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Development of electron beam nonostructure analysis system and its application

Research Project

Project/Area Number 09450236
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionOsaka University

Principal Investigator

HIROTSU Yoshihiko  ISIR Osaka Univ. Professor, 産業科学研究所, 教授 (70016525)

Co-Investigator(Kenkyū-buntansha) BIAN Bo  ISIR Osaka Univ. Research associate, 産業科学研究所, 助手 (80283810)
OHKUBO Tadakatsu  ISIR Osaka Univ. Research associate, 産業科学研究所, 助手 (00242462)
NAKATA Yoshiyuki  ISIR Osaka Univ. Research associate, 産業科学研究所, 助手 (40164214)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥15,200,000 (Direct Cost: ¥15,200,000)
Fiscal Year 1998: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1997: ¥11,800,000 (Direct Cost: ¥11,800,000)
Keywordsnonostructure analysis / high resolution electron microscope / drift correction for specimen tilting / nano-beam electron diffraction / projection-beams-deflection / 極細束電子線構造解析 / 高分解能電子顕微鏡 / 電子線構造解析 / ドリフト補正
Research Abstract

In recent years, nano-structure analysis has been becoming important to develop new types of functional nanostructured materials. We recently performed nano-diffraction studies for local structure analysis of several new materials with nano structures such as magnetic nano-granular films and amorphous alloys. For the purpose of detailed local structure analysis, it is necessary to make nano-diffraction and HREM study at the same local area from different orientations. When we observe a local structural area in a specimen under a high magnification, the observation position of interests easily goes out of the observation screen by tilting the specimen. This makes our high-resolution observation and nano-diffraction of local areas difficult under various orientation directions. This is primarily because the observation position is not exactly on the cross-point of tilting x and y-axes. We have developed an auto-correction system for the specimen positional-shift on large angle specimen-tilting taking advantage of the projector-lens-deflection coils. Software necessary to tilt the specimen stage toward an arbitrary orientation was also developed. In this system the image-escape by a step-wise tilt is searched by the TV-monitor, and the escape-vector is calculated by computer using the convolution algorism. The image-escape with the escape-vector is compensated using the projector-lens-deflection. The merit of this system is that we need not observe the diffraction patterns during the specimen tilting towards our intended specimen orientation, though the tilting procedure still takes a considerable time (5-10 mm). In achieving an auto-tilt for the HREM purpose, we need to develop a precision-specimen drive with a quick movement to change more precisely and quickly the orientation in future. The present investigation will be the primary step for the nano-area crystal structure analysis technique with HREM and nano-diffraction.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] Y.Hirotsu: "Auto-correction system for specimen-positional shift in specimen-tilting in TEM"J. Electron Microsc.. (to be published).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Ohkubo: "Microphase separation in amorphous Pd-Si alloys studied by electron diffraction and HREM"J. Electron Microsc.. 48. 1005-1013 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] B.Bian: "Ordering of Island-Like FePt Crystallites with Orentations."Appl.Phys. Lett.. 78. 3686-3688 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] B.Bian: "Structures and Magnetic Properties of Oriented Fe/Au and Fe/Pt Nanoparticles on a-Al_2-O_3"J. Electron Microsc.. 48. 753-759 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 佐藤和久: "Fe 系ナノ粒子の均一分散・方位配向組織"熱処理. 39. 113-114 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 卞波: "非晶質絶縁膜上の均一分散α-Feナノ粒子"まてりあ. 37. 393-394 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Hirotsu: "Study of Amorphous Alloy Structures with Medium Range Atomic Ordering"Microsc.Res.Tech.. 40. 284-312 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Hirotsu: "Average and Local Structure of Amorphous Pd_<75> Si_<25>Alloy Analyzed by Modern Electron Diffraction Techniques"Mater.Sci.Eng.. A226-228. 274-279 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y. Hirotsu: "Auto-correction system for specimen-positional shift in specimen-tilting in TEM"J. Electron Microsc.. (to be published).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T. Ohkubo: "Microphase separation in amorphous Pd-Si alloys studied by electron diffraction and HREM"J. Electron Microsc.. 48. 1005-1013 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] B. Bian: "Ordering of Island-Like FePt Crystallites with Orentations"Appl. Phys Lett.. 75. 3686-3688 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] B. Bian: "Structures and Magnetic Properties of Oriented Fe/Au and Fe/Pt Nanoparticles on a-AlィイD22ィエD2OィイD23ィエD2"J. Electron Microsc.. 48. 753-759 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y. Hirotsu: "Study of Amorphous Alloy Structures with Medium Range Atomic Ordering"Microsc. Res. Tech.. 40. 284-312 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y. Hirotsu: "Average and Local Structure of Amorphous Pd75Si25 Alloy Analyzed by Modern Electron Diffraction Techniques"Mater. Sci. Eng.. A226-228. 274-279 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Yoshihiko Hirotsu: "Study of amorphous alloy structures with medium range atomic ordering" Microsc.Res.and Tech.40-2. 284-312 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Bo Bian: "Plan-view and cross-sectional TEM observations of interfacial reactions and fractal formation in a-Ge/Au films" Phil.Mag.A. 78-1. 157-170 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Yoshihiko Hirotsu: "Structure analysis of amorphous alloys by modern electron diffraction techniques" NanoStructured Mater.8-8. 1113-1119 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Bo Bian: "Microstructure and magnetic property of Fe-A1203 granular films" NanoStructured Mater.8-8. 1057-1066 (1998)

    • Related Report
      1998 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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