the films prepared by using FeCo target. (5) A fundamental study concerning the measurement of dynamic hardness was performed preliminarily for the Co-C films, It was found that the measurements of DHT115 are available for estimation of metal composition in the films. This result suggests that this method will be able to estimate the metal composition of AlN films containing magnetic particles after some improvements according to the previous results for the Co-C films. Less
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