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Characterization of Nano-electric Structure of Materials by Weak Excitation Cathodoluminescence

Research Project

Project/Area Number 09555001
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied materials science/Crystal engineering
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

SEKIGUCHI Takashi  Tohoku Univ.Inst.for Materials Research, Research Associate, 金属材料研究所, 助手 (00179334)

Co-Investigator(Kenkyū-buntansha) KITAZAWA Koichi  Hitachi Co.Ltd., 計測事業部, 主任研究員
TOMIZAWA Jyun'ichiro  Hitachi Science Systems Co.Ltd., 第一設計部, 研究員
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 1998: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1997: ¥11,100,000 (Direct Cost: ¥11,100,000)
KeywordsCathodoluminescence / Semiconductor / nanostructure / Quantum dots / Quantum wire / InGaAs / GaAs / ZnO / bonded Si
Research Abstract

We were intended to develop the characterizing technique of electronic structure of nano-scale materials and have fabricated a cathodoluminescence (CL) system which has a spatial resolution of 50 nm. Such a high resolution was realized using low electron beam voltages as 1 kV.A new thermal-field-emission gun was developed to achieve an electron beam current of 5 nA at 1 kV operation. A light collection system with high efficiency was developed using ellipsoidal mirror and fiber optics to detect faint light from nano-materials. Serial (photon counter) and parallel (CCD) light detection systems were also equipped to realize CL image and spectra. CL images were recorded on the memory of computer, which makes it possible to the analyze CL intensity quantitatively. With this system, we have studied quantum structure such as quantum dots and wires.
CL from InGaAs/GaAs quantum dot structures formed on the tetrahedral-shaped recesses on GaAs (111)B substrates were extensively studied with analyzing the dependencies of excitation power and observing temperature. The self-organized quantum structure in II-VI semiconductors using Stranski-Krastanov growth were also evaluated with CL.
The optical properties of ZnO nano-particles of various shapes, such as hexagonal plates, prisms and tetrapods, were also studied in detail.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (50 results)

All Other

All Publications (50 results)

  • [Publications] T.Sekiguchi: "Cathodiluminescence Study of InGaAs/GsAs Quantum Dot Structures formed on the Tetrahedral-Shaped Recesses on GaAs(III)B Substrates" J.Appl.Phys.83 No.9. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi: "Cathodoluminescence Study on ZnO and GaN" Solid State Phenomena. 63-64. 171-182 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Ikeda: "EBIC and Cathodoluminescence Study on the Bonded Silicon Wafers" Solid State Phenomena. 63-64. 481-488 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 関口隆史: "カソードルミネッセンス顕微法(I)原理" 電子顕微鏡. 33 No.3. 186-190 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi: "Cathodoluminescence Imaging of Dislocations in Silicon - On the Origin of D1 and D2 Lines" Semiconductor News (Pakistan). 7. 121-123 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Tomasini: "Orientation Dependence of Strained ZnSe/ZnS(hII) Single Quantum Well Luminescence" J.Appl.Phys.83. 4272-4278 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi, Y.Sakuma, Y.Awano, and N.Yokoyama: "Cathodoluminescence study of InGaAs/GaAs quantum dot structures formed on the tetrahedral-shaped recesses on GaAs (111) B substrates" J.Appl.Phys.83. 4944-4950 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sugaya, Y.Tanuma, T.Nakagawa, T.Sekiguchi, K.Yonei and Y.Sugiyama: "Effect of As2 Flux and Atomic Hydrogen Irradiation for Growth of InGaAs Quantum Wires by Molecular Beam Epitaxy" Jpn.J.Appl.Phys.37. 1497-1500 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi, Y.Sakuma, Y.Awano, and N.Yokoyama: "Cathodoluminescence study of InGaAs/GaAs Quantum Dots on the Tetrahedral-Shaped Recesses" Nonlinear Optics. 18. 311-314 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Tomasini, K.Arai, F.Lu, Z.Q.Zhu, T.Sekiguchi, T.Yao, M.Y.Shen, T.Goto: "Localization and Thermal Escape of Excitons in Ultrathin ZnSe/ZnS Single Quantum Wells Linked to Interfacial ZnSe Quantum Slabs" J.Appl.Phys.83. 6028-6033 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Tomasini, K.Arai, F.Lu, Z.Q.Zhu, T.Sekiguchi, M.Suezawa, T.Yao, M.Y.Shen, T.Goto, T.Yasuda, and Y.Segawa: "Orientation Dependence of Strained ZnSe/ZnS (h11) Single Quantum Well Luminescence" J.Appl.Phys.83. 4272-4278 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Tomasini, K.Arai, F.Lu, Z.Q.Zhu, T.Sekiguchi, M.Suezawa, T.Yao, M.Y.Shen, T.Goto, T.Yasuda, and Y.Segawa: "Luminescence Properties of ZnSe/ZnS (h11) A Low Dimensional Structures" J.Cryst.Growth. 184. 343-346 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Arai, Z.Q.Zhu, T.Sekiguchi, T.Yasuda, F.Lu, N.Kuroda, Y.segawa, and T.Yao: "Photoluminescence and Cathodoluminescence Studies of ZnSe Quantum Structures Embedded in ZnS" J.Cryst.Growth. 184/185. 254-258 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] E.Kurtz, H.D.Jung, T.Hanada, Z.Zhu, T.Sekiguchi, and T.Yao: "Self-Organized CdSe/ZnSe Quantum Dots on a ZnSe (111) A Surface" J.Cryst.Growth. 184/185. 242-247 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Z.Zhu, E.Kurtz, K.Arai, Y.F.Chen, D.M.Bagnall, P.Tomashini, F.Lu, T.Sekiguchi, T.Yao, T.Yasuda and Y.Segawa: "Self-Organized Growth of II-VI Wide Bandgap Quantum Dot Structures" Phys.Stat.Sol.B. 202. 827-833 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] P.Tomasini, K.Arai, F.Lu, Z.Q.Zhu, T.Yao, T.Sekiguchi, M.Suezawa, M.Y.Shen, T.Goto, T.Yasuda, and Y.Segawa: "Optical Properties of ZnSe/ZnS Quantum Wire Structures When Using High Index Substrates" Nonlinear Optics. 18. 215-218 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Arai, Z.Q.Zhu, T.Sekiguchi, T.Yasuda, F.Lu, Y.Segawa, N.Kuroda, and T.Yao: "Micro Cathodoluminescence Study of ZnSe Quantum Dots Embedded in ZnS Grown by Molecular Beam Epitaxi" Nonlinear Optics. 18. 307-310 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] E.Kurtz, H.D.Jung, T.Hanada, Z.Zhu, T.Sekiguchi, and T.Yao: "The Growth and Photoluminescence Properties of Self-Organized CdSe Quantum Dots on a (111) A ZnSe Surface" Nonlinear Optics. 18. 93-98 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Yamane, M.Shimada, T.Sekiguchi, and F.J.DiSalvo: "Morphology and characterization of GaN Single Crystals Grown in a Na Flux" J.Cryst.Growth. 186. 8-12 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi and N.Ohashi and H.Yamane: "Cathodoluminescence Study on ZnO and GaN" Solid State Phenom.63-64. 171-182 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] N.Ohashi, T.Nakata, T.Sekiguchi, H.Hosono, M.Mizuguchi, T.Tsurumi, J.Tanaka and H.Haneda: "Yellow Emission from Zinc Oxide giving an Electron Spin Resonance Signal at g=1.96" Jpn.J.Appl.Phys.38. L113-L115 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Chen, Z.Zhu, D.M.Bagnall, T.Sekiguchi, and T.Yao: "ZnO Quantum Pyramids Grown on c-plane Sapphire by Plasma-Assisted Molecular Beam Epitaxy" J.Cryst.Growth. 184/185. 269-273 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi, N.Ohashi and Y.Terada: "Effect of Hydrogenation on ZnO Luminescence" Jpn.J.Appl.Phys.36. L289-L291 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi, N.Ohashi and Y.Terada: "Hydrogenation-Effect on the Luminescence of ZnO Crystals" Nonlinear Optics. 18. 247-250 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi, N.Ohashi and Y.Terada: "Cathodoluminescence Study on the Hydrogenation of ZnO" Mat.Sci.Forum.258-263. 1371-1376 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Chen, D.M.Bagnall, Z,Zhu, T.Sekiguchi, K.Park, K.Hiraga, T.Yao, S.Koyama, M.Y.Shen and T.Goto: "Growth of ZnO Single Crystal Thin Films on c-plane (0001) Sapphire by Plasma Enhanced Molecular Beam Epitaxy" J.Cryst.Growth. 181. 165-169 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] Y.Chen, D.M.Bagnall, Z.Q,Zhu, T.Sekiguchi, K-T.Park, K.Hiraga, and T.Yao: "Observation of Zinc Oxide Quantum Pyramids Grown by Plasma Enhanced Molecular Beam Epitaxi" Nonlinear Optics. 18. 107-110 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Hayashi, S.Yamanaka, H.Watanabe, T.Sekiguchi, H.Okushi, and K.Kajimura: "Characteristics of Diamond Films Epitaxially Grown by Step-flow Mode" J.Cryst.Growth. 183. 338 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Hayashi, S.Yamanaka, H.Watanabe, T.Sekiguchi, H.Okushi, and K.Kajimura: "Atomic Force Microscopy Study of Atomically Flat (001) Diamond Surfaces Treated with Hydogen Plasma" Appl.Surf.Sci.125. 120-124 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Watanabe, K.Hayashi, D.Takeuchi, S.Yamanaka, H.Okushi, K.Kajimura and T.Sekiguchi: "Strong excitonic recombination radiation from homoepitaxial diamond thin films at room temperature" Appl.Phys.Lett.73. 981-983 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Watanabe, D.Takeuchi, H.Okushi, K.Kajimura and T.Sekiguchi: "Spatially Resolved Cathodoluminescence Study on CVD Homoepitaxial Diamond Film" Solid State Phenom. 63-64. 489-496 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Hayashi, T.Sekiguchi and H.Okushi: "Formation and Relaxation of Hydrogen-Related Defects in the Subsurface Region of Diamond Films" Mat.Sci.Forum.258-263. 745-760 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Hayashi, S.Yamanaka, H.Watanabe, T.Sekiguchi, H.Okushi, and K.Kajimura: "Investigation of the Effect of Hydrogen on Electrical and Optical Properties in Chemical Vapor Deposited Homoepitaxial Diamond Films" J.Appl.Phys.81. 744-753 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Hayashi, H.Watanabe, S.Yamanaka, T.Sekiguchi, H.Okushi, and K.Kajimura: "Hydrogen-related Gap States in the Near Surface of Chemical Vapor Deposited Homoepitaxial Diamond Films" Diamond & Related Materials. 6. 303-307 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] H.Watanabe, D.Takeuchi, S.Hara, T.Sekiguchi, H.Okushi, and K.Kajimura: "Role of Hydrogen in Homoepitaxial Diamond Film Growth" Diamond Films & Technology. 7. 277-280 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] D.Takeuchi, H.Watanabe, S.Yamanaka, S.Masaki, S.Hara, T.Sekiguchi, H.Okushi, and K.Kajimura: "Cathodoluminescence and Schottky Characteristics of Homoepitaxial Diamond Thin Films Synthesized by Microwave Plasma-Enhanced CVD Using an End-Launch-Type Reactor" Diamond Films & Technology. 7. 347-350 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi: "Cathodoluminescence Imaging of Dislocations in Silicon-On the Origin of D1 and D2 Lines" Semicond.News (Pakistan). 7. 121-123 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] K.Ikeda, T.Sekiguchi, S.Ito and M.Suezawa: "EBIC and Cathodoluminescence Study of the Bonded Silicon Wafers" Soild State Phenom. 63-64. 481-488 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Sekiguchi: "Cathodoluminescence Study of InGaAs/GaAs Quantun Dot Structures formed on the Tetrahedral-Shaped Recesses on GaAs(111)B Substrates" J.Appl.Phys.83 No.9. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Sekiguchi: "Cathodoluminescence Study on ZnO and GaN" Solid State Phenomena. 63-64. 171-182 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] K.Ikeda: "EBIC and Cathodoluminescence Study on the Bonded Silicon Wafers" Solid State Phenomena. 63-64. 481-488 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 関口隆史: "カソードルミネッセンス顕微法(I)原理" 電子顕微鏡. 33No.3. 186-190 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Sekiguchi: "Cathodoluminescence Imaging of Dislocations in Silicon-On the Origin of D1 and D2 Lines" Semiconductor News(Pakistan). 7. 121-123 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] P.Tomasini: "Orientation Dependence of Strained ZnSe/ZnS(hll)Sirgle Quantun Well Luminescence" J.Appl.Phys.83. 4272-4278 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Sekiguchi: "Cathodoluminescence study of InGaAs/GaAs quantum dot structures formed on the tetrahedral-shaped recesses on GaAs (111)B substrates" J.Appl.Phys.83No.9. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Sekiguchi: "Cathodoluminescence study of InGaAs/GaAs Quantum Dots on the Tetrahedral-Shaped Recesses" Nonlinear Optics. 18. 311-314 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 関口隆史: "カソードルミネッセンス法の原理と応用" 電子顕微鏡. 32Suppl.2. 93-98 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Sekiguchi: "Hydrogenation-Effect on the Luminescence of ZnO Crystals" Nonlinear Optics. 18. 247-250 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Hayashi: "Hydrogen-induced Luminescence States in the Subsurface Region of Homoepitaxial Diamond Films" Mat.Res.Soc.Symp.Proc.442. 699-704 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Z.Zhn: "Self-Organized Growth of II-VI Wide Bandgap Quantum Dot Structures" Phys.Stat.Sol.B.202. 827-833 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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