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THE CREATION RESEARCH OF SUB NANOMETER MACHINING SYSTEM OF MAGNETISM, ELECTRON AND OPTICAL COMPONENT GLASS AND MULTIPURPOSE MACHINE TOOL

Research Project

Project/Area Number 09555036
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 機械工作・生産工学
Research InstitutionIbaraki University

Principal Investigator

EDA Hiroshi  IBARAKI UNIV. FACULTY OF ENGINEERING, PROFESSOR, 工学部, 教授 (60007995)

Co-Investigator(Kenkyū-buntansha) YAMAMOTO Yoshio  TOKAI UNIV. FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (20272114)
Project Period (FY) 1997 – 1999
Project Status Completed (Fiscal Year 1999)
Budget Amount *help
¥4,700,000 (Direct Cost: ¥4,700,000)
Fiscal Year 1999: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1998: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1997: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsGLASS / MULTIPURPOSE MACHINE TOOL / MAGNETISM, ELECTRON AND OPTICAL COMPONENT / DUCTILE-MODE MACHINING / MICRO PLASTICITY / GRINDING / LAPPING, POLISHING / MICRO SCRATCHING / ガラス / セラミックス / き裂なし加工 / 引っかき試験機 / 電子顕微鏡 / 動画観察 / サブナノメータ加工
Research Abstract

The machine finish accuracy of the glass used abundantly in magnetism, electron and optical glass components, roughness of finished surface of angstrom order and 0.1μm/φ100 or less of flatness are required. The purpose of this study did not remain in productive improvement goal of mere accuracy experiment, and it is examined including the energy reduction of processing and the relation facility of minimizing of machining environment space such as reduction of the machining process, construction of circulation regeneration system of machining fluid, clean room, etc., and global environmental load off is considered. At the beginning to clarify the mechanical property of test glasses, micro indentation-scratching experiments in the air and in a SEM are conducted. As a result, critical depths of scratching on several types of glasses are clarified . In continuing, ultra-precision grinding experiments have been conducted on several types of test glasses by using developed multipurpose machine tool, and super smooth finished surfaces in sub nanometer order are obtained. The relationship between machining parameters and microcracks was examined and brittle to ductile grinding transition has been established for a given types of glasses, as well. Besides, a comparison of the recent grinding results and a results of diamond indentation-scratching experiments of previous work done by the authors has shown that the critical depth in grinding is thereabouts six times bigger than the critical depth in indentation and seven times than in scratching. It is clarified that by using developed multipurpose machine tool, from rough processing to the super-finishing is realized without using lapping and polishing machine.

Report

(4 results)
  • 1999 Annual Research Report   Final Research Report Summary
  • 1998 Annual Research Report
  • 1997 Annual Research Report
  • Research Products

    (44 results)

All Other

All Publications (44 results)

  • [Publications] H.Eda,H.Hamada,Y,Tomita and Y.Yamamoto: "Study on Super-Fine Diamond Cluster with Application to Ultra-Precision Surface Generation"Journal of the Balkan Tribological Association. 5・2. 94-104 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,L.Chouanine,J.Shimizu and L.Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proceeding of Int.Conf.Proc.EUSPEN'99, Germany. 222-225 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,L.Chouanine,J.Shimizu and L.Zhou: "Development of State-of-Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proceedings of Int.Conf.OCOSN'99, Yokohama. 344-347 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,J.Shimizu and L.Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proceedings of Int.Conf.OCOSN'99, Yokohama. 420-423 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,J.Shimizu,L.Zhou,Y.Takimoto and A.Muroya: "Giant Magnetostrictive Positioner for Single Diamond Turning of Silicon Substrate"Proceedings of Int.Conf.ICPE-9, Osaka. 187-192 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,Y.Yamamoto,T.Ishikawa,L.Zhou and T.Kawakami: "Design Concept and System Development of Machining Under a Scanning Electron Microscope"Proc. Miniaturized Systems with Micro-Optics and MEMS, Santa Clara. 310-318 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda and Y. Yamamoto: "Giant magnetostriction Materials"Int. J. of Japan Society of Precision Engineering. 31-2. 83-86 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L. Chouanine, H. Eda and J. Shimizu: "Analytical Study on Ductile-Regime Scratching of Glasses Using Sharply Pointed Tip Diamond Indenter"Int. J. of Japan Society of Precision Engineering. 31-2. 109-114 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L. Chouanine, H. Eda, M. li: "Sub-nanometer Precision Grinding of Optical and Electron Glasses under Ductile-Regime Conditions"Proc. Int. Conf. UME4 (Braunschweig). 351-355 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Y. Tomita, H. Eda and J. Shimizu: "A Study of Physical and Structural Features of High Porous Resin Bonded Grinding Stone"Proc. Int. Conf. ECCM-8 (Italy). Vol.3. 365-372 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, Y. Yamamoto, Y. Tomita and J. Shimizu: "Giant Magnetostriction Composite Materials and Its Applications to an Actuator"Proc. Int. Conf. ECCM-8 (Italy). 3. 549-556 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] L. Chouanine, H. Eda and J. Shimizu: "Development of Key-Technology on the State-of-the Art Machine Tool and Generalization of Grinding Forces under Ductile Mode Grinding Experiments"Int. J. of Japan Society of Precision Engineering. 32-2. 98-103 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] J. Shimizu, H. Eda, M. Yoritsune and E. Ohmura: "Molecular Dynamics Simulation of Friction on the Atomic Scale"Nanotechnology. 9-2. 118-123 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, J. Shimizu and Y. Tomita: "Experiment and Simulation Study on Combined Mechanism of Micro World Scratching"Proc. Int. Conf. ASIATRIB'98 (China). Vol.1.1. 283-287 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, J. Shimizu, Y. Tomita: "Sliding Friction Mechanism on Ultra Precision Surface in Atomic Scale"Proc. Int. Conf. ASIATRIB'98 (China). Vol.1.1. 314-318 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] Hiroshi Eda: "Computer Simulation in Abrasive Grinding Process, Journal of Japan Society of Precision Engineering"Int. J. of Japan Society of Precision Engineering. 32-4. 233-238 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, H. Hamada, Y. Tomita and Y. Yamamoto: "Study on Super-Fine Diamond Cluster with Application to Ultra-Precision Surface Generation"Journal of the Balkan Tribological Association. 5-2. 94-104 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, L. Chouanine, J. Shimizu and L. Zhou: "Development of State-of Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proc. Int. Conf. ICOSN'99 (Yokohama). 344-347 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, J. Shimizu and L. Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proc. Int. Conf. ICOSN'99 (Yokohama), Japan. 420-423 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, L. Chouanine, J. Shimizu and Libo Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proc. Int. Conf. EUSPEN'99 (Germany). 222-225 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou and J. Shimizu: "Computer Assisted Modeling and Simulation for Grinding Process"Proc. Int. Conf. EUSPEN'99 (Germany). 226-229 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H. Eda, T. Mori, L. Zhou, K. Kubota, and J. Shimizu: "Powder Metallurgic Giant Magnetostrictive Material and Applications in Micro-actuator and Micro-sensors"Proc. Inf. Conf. Materials and Device Characterization in Micromachining II, Santa Clara. 114-123 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1999 Final Research Report Summary
  • [Publications] H.Eda,H.Hamada,Y.Tomita and Y.Yamamoto: "Study on Super-Fine Diamond Cluster with Application to Ultra-Precision Surface Generation"Journal of the Balkan Tribological Association. 5・2. 94-104 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,L.Chouanine,J.Shimizu and L.Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proceedings of Int.Conf.Proc.EUSPEN'99,Germany. 222-225 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,L.Chouanine,J.Shimizu and L.Zhou: "Development of State-of-Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proceedings of Int.Conf.ICOSN'99,Yokohama. 344-347 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,J.Shimizu and L.Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proceedings of Int.Conf.ICOSN'99,Yokohama. 420-423 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,J.Shimizu,L.Zhou,Y.Takimoto and A.Muroya: "Giant Magnetostrictive Positioner for Single Diamond Turning of Silicon Substrate"Proceedings of Int.Conf.ICPE-9,Osaka. 187-192 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,Y.Yamamoto,T.Ishikawa,L.Zhou and T.Kawakami: "Design Concept and System Development of Machining Under a Scanning Electron Microscope"Proc.Miniaturized Systems with Micro-Optics and MEMS,Santa Clara. 310-318 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 江田 弘,L.Chouanine,清水 淳: "ガラス引っかき過程の延性発現の検証-鋭利なダイヤモンド圧子を用いた場合-" 精密工学会誌. 64・4. 613-617 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] L.Chouanine,H.Eda and J.Shimizu: "Development of Key-Technology on the State-of-the-Art Machine Tool and Generalization of Grinding Forces under Ductile Mode Grinding Experiments" Journal of Japan Society of Precision Engineering. 32・2. 98-103 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Eda: "Computer Simulation in Abrasive Grinding Process(Review)" Journal of Japan Society of Precision Engineering. 32・4. 233-238 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] J.Shimizu,H.Eda,M.Yoritsune and E.Ohmura: "Molecular Dynamics Simulation of Friction on the Atomic Scale" Nanotechnology. 9・2. 118-123 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] Y.Tomita,H.Eda and J.Shimizu: "A Study of Physical and Structural Features of High Porous Resin Bonded Grinding Stone" Proceedings of ECCM-8,Italy,Woodhead Publishing Limited,vol.3. 365-372 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] H.Eda,Y.Yamamoto Y.Tomita and J.Shimizu: "Giant Magnetostriction Composite Materials and Its Applications to an Actuator" Proceedings of ECCM-8,Italy,Woodhead Publishing Limited,vol.3. 549-556 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 江田 弘(兼編集)他多数: "生産加工の原理" 日本機械学会編(日刊工業新聞社), 369 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 江田 弘(研究代表者): "広帯域ダイナミカルシステム適用の超磁歪材料の創成に関する研究" 科学研究費基盤研究(C)(2)(08650126),研究成果報告書, 120 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 江田 弘: "工作機械・生産加工進化のニューテクノワールド" 日本機械学会論文集(C編). 63・614. 3321-3326 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 江田 弘: "切削・研削・研磨・粒子加工技術の動向" 日本機械学会誌. 100・945. 887-889 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Eda, L.Chouanine: "On the Super Smooth Surface Generation Under Subnanometer Order Grinding Condition of Glasses" Proc.Int.Conf.MM21 (1997・7・24). 323-328 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Eda, J.Shimizu: "Microscopic Analysis of Abrasive Wear Process" Proc.Int.Conf.MM21 (1997・7・24). 305-311 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] L.Chouanine, H.Eda: "Analytical Study on Ductile-Regime Scratching of Glasses Using Gharply Pointed Tip Diamond Indenter" Int.Jour.JSPE. 31・2. 109-114 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Eda, L.Chouanine: "Sub-nanometer Precision Grinding of Optical and Electron Glasses under Ductile-Regine Conditions" Proc.4th Int.Conf.on UME (1997・5・28). 351-355 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 江田 弘 他5名: "知的複合材料と知的適応構造物" 日本機械学会編(養賢堂), 198 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 江田 弘(編集)他多数: "生産加工の原理" 日本機械学会編(日本工業新聞社), 369 (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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